0001181431-02-003372 4 1 20021220 20021223 PUMA MARY G 0001158015 DIRECTOR 4 NORDSON CORP 28601 CLEMENS RD WESTLAKE OH 44145 NORDSON CORP 28601 CLEMENS RD WESTLAKE OH 44145 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 4 34 000-30941 02866229 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd681.htm PUMA DEC. 2002 OPTIONS FORM 4