0001181431-02-003373 4 1 20021220 20021223 FALLON LYNNETTE C 0001195654 OFFICER 4 AXCELIS TECHNOLOGIES INC BEVERLY MA 01915-1053 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 4 34 000-30941 02866237 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd2038.htm FALLON DEC. 2002 OPTIONS