0000927016-02-001776 S-3 5 20020329 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 S-3 33 333-85214 02594364 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 S-3 1 ds3.txt FORM S-3 EX-5 3 dex5.txt OPINION OF PALMER & DODGE LLP EX-12 4 dex12.txt STATEMENT REG. COMPUTATION OF RATIO OF EARNINGS EX-23.1 5 dex231.txt CONSENT OF ERNST & YOUNG LLP EX-25 6 dex25.txt STATEMENT OF ELIGIBILITY AND QUALIFICATIONS