0000927016-02-002980 S-3/A 3 20020521 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 S-3/A 33 333-85214 02658812 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 S-3/A 1 ds3a.txt AMENDMENT #1 TO FORM S-3 EX-12 3 dex12.txt COMPUTATION OF RATIO OF EARNINGS EX-23.1 4 dex231.txt CONSENT OF ERNST & YOUNG LLP