0000927016-02-005381 424B3 1 20021112 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 424B3 33 333-85214 02816930 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 424B3 1 d424b3.txt AXCELIS TECHNOLOGIES PROSPECTUS SUPPLEMENT