<SUBMISSION>
<ACCESSION-NUMBER>0001113232-02-000013
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<PERIOD>20021211
<ITEMS>7
<ITEMS>9
<FILING-DATE>20021213
<FILER>
<COMPANY-DATA>
<CONFORMED-NAME>AXCELIS TECHNOLOGIES INC
<CIK>0001113232
<ASSIGNED-SIC>3559
<IRS-NUMBER>341818596
<STATE-OF-INCORPORATION>DE
<FISCAL-YEAR-END>1231
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<FORM-TYPE>8-K/A
<ACT>34
<FILE-NUMBER>000-30941
<FILM-NUMBER>02856982
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<BUSINESS-ADDRESS>
<STREET1>55 CHERRY HILL DRIVE
<CITY>BEVERLY
<STATE>MA
<ZIP>01915
<PHONE>9782324001
</BUSINESS-ADDRESS>
<FORMER-COMPANY>
<FORMER-CONFORMED-NAME>EATON SEMICONDUCTOR EQUIPMENT INC
<DATE-CHANGED>20000501
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<FILENAME>acls_8ka.txt
<DESCRIPTION>AXCELIS TECHNOLOGIES, INC. FORM 8-K/A
<TEXT>

<PAGE>

                                  UNITED STATES

                       SECURITIES AND EXCHANGE COMMISSION

                             WASHINGTON, D. C. 20549



                                    FORM 8-K/A

                 CURRENT REPORT PURSUANT TO SECTION 13 OR 15(D)
                     OF THE SECURITIES EXCHANGE ACT OF 1934



                DATE OF REPORT (DATE OF EARLIEST EVENT REPORTED):
                                 December 11, 2002



                           AXCELIS TECHNOLOGIES, INC.
             (Exact name of registrant as specified in its charter)


<TABLE>
<S>                                   <C>                          <C>
             Delaware                        000-30941                      34-1818596
 (State or other jurisdiction of      (Commission file number)     (IRS employer identification
  incorporation or organization)                                              number)
</TABLE>

                              55 Cherry Hill Drive
                          Beverly, Massachusetts 01915
               (Address of Principal Executive Offices) (Zip Code)



               Registrant's telephone number, including area code:
                                 (978) 787-4000



Note:     This amendment is being filed to correct a typographical error
          in the internet address below and to file Exhibit 99.1.

<PAGE>

Item 7.    Financial Statements, Pro Forma Financial Information and Exhibits

(c)      Exhibits:

         99.1     Memorandum Regarding Claims Construction from the United
		  States District Court, District of Massachusetts,
		  December 10, 2002.  Filed herewith.


Item 9.    Regulation FD Disclosure

         On December 11, 2002, the United States District Court for the
District of Massachusetts issued a Memorandum Regarding Claims
Construction in Axcelis' patent litigation against Applied Materials,
Inc. (Civil Action No. 01-10029-DPW).  This decision filed herewith as
Exhibit 99.1, is publicly available from the court and can be accessed
at http://pacer.mad.uscourts.gov/dc/cgi-bin/recentops.pl?filename
=woodlock/pdf/axcelis.pdf.

         In addition, the Court has scheduled a conference with the parties
in this case in mid January 2003 to discuss future proceedings.



<PAGE>

                                    SIGNATURE

           Pursuant to the requirements of the Securities Exchange Act of 1934,
the registrant has duly caused this report to be signed on its behalf by the
undersigned hereunto duly authorized.

                                   AXCELIS TECHNOLOGIES, INC.

Dated: December 13, 2002            By: /s/ Cornelius F. Moses, III
                                      ----------------------------------------
                                      Cornelius F. Moses, III
                                      Executive Vice President and
                                      Chief Financial Officer



<PAGE>

                                  EXHIBIT INDEX

    Exhibit
     No.         Description
    -------      -----------

    99.1         Memorandum Regarding Claims Construction from the United
		 States District Court, District of Massachusetts,
		 December 10, 2002.  Filed herewith.




</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99
<SEQUENCE>3
<FILENAME>ex99_1.txt
<DESCRIPTION>EXHIBIT 99.1
<TEXT>

<PAGE>

			UNITED STATES DISTRICT COURT
			 DISTRICT OF MASSACHUSETTS




	AXCELIS TECHNOLOGIES, INC., 	)
					)
	Plaintiff, 			)
					) CIVIL ACTION NO.
	v. 				) 01-10029-DPW
					)
	APPLIED MATERIALS, INC., 	)
					)
	Defendant. 			)



		MEMORANDUM REGARDING CLAIM CONSTRUCTION
			December 10, 2002

Plaintiff Axcelis Technologies, Inc. ("Axcelis") alleges
defendant Applied Materials, Inc. ("Applied") has infringed U.S.
Patent No. 4,667,111 (the "'111 patent"). The '111 patent
provides a method of and apparatus for ion implantation involving
a radio frequency ("rf") ion accelerator.

At the threshold, the parties vigorously dispute
construction of certain claims in the '111 patent. The parties'
disagreement focuses at this point on three "means-plus-function"
elements of claim 1, an apparatus claim, and their analogs in
claims 17 and 29 (a method claim and another apparatus claim,
respectively). In this Memorandum, I will construe each of these
contested elements.

<PAGE>

I. THE '111 PATENT

The '111 patent generally describes a technology that
(i)generates charged atoms, called ions, (ii) accelerates those
ions in a focused beam, using a rf accelerator, and (iii)
implants the ions into a "workpiece." The patent's claims were
initially rejected by the U.S. Patent and Trademark Office (the
"PTO"); upon amendment, the patent was issued to Axcelis's
predecessor, the Eaton Corporation, on May 19, 1987.

Since its issuance, the '111 patent has been subject to two
reexamination requests by Applied, both of which were granted by
the PTO and then consolidated into one reexamination proceeding.
The PTO issued two Notices of Intent to Issue Reexamination
Certificate, the first before consolidation of the two
proceedings on June 22, 2000 (the "1st NIRC"), and the second on
December 8, 2000 (the "2nd NIRC").(1)  The PTO issued its
reexamination certificate on April 10, 2001, confirming inter


(1)  Axcelis filed for reconsideration of certain statements
contained in the 2nd NIRC's Statement of Reasons for
Patentability and/or Confirmation shortly after it was
issued.(Applied Vol. 1, Ex. 15.) By order dated January 30, 2001,
the PTO declined Axcelis's request for reconsideration, but
permitted entry of Axcelis's submission in the record of the
reexamination proceeding, and noted that its denial of
reconsideration would not "give rise to any negative inference."
(Applied Vol. 1, Ex. 16.)

<PAGE>

alia the patentability of claim 1 without modification, claim 17
as amended, and a newly added claim 29.

II. CLAIM CONSTRUCTION

I address below each of the aforementioned claims in turn,
construing only those particular elements now in dispute.

A. Claim 1

An apparatus claim that was left unchanged by the PTO's
reexamination of the '111 patent, claim 1 describes an ion
implantation device comprising:

an ion source for directing charged ions having an initial
energy along a travel path;

an ion accelerator including a plurality of spaced apart,
accelerating electrodes which, when energized, create an
alternating electric field to accelerate the ions in stages
through a plurality of accelerating gaps between electrodes
to a second energy;

energizing means coupled to the ion accelerator for applying
an alternating accelerating potential of a specific
frequency and amplitude to each accelerating electrode of a
plurality of accelerating electrodes to accelerate the ions
through said plurality of accelerating gaps;

implantation means for positioning a workpiece so that
charged ions accelerated to the second energy impact said
workpiece; and

control means coupled to the energizing means to control the
relative amplitude and phase of the electric fields in the
accelerating gaps.

'111 Patent (emphasis added).

<PAGE>

The parties' respective positions require construction of
the latter three elements italicized above, all set forth in the
means-plus-function form: "energizing means," "implantation
means," and "control means." The Federal Circuit has outlined the
appropriate manner of proceeding in relation to such means-plus-
function elements, as governed by 35 U.S.C. section 112,
paragraph 6,thus: "The first step . . . is to identify the
function explicitly recited in the claim. The next . . . is to
identify the corresponding structure set forth in the written
description that performs the particular function set forth in
the claim."  Asyst Technologies, 268 F.3d 1364, 1369
(Fed.Cir.2001) (internal citation omitted).

1. "Energizing means"

The parties are in agreement regarding the function
recited at the "energizing means" element of claim 1: "to apply
an alternating accelerating potential of a specific frequency
and amplitude to each accelerating electrode of the plurality of
accelerating electrodes to accelerate the ions through said
plurality of accelerating gaps." As to the corresponding
structure, Axcelis points to column 3:31-36 and column 5:45-50
of the '111 patent's specification as disclosing nothing more
than a tank circuit and an rf generator.

<PAGE>


Just a few lines beyond each of the passages Axcelis cites,
however, there is particularity that appears to challenge
Axcelis's generalized description. Column 3:41-43 discloses that
the "tank coil is mounted in a separate cavity from the
evacuated accelerating chamber." Column 5:64 to column 6:15
supplies yet further detail, stating that the preferred
embodiment of the '111 patent will segregate the tank coil from
the vacuum chamber (where the accelerating electrode is found)
in a separate chamber containing an electronegative gas, and by
means of a high voltage rf feedthrough, in order to meet the
following independent "requirements" for the coil's environment:
that it (i) "cools better than vacuum," (ii) has "a low
dielectric constant to limit its self capacitance," and (iii)
also has "low rf loss and good high voltage properties."

Axcelis seeks to diminish the significance of these details
by reference to the principle that "[s]tructural features that do
not actually perform the recited function do not constitute
corresponding structure and thus do not serve as claim
limitations." Asyst Technologies, 268 F.3d at 1370. In
particular, Axcelis notes the distinction articulated in Asyst
Technologies between a structural feature that "performs" the
recited function (and hence is a limitation), and one that merely

<PAGE>

"enables" it. Id. at 1370-71.

Notwithstanding the specification's use of the term
"requirements," I am persuaded that the tank coil's environment
lies, for the most part, on the "enabling" side of the line. To
be sure, the separate, "external" cable connected to the
disclosed processor in Asyst presented a more compelling
illustration of an enabling feature. Nevertheless, it remains the
case that the tank circuitry's functioning here is not premised
upon the environment that the '111 patent describes.  The
functioning may be substantially improved, for the reasons
expressly noted, but there is no suggestion that it inheres in
the segregation of the tank coil in a separate, gaseous chamber
by means of a high voltage rf feedthrough. As a broad means-plus-
function element, the energizing means of claim 1 must be limited
by the structure disclosed in the specification,(2)  but limitation
will not necessarily be drawn from the preferred


(2) As the Federal Circuit Court has noted, "Congress decided to
permit broad means-plus-function language, but provided a
standard to make the broad claim language more definite. . . . A
claim limitation described  as a means for performing a
function, if read literally, could encompass any conceivable
means for performing the function.  [The] second clause [of 35
U.S.C. Section 112, Paragraph 6] confines the breadth of
protection otherwise permitted by the first clause." Valmont
Indus., Inc. v. Reinke Mfg. Co., Inc., 983 F.2d 1039, 1042
(Fed.Cir.1993).

<PAGE>

embodiment. See, e.g., Kemco Sales, Inc. v. Control Papers
Company, Inc., 208 F.3d 1352, 1362 ("we have noted the danger of
reading limitations into the claims from the preferred
embodiments").

For the same reasons, I also decline Applied's suggestion to
limit this element to other structural features suggested by the
'111 patent's specification: in particular, a 1/1 ratio between
tank coil and rf generator, and the two-gap design with which
that is associated. Neither is presented in the specification in
terms as express as those regarding the tank coil's environment,
and my exclusion of the latter from the "corresponding structure"
to claim 1's energizing means applies with greater force against
inclusion of these other features.

Accordingly, I construe the corresponding structure to the
"energizing means" element of claim 1 to be a tank circuit
coupled with an rf generator, and its equivalents.

2. "Implantation means"

The parties agree on the function recited for this element:
"positioning a workpiece so that charged ions accelerated to the
second energy impact said workpiece." As for the corresponding
structure, Applied contends that it is limited to the spinning,
batch wafer processor described by the specification at column

<PAGE>

4:38-54 and represented in Figure 1.(3)  Axcelis seeks a much
broader construction: namely, a "movable support for a
workpiece."

As grounds, Axcelis again principally relies on the
distinction between structural features that perform and those
that enable a claimed function. There is less need for me to
dwell on this distinction for this element, however, because the
prosecution history -- and in particular, the reexamination -- of
the '111 patent substantially bolsters Applied's contrary view.

The Federal Circuit has emphasized that the prosecution
history of a patent, including any express representations made
by the applicant regarding the scope of the claim, is part of the
"intrinsic" evidence to be considered in claim construction.
Vitronics Corp. v. Conceptronic, Inc., 90 F.3d 1576, 1582-83
Fed.Cir.1996). Of particular relevance to reexamination
proceedings, the Federal Circuit has noted that the prosecution
history might reveal "whether the patentee has relinquished a
potential claim construction in an amendment to the claim or in

(3)Applied summarizes the features of this wafer processor as
including a mounting disk, a motor for rotating the disk, a
separate drive for translating the motor and disk, structures to
hold multiple wafers around the periphery of each mounting disk,
a load/unload station, disk exchange arms, and a vacuum process
chamber. (Applied Memo. in Supp. of SJ: Implantation Means, 10.)

<PAGE>


an argument to overcome or distinguish a reference." Bell
Atlantic Network Services, Inc. v. Covad Communications Group,
Inc., 262 F.3d 1258, 1268  Fed.Cir.2001).

Axcelis's defense of claim 1, in the reexamination
proceeding, was premised on distinguishing the detailed
mechanism outlined at column 4:38-54 from prior art references.
Its March 17, 2000 Amendment is quite clear, quoting column
4:38-54, then stating, "There is no teaching of this structure
in either the [asserted prior art] references." Patent Hist. Vol
1, Ex. 10 at 14. Further, in the 2nd NIRC's Statement of Reasons
for Patentability and/or Confirmation, December 8, 2000, the PTO
identified this very point as critical to its intended finding
of patentability: "All the independent claims now stress the
automatic ion implantation device, including multiple
semiconductor wafer workpieces, specifically used in conjunction
with the RF acceleration means." Pat. Hist. vol 1, Ex. 14 at 3.
Moreover, the Second NIRC stated the "The combination or the
above two features is considered unique and novel to this
particular claimed combination of an ion implantation/ion
accelerator device." Id.

Axcelis's counter-arguments to the significance of this
prosecution history are unavailing. Two merit summary dismissal.

<PAGE>

First, it is irrelevant that Applied (unsuccessfully) represented
to the PTO, in the reexamination proceeding, its view that the
"broadest reasonable interpretation" of this element was of
"simply a holder for a workpiece." What matters for present
purposes is the patentee's representations to the PTO, not those
of any third party. It would be particularly inappropriate to
hold Applied now to its earlier position when patentability was
argued for (and granted) on the contrary grounds Axcelis now
seeks to avoid. Second, it is equally irrelevant that the
language of claim 1 was not amended by the PTO. Far more
significant are the positions taken in advocating for, as
well as the logic underlying, that result.

Axcelis is more compelling when it notes that it immediately
disputed the application of the PTO's above cited statement to
claim 1 of the '111 patent, and that the PTO's denial of
reconsideration disclaimed giving rise to any negative inference,
presumably of a type that might bind a court. While I consider
Axcelis's representations before the PTO with fresh eyes, I find
the exercise not helpful to Axcelis's position here. In its
opposition brief, Axcelis notes that, in its March 17, 2000
Amendment, the reference to "this structure" refers to nothing
but the passage from the patent specification quoted immediately

<PAGE>

prior. That passage -- which logically carries over into the rest
of Axcelis's discussion of "implantation means" in its March
Amendment -- is precisely the passage which supports a narrower
construction than a "movable support for a workpiece."

Accordingly, I construe the corresponding structure to the
"implantation means" element of claim 1 to be a spinning, batch
wafer processor, as described at column 4:38-54 of the '111
patent, and its equivalents.

3. "Control means"

Agreeing that the function recited at this element is of
"control[ling] the relative amplitude and phase of the electric
fields in the accelerating gaps," the parties' dispute centers on
the meaning to be accorded to the term "control." Apparently
because Applied's allegedly infringing machine does not allow for
the independent adjustment of the relative phase of the electric
fields in the accelerating gaps, (Applied Memo. in Supp. of SJ:
Control Means), the parties each seek a definition of "control"
keyed to this circumstance.

In construing claims, the Federal Circuit has held that the
terms used in a claim bear a "'heavy presumption' that they mean
what they say and have the ordinary meaning that would be
attributed to them by persons skilled in the relevant art." Texas

<PAGE>

Digital Systems, Inc. v. Telegenix, Inc., 308 F.3d 1193, 1202,
(Fed. Cir. 2002), (quoting CCS Fitness, Inc. v. Brunswick Corp.,
288 F.3d 1359, 1366 (Fed. Cir. 2002)). This presumption may be
overcome however, where the patentee, acting as his or her own
lexicographer, has clearly set for an explicit definition of the
term different from its ordinary meaning. See Texas Digital, 308
F.3d at 1204 (citing In re Paulsen, 30 F.3d 1475, 1480 (Fed. Cir.
1994) and Intellical, Inc. v. Phonometrics, Inc., 952 F.2d 1384,
1387-88 (Fed. Cir. 1992)).

Here Axcelis argues that there is no evidence that the
patent applicant sought "to be a lexicographer by providing an
explicit definition in the specification," Renishaw PLC v.
Marposs Societa' Per Azioni, 158 F.3d 1243, 1249 (Fed.Cir.1998).
Therefore, Axcelis asserts the "ordinary meaning" of "control"
ought to be adopted suggesting that the Court consult a
dictionary for the applicable definition. Id. In Texas Digital,
Inc. v. Telegenix, Inc. the Federal Circuit clarified the rule
governing the proper use of dictionaries in claim construction.
308 F.3d at 1201-1206. The court explained that "dictionaries,
encyclopedias and treatises publicly available at the time a
patent is issued, are objective resources that serve as reliable
sources of information on the established meanings that would

<PAGE>

have been attributed to the terms of the claims by those of skill
in the art." Id. at 1203. Indeed, the court cautioned that an
over-reliance on the written description and prosecution history
of a patent "invites a violation of our precedent counseling
against importing limitations into the claims." See id. at 1204.
Rather than relying on the preferred embodiment described in the
disclosure, courts should look first for an objective definition
discernible from the ordinary and customary meaning of a given
term. Id.; see also, Generation II Orthotics, Inc., v. Medical
Technology Inc., 263 F.3d 1356, 1367 (Fed. Cir. 2001); Loctite
Corp. v. Ultraseal Ltd., 781 F.2d 861, 867 (Fed. Cir. 1985).
Nevertheless, the Texas Digital court also stated that, in
selecting the appropriate relevant definition from a dictionary
or other reference text, a court should consider the intrinsic
record to identify the meaning of the claim term most consistent
with the inventor's use of that term. See Texas Digital, 308 F.3d
at 1203; Dow. Chem. Co. v. Sumitomo Chem. Co., 257 F.3d 1364,
1372-73 (Fed. Cir. 2001); Multiform Dessicants, Inc. v. Medzam,
Ltd., 133 F.3d 1473, 1478 (Fed. Cir. 1998). Drawing on Webster's
Ninth New Collegiate Dictionary (1987),(4) Axcelis posits the


(4)  The Federal Circuit has noted that dictionaries, which
technically count as extrinsic evidence, nonetheless "hold a
'special place' and may sometimes be considered along with the
intrinsic evidence when determining the ordinary meaning of claim
terms." Bell Atlantic, 262 F.3d at 1267 (quoting Vitronics, 90
F.3d at 1584 n.6).

<PAGE>

ordinary meaning of "control" to be "regulate," which it further
defines as "fix or adjust."

Applied, on the other hand, contends that the
specification's numerous references to the ability independently
to adjust or vary the phase of the electric fields gives rise to
a perhaps "unconventional meaning" that, at any rate, does not
include the concept of "fix."(5)  Applied supplies its own
dictionary definitions as well to advance this meaning. Citing
the 1980 "New College Edition" of the American Heritage
Dictionary, Applied asserts that the definition of control
requires "the ability to adjust" (emphasis in original)(Applied
Resp. to Axcelis Supp.Memo. on Recent Fed. Cir. Precedent at 3).
Applied acknowledges that its dictionary provides several
definitions of control, but urges particular consideration of the
definition of control as "regulate." Id. Applied then provides a




(5)  In particular, Applied notes that column 5:10-15 of the
specification explains that "[a] broad range of charge to mass
ratios (q/A) can be accelerated by independently adjusting the rf
field phase of successive accelerating electrodes," and that
"this control insures a particle bunch arrives at each gap at a
time in the rf cycle so that the electric field accelerates the
ion." (Emphasis added.)

<PAGE>


definition of regulate, again from the American Heritage
Dictionary, as "to adjust in conformity to a specification or
requirement." Id. In essence, Applied contends that because
neither the definition of regulate nor control contain the word
"fix," adjust and fix must therefore be mutually exclusive. Id.

Applied's argument is unpersuasive. The essence of "control"
is nothing less than the power to determine the scope, range, or
effect of a given activity. To say therefore that control may
not, by definition, include the concept of fixing within its
ambit is a bit like saying the volume control on a radio only
"controls" the volume if it is constantly increasing or
decreasing the volume.

As a preliminary matter, I find there is nothing in the
specification to indicate that the inventor used the term
"control" in an extraordinary way, given that no explicit
definition of control is provided in the disclosure. Next, in the
context or this case, the choice between defining "control" as
"fix or adjust," on the one hand, or "independently adjust/vary,"
on the other, seems a false one. Applied's allegedly infringing
technology, after all, is not indifferent to the relative phase
of the electric fields in the accelerator. Rather, it employs
feedback loops actively to stabilize them.

<PAGE>

Even defining control as exclusively "to adjust," say, does not
seem to exclude a mechanism that actively works to maintain a
desired level.

Accordingly, I find it sufficient to define "control" as
"regulate," without needing to distinguish between the concepts
of "fix" and "adjust" for purposes of this case. I note that my
construction of this element of claim 1 effectively moots the
parties' related dispute over whether the "buncher" employed by
Applied's allegedly infringing machine qualifies as part of the
ion accelerator or not.

B. Claim 17

As noted, claim 17 is a method claim that was amended by the
PTO pursuant to its reexamination of the '111 patent. The
parties' dispute the construction of two elements that
essentially map out against claim 1's "control means" and
"implantation means," respectively. Separate analysis is
required, however; as the Federal Circuit has held, "[t]he mere
fact that a method claim is drafted with language parallel to an
apparatus claim with means-plus-function language does not mean
that the method claim should be subject to an analysis under
Section 112, Paragraph 6." Generation II Orthotics, 263 F.3d at
1367.  That cautionary observation is not relevant with respect
to

<PAGE>

one of claim 17's two contested elements, that of controlling a
relative phase of the electric fields in the accelerating gaps."
Because my analysis of the term "control" concerned the proper
definition to apply, rather than the effect of a particular
structure or embodiment, I find that there is no reason why the
definition of control should be different here.

Claim 17's second contested element, however, --
"positioning a semiconductor wafer workpiece or a plurality of
semiconductor workpieces at an implantation station" --  presents
a more demanding issue. I find compelling, however, that after
asserting that "[a]ll of the independent claims now stress the
automatic ion implantation device" specifically described by
Axcelis in its March 17, 2000 Amendment, the PTO amended the
preamble of claim 17 to specify a "method for ion implantation of
a plurality of semiconductor wafer workpieces" (modification
emphasized), and the substance of the relevant element to read "a
semiconductor wafer workpiece or a plurality of semiconductor
wafer workpieces at an implantation station" (modification
emphasized). Noting Applied's point that a single wafer may be
placed in the spinning, batch wafer processor described by the
specification at column 4:38-54, I find these modifications,
along with the PTO's previously quoted language from the 2nd

<PAGE>


NIRC's Statement of Reasons for Patentability and/or
Confirmation, instructive. They lead me to the conclusion that
there should be no different reading here than of "implantation
means" under claim 1.(6)

C. Claim 29

Claim 29 is an apparatus claim added by the PTO pursuant to
its reexamination of the '111 patent. Its contested elements --
"energizing means," "automated implantation means," and "control
means" -- are for all intents and purposes identical to those of
claim 1, and as such, the preceding analysis and claim
construction is entirely applicable.



				/s/Douglas P. Woodlock
				DOUGLAS P. WOODLOCK
				UNITED STATES DISTRICT JUDGE













(6) In this connection, I note that Axcelis only challenged
the NIRC's Statement of Reasons for Patentability and/or
Confirmation with respect to claim 1.




</TEXT>
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