9999999997-05-016780 ARS 1 20041231 20050404 20050406 20050404 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 ARS 34 000-30941 05049347 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 ARS 1 9999999997-05-016780.paper AUTO-GENERATED PAPER DOCUMENT