0001181431-05-003484 3 2 20050110 20050119 20050119 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 PALETTE DONALD W 0001314408 3 34 000-30941 05535529 978-787-4000 AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 3 1 rrd64489.xml PALETTE FORM 3 EX-99. 2 rrd54288_61301.htm POWER OF ATTORNEY DATED JANUARY 11, 2005