0001181431-05-029217 3 2 20050512 20050519 20050519 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 Namaroff Mark J 0001327115 3 34 000-30941 05844819 978-787-4000 108 CHERRY HILL DRIVE BEVERLY MA 01915 3 1 rrd78994.xml EX-99. 2 rrd67428_76606.htm POWER OF ATTORNEY DATED MAY 12, 2005