0001181431-05-029076 3 2 20050512 20050519 20050519 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 Halterman Craig M 0001327116 3 34 000-30941 05843943 978-787-4000 108 CHERRY HILL DRIVE BEVERLY MA 01915 3 1 rrd79009.xml EX-99. 2 rrd67443_76548.htm POWER OF ATTORNEY DATED MAY 12, 2005