0001181431-05-030017 3 2 20050523 20050524 20050524 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 Naruto Michio 0001328083 3 34 000-30941 05853046 978-787-4000 108 CHERRY HILL DRIVE BEVERLY MA 01915 3 1 rrd79764.xml NARUTO FORM 3 EX-24. 2 rrd68138_76728.htm POWER OF ATTORNEY DATED MAY 20, 2005