<SUBMISSION>
<ACCESSION-NUMBER>0001181431-05-030017
<TYPE>3
<PUBLIC-DOCUMENT-COUNT>2
<PERIOD>20050523
<FILING-DATE>20050524
<DATE-OF-FILING-DATE-CHANGE>20050524
<ISSUER>
<COMPANY-DATA>
<CONFORMED-NAME>AXCELIS TECHNOLOGIES INC
<CIK>0001113232
<ASSIGNED-SIC>3559
<IRS-NUMBER>341818596
<STATE-OF-INCORPORATION>DE
<FISCAL-YEAR-END>1231
</COMPANY-DATA>
<BUSINESS-ADDRESS>
<STREET1>55 CHERRY HILL DRIVE
<CITY>BEVERLY
<STATE>MA
<ZIP>01915
<PHONE>9782324001
</BUSINESS-ADDRESS>
<FORMER-COMPANY>
<FORMER-CONFORMED-NAME>EATON SEMICONDUCTOR EQUIPMENT INC
<DATE-CHANGED>20000501
</FORMER-COMPANY>
</ISSUER>
<REPORTING-OWNER>
<OWNER-DATA>
<CONFORMED-NAME>Naruto Michio
<CIK>0001328083
</OWNER-DATA>
<FILING-VALUES>
<FORM-TYPE>3
<ACT>34
<FILE-NUMBER>000-30941
<FILM-NUMBER>05853046
</FILING-VALUES>
<BUSINESS-ADDRESS>
<PHONE>978-787-4000
</BUSINESS-ADDRESS>
<MAIL-ADDRESS>
<STREET1>108 CHERRY HILL DRIVE
<CITY>BEVERLY
<STATE>MA
<ZIP>01915
</MAIL-ADDRESS>
</REPORTING-OWNER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>rrd79764.xml
<DESCRIPTION>NARUTO FORM 3
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2005-05-23</periodOfReport>

    <noSecuritiesOwned>1</noSecuritiesOwned>

    <issuer>
        <issuerCik>0001113232</issuerCik>
        <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>ACLS</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001328083</rptOwnerCik>
            <rptOwnerName>Naruto Michio</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>108 CHERRY HILL DRIVE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>BEVERLY</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01915</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <remarks>Mr. Naruto does not own any reportable securities, directly or indirectly.

Power of Attorney filed as an Exhibit 24 hereto.</remarks>

    <ownerSignature>
        <signatureName>/s/ Lynnette C. Fallon, as attorney in fact for Michio Naruto</signatureName>
        <signatureDate>2005-05-24</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24.
<SEQUENCE>2
<FILENAME>rrd68138_76728.htm
<DESCRIPTION>POWER OF  ATTORNEY DATED MAY 20, 2005
<TEXT>
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<TITLE>
rrd68138_76728.html
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<PRE>
<br>POWER OF ATTORNEY<br>For Executing Reports under Section 16(a) <br>with respect to securities of <br>AXCELIS TECHNOLOGIES INC.<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The undersigned hereby constitutes and appoints each of Mary G. Puma, Lynnette C. <br>Fallon, Matthew C. Dallett and Stanley Keller, each acting singly, the undersigned's true and <br>lawful attorney-in-fact, from the date hereof until this Power of Attorney is revoked, to:<br>(1)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect to securities <br>of Axcelis Technologies, Inc. in accordance with Section 16(a) of the Securities <br>Exchange Act of 1934 and the rules thereunder, it being understood that the documents <br>executed by such attorney-in-fact on behalf of the undersigned pursuant to this Power of <br>Attorney shall be in such form and shall contain such terms and conditions as such <br>attorney-in-fact may approve in his or her discretion; and<br>(2)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;do and perform any and all acts, for and on behalf of the undersigned, that may be <br>necessary or desirable to complete the execution of any such Form 3, 4 or 5 and the <br>timely filing of such form with the United States Securities and Exchange Commission <br>and any other authority.<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The undersigned hereby grants to each such attorney-in-fact full power and authority to <br>do and perform all and every act and thing whatsoever requisite, necessary and proper to be done <br>in the exercise of any of the rights and powers herein granted, as fully for all intents and <br>purposes as the undersigned might or could do if personally present, with full power of <br>substitution or revocation, hereby ratifying and confirming all that such attorney-in-fact, or his or <br>her substitute or substitutes, shall lawfully do or cause to be done by virtue of this power of <br>attorney and the rights and powers herein granted.  The undersigned acknowledges that the <br>foregoing attorneys-in-fact, in serving in such capacity at the request of the undersigned, are not <br>assuming any of the undersigned's responsibilities to comply with Section 16 of the Securities <br>Exchange Act of 1934. <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be <br>executed this 20th day of May, 2005.<p><p>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;__/s/ Michio Naruto____________________<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Michio Naruto<p><br> <br> <br>(continued...)<br>(continued...)<p>
</PRE>
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