POWER OF ATTORNEY
For Executing Reports under Section 16(a) 
with respect to securities of 
AXCELIS TECHNOLOGIES INC.
        The undersigned hereby constitutes and appoints each of Mary G. Puma, Lynnette C. 
Fallon, Matthew C. Dallett and Stanley Keller, each acting singly, the undersigned's true and 
lawful attorney-in-fact, from the date hereof until this Power of Attorney is revoked, to:
(1)        execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect to securities 
of Axcelis Technologies, Inc. in accordance with Section 16(a) of the Securities 
Exchange Act of 1934 and the rules thereunder, it being understood that the documents 
executed by such attorney-in-fact on behalf of the undersigned pursuant to this Power of 
Attorney shall be in such form and shall contain such terms and conditions as such 
attorney-in-fact may approve in his or her discretion; and
(2)        do and perform any and all acts, for and on behalf of the undersigned, that may be 
necessary or desirable to complete the execution of any such Form 3, 4 or 5 and the 
timely filing of such form with the United States Securities and Exchange Commission 
and any other authority.
        The undersigned hereby grants to each such attorney-in-fact full power and authority to 
do and perform all and every act and thing whatsoever requisite, necessary and proper to be done 
in the exercise of any of the rights and powers herein granted, as fully for all intents and 
purposes as the undersigned might or could do if personally present, with full power of 
substitution or revocation, hereby ratifying and confirming all that such attorney-in-fact, or his or 
her substitute or substitutes, shall lawfully do or cause to be done by virtue of this power of 
attorney and the rights and powers herein granted.  The undersigned acknowledges that the 
foregoing attorneys-in-fact, in serving in such capacity at the request of the undersigned, are not 
assuming any of the undersigned's responsibilities to comply with Section 16 of the Securities 
Exchange Act of 1934. 
        IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be 
executed this 20th day of May, 2005.
                                                __/s/ Michio Naruto____________________
                                                Michio Naruto

 
 
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