0001181431-05-045283 4 1 20050808 20050808 20050808 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 Levine Marc S 0001333074 4 34 000-30941 051006399 978-787-4000 108 CHERRY HILL DRIVE BEVERLY MA 01915 4 1 rrd88663.xml LEVINE 2005 RSU GRANT