0001181431-05-058474 4 1 20051031 20051031 20051031 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 FALLON LYNNETTE C 0001195654 4 34 000-30941 051165362 AXCELIS TECHNOLOGIES INC 108 CHERRY HILL DRIVE BEVERLY MA 01915-1053 4 1 rrd95720.xml OCT 2005 STOCK PURCHASE