0001104659-05-054037 10-Q 7 20050930 20051109 20051109 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 10-Q 34 000-30941 051189767 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 10-Q 1 a05-18117_110q.htm QUARTERLY REPORT PURSUANT TO SECTIONS 13 OR 15(D) EX-10.1 2 a05-18117_1ex10d1.htm MATERIAL CONTRACTS EX-31.1 3 a05-18117_1ex31d1.htm 302 CERTIFICATION EX-31.2 4 a05-18117_1ex31d2.htm 302 CERTIFICATION EX-32.1 5 a05-18117_1ex32d1.htm 906 CERTIFICATION EX-32.2 6 a05-18117_1ex32d2.htm 906 CERTIFICATION EX-99.1 7 a05-18117_1ex99d1.htm EXHIBIT 99