0001104659-05-050315 8-K 3 20051026 1.01 2.02 20051026 20051026 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 8-K 34 000-30941 051157402 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 8-K 1 a05-18980_18k.htm CURRENT REPORT OF MATERIAL EVENTS OR CORPORATE CHANGES EX-10.1 2 a05-18980_1ex10d1.htm MATERIAL CONTRACTS EX-99.1 3 a05-18980_1ex99d1.htm EXHIBIT 99