Axcelis
Technologies, Inc.
Non-Employee Director Cash Compensation at March 1, 2007
This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of this non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows:
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Annual Retainers (paid quarterly in advance) |
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Board Member Position |
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Amount |
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Lead Director |
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$ |
50,000 |
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Non-Employee Board Member (not Lead Director) |
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$ |
30,000 |
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Audit Committee Chair* |
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$ |
15,000 |
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Compensation Committee Chair* |
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$ |
10,000 |
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Nominating Committee Chair* |
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$ |
7,500 |
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* Retainers for Committee Chairs are in addition to the retainer payable to all non-employee Board members.
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Meeting Fees (payable quarterly in arrears) |
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Meeting Type |
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Amount Per Meeting |
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In Person Board Meetings |
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$ |
2,000 |
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Telephone Board Meetings |
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$ |
1,000 |
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In Person or Telephone Committee Meetings** |
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$ |
1,000 |
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** Committee meeting fees are paid only to committee members, and not to other Board members, attending committee meetings.
Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.