9999999997-07-016268 ARS 1 20061231 20070402 20070404 20070402 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 ARS 34 000-30941 07049206 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 ARS 1 9999999997-07-016268.paper AUTO-GENERATED PAPER DOCUMENT