0001181431-07-046375 4 1 20070716 20070718 20070718 JENNINGS WILLIAM C 0001276559 4 34 000-30941 07985729 978-787-4120 108 CHERRY HILL DRIVE BEVERLY MA 01915-1053 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd165258.xml JENNINGS 2007 REST STOCK