0001181431-07-046378 4 1 20070716 20070718 20070718 FLETCHER R JOHN 0001215024 4 34 000-30941 07985743 FLETCHER SPAGHT INC 222 BERKLEY ST. BOSTON MA 02116 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd165254.xml FLETCHER 2007 REST STOCK