0001181431-07-051813 4 1 20070809 20070813 20070813 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 HARDIS STEPHEN R 0001018624 OH 1231 4 34 000-30941 071047647 C/O APOGENT TECHNOLOGIES 30 PENHALLOW STREET PORTSMOUTH NH 03801-3816 603-433-6131 C/IO APOGENT TECHNOLOGIES 30 PENHALLOW STREET PORTSMOUTH NH 03801-3816 4 1 rrd168616.xml HARDIS FORM 4 AUG 2007