0001181431-07-054254 4 1 20070824 20070827 20070827 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 FLETCHER R JOHN 0001215024 4 34 000-30941 071079895 FLETCHER SPAGHT INC 222 BERKLEY ST. BOSTON MA 02116 4 1 rrd170711.xml FLETCHER PURCHASE AUGUST 2007