<SUBMISSION>
<ACCESSION-NUMBER>0001181431-07-057664
<TYPE>3
<PUBLIC-DOCUMENT-COUNT>2
<PERIOD>20070917
<FILING-DATE>20070917
<DATE-OF-FILING-DATE-CHANGE>20070917
<ISSUER>
<COMPANY-DATA>
<CONFORMED-NAME>AXCELIS TECHNOLOGIES INC
<CIK>0001113232
<ASSIGNED-SIC>3559
<IRS-NUMBER>341818596
<STATE-OF-INCORPORATION>DE
<FISCAL-YEAR-END>1231
</COMPANY-DATA>
<BUSINESS-ADDRESS>
<STREET1>108 CHERRY HILL DRIVE
<CITY>BEVERLY
<STATE>MA
<ZIP>01915
<PHONE>978 232 4001
</BUSINESS-ADDRESS>
<MAIL-ADDRESS>
<STREET1>108 CHERRY HILL DRIVE
<CITY>BEVERLY
<STATE>MA
<ZIP>01915
</MAIL-ADDRESS>
<FORMER-COMPANY>
<FORMER-CONFORMED-NAME>EATON SEMICONDUCTOR EQUIPMENT INC
<DATE-CHANGED>20000501
</FORMER-COMPANY>
</ISSUER>
<REPORTING-OWNER>
<OWNER-DATA>
<CONFORMED-NAME>Bintz William J
<CIK>0001411134
</OWNER-DATA>
<FILING-VALUES>
<FORM-TYPE>3
<ACT>34
<FILE-NUMBER>000-30941
<FILM-NUMBER>071119528
</FILING-VALUES>
<BUSINESS-ADDRESS>
<PHONE>978-787-4000
</BUSINESS-ADDRESS>
<MAIL-ADDRESS>
<STREET1>108 CHERRY HILL DRIVE
<CITY>BEVERLY
<STATE>MA
<ZIP>01915
</MAIL-ADDRESS>
</REPORTING-OWNER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>rrd172664.xml
<DESCRIPTION>BINTZ FORM 3
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2007-09-17</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0001113232</issuerCik>
        <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>ACLS</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001411134</rptOwnerCik>
            <rptOwnerName>Bintz William J</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>108 CHERRY HILL DRIVE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>BEVERLY</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01915</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Senior VP, Marketing</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeHolding>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>8000</value>
                    <footnoteId id="F1"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeHolding>
        <nonDerivativeHolding>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>10000</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeHolding>
    </nonDerivativeTable>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Right to Buy (Stock Option)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>4.78</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2010-01-03</value>
                <footnoteId id="F3"/>
            </exerciseDate>
            <expirationDate>
                <value>2016-01-03</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>17000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Right to Buy (Stock Option)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>6.39</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2011-05-15</value>
                <footnoteId id="F4"/>
            </exerciseDate>
            <expirationDate>
                <value>2017-05-15</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>5000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">These shares are issuable on restricted stock units granted under the Company's 2000 Stock Plan.  25% of these units are vested and 25% will vest on each of 07/03/2008, 07/03/2009 and 07/03/2010.</footnote>
        <footnote id="F2">These shares are issuable on restricted stock units granted under the Company's 2000 Stock Plan. 25% of these units will vest on each of 07/16/2008, 07/16/2009, 07/16/2010 and 07/16/2011.</footnote>
        <footnote id="F3">Exercisable as to 25% of the shares on each of 01/03/2007, 01/03/2008, 01/03/2009 and 01/03/2010.</footnote>
        <footnote id="F4">Exercisable as to 25% of the shares on each of 05/15/2008, 05/15/2009, 05/15/2010 and 05/15/2011.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Lynnette C. Fallon, as attorney in fact for William J. Bintz</signatureName>
        <signatureDate>2007-07-17</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24.
<SEQUENCE>2
<FILENAME>rrd152950_172511.htm
<DESCRIPTION>BINTZ POA
<TEXT>
<HTML>
<HEAD>
<TITLE>
rrd152950_172511.html
</TITLE>
</HEAD>
<BODY>
<PRE>

POWER OF ATTORNEY
For Executing Reports under Section 16(a)
with respect to securities of
AXCELIS TECHNOLOGIES INC.
	The undersigned hereby constitutes and appoints each of Mary G.
Puma, Lynnette C. Fallon, Matthew C. Dallett and Stanley Keller, each
acting singly, the undersigneds true and lawful attorney-in-fact, from
the date hereof until this Power of Attorney is revoked, to:
(1)	execute, for and on behalf of the undersigned, Forms 3, 4 and 5
with respect to securities of Axcelis Technologies, Inc. in accordance
with Section 16(a) of the Securities Exchange Act of 1934 and the rules
thereunder, it being understood that the documents
executed by such attorney-in-fact on behalf of the undersigned pursuant to
this Power of Attorney shall be in such form and shall contain such terms
and conditions as such attorney-in-fact may approve in his or her
discretion; and
(2)	do and perform any and all acts, for and on behalf of the
undersigned, that may be necessary or desirable to complete the execution
of any such Form 3, 4 or 5 and the timely filing of such form with the
United States Securities and Exchange Commission and any other authority.
	The undersigned hereby grants to each such attorney-in-fact full
power and authority to do and perform all and every act and thing whatsoever
requisite, necessary and proper to be done in the exercise of any of the
rights and powers herein granted, as fully for all intents and
purposes as the undersigned might or could do if personally present, with
full power of
substitution or revocation, hereby ratifying and confirming all that such
attorney-in-fact, or his or her substitute or substitutes, shall lawfully
do or cause to be done by virtue of this power of attorney and the rights
and powers herein granted.  The undersigned acknowledges that the
foregoing attorneys-in-fact, in serving in such capacity at the request
of the undersigned, are not assuming any of the undersigneds responsibilities
 to comply with Section 16 of the Securities Exchange Act of 1934.
	IN WITNESS WHEREOF, the undersigned has caused this Power of
Attorney to be executed this 27th day of August, 2007.



						__/s/ William Bintz_______________
						William Bintz









</PRE>
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</HTML>
</TEXT>
</DOCUMENT>
</SUBMISSION>
