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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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<SEC-DOCUMENT>0001181431-07-075557.txt : 20071214
<SEC-HEADER>0001181431-07-075557.hdr.sgml : 20071214
<ACCEPTANCE-DATETIME>20071214120328
ACCESSION NUMBER:		0001181431-07-075557
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20070701
FILED AS OF DATE:		20071214
DATE AS OF CHANGE:		20071214

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			BREWER KEVIN J
		CENTRAL INDEX KEY:			0001314431

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		071306519

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		AXCELIS TECHNOLOGIES, INC.
		STREET 2:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01938

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978 232 4001

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>rrd182585.xml
<DESCRIPTION>BREWER JULY 2007 RSU TAX WITHHOLDING
</DOCUMENT>
</SUBMISSION>