0001181431-07-075553 4 1 20070808 20071214 20071214 Levine Marc S 0001333074 4 34 000-30941 071306511 978-787-4000 108 CHERRY HILL DRIVE BEVERLY MA 01915 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd182592.xml LEVINE AUGUST 2007 RSU TAX WITHHOLDING