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Exhibit 10.11

Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at March 1, 2008

        This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the "Company") and each of its non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows:

Annual Retainers (paid quarterly in advance)
Board Member Position		Amount
Lead Director		$	50,000
Non-Employee Board Member (not Lead Director)		$	30,000
Audit Committee Chair*		$	15,000
Compensation Committee Chair*		$	10,000
Nominating Committee Chair*		$	7,500

*

Retainers for Committee Chairs are in addition to the retainer payable to all non-employee Board members.

Meeting Fees (payable quarterly in arrears)
Meeting Type		Amount Per Meeting
In Person Board Meetings		$	2,000
Telephone Board Meetings		$	1,000
In Person or Telephone Committee Meetings**		$	1,000

**

Committee meeting fees are paid only to committee members, and not to other Board me members, attending committee meetings.

        Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.

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Exhibit 10.11

Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at March 1, 2008