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Exhibit 10.17

AXCELIS TECHNOLOGIES, INC.

EXECUTIVE SEPARATION AGREEMENT

        THIS EXECUTIVE SEPARATION AGREEMENT, dated as of October 18, 2007, is made by and between Axcelis Technologies, Inc. (hereinafter referred to as the "Company") and Mark J. Namaroff (hereinafter referred to as "Executive"). In consideration of the mutual covenants contained herein, the parties agree as follows:

        1.    Termination Date.    Executive's employment with the Company will terminate on November 9, 2007 (the "Termination Date"). As described in Section 2, Executive will receive the separation pay and benefits under this Agreement. Prior to the Termination Date, the Executive shall cooperate with the reasonable requests of the Company to support the transition of the Executive's duties to other Company personnel.

        2.    Termination Compensation.    


        3.    Executive Acknowledgement of Compensation.    The Executive acknowledges that in exchange for entering into this Agreement the Executive has received good, sufficient and valuable consideration in excess of that to which the Executive would otherwise have been entitled in the absence of this Agreement. The Executive acknowledges that the Executive has been paid in full for any and all wages, including accrued unused vacation pay. Unless otherwise provided for expressly in this Agreement, all other benefits have ceased as of the Termination Date.

        4.    Effect of Breach on Compensation.    The Executive agrees that the compensation and benefits contained in this Agreement and which flow to the Executive from the Company are subject to termination, reduction or cancellation in the event that the Executive takes any action or engages in any conduct deemed by the Company to be in violation of this Agreement, provided however, that prior to any such termination, the Company will notify the Executive of the particular concern and provide the Executive with a reasonable opportunity to cure.

        5.    Executive Obligations.    

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        6.    SEC Reporting and Applicability of the Company's Insider Trading Policy.    

        7.    Insider Trading Policy.    Assuming the Executive does not acquire material non-public information after the Termination Date, beginning on the date two trading days after the Company's public announcement of its earnings for the fiscal quarter ending after the Termination Date, the Executive will no longer be subject to restrictions on trading arising under the Company's insider trading policy.

        8.    General Release and Covenant Not to Sue.    

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        9.    Compliance with Federal Older Workers Benefit Protection Act of 1990.    

        10.    Miscellaneous.    

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        IN WITNESS WHEREOF, the undersigned have executed this Agreement as of the date first set forth above.

    AXCELIS TECHNOLOGIES, INC.

 

 

By:

 

/s/  
LYNNETTE C. FALLON      
    Title:    

 

 

/s/  
MARK J. NAMAROFF      
Mark J. Namaroff

Attachments

Schedule 1   Mark J. Namaroff Non-Qualified Stock Options

Attachment A

 

Benefits After Termination Date
Attachment B   Employee Invention Assignment and Confidentiality Agreement
Attachment C   Resignation from Office
Attachment D   Indemnification Agreement dated May 12, 2005

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Schedule 1

Mark J. Namaroff Non-Qualified Stock Options

Award Date
  Price
  Shares
  % Vested
  Expiration Date
1/27/1998   $ 10.44   3,388   100 % 1/27/2008

7/10/2000

 

$

22.00

 

4,625

 

100

%

7/10/2010

6/2/2001

 

$

15.38

 

10,000

 

100

%

6/2/2012

7/30/2001

 

$

14.10

 

6,500

 

100

%

7/31/2011

2/4/2002

 

$

13.20

 

6,500

 

100

%

7/31/2011

6/21/2002

 

$

10.28

 

6,000

 

100

%

6/21/2012

12/20/2002

 

$

5.85

 

6,000

 

100

%

6/21/2012

1/2/2003

 

$

5.83

 

5,000

 

100

%

1/2/2013

5/1/2003

 

$

5.70

 

6,000

 

100

%

5/1/2013

11/3/2002

 

$

11.48

 

6,000

 

100

%

5/1/2013

6/25/2004

 

$

11.87

 

6,250

 

100

%

6/25/2014

12/27/2004

 

$

7.97

 

6,250

 

75

%

6/25/2014

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Attachments A and B are omitted because the content of those attachments is post-termination benefits and obligations applicable to all U.S. employees of the Company.

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Attachment C

LETTER OF RESIGNATION

    November 9, 2007

To: The Board of Directors of Axcelis Technologies, Inc.
108 Cherry Hill Drive
Beverly, MA 01982

Dear Sirs:

        Please accept tender of my resignation from the office of Senior Vice President, Strategic Marketing effective immediately.

    Very truly yours,

 

 

/s/  
MARK J. NAMAROFF      
Mark J. Namaroff

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AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT
LETTER OF RESIGNATION