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Exhibit 21.1
Axcelis Technologies, Inc.
Exhibit 21.1 to Form 10-K for the year ended December 31, 2007
Subsidiaries
A. The
following is all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof:
Domestic Subsidiaries
- 1.
- Axcelis
Technologies CCS Corporation a Delaware corporation
- 2.
- Fusion
Technology International, Inc., a Delaware corporation
- 3.
- Axcelis
Technologies (Israel), Inc., a Delaware corporation
- 4.
- Fusion
Investments, Inc., a Maryland corporation
- 5.
- High
Temperature Engineering Corporation, a Delaware corporation
- 6.
- Matrix
Integrated Systems Acquisition Corporation, a California corporation
European Subsidiaries
- 7.
- Axcelis
Technologies, GmbH (Germany)
- 8.
- Axcelis
Technologies, S.r.l (Italy)
- 9.
- Axcelis
Technologies, Sarl (France)
- 10.
- Axcelis
Technologies, Ltd. (U.K.)
- 11.
- Axcelis
Technologies B.V. (Netherlands)
- 12.
- Matrix
Europe N.V. (Belgium)
Asian Subsidiaries
- 13.
- Axcelis
Technologies, KK (Japan)
- 14.
- Axcelis
Technologies Limited (Korea)
- 15.
- Axcelis
Technologies Ltd. (Taiwan)
- 16.
- Axcelis
Technologies Pte. Ltd. (Singapore)
- 17.
- Axcelis
Technologies Semiconductor Trading (Shanghai) Co., Ltd. (Peoples Republic of China)
B. Axcelis
Technologies, Inc. holds 50% of the outstanding shares of SEN Corporation, an SHI and Axcelis Company, a Japanese corporation.
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Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2007 Subsidiaries