0001181431-08-002596 4 1 20071231 20080110 20080110 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 Halterman Craig M 0001327116 4 34 000-30941 08522192 978-787-4000 108 CHERRY HILL DRIVE BEVERLY MA 01915 4 1 rrd188835.xml HALTERMAN DEC 2007 ESPP