0001181431-08-043265 4 1 20080715 20080716 20080716 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 FLETCHER R JOHN 0001215024 4 34 000-30941 08954230 FLETCHER SPAGHT INC 222 BERKLEY ST. BOSTON MA 02116 800-633-0960 96 TALAMINE COURT COLORADO SPRINGS CO 80907 4 1 rrd211081.xml FLETCHER 2008 REST STOCK GRANT