0001181431-08-062471 4 1 20081117 20081118 20081118 Halterman Craig M 0001327116 4 34 000-30941 081198047 978-787-4000 108 CHERRY HILL DRIVE BEVERLY MA 01915 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd223888.xml HALTERMAN 2008 OPTION GRANT