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Exhibit 10.10

Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at March 1, 2009

        This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the "Company") and each of its non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows:

Annual Retainers (paid quarterly in advance)


  
Board Member Position
  Amount  

Lead Director

   $ 50,000  

Non-Employee Board Member (not Lead Director)

   $ 30,000  

Audit Committee Chair*

   $ 15,000  

Compensation Committee Chair*

   $ 10,000  

Nominating Committee Chair*

   $ 7,500  
*
Retainers for Committee Chairs are in addition to the retainer payable to all non-employee Board members.
Meeting Fees (payable quarterly in arrears)


  
Meeting Type
  Amount Per Meeting  

In Person Board Meetings

   $ 2,000  

Telephone Board Meetings

   $ 1,000  

In Person or Telephone Committee Meetings**

   $ 1,000  
**
Committee meeting fees are paid only to committee members, and not to other Board me members, attending committee meetings.

        Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.



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