0001047469-09-003537 10-K 9 20081231 20090331 20090331 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 10-K 34 000-30941 09719735 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 10-K 1 a2191974z10-k.htm 10-K EX-10.9 2 a2191974zex-10_9.htm EXHIBIT 10.9 EX-10.10 3 a2191974zex-10_10.htm EXHIBIT 10.10 EX-21.1 4 a2191974zex-21_1.htm EXHIBIT 21.1 EX-23.1 5 a2191974zex-23_1.htm EXHIBIT 23.1 EX-31.1 6 a2191974zex-31_1.htm EXHIBIT 31.1 EX-31.2 7 a2191974zex-31_2.htm EXHIBIT 31.2 EX-32.1 8 a2191974zex-32_1.htm EXHIBIT 32.1 EX-32.2 9 a2191974zex-32_2.htm EXHIBIT 32.2