0001181431-09-035501 4 1 20090715 20090716 20090716 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 NETTLES PATRICK H 0001068844 4 34 000-30941 09947447 1201 WINTERSON ROAD LINTHICUM MD 210909 4 1 rrd248470.xml NETTLES 2009 STOCK OPTION GRANT