0001181431-09-035493 4 1 20090715 20090716 20090716 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 HARDIS STEPHEN R 0001018624 OH 1231 4 34 000-30941 09947350 C/O MARSH & MCLENNAN COMPANIES, INC. 1166 AVENUE OF THE AMERICAS NEW YORK NY 10036 4 1 rrd248464.xml HARDIS 2009 OPTION GRANT