0001181431-09-035494 4 1 20090715 20090716 20090716 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 FLETCHER R JOHN 0001215024 4 34 000-30941 09947352 96 TALAMINE COURT COLORADO SPRINGS CO 80907 4 1 rrd248462.xml FLETCHER 2009 OPTION GRANT