0001181431-09-052417 4 1 20091116 20091118 20091118 BREWER KEVIN J 0001314431 4 34 000-30941 091192082 AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01938 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 4 1 rrd256264.xml BREWER 2009 OPTION GRANT