0001104659-09-012845 8-K 4 20090226 1.01 7.01 9.01 20090227 20090227 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 8-K 34 000-30941 09640622 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 8-K 1 a09-6240_18k.htm 8-K EX-10.1 2 a09-6240_1ex10d1.htm EX-10.1 EX-10.2 3 a09-6240_1ex10d2.htm EX-10.2 EX-99.1 4 a09-6240_1ex99d1.htm EX-99.1