0001104659-09-022607 8-K 4 20090330 1.01 1.02 2.01 7.01 9.01 20090403 20090403 AXCELIS TECHNOLOGIES INC 0001113232 3559 341818596 DE 1231 8-K 34 000-30941 09732368 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001 108 CHERRY HILL DRIVE BEVERLY MA 01915 EATON SEMICONDUCTOR EQUIPMENT INC 20000501 8-K 1 a09-9354_28k.htm 8-K EX-10.1 2 a09-9354_2ex10d1.htm EX-10.1 EX-99.1 3 a09-9354_2ex99d1.htm EX-99.1 EX-99.2 4 a09-9354_2ex99d2.htm EX-99.2