<SEC-DOCUMENT>0001181431-11-043836.txt : 20110804
<SEC-HEADER>0001181431-11-043836.hdr.sgml : 20110804
<ACCEPTANCE-DATETIME>20110804104754
ACCESSION NUMBER:		0001181431-11-043836
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20110803
FILED AS OF DATE:		20110804
DATE AS OF CHANGE:		20110804

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			KEITHLEY JOSEPH P
		CENTRAL INDEX KEY:			0001073329
		STATE OF INCORPORATION:			OH
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		111009187

	MAIL ADDRESS:	
		STREET 1:		NORDSON CORP
		STREET 2:		28601 CLEMENS RD
		CITY:			WESTLAKE
		STATE:			OH
		ZIP:			44145

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978 232 4001

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>rrd318522.xml
<DESCRIPTION>KEITHLEY FORM 3
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0204</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2011-08-03</periodOfReport>

    <noSecuritiesOwned>1</noSecuritiesOwned>

    <issuer>
        <issuerCik>0001113232</issuerCik>
        <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>ACLS</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001073329</rptOwnerCik>
            <rptOwnerName>KEITHLEY JOSEPH P</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O AXCELIS TECHNOLOGIES, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>108 CHERRY HILL DRIVE</rptOwnerStreet2>
            <rptOwnerCity>BEVERLY</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01915</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <remarks>Mr. Keithley did not own any reportable securities, directly or indirectly, prior to becoming a reporting person.  Power of Attorney filed as Exhibit 24.1 to this Form 3.</remarks>

    <ownerSignature>
        <signatureName>Lynnette C. Fallon, as attorney in fact for Joseph P. Keithley</signatureName>
        <signatureDate>2011-08-04</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24.1
<SEQUENCE>2
<FILENAME>rrd285605_322386.htm
<DESCRIPTION>POWER OF ATTORNEY BY JOSEPH P. KEITHLEY DATED AUGUST 3, 2011
<TEXT>
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rrd285605_322386.html
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<PRE>
<br>POWER OF ATTORNEY<br>For Executing Reports under Section 16(a) <br>with respect to securities of <br>AXCELIS TECHNOLOGIES INC.<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The undersigned hereby constitutes and appoints each of Mary G. Puma, Lynnette C. <br>Fallon, Matthew C. Dallett and Stanley Keller, each acting singly, the undersigned's true and <br>lawful attorney-in-fact, from the date hereof until this Power of Attorney is revoked, to:<br>(1)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect to securities <br>of Axcelis Technologies, Inc. in accordance with Section 16(a) of the Securities Exchange <br>Act of 1934 and the rules thereunder, it being understood that the documents executed <br>by such attorney-in-fact on behalf of the undersigned pursuant to this Power of Attorney <br>shall be in such form and shall contain such terms and conditions as such attorney-in-fact <br>may approve in his or her discretion; and<br>(2)&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;do and perform any and all acts, for and on behalf of the undersigned, that may be <br>necessary or desirable to complete the execution of any such Form 3, 4 or 5 and the <br>timely filing of such form with the United States Securities and Exchange Commission <br>and any other authority.<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The undersigned hereby grants to each such attorney-in-fact full power and authority to <br>do and perform all and every act and thing whatsoever requisite, necessary and proper to be done <br>in the exercise of any of the rights and powers herein granted, as fully for all intents and purposes <br>as the undersigned might or could do if personally present, with full power of substitution or <br>revocation, hereby ratifying and confirming all that such attorney-in-fact, or his or her substitute <br>or substitutes, shall lawfully do or cause to be done by virtue of this power of attorney and the <br>rights and powers herein granted.  The undersigned acknowledges that the foregoing attorneys-<br>in-fact, in serving in such capacity at the request of the undersigned, are not assuming any of the <br>undersigned's responsibilities to comply with Section 16 of the Securities Exchange Act of 1934. <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be <br>executed this 3rd day of August, 2011.<p><p>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;/s/Joseph P. Keithley___________________<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Joseph P. Keithley<p><p>
</PRE>
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