<SEC-DOCUMENT>0001047469-13-002045.txt : 20130301
<SEC-HEADER>0001047469-13-002045.hdr.sgml : 20130301
<ACCEPTANCE-DATETIME>20130301134406
ACCESSION NUMBER:		0001047469-13-002045
CONFORMED SUBMISSION TYPE:	10-K
PUBLIC DOCUMENT COUNT:		16
CONFORMED PERIOD OF REPORT:	20121231
FILED AS OF DATE:		20130301
DATE AS OF CHANGE:		20130301

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		10-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		13656218

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978 232 4001

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=5><B>UNITED STATES<BR>
SECURITIES AND EXCHANGE COMMISSION<BR>  </B></FONT><FONT SIZE=2><B>Washington, D.C. 20549  </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=5><B>FORM 10-K  </B></FONT></P>
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<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(Mark One)</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TD>
</TR>
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<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B><FONT FACE="WINGDINGS">&#253;</FONT></B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><B>ANNUAL REPORT PURSUANT TO SECTION&nbsp;13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF&nbsp;1934</B></FONT></TD>
</TR>
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<TD COLSPAN=3 ALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2><B> For the fiscal year ended December&nbsp;31, 2012</B></FONT></TD>
</TR>
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<TD ALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2><B> <FONT FACE="WINGDINGS">&#111;</FONT></B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><B><BR>&nbsp;</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><B><BR>
TRANSITION REPORT PURSUANT TO SECTION&nbsp;13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF&nbsp;1934</B></FONT></TD>
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 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B>For the transition period
from&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;to&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<BR>
Commission file number&nbsp;000-30941  </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=5><B>AXCELIS TECHNOLOGIES,&nbsp;INC.<BR>  </B></FONT><FONT SIZE=2>(Exact name of registrant as specified in its charter) </FONT></P>
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<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B>Delaware<BR> </B></FONT><FONT SIZE=2>(State or other jurisdiction<BR>
of incorporation or organization)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B> 34-1818596<BR> </B></FONT><FONT SIZE=2>(IRS Employer Identification No.)</FONT></TD>
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 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B>108 Cherry Hill Drive<BR>
Beverly, Massachusetts 01915<BR>  </B></FONT><FONT SIZE=2>(Address of principal executive offices) (zip code) </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B>(978)&nbsp;787-4000<BR>  </B></FONT><FONT SIZE=2>(Registrant's telephone number, including area code) </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B>Securities registered pursuant to Section&nbsp;12(b) of the Act:  </B></FONT></P>
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<TD NOWRAP  ALIGN="CENTER" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:1%;"><FONT SIZE=2><B>Title of each class

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<TD NOWRAP  ALIGN="CENTER" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:1%;"><FONT SIZE=2><B>Name of each exchange on which registered

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<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>Common Stock, $.001 par value</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>The Nasdaq Stock Market&nbsp;LLC</FONT></TD>
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 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B>Securities registered pursuant to Section&nbsp;12(g) of the Act:<BR>
None  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule&nbsp;405 of the Securities
Act.&nbsp;Yes&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT>&nbsp;No&nbsp;<FONT FACE="WINGDINGS">&#253;</FONT> </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Indicate by check mark if the registrant is not required to file reports pursuant to Section&nbsp;13 or Section&nbsp;15(d) of the
Act.&nbsp;Yes&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT>&nbsp;No&nbsp;<FONT FACE="WINGDINGS">&#253;</FONT> </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Indicate by check mark whether the registrant (1)&nbsp;has filed all reports required to be filed by Section&nbsp;13 or 15(d) of the Securities Exchange Act of
1934 during the preceding 12&nbsp;months (or for such shorter period that the registrant was required to file such reports), and (2)&nbsp;has been subject to such filing requirements for the past
90&nbsp;days.&nbsp;Yes&nbsp;<FONT FACE="WINGDINGS">&#253;</FONT>&nbsp;No&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT> </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Indicate by checkmark whether the registrant has submitted electronically and posted on its corporate Web site, of any, every Interactive Data File required to be
submitted and posted pursuant to Rule&nbsp;405 of Regulation&nbsp;S-T during the preceding 12&nbsp;months (or for such shorter period that the registrant was required to submit and
post such files).&nbsp;Yes&nbsp;<FONT FACE="WINGDINGS">&#253;</FONT>&nbsp;No&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT> </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Indicate by check mark if disclosure of delinquent filers pursuant to Item&nbsp;405 of Regulation&nbsp;S-K is not contained herein, and will not be
contained, to the best of registrant's knowledge, in definitive proxy or information statements incorporated by reference in Part&nbsp;III of this Form&nbsp;10-K or any amendment to
this Form&nbsp;10-K.&nbsp;<FONT FACE="WINGDINGS">&#253;</FONT> </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, or a smaller reporting
company. See the definitions of "large accelerated filer," "accelerated filer" and "smaller reporting company" in Rule&nbsp;12b-2 of the Exchange Act. </FONT></P>
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<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>Large accelerated filer&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>Accelerated filer&nbsp;<FONT FACE="WINGDINGS">&#253;</FONT></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>Non-accelerated filer&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT><BR></FONT> <FONT SIZE=1>(Do not check if a smaller<BR>
reporting company)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>Smaller reporting company&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT></FONT></TD>
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 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Indicate
by check mark whether the registrant is a shell company (as defined in Rule&nbsp;12b-2 of the
Act).&nbsp;Yes&nbsp;<FONT FACE="WINGDINGS">&#111;</FONT>&nbsp;No&nbsp;<FONT FACE="WINGDINGS">&#253;</FONT> </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Aggregate market value of the voting stock held by non-affiliates of the registrant as of June&nbsp;30, 2012: $127,487,448 </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Number
of shares outstanding of the registrant's Common Stock, $0.001 par value, as of February&nbsp;25, 2013: 108,233,274. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B> Documents incorporated by reference:  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Portions of the definitive Proxy Statement for Axcelis Technologies,&nbsp;Inc.'s Annual Meeting of Stockholders to be
held on May&nbsp;14, 2013 are incorporated by reference into Part&nbsp;III of this Form&nbsp;10-K. </FONT></P>


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<A NAME="toc_ca76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  PART I    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2><A
NAME="ca76601_item_1._business."> </A>
<A NAME="toc_ca76601_2"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;1.&nbsp;&nbsp;&nbsp;&nbsp;Business.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Overview of Our Business  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Axcelis Technologies,&nbsp;Inc. ("Axcelis," the "Company," "we," "us," or "our") designs, manufactures and services ion implantation,
dry strip and other processing equipment used in the fabrication of semiconductor chips. We sell to leading semiconductor chip manufacturers worldwide. The ion implantation business comprised
approximately 76.7% of our revenue in 2012 with the remaining 23.3% of revenue derived from our dry strip and other processing systems. In addition to equipment, we provide extensive aftermarket
service and support, including spare parts, equipment upgrades, maintenance services and customer training. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
December 2012, we sold to Lam Research Corporation ("Lam") the intellectual property rights and other assets relating to our dry strip systems product line. The purchased intellectual
property rights include, among other things, worldwide patent rights, patent applications, copyrights, industrial designs, know-how and related rights used by us in our dry strip business.
As a result of this transaction, we will cease the sale of 300 mm dry strip wafer processing equipment in September 2013. We will be able to continue to sell dry strip systems for smaller wafers until
December 2015 and support our installed base of dry strip systems indefinitely. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Axcelis'
business commenced in 1978 and its current corporate entity was incorporated in Delaware in 1995, headquartered in Beverly, Massachusetts. We maintain an Internet site at
http://www.axcelis.com. We make available free of charge on and through this website our annual reports on Form&nbsp;10-K, quarterly reports on Form&nbsp;10-Q, current
reports on Form&nbsp;8-K, and amendments to those reports filed or furnished pursuant to Section&nbsp;13(a) or 15(d) of the Exchange Act as soon as reasonably practicable after we
electronically file such material with, or furnish it to, the Securities and Exchange Commission. Our website and the information contained therein or connected thereto shall not be deemed to be
incorporated into this Form&nbsp;10-K. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Industry Overview  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Semiconductor chips, also known as integrated circuits, are used in personal computers, telecommunication equipment, digital consumer
electronics, wireless communication products and other applications. Types of semiconductor chips include memory chips (which store and retrieve information), microprocessors (logic devices which
process information) and "system on chip" devices (which have both logic and memory features). Most semiconductor chips are built on a wafer of silicon of either 200mm (8 inches) or 300mm (12 inches)
in diameter. Each semiconductor chip is made up of millions of tiny transistors or "switches" to control the functions of the device. Transistors are created in the silicon wafer by introducing
various precisely placed impurities into the silicon in specific patterns. The process steps in the formation of transistors are traditionally referred to as
"front-end-of-line." The "back-end-of-line" process steps connect the transistors and other components together through several
overlapping layers of metal wires, known as interconnect, creating a complete circuit. Each layer of metal interconnect must be separated by a non-conductive or insulating material called
inter-level dielectric. Each layer that is added is selectively patterned to all previous layers through a process called photolithography. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Semiconductor
chip manufacturers utilize many different types of equipment in the making of integrated circuits. Over 300 process steps utilizing over 50 different types of process tools
are required to make a single device like a microprocessor. Semiconductor chip manufacturers seek efficiency improvements through increased throughput, equipment utilization and higher manufacturing
yields. Capacity is added by increasing the amount of manufacturing equipment in existing fabrication facilities and by constructing new fabrication facilities. Periodically the semiconductor industry
adopts a larger </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>1</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>silicon
wafer size to achieve lower manufacturing costs. Semiconductor manufacturers can produce more chips on a larger wafer, thus reducing the overall manufacturing cost per chip. For example, the
use of 200mm wafers in production began at the end of the 1980s. The migration from 200mm to 300mm began at the end of the 1990s. The majority of wafer fabrication facilities today are using wafers
with a diameter of 300mm. In 2012, Axcelis derived 76.6% of total systems revenue (a component of product revenue) from sales of 300mm equipment. In 2011, industry participants began planning for the
next wafer size transition, to 450mm diameter wafers. The schedule for this future transition will vary by customer. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
customer base is also changing. Given the magnitude of the investment needed to build a new wafer fabrication facility (often referred to as a "fab"), which can be over
$4&nbsp;billion for a new 300mm fab, many customers are entering into partnerships to offset the cost of technology development and manufacturing. In addition, many chip developers outsource all or
part of their chip manufacturing requirements to contract manufacturers, known as foundries. Foundries are significant purchasers of semiconductor manufacturing equipment. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
semiconductor industry is highly cyclical, as global chip production capacities successively exceed, then lag behind, global chip demand. When chip demand is high, and inventories
low, chip manufacturers add capacity though capital equipment purchases. Given the difficulties of forecasting and calibrating chip demand and production capacity, the industry periodically
experiences excess chip inventories and softening chip prices. Our customers react with muted capital spending, lowering the demand for our equipment. Changes in consumer and business demand for
products in which chips are used also affect the industry. A successful semiconductor equipment manufacturer must not only provide some of the most technically complex products manufactured in the
world but also must design its business to thrive during the inevitable low points in the cycle. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Weak
industry conditions that began in mid-2011 continued through 2012, resulting in a decline in our 2012 revenues as compared with 2011. The Company's 2012 results also
reflect our efforts in recent years to lower our breakeven revenue levels to avoid significant losses in a downturn. Although future market conditions are difficult to predict, we anticipate the
industry will continue to experience similar conditions into 2013. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Axcelis' Strategy  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Axcelis' 2013 strategic goal is to return to being a successful, financially strong company. To accomplish this, we intend
to:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Reestablish Axcelis as a leader in ion implant across all customer segments with a competitive, single wafer product
portfolio; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Expand our product penetrations beyond our strong position in memory into the foundry and logic segments; and </FONT> <FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Continue to build on our strong Global Service Solutions base. </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
transaction with Lam Research in December 2012 represents an important step in the execution of our strategy, allowing us to focus on ion implant. The collaboration with Lam Research
will also allow us to identify value for our customers as we explore the interrelationships between implant, etch, deposition, dry strip and clean applications. We expect that this partnership will
enhance our ability to compete and gain implant market share. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
have continued to invest in research and development through the industry cycles to assure our products meet the needs of our customers. We take pride in our scientists and engineers
who continue to add to our portfolio of patents and unpatented proprietary technology to ensure that our investment in technology leadership is translated into unique product advantages. We strive for
operational </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>2</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>excellence
by focusing on ways to lower our manufacturing and design costs and to improve our delivery times to our customers. Finally, we have established Global Customer Teams and a focused
account management structure to maintain and strengthen our customer relationships and increase customer satisfaction. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Ion Implantation Systems  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Ion implantation is a principal step in the transistor formation cycle of the semiconductor manufacturing process. An ion implanter is
a large, technically advanced system that injects dopants such as arsenic, boron or phosphorus into a silicon wafer. These dopants are ionized and therefore have electric charges. With an electric
charge they can be manipulated, moved and accelerated with electric and magnetic fields. Ion implanters use these fields to create a beam of ions with a precisely defined amount of energy (ranging
between several hundred and three million electron-volts) and with a precisely defined amount of beam current (ranging from microamps to milliamps). Certain areas of the silicon wafer are blocked off
by a polymer material known as photoresist, which acts as a "stencil" to pattern devices so that the dopants will only enter the wafer where needed. The dopants change the electrical properties of the
silicon wafer to create the active components of a chip, called the transistors. Typical process flows require twenty implant steps, with the most advanced processes requiring thirty or more. Each
implant step is characterized by four key parameters: dopant type, dose (amount of dopant), energy (depth into the silicon) and tilt (angle of wafer relative to the ion beam). </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
order to cover the wide range of implant steps, three different types of implanters have been developed, each designed to cover a specific range of applications, primarily defined by
dose and energy. The three traditional implanter types are referred to as medium current, high current and high energy:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Medium current (mid dose) implanters are the original model of ion implanter, with mid to low-range energy and
dose capability. These implanters are single wafer systems in which only one wafer at a time is slowly moved in front of the ion beam. </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>High current (high dose) implanters were the second type of implanter to emerge, having low energy capability and high
dose range. High current implanters were initially designed as "multi wafer" or "batch" tools for maximum productivity, processing multiple wafers at the same time. To address smaller device
geometries and provide high tilt, single wafer high current implanters now dominate the sector. </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>High energy implanters emerged to address the need for deeper implants with a high energy range and low dose. High energy
implanters are available in both multi wafer and single wafer architectures. </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Axcelis
offers a complete line of high energy, high current and medium current implanters for all application requirements.  </FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2><B>High Energy
Implant.</B></FONT><FONT SIZE=2>&nbsp;&nbsp;Axcelis is a market leader in high energy ion implanters. Our single wafer tool for high energy applications is the Optima XEx.
The Optima XEx combines Axcelis' production-proven RF Linac high energy, spot beam technology with a high-speed, state-of-the-art single wafer end
station, enabling unmatched throughput. Axcelis' advanced spot beam ensures that all points across the wafer see the same beam at the same beam angle, resulting in exceptional process control and
maximum yield. We expect to maintain our leadership in the high energy segment through sales of our multi wafer high energy systems and the Optima XEx.  </FONT> <FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2><B>High Current
Implant.</B></FONT><FONT SIZE=2>&nbsp;&nbsp;Our single wafer product for high current applications is the Optima HDx. We use the term "high dose" or "HD" in connection
with this product because the Optima HDx fulfills all traditional high current requirements while extending beyond traditional </FONT></DD></DL>
</UL>
<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>3</FONT></P>

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<UL>
<UL>

<P style="font-family:times;"><FONT SIZE=2>high
current energy and dose ranges. In order to maximize utilization and flexibility, the OptimaHDx can process some traditional mid current implants. In addition, the Optima HDx is extendable into
ultra-low energy applications to satisfy future process requirements including leakage current performance.  </FONT></P>

</UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2><B>Medium Current
Implant.</B></FONT><FONT SIZE=2>&nbsp;&nbsp;In 2012, Axcelis shipped its first Purion M medium current ion implant system. Axcelis has recently not had a competitive
offering in this market space. This new system will offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity
(500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages. </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
believe our ion implant products will continue to meet customer demand for advantages in productivity, simplicity, process performance and technical extendibility. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Dry Strip  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In the process steps prior to ion implantation, a light sensitive, polymer-based liquid called photoresist is spread in a uniformly
thin film on the wafer. Through a process known as photolithography, the photoresist is developed into a pattern like a stencil. Once the subsequent implant processes and etch steps (in which the top
layer of the surface of the wafer not covered by photoresist is removed) are completed, the photoresist is no longer necessary and must be removed. The primary means of removing photoresist and
residue is a process called "dry strip" or "ashing." Our dry strip machines, also called "ashers," use microwave and radio frequency energy to turn process gases into plasma, which then acts to
"clean" the surface of the wafer by removing the photoresist and unwanted residue. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Axcelis
has offered a full line of dry strip tools that cover the entire range of customer applications. In December 2012, Lam purchased the intellectual property rights relating to our
dry strip systems business. As a result of this transaction, we will cease the sale of 300 mm dry strip wafer processing equipment in September 2013. We will be able to continue to sell dry strip
systems for smaller wafers until December 2015 and support our installed base of dry strip systems indefinitely. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> Aftermarket Support and Services  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We offer our customers extensive aftermarket service and support throughout the lifecycle of the equipment we manufacture as well as
equipment we previously manufactured. We believe that approximately 3,000 of our products are in use in 32 countries worldwide. The service and support that we provide include spare parts, equipment
upgrades, and maintenance services. We provide varying levels of sales, service and applications support out of our field offices to customers located in 32&nbsp;countries. Revenue generated through
our service and support business represented about 61.0%, 46.2% and 51.7% of revenue in 2012, 2011, and 2010, respectively. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;To
support our aftermarket business we have several hundred staff members, including sales and marketing personnel, field service engineers, and spare parts and applications engineers,
as well as employees located at our manufacturing facilities who work with our customers to provide customer training and documentation, product, process and applications support. In 2012, Ulvac
Techno, a Japanese company, began providing aftermarket services and support services for our products in Japan. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Most
of our customers maintain spare parts inventories for our machines. In addition to our web-based spare parts management and replenishment tracking program, we offer a
number of Business-to-Business options to support our customers' parts management requirements. Our Axcelis Managed Inventory service offering, a parts consignment arrangement,
provides the customer with full spares support, with Axcelis retaining responsibility for the complete supply chain. The expansion of </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>4</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>these
services provides ease of use alternatives that help us reduce order fulfillment costs and improve cycle time, resulting in an expanded customer base for this service offering. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> Sales and Marketing  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We primarily sell our equipment and services through our direct sales force. We conduct sales and marketing activities from our sales
offices located in the United States, Taiwan, South Korea, China, Germany, Singapore and Italy. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Since
March 2009, SEN Corporation, or "SEN" (our former Japanese joint venture, which was divested in 2009), has held a non-exclusive license to use certain patented and
unpatented technology associated with legacy products owned by the Company. Axcelis benefits from a reciprocal license of implant technology from SEN. These royalty-free, perpetual cross
licenses do not restrict our ability to sell any of our products in Japan or elsewhere in the world. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Concurrently
with the sale of assets to Lam Research in December 2012, the Company and Lam entered into a Transition Agreement pursuant to which Lam granted us a worldwide,
non-exclusive, non-transferable, royalty free license to use the dry strip
intellectual property rights sold by the Company. The license allows us to make and sell dry strip wafer processing equipment for semiconductor applications for a limited transition period after the
closing and to support our installed base of dry strip equipment on a perpetual basis. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;International
revenue, including export sales from our U.S. manufacturing facilities to foreign customers, sales by foreign subsidiaries and branches, accounted for 70.2% of total
revenue in 2012, 72.3% of total revenue in 2011, and 75.8% in 2010. Substantially all of our sales are denominated in U.S. dollars. See Note&nbsp;17 to our Consolidated Financial Statements
contained in Item&nbsp;15 of this Form&nbsp;10-K for a breakdown of our revenue and long-lived assets in the United States, Europe and Asia. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Customers  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In 2012, the top 20 semiconductor manufacturers accounted for approximately 85.6% of total semiconductor industry capital spending, up
from 83.6% in 2011. These manufacturers are from the largest semiconductor manufacturing regions in the world: the United States, Asia Pacific (Taiwan, South Korea, Singapore, and China), Japan and
Europe. The Company serves all leading semiconductor manufacturers. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Revenue
from our ten largest customers accounted for 70.6%, 68.6%, and 62.7% of revenue in 2012, 2011, and 2010, respectively. We expect that sales of our products to relatively few
customers will continue to account for a high percentage of revenue for the foreseeable future. In 2012, one customer accounted for 18.2% of revenue. In 2011, one customer accounted for 21.2% of
revenue. In 2010, one customer accounted for 18.6% of revenue. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
Beverly, Massachusetts Advanced Technology Center houses a process development laboratory with 12,500&nbsp;sq.&nbsp;ft. of class&nbsp;10/100/1000 clean room for product
demonstrations and process development and a 34,000&nbsp;sq.&nbsp;ft. customer training center. The Advanced Technology Center provides infrastructure and process capabilities that allow customers
to test their unique process steps on our systems under conditions that substantially replicate the customers' production environment. This facility also provides significant capability for our
research and development efforts. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Research and Development  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our industry continues to experience rapid technological change, requiring us to frequently introduce new products and enhancements.
Our ability to remain competitive in this market will </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>5</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>depend
in part upon our ability to develop new and enhanced systems and to introduce these systems at competitive prices on a timely and cost effective basis. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
devote a significant portion of our personnel and financial resources to research and development programs and seek to maintain close relationships with our customers to remain
responsive to their product needs. We have also sought to reduce the development cycle for new products through a collaborative process whereby our engineering, manufacturing and marketing personnel
work closely together with one another and with our customers at an earlier stage in the process. We also use 3D, computer-aided design, finite element analysis and other computer-based modeling
methods to test new designs. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
expenditures for research and development were $40.4&nbsp;million, $47.2&nbsp;million, and $39.5&nbsp;million in 2012, 2011, and 2010, respectively, or 19.9%, 14.8%, and 14.4%
of revenue, respectively. We expect that research and development expenditures will continue to represent a substantial investment in future years. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Manufacturing  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We manufacture products at our 417,000&nbsp;sq.&nbsp;ft. ISO&nbsp;9000:2008, ISO&nbsp;14001:2004 certified plant in Beverly,
Massachusetts. Our facility employs best in class manufacturing techniques including lean manufacturing, six sigma controls and advanced inventory management, purchasing and quality systems. Our clean
manufacturing process uses class&nbsp;1000/10,000 space to facilitate most of our manufacturing requirements. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company's core manufacturing competency is built around system assembly and test which remains an in house capability due to the high degree of expertise and intellectual property
associated with the process and design. Non-core work is sourced to one of several global partners and includes items such as power distribution, vacuum systems, wafer handling and
commodity level components. We continuously pursue outsourcing opportunities where the economics are justified, with a goal of enabling factory capacity, quality and margin improvement. Our supply
chain team is globally focused and is located in Beverly and Singapore. Customized and commercially available software solutions drive our planning, purchasing and inventory tracking process. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
products are designed to be assembled and tested in a modular fashion, which facilitates our industry-recognized "ship-from-cell" process. Specially developed
test stands, software and tooling provide the framework for this accelerated delivery process. Customers that choose ship-from-cell substantially improve their delivery times
while receiving the same high level of quality provided by more traditional longer cycle integration techniques. Product margins and inventory turns also improve as a result of shorter factory cycle
times and increased labor productivity. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Installation
of our equipment is provided by factory and field teams. The process includes placing and leveling the equipment at its installation site, connecting it to sources of gas,
water and electricity and recalibrating it to specifications that had previously been met during factory testing. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Competition  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The semiconductor wafer fabrication equipment market is highly competitive and is characterized by a small number of medium to large
size participants. We have competed in two principal product markets of the semiconductor wafer fabrication process: ion implantation and dry strip. In December 2012, we divested our dry strip
intellectual property and will cease selling 300 mm dry strip systems in September 2013. See "Overview of Our Business." In ion implantation, we compete against Applied Materials,&nbsp;Inc., SEN,
Nissin Electric&nbsp;Co.,&nbsp;Ltd. and Advanced Ion Beam Technology,&nbsp;Inc. Significant competitive factors in the semiconductor equipment market include price, cost of ownership, equipment
performance, customer support, capabilities and breadth of product line. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>6</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2><B> Intellectual Property  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We rely on patent, copyright, trademark and trade secret protection, in the United States and in other countries, as well as
contractual restrictions, to protect our proprietary rights in our products and our business. As of January&nbsp;1, 2013, we had 288 active patents issued in the United States and 348 active patents
granted in other countries, as well as 383 patent applications (44 in the United States and 339 in other countries) on file with various patent agencies worldwide. Patents are generally in effect for
up to 20&nbsp;years from the filing of the application. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
intend to file additional patent applications and grow our intellectual property portfolio as appropriate. Although patents are important to our business, we do not believe that we
are substantially dependent on any single patent or any group of patents. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
have trademarks, both registered and unregistered, that are maintained to provide customer recognition for our products in the marketplace. Trademark registrations generally remain in
effect as long as the trademarks are in use. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;From
time to time, we enter into license agreements with third parties under which we obtain or grant rights to patented or proprietary technology. Except for our license agreement with
SEN and our license from Lam Research (described above under "Sales and Marketing"), we do not believe that any of our licenses are currently material to us. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
can give no assurance that we, our licensors, licensees, customers or suppliers will not be subject to claims of patent infringement or claims to invalidate our patents, or that any
such claims will not be successful, requiring us to pay substantial damages or remove certain features from our products or both. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Backlog  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;As of December&nbsp;31, 2012, our systems backlog (excluding deferred systems revenue) was $11.6 million, as compared to
$10.8&nbsp;million as of December&nbsp;31, 2011. Systems backlog including deferred systems revenue was $18.5&nbsp;million and $23.1&nbsp;million as of December&nbsp;31, 2012 and 2011,
respectively. The slight increase in backlog is not indicative of an improvement in the semiconductor equipment market, as we expect the overall trend of a market slowdown to continue into 2013. We
believe it is meaningful to investors to include deferred systems revenue as part of our backlog. Deferred systems revenue represents revenue that will be recognized in future periods based on prior
shipments. Our policy is to include in backlog only those system orders for which we have accepted purchase orders and typically are due to ship within six months. Backlog does not include orders
received for our service business (spare parts, consumables and service contracts) due to the turn rate associated with that business. Generally, orders for services or parts received during the
quarter are performed or shipped within the same quarter. All orders are subject to cancellations or rescheduling by customers with limited or no penalties. Due to possible changes in system delivery
schedules, cancellations of orders, and delays in systems shipments, our backlog at any particular date is not necessarily indicative of our actual sales for any succeeding period. In addition, our
backlog at the beginning of a quarter typically does not include all orders required to achieve our sales objectives for that quarter and is not a reliable indicator of our future sales. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Employees  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;As of December&nbsp;31, 2012, we had 879 employees and 8 temporary staff worldwide, of which 656 work in North America, 171 in Asia
and 60 in Europe. We consider our relationship with our employees to be good. Our employees are not represented by a labor union and are not subject to a collective bargaining agreement. One of our
European locations has formed a work council, which has certain information and discussion rights under applicable law. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>7</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2><B> Environmental  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We are subject to environmental laws and regulations in the countries in which we operate that regulate, among other things: air
emissions; water discharges; and the generation, use, storage, transportation, handling and disposal of solid and hazardous wastes produced by our manufacturing, research and development and sales
activities. As with other companies engaged in like businesses, the nature of our operations exposes us to the risk of environmental liabilities, claims, penalties and orders. We believe, however,
that our operations are in substantial compliance with applicable environmental laws and regulations and that there are no pending environmental matters that would have a material impact on our
business. We are ISO-14001 certified at our Beverly, MA facility. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Executive Officers of the Registrant  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT SIZE=2><B><I>Mary G. Puma,</I></B></FONT><FONT SIZE=2> 55, has been our President and Chief Executive Officer since January 2002
and Chairman since 2005. From May 2000 until January 2002, Ms.&nbsp;Puma was our President and Chief Operating Officer, prior to which she served as a Vice President of Axcelis from February 1999.
In 1998, she became General Manager and Vice President of the Implant Systems Division of Eaton Corporation, a global diversified industrial manufacturer. In May 1996, she joined Eaton as General
Manager of the Commercial Controls Division. Prior to joining Eaton, Ms.&nbsp;Puma spent 15&nbsp;years in various marketing and general management positions for General Electric Company.
Ms.&nbsp;Puma is a director of Nordson Corporation, North Shore Medical Center and Semiconductor Equipment and Materials International (SEMI). </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><B><I>Jay Zager</I></B></FONT><FONT SIZE=2>, 63, became our Executive Vice President and Chief Financial Officer in January 2011. Prior to joining Axcelis, from 2007 until
2010, Mr.&nbsp;Zager was Executive Vice President and Chief Financial Officer at 3Com Corporation, a global enterprise networking solutions provider acquired by Hewlett Packard. From February 2005
until June 2007, Mr.&nbsp;Zager was Executive Vice President and Chief Financial Officer at Gerber Scientific,&nbsp;Inc., a supplier of automated manufacturing systems. Prior to joining Gerber,
Mr.&nbsp;Zager was Senior Vice President and Chief Financial Officer of Helix Technology Corp., a semiconductor equipment manufacturer, from February 2002 to January 2005. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><B><I>Kevin J. Brewer,</I></B></FONT><FONT SIZE=2> 54, has been our Executive Vice President, Global Operations since 2008. Mr.&nbsp;Brewer held the position of Senior
Vice President, Manufacturing Operations since May 2005, prior to which he had been Vice President of Manufacturing Operations since October 2002 and Director of Operations from 1999 to 2002. Prior to
joining Axcelis in 1999, Mr.&nbsp;Brewer was Director of Operations, Business Jets at Raytheon Aircraft Company, a leading manufacturer of business and special mission aircraft owned by Raytheon
Company, a manufacturer of defense, government and commercial electronics, as well as aircraft. Prior to that, Mr.&nbsp;Brewer held various management positions in
operations and strategic planning in Raytheon Company's Electronic Systems and Missile Systems groups. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><B><I>Lynnette C. Fallon,</I></B></FONT><FONT SIZE=2> 53, is our Executive Vice President, Human Resources/Legal and General Counsel, a position she has held since May
2005. Prior to that, Ms.&nbsp;Fallon was Senior Vice President HR/Legal and General Counsel since 2002, and Senior Vice President and General Counsel since 2001. Ms.&nbsp;Fallon has also been our
corporate Secretary since 2001. Before joining Axcelis, Ms.&nbsp;Fallon was a partner in the Boston law firm of Palmer&nbsp;&amp; Dodge&nbsp;LLP since 1992, where she was head of the Business Law
Department from 1997 to 2001. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><B><I>William Bintz,</I></B></FONT><FONT SIZE=2> 56, has been our Executive Vice President, Product Development, Engineering and Marketing since 2011. Prior to that, he was
our Senior Vice President, Marketing since September 2007, after joining Axcelis in early 2006 as Director of Marketing for curing and cleaning products and shortly thereafter becoming Vice President
of Product Marketing. Prior to joining Axcelis, from 2002 Mr.&nbsp;Bintz was Product Director for Medium Current and High Energy Ion Implant System at Varian Semiconductor Equipment
Associates,&nbsp;Inc. Before that, he was General Manager of the Materials </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>8</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>Delivery
Products Group at MKS Instruments, beginning in 1999, and General Manager of the Thermal Processing Systems Division at Eaton Corporation (now Axcelis) beginning in 1995. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><B><I>John E. Aldeborgh,</I></B></FONT><FONT SIZE=2> 56, has been our Executive Vice President, Customer Operations since February 2013, having joined Axcelis in January
2013 as our Senior Vice President, Customer Operations. Prior to joining Axcelis, Mr.&nbsp;Aldeborgh served as the Chief Executive Officer and President, and as a Director, of innoPad,&nbsp;Inc.,
a privately held manufacturer of Chemical Mechanical Planarization pads, since 2006. Mr.&nbsp;Aldeborgh served in various marketing and sales position at Varian Semiconductor Equipment
Associates&nbsp;Inc. from 2002 to 2005, including Vice President of Sales and Marketing. Prior to Varian, Mr.&nbsp;Aldeborgh served as President and Chief Operating Officer of Ebara
Technologies,&nbsp;Inc., from 1998 to 2002. Mr.&nbsp;Aldeborgh also held various positions, at Genus,&nbsp;Inc. from 1989 to 1998, including Executive Vice President and Chief Operating Officer. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><A
NAME="cc76601_item_1a._risk_factors."> </A>
<A NAME="toc_cc76601_1"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;1A.&nbsp;&nbsp;&nbsp;&nbsp;Risk Factors.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> Risks Related to Our Business and Industry  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Set forth below and elsewhere in this Form&nbsp;10-K and in other documents we file with the SEC are risks and
uncertainties that could cause actual results to differ materially from the results contemplated by the forward-looking statements contained in this Form&nbsp;10-K. We note that factors
set forth below, individually or in the aggregate, may cause our actual results to differ materially from expected and historical results. We note these factors for investors as permitted by the
Private Securities Litigation Reform Act of 1995. You should understand that it is not possible to predict or identify all such factors. Consequently, you should not consider the following to be a
complete discussion of all potential risks or uncertainties. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> If semiconductor manufacturers do not make sufficient capital expenditures, our sales and profitability will be harmed.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Almost all of our new orders will depend upon demand from semiconductor manufacturers who build or expand fabrication facilities. When
the rate of construction or expansion of fabrication facilities declines, demand for our systems will decline, reducing our revenue. Revenue decline also hurts our profitability because our
established cost structure and our continued investments in engineering, research and development and marketing necessary to develop new products and to maintain extensive customer service and support
capabilities limit our ability to reduce expenses in proportion to declining sales. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> If we fail to develop and introduce reliable new or enhanced products and services that meet the needs of semiconductor manufacturers, our results will suffer.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Rapid technological changes in semiconductor manufacturing processes require us to respond quickly to changing customer requirements.
Our future success will depend in part upon our ability to develop, manufacture and successfully introduce new systems and product lines with improved capabilities and to continue to enhance existing
products. This will depend upon a variety of factors, including new product selection, timely and efficient completion of product design and development and of manufacturing and assembly processes,
product performance in the field and effective sales and marketing. In particular:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>We must develop competitive technical specifications of new systems, or enhancements to our existing systems, and
manufacture and ship these systems or enhancements in volume in a timely manner. </FONT></DD></DL>
</UL>
<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>9</FONT></P>

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<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>We will need to accurately predict the schedule on which our customers will be ready to transition to new products, in
order to accurately forecast demand for new products while managing the transition from older products. </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>We will need to effectively manage product reliability or quality problems that often exist with new systems, in order to
avoid reduced orders, higher manufacturing costs, delays in acceptance and payment and additional service and warranty expenses. </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Our new products must be accepted in the marketplace. </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Our failure to meet any of these requirements will have a material adverse effect on our operating results and
profitability. </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2><B><I> We may be unable to obtain needed additional capital to finance our operations.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our capital requirements may vary widely from quarter to quarter, depending on, among other things, capital expenditures, fluctuations
in our operating results, financing activities, acquisitions and investments and inventory and receivables management. We believe that our existing cash and cash equivalents will be sufficient to
satisfy our anticipated cash requirements through the end of 2013 and beyond, but this, of course, depends on the accuracy of our assumptions about levels of sales and expenses. A number of factors,
including those described in these "Risk Factors," could prove our assumptions wrong and cause us to require additional capital from external sources. Depending on market conditions, future debt or
equity financings may not be possible on attractive terms or at all. In addition, future debt or equity financings could be dilutive to the existing holders of our common stock. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B><I> Our financial results may fluctuate significantly.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We derive our systems revenue from the sale of a relatively small number of expensive products to a small number of customers. The list
prices on these products range from $0.2&nbsp;million to $5.0&nbsp;million. At our current sales level, each sale, or failure to make a sale, has a material effect on us in a particular quarter.
In a given quarter, a number of factors can adversely affect our revenue and results, including changes in our product mix, increased fixed expenses per unit due to reductions in the number of
products manufactured, and higher fixed costs due to increased levels of research and development and expansion of our worldwide sales and marketing organization. Our financial results also fluctuate
based on gross profit realized on sales. A variety of factors may cause gross profit as a percentage of revenue to vary, including the mix and average selling prices of products sold, costs to
manufacture and customize systems and warranty costs. New product introductions may also affect our gross margins. Fluctuations in our financial results may have an adverse effect on the price of our
common stock. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> Our financial results may fall short of anticipated levels; forecasting revenue and profitability is complex and may be inaccurate.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Management may from time to time provide financial forecasts. These forecasts are based on assumptions, believed to be reasonable when
made, of fab utilization, shipment timing and system acceptance timing. Any of these assumptions can prove erroneous and the level of revenue recognizable in a particular quarter may vary from the
forecast. Our lengthy sales cycle, coupled with customers' competing capital budget considerations, make the timing of customer orders uneven and difficult to predict. In addition, our backlog at the
beginning of a quarter typically does not include all orders required to achieve our sales objectives for that quarter and is not a reliable indicator of our future sales. As a result, our revenue and
operating results for a quarter depend on our shipping orders as scheduled during that quarter, receiving customer acceptance of previously shipped products, and obtaining new orders for products to
be shipped in that same quarter. Any delay in, or cancellation of, </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>10</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>scheduled
shipments and customer acceptances or in shipments from new orders could materially and adversely affect our financial results. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Accounting
rules addressing revenue recognition have added additional complexity in forecasting quarterly revenue and profitability. Orders for our products usually contain multiple
delivery elements
that result in revenue deferral under generally accepted accounting principles. Due to the foregoing factors, investors should understand that our actual financial results for a quarter may vary
significantly from our forecasts of financial performance for that quarter. Failure to meet forecasted financial performance may have an adverse effect on the price of our common stock. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> The semiconductor industry is highly cyclical and we expect that demand for our products will regularly increase and decrease, making it difficult to manage the business and
potentially causing harm to our sales and profitability.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The semiconductor business is highly cyclical, experiencing upturns when the demand for our products is high and downturns when our
customers are not investing in new or expanded fabrication facilities. From time to time, inventory buildups in the semiconductor industry, resulting in part from periodic downturns, produce an
oversupply of semiconductors. This will cause semiconductor manufacturers to revise capital spending plans, resulting in reduced demand for capital equipment such as our products. If an oversupply is
not reduced by increasing demand from the various industries that use semiconductors, which we cannot accurately predict, our sales and profitability will be harmed. Our revenue can vary significantly
from one point in the cycle to another, making it difficult to manage the business, both when revenue is increasing and when it is decreasing. In addition, a substantial portion of our operating
expenses do not fluctuate with changes in volume. Significant decreases in revenue can therefore have a disproportionate effect on profitability. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> If we fail to compete successfully in the highly competitive semiconductor equipment industry, our sales and profitability will decline.  </I></B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The market for semiconductor manufacturing equipment is highly competitive and includes companies with substantially greater financial,
engineering, manufacturing, marketing and customer service and support resources than we have that may be better positioned to compete successfully in the industry. In addition, there are smaller,
emerging semiconductor equipment companies that provide innovative systems with technology that may have performance advantages over our systems. We expect our competitors to continue to improve the
design and performance of their existing products and processes and to introduce new products and processes with improved price and performance characteristics. If we are unable to improve or
introduce competing products when demanded by the markets, our business will be harmed. In addition, if competitors enter into strategic relationships with leading semiconductor manufacturers covering
products similar to those sold or being developed by us, our ability to sell products to those manufacturers may be adversely affected. Finally, if we must lower prices to remain competitive without
commensurate cost of goods savings, our gross margins and profitability will be adversely affected. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> We have been dependent on sales to a limited number of large customers; the loss of any of these customers or any reduction in orders from them could materially affect our
sales.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Historically, we have sold a significant portion of our products and services to a limited number of fabricators of semiconductor
products. For example, in 2012, our top ten customers accounted for 70.6% of our net sales. None of our customers has entered into a long-term agreement requiring it to purchase our
products. Although the composition of the group comprising our largest customers has varied from year to year, the loss of a significant customer or any reduction or delays in orders from any
significant customer could adversely affect us. The ongoing consolidation of semiconductor manufacturers may also increase the harmful effect of losing one or more significant customers. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>11</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2><B><I> Axcelis is subject to the risks of operating internationally and we derive a substantial portion of our revenue from outside the United States, especially from Asia.  </I></B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We are substantially dependent on sales of our products and services to customers outside the United States. International sales,
including export sales from our U.S. manufacturing facilities to non-U.S. customers and sales by our non-U.S. subsidiaries and branches, accounted for 70.2% of total revenue in
2012 in comparison to 72.3% in 2011 and 75.8% in 2010. System shipments to Asian customers represented 71.3% of total shipment dollars in 2012 in comparison to 60% in 2011 and 68% in 2010. We
anticipate that international sales will continue to account for a significant portion of our revenue. Because of our dependence upon international sales, our results and prospects may be adversely
affected by a number of factors, including:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>unexpected changes in laws or regulations resulting in more burdensome governmental controls, tariffs, restrictions,
embargoes or export license requirements; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>difficulties in obtaining required export licenses; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>volatility in currency exchange rates; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>political and economic instability; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>difficulties in accounts receivable collections; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>extended payment terms beyond those customarily offered in the United States; </FONT> <FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>difficulties in managing suppliers, service providers or representatives outside the United States; </FONT> <FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>difficulties in staffing and managing foreign subsidiary and branch operations; and </FONT> <FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>potentially adverse tax consequences. </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2><B><I> We may not be able to maintain and expand our business if we are not able to hire, retain and integrate qualified personnel.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our business depends on our ability to attract and retain qualified, experienced employees. There is substantial competition for
experienced engineering, technical, financial, sales and marketing personnel in our industry. In particular, we must attract and retain highly skilled design and process engineers. Competition for
such personnel is intense, particularly in the Boston metropolitan area, as well as in other locations around the world. If we are unable to retain our
existing key personnel, or attract and retain additional qualified personnel, we may from time to time experience levels of staffing inadequate to develop, manufacture and market our products and
perform services for our customers. As a result, our growth could be limited or we could fail to meet our delivery commitments or experience deterioration in service levels or decreased customer
satisfaction, all of which could adversely affect our financial results. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> Our dependence upon a limited number of suppliers for many components and sub-assemblies could result in increased costs or delays in the manufacture and sale of
our products.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We rely to a substantial extent on outside vendors to manufacture many of the components and sub-assemblies of our
products. We obtain many of these components and sub-assemblies from either a sole source or a limited group of suppliers. Accordingly, we may be unable to obtain an adequate supply of
required components on a timely basis, on price and other terms acceptable to us, or at all. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
addition, we often quote prices to our customers and accept customer orders for our products before purchasing components and sub-assemblies from our suppliers. If our
suppliers increase the cost of components or sub-assemblies, we may not have alternative sources of supply and may not be able </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>12</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>to
raise the price of our products to cover all or part of the increased cost of components, negatively impacting our gross margins. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
manufacture of some of these components and sub-assemblies is an extremely complex process and requires long lead times. As a result, we have in the past, and may in the
future, experience delays or shortages. If we are unable to obtain adequate and timely deliveries of our required components or sub-assemblies, we may have to seek alternative sources of
supply or manufacture these components internally. This could delay our ability to manufacture or to ship our systems on a timely basis, causing us to lose sales, incur additional costs, delay new
product introductions and suffer harm to our reputation. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> Our international operations involve currency risk.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Substantially all of our sales are billed in U.S. dollars, thereby reducing the impact of fluctuations in foreign exchange rates on our
results. Operating margins of our foreign operations can fluctuate with changes in foreign exchange rates to the extent revenues are billed in U.S. dollars and operating expenses are incurred in the
local functional currency. During the year ended December&nbsp;31, 2012, approximately 29.0% of our revenue was derived from foreign operations with this inherent risk. In addition, at
December&nbsp;31, 2012, our operations outside of the United States accounted for approximately 42.4% of our total assets, the majority of which was denominated in currencies other than the U.S.
dollar. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> We may incur additional expenses in connection with developing processes to comply with the SEC's new Conflict Minerals Rule; failure to comply would have negative
consequences.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;As with all public companies, Axcelis will need to develop processes to comply with Rule&nbsp;13p-1 issued by the
Securities and Exchange Commission under the U.S. Securities and Exchange Act regarding reporting obligations for the use of tin, tantalum, tungsten and gold that could have originated in the
Democratic Republic of the Congo and adjoining countries. In light of the complexity of the new rule, Axcelis has begun considering how our purchasing and legal functions will need to adapt to the new
reporting and disclosure requirements. We will likely incur additional expense in connection with our preparation of our first Form&nbsp;SD covering the 2013 calendar year for filing with the
Commission by May&nbsp;31, 2014. If we do not comply with this new regulatory requirement, or requirements imposed by our customers as a result of the new rule, our business and stock price may be
affected. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B><I> We are subject to cyber security risks, which could adversely affect our business.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We and certain of our third-party vendors receive and store personal information in connection with our human resources operations and
other aspects of our business. Despite our implementation of security measures, our IT systems are vulnerable to damages from computer viruses, natural disasters, unauthorized access, cyber-attack and
other similar disruptions. Any system failure, accident or security breach could result in disruptions to our operations. A material network breach in the security of our IT systems could include the
theft of our intellectual property or trade secrets. To the extent that any disruptions or security breach results in a loss or damage to our data, or in inappropriate disclosure of confidential
information, it could cause significant damage to our reputation, affect our relationships with our customers, lead to claims against us and ultimately harm our business. In addition, we may be
required to incur significant costs to protect against damage caused by these disruptions or security breaches in the future. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>13</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2><B><I> Our stock price has been volatile and you could lose the value of your investment.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our stock price has been volatile and has fluctuated significantly to date. The trading price of our stock is likely to continue to be
highly volatile and subject to wide fluctuations. Your investment in our stock could lose value. Some of the factors that could significantly affect the market price of our stock
include:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>actual or anticipated variations in results; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>analyst reports or recommendations; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>changes in interest rates; and </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>other events and factors, many of which are beyond our control. </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
stock market in general has experienced extreme price fluctuations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> Our proprietary technology may be vulnerable to efforts by competitors to challenge or design around, potentially reducing our market share.  </I></B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We rely on a combination of patents, copyrights, trademark and trade secret laws, non-disclosure agreements and other
intellectual property protection methods to protect our proprietary technology. Despite our efforts to protect our intellectual property, our competitors may be able to legitimately ascertain the
non-patented proprietary technology embedded in our systems. If this occurs, we may not be able to prevent their use of this technology. Our means of protecting our proprietary rights may
not be adequate and our patents may not be sufficiently broad to prevent others from using technology that is similar to or the same as our technology. In addition, patents issued to us have been, or
might be challenged, and might be invalidated or circumvented and any rights granted under our patents may not provide adequate protection to us. Our competitors may independently develop similar
technology, duplicate features of our products or design around patents that may be issued to us. As a result of these threats to our proprietary technology, we may have to resort to costly litigation
to enforce or defend our intellectual property rights. Finally, all patents expire after a period of time (in the U.S., patents expire 20&nbsp;years from the date of filing of the patent
application). Our market share could be negatively impacted by the expiration of a patent which had created a barrier for our competitors. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Axcelis
also has agreements with third parties for licensing of patented or proprietary technology with Axcelis as the licensor or the licensee. Termination of license agreements could
have an adverse impact on our financial performance or ability to ship products with existing configurations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> We (or customers that we indemnify) might face intellectual property infringement claims or patent disputes that may be costly to resolve and, if resolved against us, could
be very costly to us and prevent us from making and selling our systems.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;From time to time, claims and proceedings have been or may be asserted against us relative to patent validity or infringement matters.
We typically agree to indemnify our customers from liability to third parties for intellectual property infringement arising from the use of our products in their intended manner. Therefore, we
occasionally receive notification from customers who believe that we owe them indemnification or other obligations related to infringement claims made against the customers by third parties. Our
involvement in any patent dispute or other intellectual property dispute or action to protect trade secrets, even if the claims are without merit, could be very expensive to defend and could divert
the attention of our management. Adverse determinations in any litigation could subject us to significant liabilities to third parties, require us to seek costly licenses from third parties and
prevent us from manufacturing and selling our systems. In addition, infringement indemnification clauses in system sale agreements may require us to take other actions or require us to </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>14</FONT></P>

<HR NOSHADE>
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<P style="font-family:times;"><FONT SIZE=2>provide
certain remedies to customers who are exposed to indemnified liabilities. Any of these situations could have a material adverse effect on our business results. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B><I> If operations were disrupted at Axcelis' primary manufacturing facility it would have a negative impact on our business.  </I></B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We have one primary manufacturing facility, located in Massachusetts. Its operations could be subject to disruption for a variety of
reasons, including, but not limited to natural disasters, work stoppages, operational facility constraints and terrorism. Such disruption could cause delays in shipments of products to our customers
and could result in cancellation of orders or loss of customers, which could seriously harm our business.  </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cc76601_item_1b._unresolved_staff_comments."> </A>
<A NAME="toc_cc76601_2"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;1B.&nbsp;&nbsp;&nbsp;&nbsp;Unresolved Staff Comments.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;None.  </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cc76601_item_2._properties."> </A>
<A NAME="toc_cc76601_3"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;2.&nbsp;&nbsp;&nbsp;&nbsp;Properties.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We own one property and lease 39 properties, of which 15 are located in the United States and the remainder are located in Asia and
Europe, including offices in Taiwan, Singapore, South Korea, China, Malaysia, Italy, and Germany. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
own our principal facility in Beverly, Massachusetts, which comprises 417,000 square feet. The facility is principally used for manufacturing, research and development,
sales/marketing, customer support, advanced process development, product demonstration, customer-training center and corporate headquarters. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Although
we are currently operating significantly below normal capacity as a result of the continuing downturn in the industry, we believe that there is no material
long-term, excess capacity in our manufacturing facilities, although utilization is subject to change based on customer demand. We believe that our manufacturing facilities and equipment
generally are well maintained, in good operating condition, suitable for our purposes, and adequate for our present operations. Our Beverly, Massachusetts facility is Massachusetts facility is
ISO&nbsp;9001:2008 and ISO&nbsp;14001:2004 and our European office is ISO&nbsp;9001:2008 certified.  </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cc76601_item_3._legal_proceedings."> </A>
<A NAME="toc_cc76601_4"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;3.&nbsp;&nbsp;&nbsp;&nbsp;Legal Proceedings.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company is not presently a party to any litigation that it believes might have a material adverse effect on its business
operations. The Company is, from time to time, a party to litigation that arises in the normal course of its business operations.  </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cc76601_item_4._mine_safety_disclosures."> </A>
<A NAME="toc_cc76601_5"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;4.&nbsp;&nbsp;&nbsp;&nbsp;Mine Safety Disclosures.    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Not applicable. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>15</FONT></P>

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 </FONT></P>

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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="ce76601_part_ii"> </A>
<A NAME="toc_ce76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  PART II    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2><A
NAME="ce76601_item_5._market_for_registrant___ite04647"> </A>
<A NAME="toc_ce76601_2"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;5.&nbsp;&nbsp;&nbsp;&nbsp;Market for Registrant's Common Equity, Related Stockholder Matters and Issuer Purchases of Equity Securities.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our common stock trades on the Nasdaq Global Select Market under the symbol ACLS. The following table sets forth the high and low sale
prices as reported on the Nasdaq Global Select Market during each of the quarters for the two most recent years. As of February&nbsp;25, 2013, we had approximately 5,000 stockholders of record. We
have never paid any cash dividends to our shareholders and do not anticipate paying cash dividends in the future and in any event, we would be restricted from doing so by the terms of our bank credit
agreement. </FONT></P>
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<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="54pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="54pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Common Stock Price </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>High </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Low </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><U>2011</U></FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>First Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3.77</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.20</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Second Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.69</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.48</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Third Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.94</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.14</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Fourth Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.55</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.00</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><U>2012</U></FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>First Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.88</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.36</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Second Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.76</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.00</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Third Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.20</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.78</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Fourth Quarter</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.40</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.84</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
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 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>16</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2><A
NAME="ce76601_item_6._selected_financial_data."> </A>
<A NAME="toc_ce76601_3"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;6.&nbsp;&nbsp;&nbsp;&nbsp;Selected Financial Data.    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The following selected consolidated statements of operations data for each of the three years ended December&nbsp;31, 2012, 2011, and
2010 and the consolidated balance sheet data as of December&nbsp;31, 2012 and 2011 have been derived from the audited consolidated financial statements contained in Item&nbsp;15 of Part&nbsp;IV
of this Form&nbsp;10-K. The selected consolidated balance sheet data as of December&nbsp;31, 2010 and 2009, and the statement of operations data for the years ended December&nbsp;31,
2009 and 2008, have been derived from the audited financial statements contained in our Form&nbsp;10-K filed on March&nbsp;14, 2011. The consolidated balance sheet data as of
December&nbsp;31, 2008 has been derived from the audited financial statements contained in our Form&nbsp;10-K filed on March&nbsp;31, 2009. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
historical financial information set forth below may not be indicative of our future performance and should be read together with "Management's Discussion and Analysis of Financial
Condition and Results of Operations" and our historical consolidated financial statements and notes to those statements included in Item&nbsp;7 of Part&nbsp;II and Item&nbsp;15 of
Part&nbsp;IV, respectively, of this Form&nbsp;10-K. </FONT></P>
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<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="56pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=14 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2009 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2008 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=14 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(In thousands, except per share amounts)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Consolidated statements of operations data:</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Revenue</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>203,385</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>319,416</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>275,212</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>133,022</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>250,214</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gross profit</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>58,171</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>114,737</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>85,838</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>28,064</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>62,615</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Equity loss of SEN</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(3,238</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(3,667</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) from operations</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(30,938</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,132</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(13,367</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(69,434</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(186,837</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) before income taxes</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(32,388</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,471</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,261</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(76,603</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(195,803</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(34,034</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,077</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,573</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(77,468</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(196,664</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss) per share:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Basic</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.32</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.05</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.17</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.75</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1.91</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Diluted</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.32</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.05</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.17</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.75</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1.91</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Shares used in computing basic and diluted per share amounts:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Basic</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107,619</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>106,234</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>104,522</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>103,586</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>102,739</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Diluted</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107,619</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>109,098</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>104,522</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>103,586</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>102,739</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Consolidated balance sheet data:</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash and cash equivalents</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>44,986</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>46,877</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>45,743</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>45,020</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>37,694</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Working capital</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>145,443</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>164,561</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>160,501</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>163,849</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>111,182</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total assets</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>222,158</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>269,245</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>280,872</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>250,603</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>455,181</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Long-term liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6,300</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,218</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,176</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,447</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,808</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stockholders' equity</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>186,076</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>214,555</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>205,567</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>216,399</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>319,377</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
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<P style="font-family:times;"><FONT SIZE=2><A
NAME="cg76601_item_7._management_s_discussio__ite03649"> </A>
<A NAME="toc_cg76601_1"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;7.&nbsp;&nbsp;&nbsp;&nbsp;Management's Discussion and Analysis of Financial Condition and Results of Operations.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Certain statements in "Management's Discussion and Analysis of Financial Condition and Results of Operations" are forward-looking
statements that involve risks and uncertainties. Words such as may, will, should, would, anticipates, expects, intends, plans, believes, seeks, estimates and similar expressions identify such
forward-looking statements. The forward-looking statements contained herein are based on current expectations and entail various risks and uncertainties that could cause actual results to differ
materially from those expressed in such forward-looking statements. Factors that might cause such a difference include, among other things, those set forth under "Liquidity and Capital Resources" and
"Risk Factors" and others discussed elsewhere in this Form&nbsp;10-K. Readers are cautioned not to place undue reliance on these forward-looking statements, which reflect management's
analysis only as of the date hereof. We assume no obligation to update these forward-looking statements to reflect actual results or changes in factors or assumptions affecting forward-looking
statements, except as may be required by law. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Overview  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The semiconductor capital equipment industry is subject to significant cyclical swings in capital spending by semiconductor
manufacturers. Capital spending is influenced by demand for semiconductors and the products using them, the utilization rate and capacity of existing semiconductor manufacturing facilities and changes
in semiconductor technology, all of which are outside of our control. As a result, our revenue and gross margins fluctuate from year to year and
period to period. We typically become more efficient in manufacturing products as they mature. Our established cost structure does not vary significantly with changes in volume, which limits our
ability to reduce costs in proportion to declining sales. Therefore, we experience fluctuations in operating results and cash flows depending on our revenue as driven by the level of capital
expenditures by semiconductor manufacturers. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
December 2012, we sold to Lam Research Corporation the intellectual property rights and other assets relating to our dry strip systems product line. The purchased intellectual
property rights include, among other things, worldwide patent rights, patent applications, copyrights, industrial designs, know-how and related rights used by us in our dry strip products.
As a result of this transaction, Lam granted us a worldwide, non-exclusive, non-transferable, royalty free license to use the intellectual property rights sold by us. The
license allows us to make and sell 300 mm dry strip wafer processing equipment for semiconductor applications through September 2013. We will continue to sell dry strip systems for smaller wafers
until December 2015 and support our installed base of dry strip systems indefinitely. As a result of this continuing interest in the dry strip business, the sale of the intellectual property rights
and other assets to Lam have been reported in continuing operations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
sizable expense of building, upgrading or expanding a semiconductor fabrication facility is increasingly causing semiconductor companies to contract with foundries to manufacture
their semiconductors. In addition, consolidation and partnering within the semiconductor manufacturing industry is increasing. We expect these trends to continue to reduce the number of our potential
customers. This growing concentration of Axcelis' customers may increase pricing pressure as higher percentages of our total revenue are tied to the buying decisions of a particular customer or a
small number of customers. Our net revenue from our ten largest customers accounted for 70.6% of total revenue for the year ended December&nbsp;31, 2012 compared to, 68.6%, and 62.7% of revenue for
the years ended December&nbsp;31, 2011 and 2010, respectively. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Weak
industry conditions that began in mid-2011 continued through 2012. This resulted in a decline in our 2012 revenues as compared with 2011, with ongoing weak sales of ion
implant and dry strip systems in addition to lower aftermarket revenues, which were negatively impacted by low fab utilization rates and customers holding back on spending for consumables, spare parts
and upgrades. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>18</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>During
this period of market uncertainty, we continued to align our organization with market demands. In addition to tight control of discretionary spending, we also implemented other actions
including headcount reductions and three weeks of unpaid shutdowns. Our 2012 results also reflect efforts in recent years to lower our breakeven revenue levels to avoid significant losses in a
downturn, while continuing to invest a significant portion of our personnel and financial resources in research and development programs. Although future market conditions are difficult to predict, we
anticipate the industry will continue to experience similar conditions into 2013. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
the event that industry conditions cause the demand for our products to decline in future periods, we believe that we can align manufacturing and operating expense levels to changing
business conditions and provide sufficient liquidity to support operations. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Operating
results for the years presented are not necessarily indicative of the results that may be expected for future interim periods or years as a whole. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Critical Accounting Estimates  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Management's discussion and analysis of our financial condition and results of operations are based upon Axcelis' consolidated
financial statements, which have been prepared in accordance with accounting principles generally accepted in the United States. The preparation of these financial statements requires management to
make estimates and judgments that affect the reported amounts of assets, liabilities, revenue and expenses, and related disclosure of contingent assets and liabilities. On an on-going
basis, we evaluate our estimates and assumptions. Management's estimates are based on historical experience and on various other assumptions that are believed to be reasonable under the circumstances,
the results of which form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. Actual results may differ from these
estimates under different assumptions or conditions. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
believe the following accounting policies are critical in the portrayal of our financial condition and results of operations and require management's most significant judgments and
estimates in the preparation of our consolidated financial statements. For additional accounting policies see Notes to Consolidated Financial Statements Note&nbsp;2. Summary of Significant
Accounting Policies. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Revenue Recognition  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our revenue recognition policy involves significant judgment by management. As described below, we consider a broad array of facts and
circumstances in determining when to recognize revenue, including contractual future service obligations to the customer, the complexity of the customer's post-delivery acceptance
provisions, payment history, customer creditworthiness and the installation process. In the future, if the post-delivery acceptance provisions and installation process become more complex
or result in a materially lower rate of acceptance, we may have to revise our revenue recognition policy, which could delay the timing of revenue recognition. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
system sales transactions are made up of multiple elements, including the system itself and elements that are not delivered simultaneously with the system. These undelivered elements
might include a combination of installation services, extended warranty and support and spare parts, all of which are generally covered by a single sales price. In January 2011, we adopted the
accounting standards update for multiple deliverable revenue arrangements, as required, using the prospective method. Accordingly, this guidance is being applied to all system revenue arrangements
entered into or materially modified on or after January&nbsp;1, 2011. The adoption of the amended guidance did not change the accounting for arrangements entered into prior to January&nbsp;1,
2011. There was no material impact on our financial position, results of operations or cash flows upon adoption. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>19</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
impact of adopting this amended guidance on our results of operations has been limited to transactions involving the sale of systems. The update amended the previous guidance for
multiple-element arrangements. Pursuant to the amended guidance, our system revenue arrangements with multiple elements are divided into separate units of accounting if specified criteria are met,
including whether the delivered element has stand-alone value to the customer. If the criteria are met, then the consideration received is allocated among the separate units based on their relative
selling price, and the revenue is recognized separately for each of the separate units. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
determine selling price for each unit of accounting (element) using vendor specific objective evidence ("VSOE") or third-party evidence ("TPE"), if they exist, otherwise, we use best
estimated selling price ("BESP"). The Company generally expects that it will not be able to establish TPE due to the nature of its products, and, as such, the Company typically will determine selling
price using VSOE or BESP. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Where
required, the Company determines BESP for an individual element based on consideration of both market and Company-specific factors, including the selling price and profit margin
for similar products, the cost to produce the deliverable and the anticipated margin on that deliverable and the characteristics of the varying markets in which the deliverable is sold. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
total consideration to be received in the transaction is allocated to each element in the arrangement based upon the relative selling price of each element when compared to the
consideration received. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Systems
are not sold separately and VSOE or TPE is not available for the systems element. Therefore the selling price associated with systems is based on BESP. The allocated value for
installation in the
arrangement includes (a)&nbsp;the greater of (i)&nbsp;the relative selling price of the installation or (ii)&nbsp;the portion or the sales price that will not be received until the installation
is completed (the "retention"). The selling price of installation is based upon the fair value of the service performed, including labor, which is based upon the estimated time to complete the
installation at hourly rates, and material components, both of which are sold separately. The selling price of all other elements (extended warranty for support, spare parts, and labor) is based upon
the price charged when these elements are sold separately, or VSOE. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Product
revenue for products which have demonstrated market acceptance, is generally recognized upon shipment provided title and risk of loss has passed to the customer, evidence of an
arrangement exists, prices are contractually fixed or determinable, collection is reasonably assured through historical collection results and regular credit evaluations, and there are no
uncertainties regarding customer acceptance. Revenue from installation services is recognized at the time formal acceptance is received from the customer or, for certain customers, when both the
formal acceptance and retention payment have been received. Revenue for other elements is recognized at the time products are shipped or the related services are performed. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
generally recognize product revenue for systems which have demonstrated market acceptance at the time of shipment because the customer's post-delivery acceptance
provisions and installation process have been established to be routine, commercially inconsequential and perfunctory. While some customers accept Axcelis' standard specifications, the majority of
Axcelis' systems are designed and tailored to meet the customer's specifications, as outlined in the contract between the customer and Axcelis. To ensure that the customer's specifications are
satisfied, many customers request that new systems be tested at Axcelis' facilities prior to shipment, normally with the customer present, under conditions that substantially replicate the customer's
production environment and the customer's criteria are confirmed to have been met. We believe the risk of failure to complete a system installation is remote. Should an installation not be completed
successfully, the contractual provisions do not provide for forfeiture, refund or other purchase price concession beyond those prescribed by the provisions of the Uniform Commercial Code applicable
generally to such transactions. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>20</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;For
initial shipments of systems with new technologies or in the small number of instances where we are unsure of meeting the customer's specifications or obtaining customer acceptance
upon shipment of the system, we will defer the recognition of systems revenue and related costs until written customer acceptance of the system is obtained. This deferral period is generally within
twelve months of shipment. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Revenue
related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service
hours is recognized when the services are performed. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Impairment of Long-Lived Assets  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We record impairment losses on long-lived assets when events and circumstances indicate that these assets might not be
recoverable. Recoverability is measured by a comparison of the assets' carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the
impairment is measured based on the amount by which the carrying value exceeds its fair value. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Future
actual performance could be materially different from our current forecasts, which could impact future estimates of undiscounted cash flows and may result in the impairment of the
carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic
environment on our customer base, or a material adverse change in our relationships with significant customers. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
completed a test for recoverability due to indicators present at December&nbsp;31, 2012; specifically the carrying value of our net assets exceeded our current market
capitalization. As of December&nbsp;31, 2012, the undiscounted cash flows used in the analysis significantly exceeded the carrying value of our assets. As a result no impairment was recorded. The
undiscounted cash flows used in the analysis were derived from our long-term strategic plan. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
did not record an impairment charge for the years ended December&nbsp;31, 2011, or 2010. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><I> Accounts Receivable&#151;Allowance for Doubtful Accounts  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We record an allowance for doubtful accounts for estimated losses resulting from the inability of our customers to make required
payments. Our allowance for doubtful accounts is established based on a specific assessment of collectability of our customer accounts. If the financial condition of our customers were to deteriorate,
resulting in an impairment of their ability to make payments, additional allowances may be necessary. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Inventory&#151;Allowance for Excess and Obsolescence  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We record an allowance for estimated excess and obsolete inventory. The allowance is determined using management's assumptions of
materials usage, based on estimates of forecasted and historical demand and market conditions. If actual market conditions become less favorable than those projected by management, additional
inventory write-downs may be required. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Although
we make every effort to ensure the accuracy of our forecasts or product demand and pricing assumptions, any significant unanticipated changes in demand, pricing, or technical
developments would significantly impact the value of our inventory and our reported operating results. In the future, if we find that estimates are too optimistic and determine that inventory needs to
be written down, the Company will recognize such costs in our cost of revenue at the time of such determination. Conversely, if we find our estimates are too pessimistic and we subsequently sell
product that has previously been written down, our gross margin in that period will be favorably impacted. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>21</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
2012, we recorded a $14.5&nbsp;million increase to our inventory reserves. During the fourth quarter, as a result of industry consensus indicating that the semiconductor industry
downturn will continue into 2013, along with our internal projections, we performed a comprehensive review and analysis of our worldwide inventory levels based on historic and projected inventory
requirements for all of our products, components and parts. As a result, we recorded a $13.4&nbsp;million increase to inventory reserves in the fourth quarter of 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Product Warranty  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We generally offer a one year warranty for all of our systems, the terms and conditions of which vary depending upon the product sold.
For all systems sold, we accrue a liability for the estimated cost of standard warranty at the time of system shipment and defer the portion of systems revenue attributable to the fair value of
non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect our warranty liability include the number of installed units, historical
and anticipated product failure rates, material usage and service labor costs. We periodically assess the adequacy of our recorded liability and adjust the amount as necessary. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Share-Based Compensation  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Stock-based compensation expense is estimated as of the grant date based on the fair value of the award and is recognized as expense
over the requisite service period, which generally equals the vesting period, based on the number of awards that are expected to vest. Estimating the fair value for stock options requires judgment,
including the expected term of our stock options, volatility of our stock, expected dividends, risk-free interest rates over the expected term of the options and the expected forfeiture
rate. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
use the straight-line attribution method to recognize expense for stock-based awards such that the expense associated with awards is evenly recognized throughout the
period. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
are responsible for estimating volatility and have considered a number of factors when estimating volatility. Our method of estimating expected volatility for all stock options
granted relies on a combination of historical and implied volatility. We believe that this blended volatility results in a more accurate estimate of the grant-date fair value of employee
stock options because it more appropriately reflects the market's current expectations of future volatility. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
amount of stock-based compensation recognized is based on the value of the portion of the awards that are ultimately expected to vest. We estimate forfeitures at the time of grant
and revise them, if necessary, in subsequent periods if actual forfeitures differ from those estimates. The term "forfeitures" is distinct from "cancellations" or "expirations" and represents only the
unvested portion of the surrendered stock-based award. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
benefits of tax deductions in excess of recognized compensation cost is reported as a financing cash flow, rather than as an operating cash flow. Because the Company does not
recognize the benefit of tax deductions in excess of recognized compensation cost due to its cumulative net operating loss position, this had no impact on the Company's consolidated statement of cash
flows as of and for the years ended December&nbsp;31, 2012, 2011 and 2010. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Income Taxes  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We record income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future
tax consequences attributable to
differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax bases, and net operating loss and tax credit carryforwards. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>22</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between
financial and income tax accounting. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
establish a valuation allowance when it is more likely than not that some portion or all of the deferred tax assets will not be realized. Significant management judgment is required
in determining our provision for income taxes, the deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
evaluate the weight of all available evidence such as historical losses, projected future taxable income and the expected timing of the reversals of existing temporary differences to
determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Based
on our level of deferred tax assets as of December&nbsp;31, 2012 and our level of historical U.S. losses, we have determined that the current uncertainty regarding the
realization of these assets is sufficient to warrant the need for a full valuation allowance against our U.S. net deferred tax assets. We have also determined that a valuation allowance is required on
a portion of our foreign deferred tax assets. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
income tax expense includes the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of
the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change
to the effective tax rate. The Company recognizes accrued interest related to unrecognized tax benefits as interest expense and penalties as operating expense. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>23</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=6,SEQ=24,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=749204,FOLIO='23',FILE='DISK112:[12ZDL1.12ZDL76601]CG76601A.;6',USER='LPALLES',CD='26-FEB-2013;15:08' -->
<A NAME="page_cg76601_1_24"> </A>

<P style="font-family:times;"><FONT SIZE=2><B> Results of Operations  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The following table sets forth our results of operations as a percentage of total revenue: </FONT></P>
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<p style="font-family:times;"></FONT></P>

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<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="32pt" style="font-family:times;"></TD>
<TD WIDTH="24pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="32pt" style="font-family:times;"></TD>
<TD WIDTH="24pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="32pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years Ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Revenue:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Product</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>85.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>90.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>88.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Service</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14.3</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>10.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>11.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total revenue</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>100.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>100.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>100.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cost of revenue:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Product</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>60.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>56.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>61.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Services</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>10.6</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7.3</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total cost of revenue</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>71.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>64.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>68.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gross profit</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>28.6</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>35.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Operating expenses:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Research and development</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>19.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Sales and marketing</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>12.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>10.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>General and administrative</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>13.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>11.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gain on sale of dry strip systems assets and intellectual property</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(3.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Restructuring charges</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total operating expenses</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>43.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>33.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>36.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) from operations:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(15.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(4.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other income (expense):</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Interest income</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other, net</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(0.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1.5</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total other income (expense)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(0.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1.5</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) before income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(15.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.3</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(6.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (16.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.6</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (6.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B> Revenue  </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The following table sets forth our revenues. </FONT></P>
 <DIV style="padding:0pt;position:relative;width:54%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"150%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="150%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="41pt" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="41pt" style="font-family:times;"></TD>
<TD WIDTH="13pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="41pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=23 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(dollars in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Revenues:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Product</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>174,309</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>287,324</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(113,015</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (39.3</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>287,324</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>242,771</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>44,553</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>18.4</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:27pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>85.7</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>90.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>90.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>88.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Service</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>29,076</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>32,092</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(3,016</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (9.4</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>32,092</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>32,441</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(349</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (1.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:27pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>14.3</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>11.8</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:27pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>203,385</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>319,416</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(116,031</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (36.3</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>319,416</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>275,212</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>44,204</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>16.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
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 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>24</FONT></P>

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</FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2012 Compared with 2011</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Product  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Product revenue which includes system sales, sales of spare parts and product upgrades was $174.3&nbsp;million or 85.7% of revenue in
2012, compared with $287.3&nbsp;million, or 90.0% or revenue in 2011. The decrease in product revenue in 2012 is attributable to the continued weak semiconductor market and a related decrease in
capital spending by semiconductor manufacturers during 2012. Ongoing weak sales of our ion implant and dry strip systems combined with our customers' suspended spending for consumables, spare parts
and upgrades resulted in this decline in product revenue in 2012 compared with 2011. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Approximately
23.4% of systems revenue in 2012 was from sales of 200mm products and 76.6% was from sales of 300mm products, compared with 24.9% and 75.1% for sales of 200mm products and
300mm products in 2011, respectively. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;A
portion of our revenue from system sales is deferred until installation and other services related to future deliverables are performed. The total amount of deferred revenue at
December&nbsp;31, 2012 and 2011 was $6.9&nbsp;million and $12.3&nbsp;million, respectively. The decrease was mainly due to the decrease in systems sales in 2012 and the timing of acceptance of
deferred system sales. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Service  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Service revenue, which includes the labor component of maintenance and service contracts and fees for service hours provided by
on-site service personnel, was $29.1&nbsp;million, or 14.3% of revenue for 2012, compared with $32.1&nbsp;million, or 10.0% of revenue for 2011. Although service revenue should
increase with the expansion of the installed base of systems, it can fluctuate from period to period based on capacity utilization at customers' manufacturing facilities, which affects the need for
equipment service. The decrease during 2012 was primarily due to a decrease in fabrication utilization in the semiconductor industry during 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2011 Compared with 2010</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Revenue increased significantly in 2011 compared to 2010 as the Company benefited from improving market conditions and increased
capacity utilization at customers' manufacturing facilities during the first half of 2011. However during the second half of 2011, deterioration within the industry environment resulted in a decrease
in our revenues as compared to the first half of the year. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Product  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Product revenue was $287.3&nbsp;million or 90.0% of revenue in 2011, compared with $242.8&nbsp;million, or 88.2% of revenue in
2010. The increase in product revenue in 2011 is attributable to the strengthening of the semiconductor market and a related increase in capital spending by semiconductor manufacturers during the
first half of 2011. However, our revenues decreased during the second half of 2011 due to the weakening of the semiconductor market and the related delay in capital spending by semiconductor
manufacturers. In addition, we had delays in key penetrations in the second half of 2011. These delays were a function of poor market conditions and issues in our prioritization of new technology.
Despite this market slowdown we believe we gained market traction with our single wafer ion implant systems. During 2011, we also gained market share with our Integra dry strip products. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Approximately
24.9% of systems revenue in 2011 was from sales of 200mm products and 75.1% was from sales of 300mm products, compared with 12.8% and 87.2% for sales of 200mm products and
300mm products in 2010, respectively. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>25</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;A
portion of our revenue from system sales is deferred until installation and other services related to future deliverables are performed. The total amount of deferred revenue at
December&nbsp;31, 2011 and 2010 was $12.3&nbsp;million and $16.3&nbsp;million, respectively. The decrease was mainly due to the decrease in systems sales in the second half of 2011 and the
timing of acceptance of deferred system sales. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Service  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Service revenue was $32.1&nbsp;million, or 10.0% of revenue for 2011, compared with $32.4&nbsp;million, or 11.8% of revenue, for
2010. The slight decrease during 2011 was primarily due to a decrease in fabrication utilization in the semiconductor industry particularly during the second half of 2011. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Revenue Categories used by Management  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;As an alternative to the line item revenue categories discussed above, management also uses revenue categorizations which look at
revenue by product line (the most significant of which is ion implant) and by aftermarket, as described below. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><I> <U>2012 Compared with 2011</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Ion Implant  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Included in total revenue of $203.4&nbsp;million in 2012 is revenue from sales of ion implantation products and related service of
$156.1&nbsp;million, or 76.7% of total revenue, compared with $237.9&nbsp;million, or 74.5%, of total revenue in 2011. The dollar decrease was due to the factors discussed above for product
revenue. Annual revenue from the sale of ion implantation products and service typically averages from 70% to 80% of total revenue. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Aftermarket  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company's product revenue includes sales of spare parts and product upgrades as well as complete systems. We refer to the business
of selling spare parts and product upgrades, combined with the sale of maintenance labor and service contracts and service hours, as the "aftermarket" business. Included in total revenue of
$203.4&nbsp;million in 2012 is revenue from our aftermarket business of $124.1&nbsp;million, compared to $147.6&nbsp;million for 2011. Aftermarket revenue generally increases with expansion of
the installed base of systems but can fluctuate from period to period based on capacity utilization at customers' manufacturing facilities which affects the sale of spare parts and demand for
equipment service. The decrease in aftermarket revenue in 2012 compared to 2011 was due to a decrease in fabrication utilization in the semiconductor industry during 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2011 Compared with 2010</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Ion Implant  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Included in total revenue of $319.4&nbsp;million in 2011 is revenue from sales of ion implantation products and related service of
$237.9&nbsp;million, or 74.5% of total revenue, compared with $232.4&nbsp;million, or 84.4%, of total revenue in 2010. The dollar increase was due to the factors discussed above for product
revenue. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Aftermarket  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Included in total revenue of $319.4&nbsp;million in 2011 is revenue from our aftermarket business of $147.6&nbsp;million, compared
to $142.2&nbsp;million for 2010. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>26</FONT></P>

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</FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Gross Profit / Gross Margin  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The following table sets forth our gross profit. </FONT></P>
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<p style="font-family:times;"></FONT></P>

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<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="42pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="47pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="28pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="47pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="42pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="42pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=23 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(dollars in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gross Profit:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Product</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>50,716</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>106,083</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(55,367</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (52.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>106,083</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>74,724</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31,359</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>42.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:27pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Product gross margin</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>36.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>36.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>30.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Service</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,455</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>8,654</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,199</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (13.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>8,654</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>11,114</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(2,460</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (22.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:27pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Service gross margin</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>25.6</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>34.3</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:36pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total gross profit</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>58,171</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>114,737</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(56,566</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (49.3</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>114,737</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>85,838</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>28,899</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>33.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:36pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gross margin</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>28.6</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>35.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>35.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><I> <U>2012 Compared with 2011</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Product  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Gross margin from product revenue was 29.1% for the twelve months ended December&nbsp;31, 2012, compared to 36.9% for the twelve
months ended December&nbsp;31, 2011, a decrease of 7.8&nbsp;percentage points. Gross profit decreased by 7.7&nbsp;percentage points due to a higher excess inventory provision of
$13.4&nbsp;million recorded during the fourth quarter of 2012, as a result of our comprehensive review of our worldwide inventory levels. Lower systems sales volumes and the related unfavorable
absorption of fixed overhead costs also contributed to the reduction in gross profit by 9.0&nbsp;percentage points. These decreases were partially offset by an 8.9&nbsp;percentage point increase
in gross profit resulting from a higher margin mix of parts and upgrade revenue. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Service  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Gross margin from service revenue was 25.6% for the twelve months ended December&nbsp;31, 2012, compared to 27.0% for the twelve
months ended December&nbsp;31, 2011. The decrease in gross profit is attributable to changes in the mix of service contracts and the unfavorable absorption of fixed service costs. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2011 Compared with 2010</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Product  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Gross profit from product revenue was 36.9% for the twelve months ended December&nbsp;31, 2011, compared to 30.8% for the twelve
months ended December&nbsp;31, 2010. The increase in gross profit of 6.1&nbsp;percentage points is due primarily to a favorable mix of products at higher margins and leveraging our
on-going efforts to drive labor and material productivity through efficient use of labor and our global sourcing efforts. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> Service  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Gross profit from service revenue was 27.0% for the twelve months ended December&nbsp;31, 2011, compared to 34.3% for the twelve
months ended December&nbsp;31, 2010. The decrease in gross profit is attributable to changes in the mix of service contracts and the unfavorable absorption of fixed service costs. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>27</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=1,SEQ=28,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=623267,FOLIO='27',FILE='DISK112:[12ZDL1.12ZDL76601]CK76601A.;16',USER='LPALLES',CD='26-FEB-2013;15:11' -->
<A NAME="page_ck76601_1_28"> </A>

<P style="font-family:times;"><FONT SIZE=2><B> Operating Expenses  </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The following table sets forth our operating expenses: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:54%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"150%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="150%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="41pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="28pt" style="font-family:times;"></TD>
<TD WIDTH="15pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="41pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="35pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="23pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=23 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(dollars in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Research and development</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>40,401</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>47,176</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(6,775</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (14.4</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>47,176</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>39,524</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,652</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>19.4</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>19.9</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>14.8</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>14.8</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>14.4</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Sales and marketing</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>25,889</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>29,255</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(3,366</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (11.5</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>29,255</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>27,549</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,706</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>12.7</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>9.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>9.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>General and administrative</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>26,554</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>31,174</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(4,620</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (14.8</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>31,174</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>32,132</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(958</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (3.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>13.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>9.8</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>9.8</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>11.7</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gain on sale of dry strip assets and intellectual property</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(7,904</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(7, 904</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2> (3.9</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Restructuring charges</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,169</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,169</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:18pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.0</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total operating expenses</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>89,109</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107,605</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(18,496</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>17.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107,605</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>99,205</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,400</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8.5</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:27pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><I>Percentage of revenues</I></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>43.8</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>33.7</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>33.7</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>36.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our operating expenses consist primarily of personnel costs, including salaries, commissions, bonuses, share-based compensation and related
benefits and taxes; project material costs related to the design and development of new products and enhancement of existing products; and professional fees, travel and depreciation expenses.
Personnel costs are our largest expense, representing $52.5&nbsp;million, or 56.5% of our total operating expenses, excluding the gain on sale of the dry strip assets and intellectual property of
$7.9&nbsp;million and restructuring charges of $4.2&nbsp;million, for the year ended December&nbsp;31, 2012; $62.5&nbsp;million, or 58.1%, of our total operating expenses for the year ended
December&nbsp;31, 2011; and $56.9&nbsp;million, or 57.4%, of our total operating expenses for the year ended December&nbsp;31, 2010. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
2012, we continued to align our organization with market demands and tightened control over our discretionary spending. As a result of the current economic conditions in the
semiconductor industry, we took a number of actions during 2012 to reduce our operating expenses and manage our cash. These actions included a reduction in our global workforce, focusing our R&amp;D
spending on critical programs and asking our employees to take three weeks of unpaid shutdowns. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
impact of these actions and our operating results are discussed below. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Research and Development  </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:54%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"150%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="150%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="37pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="31pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="26pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=23 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(dollars in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Research and development</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>40,401</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>47,176</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(6,775</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (14.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>47,176</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>39,524</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,652</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>19.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><I>Percentage of revenues</I></FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>19.9</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
ability to remain competitive depends largely on continuously developing innovative technology, with new and enhanced features and systems and introducing them at competitive prices
on a timely basis. Accordingly, based on our strategic plan, we establish annual R&amp;D budgets to fund programs that we expect will drive competitive advantages. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>28</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<P style="font-family:times;"><FONT SIZE=2><A
NAME="page_co76601_1_29"> </A>


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 </FONT></P>

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<P style="font-family:times;"><FONT SIZE=2><I> <U>2012 Compared with 2011</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Research and development expense was $40.4&nbsp;million in 2012, a decrease of approximately $6.8&nbsp;million, or 14.4%, compared
with $47.2&nbsp;million in 2011. The decrease was primarily due to the reduction in payroll costs of $2.4&nbsp;million as a result of lowering our headcount through reductions in force and the
cost savings realized by three weeks of unpaid furloughs taken by our employees. As we focused our R&amp;D spend on critical programs, consulting and project material costs decreased by
$2.6&nbsp;million and depreciation expense for internal use assets used as demonstration and/or test systems decreased by $1.4&nbsp;million. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2011 Compared with 2010</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Research and development expense was $47.2&nbsp;million in 2011, an increase of $7.7&nbsp;million, or 19.4%, compared with
$39.5&nbsp;million in 2010. The increase was primarily due to higher payroll costs of $3.8&nbsp;million as a result of an increase in headcount. Depreciation costs for internal use assets used as
demonstration and/or test systems of $1.8&nbsp;million, increased project material costs of $1.1&nbsp;million, and increased professional fee expenses $1.0&nbsp;million also contributed. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> Sales and Marketing  </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:54%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="31pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="26pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=23 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(dollars in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Sales and marketing</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>25,889</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,255</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(3,366</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (11.5</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,255</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27,549</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,706</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>12.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9.2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>10.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
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 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
sales and marketing expenses result primarily from the sale of our equipment and services through our direct sales force. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2012 Compared with 2011</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Sales and marketing expense was $25.9&nbsp;million in 2012, a decrease of $3.4&nbsp;million, or 11.5%, compared with
$29.3&nbsp;million in 2011. The decrease was primarily due to the reduction in payroll costs of $5.0&nbsp;million as a result of lowering our headcount through reductions in force and the cost
savings realized by three weeks of unpaid furloughs taken by our employees. In addition, freight expenses decreased by $0.5&nbsp;million due to lower shipments and travel costs decreased by
$0.8&nbsp;million due to reduced travel. The decreases in expenses were partially offset by a one-time marketing expense of $2.1&nbsp;million associated with our evaluation programs
and an increase in consulting expenses of $0.4&nbsp;million. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2011 Compared with 2010</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Sales and marketing expense was $29.3&nbsp;million in 2011, an increase of $1.7&nbsp;million, or 6.2%, compared with
$27.5&nbsp;million in 2010. The increase was driven primarily by increased payroll costs of $2.5&nbsp;million, increased travel costs of $0.4&nbsp;million and increased freight costs of
$0.1&nbsp;million due to increased system shipments during the first half of 2011, offset by a decrease in supplies and marketing costs of $1.6&nbsp;million. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>29</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<P style="font-family:times;"><FONT SIZE=2><B> General and Administrative  </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:54%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="31pt" style="font-family:times;"></TD>
<TD WIDTH="16pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="34pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="26pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Period-to-<BR>
Period<BR>
Change </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>$ </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>% </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=23 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(dollars in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>General and administrative</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>26,554</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31,174</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(4,620</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (14.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31,174</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>32,132</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(958</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2> (3.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Percentage of revenues</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>13.1</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>11.7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><I> <U>2012 Compared with 2011</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;General and administrative expense was $26.6&nbsp;million in 2012, a decrease of $4.6&nbsp;million, or 14.8% compared with
$31.2&nbsp;million in 2011. The decrease was due to the reduction in payroll costs of $2.6&nbsp;million as a result of lowering our headcount through reductions in force and the cost savings
realized by three weeks of unpaid furloughs taken by our employees, lower facility related costs of $1.1&nbsp;million, which were partially due to the three weeks of plant shutdowns, lower
professional fees of $0.3&nbsp;million and lower consulting costs of $0.6&nbsp;million. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2011 Compared with 2010</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;General and administrative expense was $31.2&nbsp;million in 2011, a decrease of $1.0&nbsp;million, or 3.0% compared with
$32.1&nbsp;million in 2010. The lower general and administrative expense in 2011 was driven primarily by decreased incentive compensation expense of $1.9&nbsp;million and professional fees of
$1.0&nbsp;million. The decrease was partially offset by increased salaries and related expenses of $1.3&nbsp;million, which was primarily comprised of increases in salary expense of
$0.3&nbsp;million, stock compensation expense of $0.3&nbsp;million, fringe benefit expense of $0.4&nbsp;million and separation costs of $0.3&nbsp;million associated with the retirement of a
former executive of the Company. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Gain on Sale of Dry Strip Assets and Intellectual Property  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;On December&nbsp;3, 2012, we entered into a strategic collaboration agreement with Lam. As part of the agreement, we sold our dry
strip system assets and intellectual property to Lam Research. The purchase price was $10.7&nbsp;million, of which $2.0&nbsp;million is contingent upon reaching certain milestones. The
$7.9&nbsp;million gain on sale of dry strip assets and intellectual property is
comprised of the $8.7&nbsp;million in proceeds received for the sale, offset by approximately $0.8&nbsp;million of product and material costs related to the lab system and other components
purchased by Lam. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Restructuring  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;During 2012, we implemented a reduction in force to improve the focus of our operations, control costs to achieve future profitability
and conserve cash. We recorded a restructuring expense for severance and related costs of $4.2&nbsp;million, which included a $0.1&nbsp;million non-cash charge related to the
modification of a share-based award during twelve months ended December&nbsp;31, 2012. Approximately $0.5&nbsp;million of the restructuring costs were associated with the sale of the dry strip
assets and intellectual property. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Other Income (Expense)  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2012 Compared with 2011</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Other expense was $1.5&nbsp;million for the twelve months ended December&nbsp;31, 2012 compared to other income of
$0.3&nbsp;million for the twelve months ended December&nbsp;31, 2011. Other income (expense) consists primarily of foreign exchange gains and losses attributable to fluctuations of the U.S. dollar </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>30</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<P style="font-family:times;"><FONT SIZE=2>against
the local currencies of certain of the countries in which we operate, interest earned on our invested cash balances and bank fees associated with maintaining our credit facility. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;During
the years ended December&nbsp;31, 2012 and 2011, we had no significant off-balance-sheet risk such as foreign exchange contracts, option contracts or other foreign
hedging arrangements </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><I> <U>2011 Compared with 2010</U>  </I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Other income was $0.3&nbsp;million for the twelve months ended December&nbsp;31, 2011 compared to other expense of
$3.9&nbsp;million for the twelve months ended December&nbsp;31, 2010. For the year ended December&nbsp;31, 2011 the Company incurred $1.2&nbsp;million of foreign exchange gains. For the year
ended December&nbsp;31, 2010 the Company incurred $1.9&nbsp;million of foreign exchange losses. Included in foreign exchange losses in 2010 are $0.3&nbsp;million of foreign exchange losses
relating to currency hedging activities. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Income Taxes  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Income tax expense was $1.6&nbsp;million, $2.4&nbsp;million and $0.3&nbsp;million for the twelve months ended December&nbsp;31,
2012, 2011 and 2010, respectively. Our income tax expense is due primarily to operating results of foreign entities in jurisdictions in Europe and Asia, where we earn taxable income. We have
significant net operating loss carryforwards in the United States and certain European jurisdictions, and, as a result, we do not currently pay significant income taxes in those jurisdictions.
Additionally, we do not recognize the tax benefit for such losses in the United States and certain European taxing jurisdictions. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;During
2012, we settled a tax dispute with a foreign jurisdiction for an amount, $0.9&nbsp;million, equal to the charge we had previously recorded in 2011 related to an uncertain tax
position. The settlement did not have an impact on our results of operations or cash flows for the twelve months ended December&nbsp;31, 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;During
2010, the Company performed an evaluation of the deferred tax assets of certain of our foreign subsidiaries for which we had previously established a valuation allowance. Based on
the subsidiaries' recent and expected ability to generate taxable income, the Company reduced the subsidiaries' corresponding valuation allowance and recognized a tax benefit of $1.3&nbsp;million. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Liquidity and Capital Resources  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our liquidity is affected by many factors. Some of these relate specifically to the operations of our business, for example, the rate
of sale of our product lines, and others relate to the uncertainties of global economies, including the availability of credit and the condition of the overall semiconductor equipment industry. Our
established cost structure does not vary significantly with changes in volume, which limits our ability to reduce costs in proportion to declining sales. We have tried to reduce operating expense to
achieve profitability towards the lower end of our quarterly revenue swings. Therefore, we experience fluctuations in operating results and cash flows depending on our revenue as driven by the level
of capital expenditures by semiconductor manufacturers. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Although
the Company generated operating cash in the third and fourth quarters of 2012, in the full year 2012, $10.6&nbsp;million of cash was used to support operating activities. Cash
generation in the last two quarters was due to tight management of material purchases. This compares to cash generated by operations of $3.5&nbsp;million in 2011. The $14.1&nbsp;million increase
in cash used by operations in 2012 was predominately driven by the Company's loss from operations excluding non-cash charges for depreciation and amortization and stock based compensation
expense. The $8.7&nbsp;million in cash received in the Lam transaction in December 2012, partially offset the use of cash in operations, resulting in cash and cash equivalents at December&nbsp;31,
2012 of $45.0&nbsp;million, compared to $46.9&nbsp;million at </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>31</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<P style="font-family:times;"><FONT SIZE=2>December&nbsp;31,
2011. Working capital at December&nbsp;31, 2012 was $145.4&nbsp;million. Approximately $15.0&nbsp;million of cash was located in foreign jurisdictions as of
December&nbsp;31, 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Capital
expenditures were $0.6&nbsp;million and $2.1&nbsp;million for the years ended December&nbsp;31, 2012 and 2011, respectively. We have no significant capital projects planned
for 2013 and total capital expenditures for 2013 are projected to remain consistent with 2012. Future capital expenditures beyond 2013 will depend on a number of factors, including the timing and rate
of expansion of our business and our ability to generate cash to fund them. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
have outstanding standby letters of credit, statutory liability deposits and surety bonds in the amount of $5.5&nbsp;million to support certain operating programs, workers'
compensation insurance, and certain value added tax claims in Europe, of which $0.1&nbsp;million at December&nbsp;31, 2012 was supported by cash pledged as collateral. The pledged cash is
reflected as current restricted cash on the consolidated balance sheet. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
following represents our commercial commitments as of December&nbsp;31, 2012 (in thousands): </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="47pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Amount of<BR>
Commitment<BR>
Expiration by Period </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH NOWRAP  ALIGN="LEFT" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:117pt;"><FONT SIZE=1><B>Other Commercial Commitments

<!-- COMMAND=ADD_SCROPPEDRULE,117pt -->

 </B></FONT></DIV></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Total </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2013 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2014-2015 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Surety bonds</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,816</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,164</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>652</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Standby letters of credit</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3,575</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3,575</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Statutory liability deposits</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>106</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>106</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5,497</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>4,845</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>652</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
following represents our contractual obligations as of December&nbsp;31, 2012 (in thousands): </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="47pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="47pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Payments Due by Period </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH NOWRAP  ALIGN="LEFT" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:85pt;"><FONT SIZE=1><B>Contractual Obligations

<!-- COMMAND=ADD_SCROPPEDRULE,85pt -->

 </B></FONT></DIV></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Total </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2013 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2014-2015 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2016-2017 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Purchase order commitments</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14,879</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14,879</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Operating leases</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6,143</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3,057</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,862</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>224</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>21,022</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>17,936</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,862</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>224</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
have no off-balance sheet arrangements at December&nbsp;31, 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
have net operating loss and tax credit carryforwards, the tax effect of which aggregate $118.0&nbsp;million at December&nbsp;31, 2012. These carryforwards, which expire
principally between 2013 and 2032, are available to reduce future income tax liabilities in the United States and certain foreign jurisdictions. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;It
is Company policy to provide taxes for the total anticipated tax impact of the undistributed earnings of our wholly-owned foreign subsidiaries' as such earnings are not expected to be
reinvested indefinitely. The Company anticipates that US tax resulting from remitting such earnings will be
off-set by net operating loss or credit carryforwards to the extent available. In addition, the Company does not anticipate incurring a foreign withholding tax on remitting such earnings
since it does not intend to remit the earnings as dividends. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our
revolving credit facility with a bank provides for borrowings up to $30&nbsp;million based primarily on accounts receivable. The facility has certain financial covenants requiring
us to maintain minimum levels of operating results and liquidity. The agreement will terminate on April&nbsp;10, 2015. We use the facility to support letters of credit and for short term borrowing
as needed. At December&nbsp;31, 2012, our available borrowing capacity under the credit facility was $17.3&nbsp;million and we were compliant with all </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>32</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>covenants
of the loan agreement. There were no borrowings against this facility during the twelve months ended December&nbsp;31, 2012. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
believe that based on our current market, revenue, expense and cash flow forecasts, our existing cash and cash equivalents will be sufficient to satisfy our anticipated cash
requirements for the short and long-term. In the event that demand for our products declines in future periods, we believe we can align manufacturing and operating spending levels to the
changing business conditions and provide sufficient liquidity to support operations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Related-Party Transactions  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;There are no significant related-party transactions that require disclosure in the consolidated financial statements for the year ended
December&nbsp;31, 2012, or in this Annual Report on Form&nbsp;10-K. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Recent Accounting Pronouncements  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;A discussion of recent accounting pronouncements is included in Note&nbsp;2 to the consolidated financial statements for the year
ended December&nbsp;31, 2012 included in this Annual Report on Form&nbsp;10-K.  </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="co76601_item_7a._quantitative_and_qual__ite02650"> </A>
<A NAME="toc_co76601_1"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;7A.&nbsp;&nbsp;&nbsp;&nbsp;Quantitative and Qualitative Disclosures about Market Risk.    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> Interest Rate Sensitivity  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our exposure to market risk for changes in interest rates relates primarily to our investment portfolio, which consists entirely of
cash-equivalents at December&nbsp;31, 2012. The primary objective of our investment activities is to preserve principal while maximizing yields without significantly increasing risk.
This is accomplished by investing in marketable high investment grade securities. We do not use derivative financial instruments in managing our investment portfolio. Due to the nature of our
investments, we do not expect our operating results or cash flows to be affected to any significant degree by any change in market interest rates. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> Foreign Currency Exchange Risk  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Substantially all of our sales are billed in U.S. dollars, thereby reducing the impact of fluctuations in foreign exchange rates on our
results. Operating margins of certain foreign operations can fluctuate with changes in foreign exchange rates to the extent revenues are billed in U.S. dollars and operating expenses are incurred in
the local functional currency. During the years ended December&nbsp;31, 2012 and 2011, approximately 29% and 21% of our revenue were derived from foreign operations with this inherent risk. In
addition, at both December&nbsp;31, 2012 and 2011, our operations outside of the United States accounted for approximately 42% and 37% of our total assets, respectively, the majority of which was
denominated in currencies other than the U.S. dollar.  </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="co76601_item_8._financial_statements_and_supplementary_data."> </A>
<A NAME="toc_co76601_2"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;8.&nbsp;&nbsp;&nbsp;&nbsp;Financial Statements and Supplementary Data.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Response to this Item is submitted as a separate section of this report immediately following Item&nbsp;15. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="co76601_item_9._changes_in_and_disagre__ite03557"> </A>
<A NAME="toc_co76601_3"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;9.&nbsp;&nbsp;&nbsp;&nbsp;Changes in and Disagreements with Accountants on Accounting and Financial Disclosure.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;None. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>33</FONT></P>

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<A NAME="page_co76601_1_34"> </A>
<BR>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="co76601_item_9a._controls_and_procedures."> </A>
<A NAME="toc_co76601_4"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;9A.&nbsp;&nbsp;&nbsp;&nbsp;Controls and Procedures.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Evaluation of Disclosure Controls and Procedures.  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Our management, with the participation of our principal executive officer and principal financial officer, has evaluated the
effectiveness of our disclosure controls and procedures (as defined in Rule&nbsp;13a-15(e) under the Securities Exchange Act of 1934, as amended (the "Exchange Act") as of the end of the
period covered by this annual report (the "Evaluation Date"). Based on this evaluation, our principal executive officer and principal financial officer concluded that, as of the Evaluation Date, these
disclosure controls and procedures are effective. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>34</FONT></P>

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NAME="page_cq76601_1_35"> </A>


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<P style="font-family:times;"><FONT SIZE=2><B> Internal Control over Financial Reporting  </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_management_s_annual_report_on___man02929"> </A>
<A NAME="toc_cq76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Management's Annual Report on Internal Control over Financial Reporting    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Management is responsible for establishing and maintaining adequate internal control over financial reporting, as such term is defined
in Rule&nbsp;13a-15(f) under the Exchange Act. Because of its inherent limitations, internal control over financial reporting may not prevent or detect all misstatements. A control
system, no matter how well designed and operated, can provide only reasonable assurance with respect to financial statement preparation and presentation. Projections of any evaluation of effectiveness
to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Management
assessed the effectiveness of our internal control over financial reporting as of December&nbsp;31, 2012. In making this assessment, management used the criteria set forth
in the Committee of Sponsoring Organizations of the Treadway Commission (COSO) Internal Control&#151;Integrated Framework. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Based
on this assessment, management has concluded that, as of December&nbsp;31, 2012, our internal control over financial reporting is effective based on those criteria. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
independent registered public accounting firm of Ernst&nbsp;&amp; Young&nbsp;LLP, as auditors of our consolidated financial statements, has issued an attestation report on its
assessment of our internal control over financial reporting. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>35</FONT></P>

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<A NAME="page_cq76601_1_36"> </A>
<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_report_of_independent___cq702295"> </A>
<A NAME="toc_cq76601_2"> </A>
<BR></FONT><FONT SIZE=2><B>  Report of Independent Registered Public Accounting Firm    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>The
Board of Directors and Stockholders of Axcelis Technologies,&nbsp;Inc. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
have audited Axcelis Technologies,&nbsp;Inc.'s internal control over financial reporting as of December&nbsp;31, 2012, based on criteria established in Internal
Control&#151;Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission (the COSO criteria). Axcelis Technologies,&nbsp;Inc.'s management is
responsible for maintaining effective internal control over financial reporting, and for its assessment of the effectiveness of internal control over financial reporting included in the accompanying
Management's Annual Report on Internal Control over Financial Reporting. Our responsibility is to express an opinion on the Company's internal control over financial reporting based on our audit. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
conducted our audit in accordance with the standards of the Public Company Accounting Oversight Board (United States). Those standards require that we plan and perform the audit to
obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all material respects. Our audit included obtaining an understanding of internal control
over financial reporting, assessing the risk that a material weakness exists, testing and evaluating the design and operating effectiveness of internal control based on the assessed risk, and
performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a reasonable basis for our opinion. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;A
company's internal control over financial reporting is a process designed to provide reasonable assurance regarding the reliability of financial reporting and the preparation of
financial statements for external purposes in accordance with generally accepted accounting principles. A company's internal control over financial reporting includes those policies and procedures
that (1)&nbsp;pertain to the maintenance of records that, in reasonable detail, accurately and fairly reflect the transactions and dispositions of the assets of the company; (2)&nbsp;provide
reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and
expenditures of the company are being made only in accordance with authorizations of management and directors of the company; and (3)&nbsp;provide reasonable assurance regarding prevention or timely
detection of unauthorized acquisition, use or disposition of the company's assets that could have a material effect on the financial statements. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Because
of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, projections of any evaluation of effectiveness to future
periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
our opinion, Axcelis Technologies,&nbsp;Inc. maintained, in all material respects, effective internal control over financial reporting as of December&nbsp;31, 2012, based on the
COSO criteria. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States), the consolidated balance sheets of Axcelis
Technologies,&nbsp;Inc. as of December&nbsp;31, 2012 and 2011, and the related consolidated statements of operations, comprehensive income, stockholders' equity, and cash flows for each of the
three years in the period ended December&nbsp;31, 2012 of Axcelis Technologies,&nbsp;Inc. and our report dated March&nbsp;1, 2013 expressed an unqualified opinion thereon. </FONT></P>

<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>

<P style="font-family:times;"><FONT SIZE=2>/s/
Ernst&nbsp;&amp; Young&nbsp;LLP </FONT></P>

</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>Boston,
Massachusetts<BR>
March&nbsp;1, 2013 </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>36</FONT></P>

<HR NOSHADE>
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<P style="font-family:times;"><FONT SIZE=2><B> Changes in Internal Control over Financial Reporting  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;There was no change in our internal control over financial reporting (as defined in Rule&nbsp;13a-15(f) under the
Exchange Act) identified in connection with the evaluation of our internal control that occurred during our fourth quarter that has materially affected, or is reasonably likely to materially affect,
our internal control over financial reporting.  </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_item_9b._other_information."> </A>
<A NAME="toc_cq76601_3"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;9B.&nbsp;&nbsp;&nbsp;&nbsp;Other Information.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company entered into Amended and Restated Indemnification Agreements dated February&nbsp;28, 2012 with each of its current
directors and officers to conform to an updated form of Indemnification Agreement. The previous form of Indemnification Agreement was adopted in June, 2000 and the Board determined that certain
provisions required clarification or enhancement in light of court decisions interpreting indemnification agreements during the period since the previous form was adopted. These
amendments:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>add language providing for a neutral decision-maker in the event of a change in control and certain presumptions
benefiting the director or officer; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>clarify and elaborate on a number of definitions and other terms; </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>eliminate the Company's obligation to maintain an escrow account for the benefit of the indemnitees. </FONT></DD></DL>
</UL>
<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_part_iii"> </A>
<A NAME="toc_cq76601_4"> </A>
<BR></FONT><FONT SIZE=2><B>  PART III    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_item_10._directors,_executive___ite02317"> </A>
<A NAME="toc_cq76601_5"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;10.&nbsp;&nbsp;&nbsp;&nbsp;Directors, Executive Officers and Corporate Governance.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;A portion of the information required by Item&nbsp;10 of Form&nbsp;10-K is incorporated by reference from the
information responsive thereto contained in the sections in Axcelis Proxy Statement for the Annual Meeting of Stockholders to be held May&nbsp;14, 2013 (the "Proxy Statement")
captioned:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Proposal 1: Election of Directors," </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Corporate Governance," and </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Other Matters&#151;Section&nbsp;16(a) Beneficial Ownership Reporting Compliance." </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
remainder of such information is set forth under the heading "Executive Officers of the Registrant" at the end of Item&nbsp;1 in Part&nbsp;I of this report. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_item_11._executive_compensation."> </A>
<A NAME="toc_cq76601_6"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;11.&nbsp;&nbsp;&nbsp;&nbsp;Executive Compensation.    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The information required by Item&nbsp;11 of Form&nbsp;10-K is incorporated by reference from the information responsive
thereto contained in the sections in the Proxy Statement captioned:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Executive Compensation," and </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Other Matters&#151;Compensation Committee Interlocks and Insider Participation."  </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_item_12._security_ownership_of__ite03985"> </A>
<A NAME="toc_cq76601_7"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;12.&nbsp;&nbsp;&nbsp;&nbsp;Security Ownership of Certain Beneficial Owners and Management and Related Stockholder Matters.    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;A portion of the information required by Item&nbsp;12 of Form&nbsp;10-K is incorporated by reference from the
information responsive thereto contained in the sections in the Proxy Statement captioned:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Share Ownership of 5% Stockholders," </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Share Ownership of Directors and Executive Officers," and </FONT></DD></DL>
</UL>
<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>37</FONT></P>

<HR NOSHADE>
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<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Proposal 3: Approval of Amendment to the 2012 Equity Incentive Plan&#151;Current Equity Compensation Plan
Information."  </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_item_13._certain_relationships__ite03069"> </A>
<A NAME="toc_cq76601_8"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;13.&nbsp;&nbsp;&nbsp;&nbsp;Certain Relationships and Related Transactions and Director Independence.    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The information required by Item&nbsp;13 of Form&nbsp;10-K is incorporated by reference from the information responsive
thereto contained in the sections in the Proxy Statement captioned:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Executive Compensation," </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Corporate Governance&#151;Board of Directors Independence and Meetings," and </FONT> <FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>"Corporate Governance&#151;Certain Relationships and Related Transactions."  </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="cq76601_item_14._principal_accounting_fees_and_services"> </A>
<A NAME="toc_cq76601_9"> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;14.&nbsp;&nbsp;&nbsp;&nbsp;Principal Accounting Fees and Services    <BR>  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The information required by Item&nbsp;14 of Form&nbsp;10-K is incorporated by reference from the information responsive
thereto contained in the section captioned "Proposal 2: Ratification of the Appointment of our Independent Registered Public Accounting Firm" in the Proxy Statement. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>38</FONT></P>

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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fa76601_part_iv"> </A>
<BR></FONT><FONT SIZE=2><B>  PART IV    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="fa76601_item_15._exhibits,_financial_statement_schedules."> </A></FONT> <FONT SIZE=2><B>  Item&nbsp;15.&nbsp;&nbsp;&nbsp;&nbsp;Exhibits, Financial Statement Schedules.    <BR>    </B></FONT></P>

<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(a)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>The
following documents are filed as part of this Report:
<BR><BR></FONT>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>1)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Financial
Statements: </FONT></DD></DL>
</DD></DL>

<P style="font-family:times;"><FONT SIZE=2><A
NAME="FA76601_TOC"></A> </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Report of Independent Registered Public Accounting Firm</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>F-1</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Consolidated Statements of Operations&#151;For the years ended December&nbsp;31, 2012, 2011 and 2010</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>F-2</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Consolidated Statements of Comprehensive Income&#151;For the years ended December&nbsp;31, 2012, 2011 and 2010</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>F-3</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Consolidated Balance Sheets&#151;December&nbsp;31, 2012 and 2011</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>F-4</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Consolidated Statements of Stockholders' Equity&#151;For the years ended December&nbsp;31, 2012, 2011 and 2010</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>F-5</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Consolidated Statements of Cash Flows&#151;For the years ended December&nbsp;31, 2012, 2011 and 2010</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>F-6</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Notes to Consolidated Financial Statements</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>F-7</FONT></TD>
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<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>2)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Financial
Statement Schedules: </FONT></DD></DL>
</UL>
<UL>
<UL>

<P style="font-family:times;"><FONT SIZE=2>Schedule&nbsp;II&#151;Valuation
and Qualifying Accounts for the years ended December&nbsp;31, 2012, 2011 and 2010 </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>All
other schedules for which provision is made in the applicable regulation of the Securities and Exchange Commission are not required under the related instructions or are inapplicable, and
therefore have been omitted.  </FONT></P>

</UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>3)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Exhibits
</FONT></DD></DL>
</UL>
<UL>
<UL>

<P style="font-family:times;"><FONT SIZE=2>The
exhibits filed as part of this Form&nbsp;10-K are listed on the Exhibit Index immediately preceding such Exhibits, which Exhibit Index is incorporated herein by reference. </FONT></P>

</UL>
</UL>
<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>39</FONT></P>

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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fb76601_report_of_independent___fb702283"> </A>
<A NAME="toc_fb76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Report of Independent Registered Public Accounting Firm    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>The
Board of Directors and Stockholders of Axcelis Technologies,&nbsp;Inc. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
have audited the accompanying consolidated balance sheets of Axcelis Technologies,&nbsp;Inc. (the "Company") as of December&nbsp;31, 2012 and 2011, and the related consolidated
statements of operations, comprehensive income, stockholders' equity, and cash flows for each of the three years in the period ended December&nbsp;31, 2012. Our audits also included the financial
statement schedule listed in the Index at Item&nbsp;15(a). These financial statements and schedule are the responsibility of the Company's management. Our responsibility is to express an opinion on
these financial statements and schedule based on our audits. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
conducted our audits in accordance with the standards of the Public Company Accounting Oversight Board (United States). Those standards require that we plan and perform the audit to
obtain reasonable assurance about whether the financial statements are free of material misstatement. An audit includes examining, on a test basis, evidence supporting the amounts and disclosures in
the financial statements. An audit also includes assessing the accounting principles used and significant estimates made by management, as well as evaluating the overall financial statement
presentation. We believe that our audits provide a reasonable basis for our opinion. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
our opinion, the financial statements referred to above present fairly, in all material respects, the consolidated financial position of Axcelis Technologies,&nbsp;Inc. at
December&nbsp;31, 2012 and 2011, and the
consolidated results of its operations and its cash flows for each of the three years in the period ended December&nbsp;31, 2012, in conformity with U.S. generally accepted accounting principles.
Also, in our opinion, the related financial statement schedule, when considered in relation to the basic financial statements taken as a whole, presents fairly in all material respects to the
information set forth therein. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We
also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States), Axcelis Technologies,&nbsp;Inc.'s internal control over
financial reporting as of December&nbsp;31, 2012, based on criteria established in Internal Control&#151;Integrated Framework issued by the Committee of Sponsoring Organizations of the
Treadway Commission and our report dated March&nbsp;1, 2013 expressed an unqualified opinion thereon. </FONT></P>

<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>

<P style="font-family:times;"><FONT SIZE=2>/s/
Ernst&nbsp;&amp; Young&nbsp;LLP </FONT></P>

</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>Boston,
Massachusetts<BR>
March&nbsp;1, 2013 </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-1</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fc76601_axcelis_technologies,_inc._con__axc04029"> </A>
<A NAME="toc_fc76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Consolidated Statements of Operations<BR>  (In thousands, except per share amounts)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TR><!-- TABLE COLUMN WIDTHS SET -->
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<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Twelve months ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Revenue</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Product</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>174,309</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>287,324</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>242,771</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Services</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,076</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>32,092</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>32,441</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total revenue</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>203,385</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>319,416</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>275,212</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cost of revenue</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Product</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>123,593</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>181,241</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>168,047</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Services</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>21,621</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>23,438</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>21,327</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total cost of revenue</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>145,214</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>204,679</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>189,374</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gross profit</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>58,171</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>114,737</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>85,838</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Operating expenses</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Research and development</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>40,401</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>47,176</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>39,524</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Sales and marketing</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>25,889</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,255</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27,549</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>General and administrative</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>26,554</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31,174</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>32,132</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gain on sale of dry strip assets and intellectual property</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(7,904</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Restructuring charges</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>4,169</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total operating expenses</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>89,109</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>107,605</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>99,205</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) from operations</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(30,938</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,132</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(13,367</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other income (expense)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Interest income</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>45</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>42</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>96</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other, net</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,495</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>297</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(3,990</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total other income (expense)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,450</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>339</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(3,894</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) before income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(32,388</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,471</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(17,261</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2><BR>
1,646</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2><BR>
2,394</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2><BR>
312</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(34,034</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5,077</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(17,573</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss) per share</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Basic</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(0.32</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.05</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(0.17</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Diluted</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(0.32</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.05</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(0.17</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Shares used in computing net income (loss) per share</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Basic</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>107,619</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>106,234</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>104,522</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Diluted</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>107,619</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>109,098</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>104,522</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
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<!-- BLANK LINE TO FORCE PARA -->
&nbsp;&nbsp;&nbsp;
</font></p><p align=center style="font-family:times;"><font> </FONT> <FONT SIZE=2>
See accompanying Notes to these Consolidated Financial Statements </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-2</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=1,SEQ=42,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=886193,FOLIO='F-2',FILE='DISK112:[12ZDL1.12ZDL76601]FC76601A.;9',USER='MSULLIV',CD='26-FEB-2013;13:27' -->
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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fe76601_axcelis_technologies,_inc._con__axc03401"> </A>
<A NAME="toc_fe76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Consolidated Statements of Comprehensive Income<BR>  (In thousands)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Twelve months ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(34,034</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,077</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,573</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other comprehensive income:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign currency translation adjustments</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>642</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,465</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,384</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Actuarial net (loss) gain from pension plan, net of benefit (taxes) of $178, ($4) and $151</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(399</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(291</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Comprehensive income (loss)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(33,791</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,622</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(16,480</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
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 <p style="font-family:times;line-height:1pt;margin-left:18pt;"><font> </FONT> <FONT SIZE=2>
<!-- BLANK LINE TO FORCE PARA -->
&nbsp;&nbsp;&nbsp;
</font></p><p align=center style="font-family:times;"><font> </FONT> <FONT SIZE=2>
See accompanying Notes to these Consolidated Financial Statements </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-3</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=1,SEQ=43,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=213851,FOLIO='F-3',FILE='DISK112:[12ZDL1.12ZDL76601]FE76601A.;7',USER='MSULLIV',CD='26-FEB-2013;13:27' -->
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</FONT></P>

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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fg76601_axcelis_technologies,_inc._con__axc03545"> </A>
<A NAME="toc_fg76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Consolidated Balance Sheets<BR>  (In thousands, except per share amounts)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="64pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="64pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31,<BR>
2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31,<BR>
2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD ALIGN="CENTER" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>ASSETS</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Current assets</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash and cash equivalents</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>44,986</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>46,877</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accounts receivable, net</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>24,843</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>35,071</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Inventories, net</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>100,234</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>120,023</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Restricted cash</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>106</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Prepaid expenses and other current assets</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,056</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10,062</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total current assets</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>175,225</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>212,033</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Property, plant and equipment, net</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>34,413</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>37,204</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Long-term restricted cash</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>104</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other assets</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>12,520</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>19,904</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total assets</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>222,158</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>269,245</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD ALIGN="CENTER" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>LIABILITIES AND STOCKHOLDERS' EQUITY</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Current liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accounts payable</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10,166</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>19,551</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accrued compensation</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,283</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,437</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Warranty</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,700</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,556</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income taxes</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>278</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>495</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Deferred revenue</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6,423</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10,786</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other current liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,932</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,647</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total current liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>29,782</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>47,472</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Long-term deferred revenue</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>456</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,488</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other long-term liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,844</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,730</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>36,082</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>54,690</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Commitments and contingencies (Note&nbsp;16)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stockholders' equity</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Preferred stock, $0.001 par value, 30,000 shares authorized; none issued or outstanding</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Common stock, $0.001 par value, 300,000 shares authorized; 108,293 shares issued and 108,173 shares outstanding at December&nbsp;31, 2012; 106,809 shares
issued and 106,689 shares outstanding at December&nbsp;31, 2011</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>108</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Additional paid-in capital</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>504,643</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>499,332</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Treasury stock, at cost, 120 shares at December&nbsp;31, 2012 and 2011</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,218</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,218</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accumulated deficit</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(322,477</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(288,443</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accumulated other comprehensive income</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,020</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,777</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total stockholders' equity</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>186,076</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>214,555</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total liabilities and stockholders' equity</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>222,158</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>269,245</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
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<!-- BLANK LINE TO FORCE PARA -->
&nbsp;&nbsp;&nbsp;
</font></p><p align=center style="font-family:times;"><font> </FONT> <FONT SIZE=2>
See accompanying Notes to these Consolidated Financial Statements </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-4</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=1,SEQ=44,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=1044451,FOLIO='F-4',FILE='DISK112:[12ZDL1.12ZDL76601]FG76601A.;8',USER='MSULLIV',CD='26-FEB-2013;13:27' -->
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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fi76601_axcelis_technologies,_inc._con__axc03435"> </A>
<A NAME="toc_fi76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Consolidated Statements of Stockholders' Equity<BR>  (In thousands)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:54%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="41pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="35pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="46pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="40pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="54pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="63pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="6pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="56pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH ROWSPAN=2 style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ROWSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Common Stock </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH ROWSPAN=3 style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ROWSPAN=3 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Accumulated<BR>
Other<BR>
Comprehensive<BR>
Income (Loss) </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH ROWSPAN=2 style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ROWSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Additional<BR>
Paid-in<BR>
Capital </B></FONT></TH>
<TH ROWSPAN=2 style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ROWSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Treasury<BR>
Stock </B></FONT></TH>
<TH ROWSPAN=2 style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ROWSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Accumulated<BR>
Deficit </B></FONT></TH>
<TH ROWSPAN=2 style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ROWSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Total<BR>
Stockholders'<BR>
Equity </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Shares </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Amount </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2009</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>104,212</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>104</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>488,321</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,218</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(275,947</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,139</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>216,399</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net loss</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,573</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,573</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign currency translation adjustments</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,384</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,384</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Change in pension</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(291</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(291</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Exercise of stock options</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>704</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>552</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>553</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of shares under Employee Stock Purchase Plan</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>280</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>637</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>638</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of restricted common shares</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>262</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(201</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(201</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of restricted shares in satisfaction of accrued compensation</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>448</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>570</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>570</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stock-based compensation expense</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,088</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,088</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2010</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>105,906</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>106</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>493,967</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,218</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(293,520</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6,232</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>205,567</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,077</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,077</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign currency translation adjustments</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,465</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,465</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Change in pension</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Exercise of stock options</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>372</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>288</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>288</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of shares under Employee Stock Purchase Plan</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>398</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>502</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>503</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of restricted common shares</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>133</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(112</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(112</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stock-based compensation expense</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,687</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,687</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2011</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>106,809</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>499,332</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,218</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(288,443</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,777</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>214,555</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net loss</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(34,034</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(34,034</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign currency translation adjustments</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>642</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>642</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Change in pension</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(399</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(399</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Exercise of stock options</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,148</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>967</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>968</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of shares under Employee Stock Purchase Plan</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>306</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>390</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>390</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of restricted common shares</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>30</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(22</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(22</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stock-based compensation expense</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,976</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,976</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:9pt;text-indent:-9pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2012</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>108,293</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>108</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>504,643</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,218</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(322,477</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,020</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>186,076</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
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&nbsp;&nbsp;&nbsp;
</font></p><p align=center style="font-family:times;"><font> </FONT> <FONT SIZE=2>
See accompanying Notes to these Consolidated Financial Statements</FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-5</FONT></P>

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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fk76601_axcelis_technologies,_inc._con__axc02936"> </A>
<A NAME="toc_fk76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Consolidated Statements of Cash Flow<BR>  (In thousands)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
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<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Twelve months ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Cash flows from operating activities</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(34,034</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,077</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,573</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Adjustments to reconcile net income (loss) to net cash provided by (used for) operating activities:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Depreciation and amortization</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6,877</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,497</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,045</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gain on sale of dry strip assets and intellectual property</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(7,904</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Deferred taxes</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>826</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>585</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,525</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>186</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>28</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stock-based compensation expense</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,976</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,687</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,088</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Provision for excess inventory</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>14,492</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,015</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,015</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Changes in operating assets&nbsp;&amp; liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accounts receivable</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10,478</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>22,692</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(38,652</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Inventories</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,903</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(11,870</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,549</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Prepaid expenses and other current assets</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,386</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,049</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(3,469</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accounts payable and other current liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(13,490</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,940</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>32,276</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Deferred revenue</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(5,396</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(4,006</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>10,601</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income taxes</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(225</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>507</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,406</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other assets and liabilities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,328</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(8,788</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(2,841</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:50pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net cash (used for) provided by operating activities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(10,597</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,533</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(5,892</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-top:11pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Cash flows from investing activities</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Proceeds from sale of dry strip assets and intellectual property</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,716</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Expenditures for property, plant, and equipment</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(591</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(2,124</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,403</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>(Increase) decrease in restricted cash</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,056</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:50pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net cash provided by (used for) investing activities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,123</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(2,121</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,653</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-top:11pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Cash flows from financing activities</B></FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Financing fees and other expenses</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(200</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(523</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Proceeds from exercise of stock options</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>968</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>288</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>553</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Proceeds from Employee Stock Purchase Plan</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>331</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>503</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>569</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:50pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net cash provided by financing activities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,299</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>591</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>599</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Effect of exchange rate changes on cash</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(716</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(869</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>363</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net (decrease) increase in cash and cash equivalents</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,891</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,134</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>723</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash and cash equivalents at beginning of period</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>46,877</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>45,743</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>45,020</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash and cash equivalents at end of period</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>44,986</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>46,877</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>45,743</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash paid for:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income taxes</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>848</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>515</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,286</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Issuance of restricted common stock in satisfaction of accrued compensation</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>570</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
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&nbsp;&nbsp;&nbsp;
</font></p><p align=center style="font-family:times;"><font> </FONT> <FONT SIZE=2>
See accompanying Notes to these Consolidated Financial Statements</FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-6</FONT></P>

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</FONT></P>

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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="fm76601_axcelis_technologies,_inc._not__axc02695"> </A>
<A NAME="toc_fm76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Notes to Consolidated Financial Statements    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;1.&nbsp;&nbsp;Nature of Business  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Axcelis Technologies,&nbsp;Inc. ("Axcelis" or the "Company") was incorporated in Delaware in 1995, and is a worldwide producer of ion implantation, dry strip
and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, the Company provides extensive aftermarket service and support,
including spare parts, equipment upgrades, and maintenance services to the semiconductor industry. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
December 2012, the Company sold its intellectual property rights and certain assets relating to the Company's dry strip product line for cash proceeds of $8.7&nbsp;million. As a
result of this transaction, the Company will cease the sale of 300 mm dry strip wafer processing equipment in 2013. The Company will be able to continue to sell dry strip systems for smaller wafers
until December 2015 and to support its installed base of all dry strip systems indefinitely. See Note&nbsp;3 for additional information relating to the accounting for the sale of the dry strip
assets and intellectual property. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;2.&nbsp;&nbsp;Summary of Significant Accounting Policies  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The accompanying consolidated financial statements reflect the application of certain significant accounting policies as described in this note and elsewhere in
the footnotes. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (a)&nbsp;&nbsp;&nbsp;&nbsp;Basis of Presentation  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The accompanying consolidated financial statements include the accounts of the Company and its wholly-owned, controlled subsidiaries.
All intercompany balances and transactions have been eliminated in consolidation. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Events
occurring subsequent to December&nbsp;31, 2012 have been evaluated for potential recognition or disclosure in the consolidated financial statements. See Note&nbsp;20 for
additional information relating to subsequent events. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> (b)&nbsp;&nbsp;&nbsp;&nbsp;Use of Estimates  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United
States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates
of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, the Company evaluates its estimates and judgments, including those
related to revenue recognition, the realizable value of inventories, valuing share-based compensation instruments and valuation allowances for deferred tax assets. Actual amounts could differ from
these estimates. Changes in estimates are recorded in the period in which they become known. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (c)&nbsp;&nbsp;&nbsp;&nbsp;Foreign Currency  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company has determined the functional currency for substantially all operations outside the United States is the local currency.
Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue
and expenses. The resulting translation adjustments are recorded in stockholders' equity as an element of accumulated other comprehensive
income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the consolidated statements of operations. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-7</FONT></P>

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<A NAME="page_fm76601_1_8"> </A>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;For
the year ended December&nbsp;31, 2012 the Company realized $0.9&nbsp;million of foreign exchange losses. For the year ended December&nbsp;31, 2011 the Company realized
$1.2&nbsp;million of foreign exchange gains. For the year ended December&nbsp;31, 2010 the Company incurred $1.9&nbsp;million of foreign exchange losses. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (d)&nbsp;&nbsp;&nbsp;&nbsp;Cash and Cash Equivalents  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash
equivalents consist primarily of money market securities and certificates of deposit. Cash equivalents are carried on the balance sheet at fair market value. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (e)&nbsp;&nbsp;&nbsp;&nbsp;Inventories  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Inventories are carried at lower of cost, determined using the first-in, first-out ("FIFO") method, or market.
The Company periodically reviews its inventories and makes provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or market. The amount of such
markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company records an allowance for estimated excess inventory. The allowance is determined using management's assumptions of materials usage, based on estimates of demand and market
conditions. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> (f)&nbsp;&nbsp;&nbsp;&nbsp;Property, Plant and Equipment  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Property and equipment are stated at cost, less accumulated depreciation and amortization. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Depreciation
and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows: </FONT></P>
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<p style="font-family:times;"></FONT></P>

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<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="101pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH NOWRAP  ALIGN="LEFT" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:69pt;"><FONT SIZE=1><B>Asset Classification

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 </B></FONT></DIV></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Estimated Useful Life </B></FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Buildings</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>40&nbsp;years</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Machinery and equipment</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3 to 10&nbsp;years</FONT></TD>
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 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Repairs
and maintenance costs are expensed as incurred. Expenditures for renewals and betterments are capitalized. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (g)&nbsp;&nbsp;&nbsp;&nbsp;Impairment of Long-Lived Assets  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company records impairment losses on long-lived assets when events and circumstances indicate that these assets might
not be recoverable. Recoverability is measured by a comparison of the assets' carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the
impairment is measured based on the amount by which the carrying value exceeds its fair value. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company completed a test for recoverability due to indicators present at December&nbsp;31, 2012; specifically the carrying value of its net assets exceeded its current market
capitalization. As of December&nbsp;31, 2012, the undiscounted cash flows used in the analysis significantly exceeded the carrying value of the Company's assets. As a result no impairment was
recorded. The undiscounted cash flows used in the analysis were derived from the Company's long-term strategic plan. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company did not record an impairment charge for the years ended December&nbsp;31, 2011, or 2010. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-8</FONT></P>

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<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Future
actual performance could be materially different from our current forecasts, which could impact future estimates of undiscounted cash flows and may result in the impairment of the
carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made
in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in the Company's relationships with significant customers.
The Company performs an impairment analysis when circumstances or events warrant. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (h)&nbsp;&nbsp;&nbsp;&nbsp;Concentration of Risk and Off-Balance Sheet Risk  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Financial instruments that potentially subject the Company to concentrations of credit risk are principally cash equivalents and
accounts receivable. The Company's cash equivalents are principally maintained in an investment grade money-market fund. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company has no significant off-balance-sheet risk such as foreign exchange contracts, option contracts or other foreign hedging arrangements. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company exposure to market risk for changes in interest rates relates primarily to cash equivalents. The primary objective of the Company's investment activities is to preserve
principal while maximizing yields without significantly increasing risk. This is accomplished by investing in marketable high investment grade securities. The Company does not use derivative financial
instruments to manage its investment portfolio and does not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company performs ongoing credit evaluations of its customers' financial condition and generally requires no collateral to secure accounts receivable. For selected overseas sales, the
Company requires customers to obtain letters of credit before product is shipped. The Company maintains an allowance for doubtful accounts based on its assessment of the collectability of accounts
receivable. The Company reviews the allowance for doubtful accounts monthly. The Company does not have any off-balance sheet credit exposure related to its customers. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company's customers consist of semiconductor manufacturers located throughout the world and net sales to its ten largest customers accounted for 70.6%, 68.6% and 62.7% of revenue in
2012, 2011 and 2010, respectively. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;For
the years ended December&nbsp;31, 2012, 2011 and 2010, the Company had one customer represent 18.2%, 21.2% and 18.6% of total revenues, respectively, for each of the periods
presented. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;For
the year ended December&nbsp;31, 2012, the Company had two customers account for 11.9% and 11.5% of consolidated accounts receivable, respectively. For the year ended
December&nbsp;31, 2011, the Company had one customer represent 27.2% of consolidated accounts receivable. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Some
of the components and sub-assemblies included in the Company's products are obtained either from a sole source or a limited group of suppliers. Disruption to the
Company's supply source, resulting either from depressed economic conditions or other factors, could affect its ability to deliver products to its customers. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (i)&nbsp;&nbsp;&nbsp;&nbsp;Revenue Recognition  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company's revenue recognition policy involves significant judgment by management. As described below, the Company considers a broad
array of facts and circumstances in determining when to recognize revenue, including contractual obligations to the customer, the complexity of the customer's post-delivery acceptance
provisions, payment history, customer creditworthiness and the installation process. In the future, if the post-delivery acceptance provisions and installation process become more complex
or result in a materially lower rate of acceptance, the Company may have to revise its revenue recognition policy, which could delay the timing of revenue recognition. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-9</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<A NAME="page_fm76601_1_10"> </A>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company's system sales transactions are made up of multiple elements, including the system itself and elements that are not delivered simultaneously with the system. These
undelivered elements might include a combination of installation services, extended warranty and support and spare parts, all of which are covered generally by a single sales price. On
January&nbsp;1, 2011, the Company adopted the accounting standards update for multiple deliverable revenue arrangements, as required, using the prospective method. Accordingly, this guidance is
being applied to all system revenue arrangements entered into or materially modified on or after January&nbsp;1, 2011. The adoption of the amended guidance did not change the accounting for
arrangements entered into prior to January&nbsp;1, 2011. There was no material impact on our financial position, results of operations or cash flows upon adoption. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
impact of adopting this amended guidance on the Company's results of operations has been limited to transactions involving the sale of systems. The update amended the previous
guidance for multiple-element arrangements. Pursuant to the amended guidance, the Company's system revenue arrangements with multiple elements are divided into separate units of accounting if
specified criteria are met, including whether the delivered element has stand-alone value to the customer. If the criteria
are met, then the consideration received is allocated among the separate units based on their relative selling price, and the revenue is recognized separately for each of the separate units. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company determines selling price for each unit of accounting (element) using vendor specific objective evidence (VSOE) or third-party evidence (TPE), if they exist, otherwise, the
Company uses best estimated selling price (BESP). The Company generally expects that it will not be able to establish TPE due to the nature of its products, and, as such, the Company typically will
determine selling price using VSOE or BESP. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Where
required, the Company determines BESP for an individual element based on consideration of both market and Company-specific factors, including the selling price and profit margin
for similar products, the cost to produce the deliverable and the anticipated margin on that deliverable and the characteristics of the varying markets in which the deliverable is sold. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
total consideration to be received in the transaction is allocated to each element in the arrangement based upon the relative selling price of each element when compared to the
consideration received. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Systems
are not sold separately and VSOE or TPE is not available for the systems element. Therefore the selling price associated with systems is based on BESP. The allocated value for
installation in the arrangement includes (a)&nbsp;the greater of (i)&nbsp;the relative selling price of the installation or (ii)&nbsp;the portion or the sales price that will not be received
until the installation is completed (the "retention"). The selling price of installation is based upon the fair value of the service performed, including labor, which is based upon the estimated time
to complete the installation at hourly rates, and material components, both of which are sold separately. The selling price of all other elements (extended warranty for support, spare parts, and
labor) is based upon the price charged when these elements are sold separately, or VSOE. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Product
revenue for products which have demonstrated market acceptance, generally recognized upon shipment provided title and risk of loss has passed to the customer, evidence of an
arrangement exists, prices are contractually fixed or determinable, collectability is reasonably assured through historical collection results and regular credit evaluations, and there are no
uncertainties regarding customer acceptance. Revenue from installation services is recognized at the time formal acceptance is received from the customer or, for certain customers, when both the
formal acceptance and retention payment have been received. Revenue for other elements is recognized at the time products are shipped or the related services are performed. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company generally recognizes revenue for products which have demonstrated market acceptance at the time of shipment because the customer's post-delivery acceptance
provisions and </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-10</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<A NAME="page_fm76601_1_11"> </A>

<P style="font-family:times;"><FONT SIZE=2>installation
process have been established to be routine, commercially inconsequential and perfunctory. The majority of its systems are designed and tailored to meet the customer's specifications, as
outlined in the contract between the customer and the Company, which may be the Company's standard specification. To ensure that the customer's specifications are satisfied, many customers request
that new systems be tested at the Company's facilities prior to shipment, normally with the customer present, under conditions that substantially replicate the customer's production environment and
the customer's criteria are confirmed to have been met. The Company believes the risk of failure to complete a system installation is remote. Should an installation not be completed successfully, the
contractual provisions do not provide for forfeiture, refund or other purchase price concession beyond those prescribed by the provisions of the Uniform Commercial Code applicable generally to such
transactions. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;For
initial shipments of systems with new technologies or in the small number of instances where the Company is unsure of meeting the customer's specifications or obtaining customer
acceptance upon shipment of the system, it will defer the recognition of systems revenue and related costs until written customer acceptance of the system is obtained. This deferral period is
generally within twelve months of shipment. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Revenue
related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service
hours is recognized when the services are performed. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Product
revenue includes revenue from system sales, sales of spare parts, the spare parts component of maintenance and service contracts and product upgrades. Service revenue includes
the labor component of maintenance and service contract amounts charged for on-site service personnel. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Revenue
related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service
hours is recognized when the services are performed. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (j)&nbsp;&nbsp;&nbsp;&nbsp;Shipping and Handling Costs  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Shipping and handling costs are included in cost of revenue. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (k)&nbsp;&nbsp;&nbsp;&nbsp;Stock-Based Compensation  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company recognizes compensation expense for all share-based payments to employees and directors, including grants of employee stock
options, based on the grant-date fair value of those share-based payments using the Black- Sholes option pricing model, adjusted for expected forfeitures. Stock-based compensation expense
is recognized ratably over the requisite service period. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;See
Note&nbsp;13 for additional information relating to stock-based compensation. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (l)&nbsp;&nbsp;&nbsp;&nbsp;Income Taxes  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company records income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for
the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax bases, and operating loss
and tax credit carryforwards. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company's consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences
between financial and tax accounting. The Company establishes a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective
verifiable evidence. Significant management judgment is required in determining the Company's provision for income taxes, the </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-11</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<A NAME="page_fm76601_1_12"> </A>

<P style="font-family:times;"><FONT SIZE=2>Company's
deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. The Company evaluates the weight of all available evidence to determine
whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Income
taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax
position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the
effective tax rate. The Company recognizes accrued interest related to unrecognized tax benefits as interest expense and penalties as operating expense. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (m)&nbsp;&nbsp;&nbsp;&nbsp;Computation of Net Income (Loss) per Share  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number
of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include
the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company incurred net losses for years ended December&nbsp;31, 2012 and December&nbsp;31, 2010, and has excluded 1,563,417 and 3,230,705 incremental shares attributable to
outstanding stock options, restricted stock and restricted stock units from the calculation of net loss per share because the effect would have been anti-dilutive. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
components of net income (loss) per share are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years Ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands, except per share data)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) available to common stockholders</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(34,034</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,077</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(17,573</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Weighted average common shares outstanding used in computing basic net income (loss) per share</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107,619</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>106,234</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>104,522</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Incremental shares</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,864</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Weighted average common shares outstanding used in computing diluted net income (loss) per share</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>107,619</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>109,098</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>104,522</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss) per share</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Basic</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.32</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.05</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.17</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Diluted</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.32</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.05</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.17</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B> (n)&nbsp;&nbsp;&nbsp;&nbsp;Recent Accounting Guidance  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><U>Accounting
Standards or Updates Recently Adopted</U> </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Effective
January&nbsp;1, 2012 the Company adopted Accounting Standards Update, or ASU, No.&nbsp;2011-05, </FONT><FONT SIZE=2><I>Comprehensive
Income (Topic 220)</I></FONT><FONT SIZE=2>. This newly issued accounting standard requires the Company to report comprehensive income either in a single continuous statement or in two separate but
consecutive financial statements. The adoption of this standard did impact the presentation of other comprehensive income, as we have elected to present two separate but consecutive statements, but
did not have an impact on our financial position or results of operations. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-12</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<A NAME="page_fm76601_1_13"> </A>
<BR>

<P style="font-family:times;"><FONT SIZE=2><U>Accounting
Standards or Updates Not Yet Effective</U> </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;On
February&nbsp;5, 2013, The Financial Accounting Standards Board ("FASB") issued Accounting Standards Update No.&nbsp;2013-02, </FONT> <FONT SIZE=2><I>Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income</I></FONT><FONT
SIZE=2>. The update requires that companies present either in a single note or
parenthetically on the face of the financial statements, the effect of significant amounts reclassified from each component of accumulated other comprehensive income based on its source and the income
statement line items affected by the reclassification. If a component is not required to be reclassified to net income in its entirety, companies would instead cross reference to the related footnote
for additional information. This update is effective prospectively for annual and interim reporting periods beginning after December&nbsp;15, 2012. As this update only requires enhanced disclosure,
the adoption of this update will not impact our financial position or results of operations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;3.&nbsp;&nbsp;Gain on Sale of Dry Strip Assets and Intellectual Property  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;On December&nbsp;3, 2012, the Company entered into a purchase agreement with Lam Research Corporation ("Lam"). As part of the agreement, the Company sold its
dry strip system assets and
intellectual property to Lam. The purchase price was $10.7&nbsp;million, of which $2.0&nbsp;million is contingent upon reaching certain milestones. The $7.9&nbsp;million gain on sale of dry
strip assets and intellectual property is comprised of the $8.7&nbsp;million proceeds received for the sale, offset by approximately $0.8&nbsp;million of product and material costs related to the
lab system and other components purchased by Lam. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company determined that the sale would not be accounted for as a discontinued operation due to the continuing involvement it has as a result of the royalty free license granted to
the Company and other factors as discussed below. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Lam
granted the Company a worldwide, non-exclusive, non-transferable, royalty free license to use the intellectual property rights sold by the Company under the
Asset Purchase Agreement. The perpetual license allows the Company to make and sell 300 mm dry strip wafer processing equipment for semiconductor applications through September 2013, make and sell 200
mm products through December 2015 and to support the Company's installed base of all dry strip equipment on a perpetual basis. As a result of this continuing involvement, the transaction has been
recorded in continuing operations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company will recognize the contingencies as the milestones are achieved, in accordance with the accounting guidance for gain contingencies. The Company expects to achieve the
transition milestones over various periods through the first half of 2014. As the milestones are achieved, the proceeds will be recorded as part of the gain on sale of dry strip assets and
intellectual property. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;4.&nbsp;&nbsp;Restricted Cash  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The components of restricted cash are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="30pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="30pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Statutory liability deposit</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>106</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>104</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
addition to the statutory liability deposit, the Company has surety bonds related to value added tax claims and refunds in Europe of approximately $1.8&nbsp;million at
December&nbsp;31, 2012 and standby letters of credit issued under the credit line of $3.6&nbsp;million. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-13</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<A NAME="page_fm76601_1_14"> </A>

<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;5.&nbsp;&nbsp;Accounts Receivable, net  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The components of accounts receivable are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Trade receivables</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>25,148</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>35,482</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Allowance for doubtful accounts</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(305</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(411</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>24,843</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>35,071</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;6.&nbsp;&nbsp;Inventories, net  </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The components of inventories are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Raw materials</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>72,013</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>85,829</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Work in process</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>12,253</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>25,639</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Finished goods (completed systems)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>15,968</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>8,555</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>100,234</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>120,023</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;When
recorded, inventory reserves are intended to reduce the carrying value of inventories to their net realizable value. The Company establishes inventory reserves when conditions exist
that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company's products or market conditions. The Company regularly
evaluates the ability to realize the value of inventories based on a combination of factors including the following: forecasted sales or usage, estimated product end of life dates, estimated current
and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure. As of December&nbsp;31, 2012 and 2011, inventories are
stated net of inventory reserves of $33.6&nbsp;million and $22.8&nbsp;million respectively. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
2012, the Company recorded a $14.5&nbsp;million increase to its excess inventory reserves. During the fourth quarter, as a result of industry consensus indicating that the
semiconductor industry downturn will continue into 2013, along with the Company's internal projections, the Company performed a comprehensive review and analysis of its worldwide inventory levels
based on historic and projected inventory requirements for all of its products, components and parts. As a result, the Company recorded a $13.4&nbsp;million increase to inventory reserves in the
fourth quarter of 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;During
2012, the Company recorded a charge to cost of sales of $2.6&nbsp;million due to production levels below normal capacity. There were no similar charges recorded for the year
ended December&nbsp;31, 2011.
During 2010, the Company recorded a charge to cost of sales of $1.0&nbsp;million due to below normal production capacity. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-14</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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NAME="page_fo76601_1_15"> </A>


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 </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;7.&nbsp;&nbsp;Property, Plant and Equipment, net  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The components of property, plant and equipment are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Land and buildings</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>78,954</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>78,985</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Machinery and equipment</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,118</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,020</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Construction in process</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>455</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>541</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total cost</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>86,527</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>86,546</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accumulated depreciation</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(52,114</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(49,342</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Property, plant and equipment, net</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>34,413</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>37,204</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Depreciation
expense was $3.3&nbsp;million, $3.5&nbsp;million, and $3.6&nbsp;million, for the years ended December&nbsp;31, 2012, 2011, and 2010, respectively. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;8.&nbsp;&nbsp;Assets Manufactured for Internal Use  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The components of assets manufactured for internal use, included in amounts reported as other assets, are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Internal use assets</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>21,904</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27,503</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Construction in progress</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,823</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total cost</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>23,727</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27,503</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accumulated depreciation</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(13,948</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(10,526</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9,779</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>16,977</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;These
products are used in-house for research and development, training, and customer demonstration purposes. Costs are generally depreciated to expense over five years.
Depreciation expense was $3.4&nbsp;million, $4.9&nbsp;million, and $3.3&nbsp;million, for the years ended December&nbsp;31, 2012, 2011, and 2010, respectively. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;9.&nbsp;&nbsp;Restructuring Charges  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company initiated reductions in force throughout 2012 to control costs and improve the focus of its operations in order to sustain future profitability and
conserve cash. As a result, the Company recorded a total charge to restructuring expense of approximately $4.2&nbsp;million, for severance and related costs including a $0.1&nbsp;million
non-cash charge for the modification of a share-based award. The Company did not incur restructuring charges for the years ended December&nbsp;31, 2011 or December&nbsp;31, 2010. The
liability at December&nbsp;31, 2012 of $0.7&nbsp;million is expected to be paid in the first quarter of 2013. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-15</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=1,SEQ=55,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=692107,FOLIO='F-15',FILE='DISK112:[12ZDL1.12ZDL76601]FO76601A.;20',USER='MSULLIV',CD='26-FEB-2013;13:27' -->
<A NAME="page_fo76601_1_16"> </A>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company's restructuring liability for the years ended December&nbsp;31, 2012, 2011 and 2010 are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="70pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Severance </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(In thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2009</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>297</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash payments</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(126</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2010</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>171</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash payments</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2011</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>171</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Severance and related costs</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>4,169</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash payments</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(3,551</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Non-cash items</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(130</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31, 2012</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>659</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;10.&nbsp;&nbsp;Product Warranty  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company generally offers a one year warranty for all of its systems, the terms and conditions of which vary depending upon the product sold. For all systems
sold, the Company accrues a liability for the estimated cost of standard warranty at the time of system shipment and defers the portion of systems revenue attributable to the fair value of
non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect the Company's warranty liability include the number of installed units,
historical and anticipated product failure rates,
material usage and service labor costs. The Company periodically assesses the adequacy of its recorded liability and adjusts the amount as necessary. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
changes in the Company's product warranty liability are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years Ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at January&nbsp;1 (beginning of year)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,697</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,713</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>726</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Warranties issued during the period</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,042</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,772</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,722</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Settlements made during the period</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(3,010</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(5,275</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,923</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Changes in estimate of liability for pre-existing warranties during the period</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,928</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,487</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>188</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at December&nbsp;31 (end of year)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,801</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,697</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,713</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Amount classified as current</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,700</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,556</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,556</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Amount classified as long-term</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>101</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>141</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>157</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total Warranty Liability</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,801</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,697</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,713</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;11.&nbsp;&nbsp;Financing Arrangements  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Bank Credit Facility  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company has a revolving credit facility with a bank pursuant to an Amended and Restated Loan and Security Agreement dated
April&nbsp;25, 2011 (the "Revolving Credit Facility"). The facility provides for borrowings up to $30&nbsp;million, based primarily on accounts receivable, and is subject to certain financial
covenants requiring the Company to maintain minimum levels of operating results and </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-16</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=2,SEQ=56,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=142520,FOLIO='F-16',FILE='DISK112:[12ZDL1.12ZDL76601]FO76601A.;20',USER='MSULLIV',CD='26-FEB-2013;13:27' -->
<A NAME="page_fo76601_1_17"> </A>

<P style="font-family:times;"><FONT SIZE=2>liquidity.
The agreement will terminate on April&nbsp;10, 2015. The Company uses the facility to support letters of credit and for short term borrowing as needed. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;On
March&nbsp;5, 2012, the Company entered into a Second Loan Modification Agreement relating to the Revolving Credit Facility to revise financial covenants. To facilitate future
availability, on September&nbsp;10, 2012, the Company further modified the Revolving Credit Facility by entering into the Third Loan Modification Agreement (the "Third Modification Agreement"). The
Third Modification Agreement revises the covenant setting the Company's minimum trailing six month Adjusted Net Income (as such capitalized term is defined in the agreement). All other material terms
of the Revolving Credit Facility are unaffected by the Third Modification Agreement. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;At
December&nbsp;31, 2012, the Company's available borrowing capacity under the Revolving Credit Facility was $17.3&nbsp;million and the Company was compliant with all covenants of
the loan agreement. There were no borrowings against this facility during year the ended December&nbsp;31, 2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;12.&nbsp;&nbsp;Employee Benefit Plans  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (a)&nbsp;&nbsp;&nbsp;&nbsp;Defined Contribution Plan  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company maintains the Axcelis Long-Term Investment Plan, a defined contribution plan. All regular employees are
eligible to participate and may contribute up to 35% of their compensation on a before-tax basis subject to Internal Revenue Service ("IRS") limitations. Highly compensated employees may
contribute up to 16% of their compensation on a before-tax basis subject to IRS limitations. The Company does not match contributions; therefore, no expense was recorded for this plan in
2012, 2011 or 2010. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (b)&nbsp;&nbsp;&nbsp;&nbsp;Other Compensation Plans  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company operates in foreign jurisdictions that require lump sum benefits, payable based on statutory regulations, for voluntary or
involuntary termination. Where required, an annual actuarial valuation of the benefit plans is obtained. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company has recorded an unfunded liability of $4.5&nbsp;million and $3.7&nbsp;million at December&nbsp;31, 2012 and 2011, respectively, for costs associated with these
compensation plans in foreign jurisdictions. The following table presents the classification of these liabilities in the Consolidated Balance Sheets: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Year Ended<BR>
December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Current:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accrued compensation</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,475</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,290</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other current liabilities</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>199</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total current liabilities</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,475</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,489</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Long-term:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other long-term liabilities</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3,042</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,243</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:40pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total liabilities</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>4,517</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3,732</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
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 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
expense recorded in connection with these plans was $0.6&nbsp;million, $0.7&nbsp;million and $0.6&nbsp;million during the years ended December&nbsp;31, 2012, 2011 and 2010,
respectively. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-17</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>

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<A NAME="page_fo76601_1_18"> </A>

<P style="font-family:times;"><FONT SIZE=2><B>Note&nbsp;13.&nbsp;&nbsp;Stock Award Plans and Stock Based Compensation  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (a)&nbsp;&nbsp;&nbsp;&nbsp;Equity Incentive Plans  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company maintains the Axcelis Technologies,&nbsp;Inc. 2012 Equity Incentive Plan (the "2012 Equity Plan"), which became effective
on May&nbsp;2, 2012. Our 2000 Stock Plan (the "2000 Stock Plan"), expired on May&nbsp;1, 2012 and no new grants may be made under that plan after this date. However, awards granted under the 2000
Stock Plan prior to the expiration remain outstanding and subject to the terms of the 2000 Stock Plan. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
2012 Equity Plan reserves 3.8&nbsp;million shares of common stock, $0.001 par value for grant and permits the issuance of options, stock appreciation rights, restricted stock,
restricted stock units, stock equivalents, and awards of shares of common stock that are not subject to restrictions or forfeiture to selected employees, directors and consultants of the Company.
Shares that are not issued under an award (because such award expires, is terminated unexercised or is forfeited) that were outstanding under the 2000 Stock Plan as of the May&nbsp;2, 2012 will
increase the reserve of shares available for grant under the 2012 Equity Plan. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
term of stock options granted under these plans is specified in the award agreements. Unless a lesser term is otherwise specified by the Company's Compensation Committee of the Board
of Directors, awards under the 2012 Equity Plan will expire seven years from the date of grant. In general, all awards issued under the 2000 Stock Plan expire ten years from the date of grant. Under
the terms of these stock plans, the exercise price of a stock option may not be less than the fair market value of a share of the Company's common stock on the date of grant. Under the 2012 Equity
Plan, fair market value is defined as the last reported sale price of a share of the common stock on a national securities exchange as of any applicable date, as long as the Company's shares are
traded on such exchange. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Stock
options granted to employees generally vest over a period of four years, while stock options granted to non-employee members of the Company's Board of Directors
generally vest over a period of 6&nbsp;months and, once vested, are not affected by the director's termination of service to the Company. Termination of service by an employee will cause options to
cease vesting as of the date of termination, and in most cases, employees will have 90&nbsp;days after termination to exercise options that were vested as of the termination of employment. In
general, retiring employees will have one year after termination of employment to exercise vested options. The Company settles stock option exercises with newly issued common shares. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Restricted
stock units granted to employees during 2012, 2011 and 2010 had both time-based vesting provisions and performance-based vesting provisions. Generally, unvested
restricted stock unit awards expire upon termination of service to the Company. The Company settles restricted stock units upon vesting with newly issued common shares. No restricted stock was granted
under either stock plan during the three year period. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;As
of December&nbsp;31, 2012, there were 1.5&nbsp;million of shares available for grant under 2012 Equity Plan. No shares are available for grant under the 2000 Stock Plan. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;As
of December&nbsp;31, 2012, there were 21.3&nbsp;million options outstanding under the 2012 Equity Plan and the 2000 Stock Plan, collectively, and 1.0&nbsp;million unvested
restricted stock units outstanding under the 2000 Stock Plan. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (b)&nbsp;&nbsp;&nbsp;&nbsp;Employee Stock Purchase Plan  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Employee Stock Purchase Plan (the "Purchase Plan") provides effectively all of the Company's employees the opportunity to purchase
common stock of the Company at less than market prices. Purchases are made through payroll deductions of up to 10% of the employee's salary as elected by the participant, subject to certain caps set
forth in the Purchase Plan. Employees may purchase its </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-18</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=4,SEQ=58,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=273417,FOLIO='F-18',FILE='DISK112:[12ZDL1.12ZDL76601]FO76601A.;20',USER='MSULLIV',CD='26-FEB-2013;13:27' -->
<A NAME="page_fo76601_1_19"> </A>

<P style="font-family:times;"><FONT SIZE=2>common
stock at 85% of the market value of the Company's common stock on the day the stock is purchased. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Purchase Plan is considered compensatory and as such, compensation expense has been recognized based on the benefit of the discounted stock price, amortized to compensation expense
over each offering period of six months. Compensation expense was $0.1&nbsp;million for each of the years ended December&nbsp;31, 2012, 2011, and 2010. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;As
of December&nbsp;31, 2012, there were a total of 2.0&nbsp;million shares reserved for issuance and available for purchase under the Purchase Plan. There were 0.3&nbsp;million,
0.4&nbsp;million and 0.3&nbsp;million shares purchased under the Purchase Plan for the years ended December&nbsp;31, 2012, 2011, and 2010, respectively. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (c)&nbsp;&nbsp;&nbsp;&nbsp;Valuation of Employee Stock Options  </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;For the purpose of valuing stock options, the Company uses the Black-Scholes option pricing model to calculate the
grant-date fair value of an award. The fair values of options granted were calculated using the following estimated weighted-average assumptions: </FONT></P>
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<p style="font-family:times;"></FONT></P>

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<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="77pt" style="font-family:times;"></TD>
<TD WIDTH="24pt" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="24pt" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Weighted-average expected volatility</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>97.8%-113.55</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>97.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>97.8</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Weighted-average expected term</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3.8-6.1&nbsp;years</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6.1&nbsp;years</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6.2&nbsp;years</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Risk-free interest rate</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0.45%-1.37</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.1%-2.4</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.5%-2.0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Expected dividend yield</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>0</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>%</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Expected
volatility&#151;The Company is responsible for estimating volatility and has considered a number of factors when estimating volatility. The Company's method of estimating
expected volatility for all stock options granted relies on a combination of historical and implied volatility. The Company believes that this blended volatility results in a more accurate estimate of
the grant-date fair value of employee stock options because it more appropriately reflects the market's current expectations of future volatility. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Expected
term&#151;The Company calculated the weighted average expected term for stock options granted prior to July&nbsp;1, 2012, using a forward looking lattice model of the
Company's stock price incorporating a suboptimal exercise factor and a projected post-vest forfeiture rate. For stock options granted after July&nbsp;1, 2012, the Company used the
simplified method for estimating the expected life of "plain vanilla" options. The change in the expected term from 10&nbsp;years to 7&nbsp;years
reflects the fact that options granted after May&nbsp;1, 2012 were granted under the 2012 Equity Incentive Plan, which limits option terms to seven years. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Risk-free
interest rate&#151;The yield on zero-coupon U.S. Treasury securities for a period that is commensurate with the expected term assumption is used
as the risk-free interest rate. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Expected
dividend yield&#151;Expected dividend yield was not considered in the option pricing formula since the Company does not pay dividends and has no current plans to do so in
the future. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (d)&nbsp;&nbsp;&nbsp;&nbsp;Summary of Share-Based Compensation Expense  </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company estimates the fair value of stock options using the Black-Scholes valuation model. The fair value of the Company's
restricted stock and restricted stock units is calculated based upon the fair market value of the Company's stock at the date of grant. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company uses the straight-line attribution method to recognize expense for stock-based awards such that the expense associated with awards is evenly recognized throughout
the period. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-19</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<P style="font-family:times;"><FONT SIZE=2><A
NAME="page_fq76601_1_20"> </A>


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 </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
amount of stock-based compensation recognized is based on the value of the portion of the awards that are ultimately expected to vest. The Company estimates forfeitures at the time
of grant and revises them, if necessary, in subsequent periods if actual forfeitures differ from those estimates. The term "forfeitures" is distinct from "cancellations" or "expirations" and
represents only the unvested portion of the surrendered stock-based award. Based on a historical analysis, a forfeiture rate of 5% per year, including executive officer awards, was applied to
stock-based awards for the years ended December&nbsp;31, 2012, 2011 and 2010. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company recognized stock-based compensation expense of $3.9&nbsp;million, $4.7&nbsp;million and $4.1&nbsp;million for the years ended December&nbsp;31, 2012, 2011 and 2010,
respectively. For 2012, 2011 and 2010, the Company primarily used stock options in its annual equity compensation program. During 2012, the Company recognized stock-based compensation expense of
$0.1&nbsp;million related to the modification of a stock option grant as a result of a restructuring action taken by the Company. As this related to a restructuring activity, the Company included
this expense in the restructuring line item in the Consolidated Statements of Operations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
benefits of tax deductions in excess of recognized compensation cost is reported as a financing cash flow, rather than as an operating cash flow. Because the Company does not
recognize the benefit of tax deductions in excess of recognized compensation cost due to its cumulative net operating loss position, this had no impact on the Company's consolidated statement of cash
flows as of and for the years ended December&nbsp;31, 2012, 2011 or 2010. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-20</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=1,SEQ=60,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=350445,FOLIO='F-20',FILE='DISK112:[12ZDL1.12ZDL76601]FQ76601A.;14',USER='DPERRY',CD='27-FEB-2013;17:33' -->
<A NAME="page_fq76601_1_21"> </A>

<P style="font-family:times;"><FONT SIZE=2><B> (e)&nbsp;&nbsp;&nbsp;&nbsp;Stock Option Awards  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The following table summarizes the stock option activity for the years ended December&nbsp;31, 2012, 2011 and 2010: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="69pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="56pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="69pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Options </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Weighted<BR>
Average<BR>
Exercise<BR>
Price </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Weighted<BR>
Average<BR>
Remaining<BR>
Contractual<BR>
Term </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Aggregate<BR>
Intrinsic<BR>
Value </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(years)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2009</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>17,368</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6.43</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Granted</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,310</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1.61</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Exercised</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(704</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.79</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Canceled</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(333</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1.23</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Expired</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(2,693</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>18.26</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2010</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>18,948</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3.70</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Granted</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,662</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1.70</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Exercised</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(372</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.77</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Canceled</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(654</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1.43</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Expired</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,491</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>12.38</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2011</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>21,093</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2.76</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Granted</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,077</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>.93</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Exercised</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,148</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>.84</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Canceled</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,225</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1.43</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Expired</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(1,537</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7.71</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2012</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>21,260</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2.24</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6.39</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,607</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Exercisable at December&nbsp;31, 2012</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>11,680</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2.99</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5.59</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,591</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Options Vested or Expected to Vest at December&nbsp;31, 2012(1)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>20,558</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2.27</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6.44</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,015</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->


<!-- COMMAND=ADD_LINERULETXT,NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" -->
<HR NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" >
 </DIV>
<DIV style="padding:0pt;position:relative;text-align:left;margin-left:10%;">
 <DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(1)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>In
addition to the vested options, the Company expects a portion of the unvested options to vest at some point in the future. Options expected to vest is
calculated by applying an estimated forfeiture rate to the unvested options. </FONT></DD></DL>
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Of
the options outstanding at December&nbsp;31, 2012, 2011 and 2010, 11.7&nbsp;million, 10.2&nbsp;million and 8.4&nbsp;million, respectively, were vested and
exercisable with a weighted average exercise price of $2.99, $4.13, and $6.68, respectively. The total intrinsic value, which is defined as the difference between the market price at exercise and the
price paid by the employee to exercise the options, for options exercised during the years ended December&nbsp;31, 2012, 2011 and 2010 was $0.9&nbsp;million, $0.7&nbsp;million and
$1.2&nbsp;million, respectively. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
total fair value of stock options vested during the year ended December&nbsp;31, 2012 was $4.1&nbsp;million. As of December&nbsp;31, 2012, there was $7.5&nbsp;million of
total forfeiture- adjusted unrecognized compensation cost related to non-vested stock options granted under the 2012 Equity Incentive Plan and the 2000 Stock Plan. That cost is expected to
be recognized over a weighted-average period of 2.5&nbsp;years. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (f)&nbsp;&nbsp;&nbsp;&nbsp;Restricted Stock and Restricted Stock Units  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Restricted stock units ("RSUs") represent the Company's unfunded and unsecured promise to issue shares of the common stock at a future
date, subject to the terms of the RSU Award Agreement </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-21</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=2,SEQ=61,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=627973,FOLIO='F-21',FILE='DISK112:[12ZDL1.12ZDL76601]FQ76601A.;14',USER='DPERRY',CD='27-FEB-2013;17:33' -->
<A NAME="page_fq76601_1_22"> </A>

<P style="font-family:times;"><FONT SIZE=2>and
either the 2012 Equity Incentive Plan or the 2000 Stock Plan. The purpose of these awards is to assist in attracting and retaining highly competent employees and directors and to act as an
incentive in motivating selected employees and directors to achieve long-term corporate objectives. RSU awards granted in 2012, 2011 and 2010 included both time vested awards and
performance vested awards for employees and executive officers. No restricted stock awards were granted, or vested, during the period. The fair value of a restricted stock unit and restricted stock
awards is charged to expense ratably over the applicable service period. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Changes
in the Company's non-vested restricted stock units for the years ended December&nbsp;31, 2012, 2011, and 2010 are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="69pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="82pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Shares/units </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Weighted-Average<BR>
Grant Date Fair<BR>
Value per Share </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2009</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>604</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5.90</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Granted</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>695</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.72</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Vested</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,052</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3.30</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Forfeited</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(19</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.94</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2010</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>228</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5.38</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Granted</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>121</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.50</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Vested</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(196</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5.81</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Forfeited</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(2</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6.01</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2011</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>151</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.52</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Granted</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>864</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.65</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Vested</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(47</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2.82</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Forfeited</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(7</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.62</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Outstanding at December&nbsp;31, 2012</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>961</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1.73</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Some
restricted stock units provide for a net share settlement program to offset the personal income tax obligations of the employee's restricted stock unit vesting.
Vesting activity above reflects shares vested before net share settlement. As of December&nbsp;31, 2012, there was $0.2&nbsp;million of total forfeiture adjusted unrecognized compensation cost
related to performance based restricted stock units that did not vest, which is expected to be amortized over a weighted average amortization period of 2.2&nbsp;years. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Note&nbsp;14. Stockholders' Equity  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Preferred Stock  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company may issue up to 30&nbsp;million shares of preferred stock in one or more series. The Board of Directors is authorized to
fix the rights and terms for any series of preferred stock without additional shareholder approval. As of December&nbsp;31, 2012, 2011, and 2010, there were no outstanding shares of preferred stock. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2><B> Note&nbsp;15. Fair Value Measurements  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Fair value is defined as the exchange price that would be received for an asset or paid to transfer a liability (an exit price) in the
principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-22</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=3,SEQ=62,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=179958,FOLIO='F-22',FILE='DISK112:[12ZDL1.12ZDL76601]FQ76601A.;14',USER='DPERRY',CD='27-FEB-2013;17:33' -->
<A NAME="page_fq76601_1_23"> </A>

<P style="font-family:times;"><FONT SIZE=2><B> (a)&nbsp;&nbsp;&nbsp;&nbsp;Fair Value Hierarchy  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of
unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value.
A financial instrument's categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as
follows: </FONT></P>

<UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><I>Level&nbsp;1</I></FONT><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or
liabilities. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><I>Level&nbsp;2</I></FONT><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for
the asset or liability, such as quoted prices for similar assets or liabilities in active
markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs
are observable or can be derived principally from, or corroborated by, observable market data. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><I>Level&nbsp;3</I></FONT><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are
significant to the measurement of the fair value of the assets or liabilities. </FONT></P>

</UL>

<P style="font-family:times;"><FONT SIZE=2><B> (b)&nbsp;&nbsp;&nbsp;&nbsp;Assets Measured at Fair Value on a Recurring Basis  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company's money market funds are included in cash and cash equivalents in the Consolidated Balance Sheets, and are considered a
level&nbsp;1 investment as they are valued at quoted market prices in active markets. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
following table sets forth Company's assets which are measured at fair value on a recurring basis by level within the fair value hierarchy. </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="36pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="36pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=11 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31, 2012<BR>
Fair Value Measurements </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Level&nbsp;1 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Level&nbsp;2 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Level&nbsp;3 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Total </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=11 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Assets</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash equivalents:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Money market funds</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,179</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,179</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;<BR></FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="36pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="36pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=11 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>December&nbsp;31, 2011<BR>
Fair Value Measurements </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Level&nbsp;1 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Level&nbsp;2 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Level&nbsp;3 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Total </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=11 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Assets</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Cash equivalents:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Money market funds</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,927</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>29,927</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B> (c)&nbsp;&nbsp;&nbsp;&nbsp;Other Financial Instruments  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The carrying amounts reflected in the consolidated balance sheets for cash and cash equivalents (which are comprised primarily of
deposit and overnight sweep accounts), accounts receivable, prepaid expenses and other current and non-current assets, accounts payable and accrued expenses approximate fair value due to
their short-term maturities. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-23</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=4,SEQ=63,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=1046417,FOLIO='F-23',FILE='DISK112:[12ZDL1.12ZDL76601]FQ76601A.;14',USER='DPERRY',CD='27-FEB-2013;17:33' -->
<A NAME="page_fq76601_1_24"> </A>

<P style="font-family:times;"><FONT SIZE=2><B> Note&nbsp;16. Commitments and Contingencies  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (a)&nbsp;&nbsp;&nbsp;&nbsp;Lease Commitments  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company leases manufacturing and office facilities and certain equipment under operating leases that expire through 2016. Rental
expense was $4.3&nbsp;million, $4.6&nbsp;million, and $5.2&nbsp;million under operating leases for the years ended December&nbsp;31, 2012, 2011, and 2010 respectively. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Future
minimum lease commitments on non-cancelable operating leases for the year ended December&nbsp;31, 2012 are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="69pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Operating<BR>
Leases </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>2013</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3,057</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>2014</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,681</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>2015</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,181</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>2016</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>224</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6,143</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B> (b)&nbsp;&nbsp;&nbsp;&nbsp;Purchase Commitments  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company has non-cancelable contracts and purchase orders for inventory of $14.9&nbsp;million at December&nbsp;31,
2012. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (c)&nbsp;&nbsp;&nbsp;&nbsp;Litigation  </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company is not presently a party to any litigation that it believes might have a material adverse effect on its business
operations. The Company is, from time to time, a party to litigation that arises in the normal course of its business operations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> (d)&nbsp;&nbsp;&nbsp;&nbsp;Indemnifications  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company's system sales agreements typically include provisions under which the Company agrees to take certain actions, provide
certain remedies and defend its customers against third-party claims of intellectual property infringement under specified conditions and to indemnify customers against any damage and costs awarded in
connection with such claims. The Company has not incurred any material costs as a result of such indemnifications and has not accrued any liabilities related to such obligations in the accompanying
consolidated financial statements. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Note&nbsp;17. Business Segment and Geographic Region Information  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The Company operates in one business segment, which is the manufacture of capital equipment for the semiconductor manufacturing
industry. The principal market for semiconductor manufacturing equipment is semiconductor manufacturers. Substantially all sales are made directly by the Company to its customers located in the United
States, Europe and Asia Pacific. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company's ion implantation systems product line includes high current, medium current and high energy implanters. Other products include dry strip equipment, curing systems, and
thermal processing systems. In addition to equipment, the Company provides post-sales equipment service and support, including spare parts, equipment upgrades, maintenance services and
customer training. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-24</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=5,SEQ=64,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=717045,FOLIO='F-24',FILE='DISK112:[12ZDL1.12ZDL76601]FQ76601A.;14',USER='DPERRY',CD='27-FEB-2013;17:33' -->
<A NAME="page_fq76601_1_25"> </A>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Revenue
by product lines is as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Ion implantation systems, services, and royalties</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>156,090</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>237,857</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>232,335</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other systems and services</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>47,295</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>81,559</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>42,877</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>203,385</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>319,416</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>275,212</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Revenue
and long-lived assets by geographic region, based on the physical location of the operation recording the sale or the asset, are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="54pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Revenue </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Long-Lived<BR>
Assets </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>2012</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>United States</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>132,159</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>43,440</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Europe</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27,636</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Asia Pacific</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>43,590</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>752</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>203,385</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>44,192</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>2011</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>United States</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>234,132</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>54,472</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Europe</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31,505</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Asia Pacific</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>53,779</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>996</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>319,416</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>55,468</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>2010</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>United States</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>190,819</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>50,532</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Europe</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>33,822</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Asia Pacific</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>50,571</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>442</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>275,212</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>50,974</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Long-lived
assets consist of property, plant and equipment, net and assets manufactured for internal use. Operations in Europe and Asia Pacific consist of
sales and service organizations. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;International
revenue, including export sales from U.S. manufacturing facilities to foreign customers, sales by foreign subsidiaries and branches was $142.8&nbsp;million (70.2% of
total revenue) in 2012, $231.0&nbsp;million (72.3% of total revenue) in 2011, and $208.5&nbsp;million (75.8% of total revenue) in 2010. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Note&nbsp;18. Income Taxes  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Income (loss) before income taxes are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>United States</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(37,682</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,622</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(21,526</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5,294</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>4,849</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>4,265</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (loss) before income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(32,388</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,471</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(17,261</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-25</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=6,SEQ=65,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=402828,FOLIO='F-25',FILE='DISK112:[12ZDL1.12ZDL76601]FQ76601A.;14',USER='DPERRY',CD='27-FEB-2013;17:33' -->
<!-- THIS IS THE END OF A COMPOSITION COMPONENT -->

<P style="font-family:times;"><FONT SIZE=2><A
NAME="page_fs76601_1_26"> </A>


<!-- COMMAND=ADD_BASECOLOR,"Black" -->




<!-- COMMAND=ADD_DEFAULTFONT,"font-family:times;" -->




<!-- COMMAND=ADD_TABLESHADECOLOR,"#CCEEFF" -->




<!-- COMMAND=ADD_STABLERULES,"border-bottom:solid #000000 1.0pt;" -->




<!-- COMMAND=ADD_DTABLERULES,"border-bottom:double #000000 2.25pt;" -->




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</FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Income
taxes (credits) are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Current:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>United States</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Federal</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:30pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>State</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>82</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>163</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>309</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>738</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,646</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,528</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total current</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>820</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,809</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,837</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Deferred:</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>826</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>585</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,525</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Total deferred</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>826</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>585</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,525</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,646</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,394</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>312</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Reconciliations
of income taxes at the United States Federal statutory rate to the effective income tax rate are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="44pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Years ended December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2010 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=8 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income (credit) at the United States statutory rate</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(11,336</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,615</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(6,041</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>State income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>53</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>31</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>309</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Unrecognized tax benefits</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(832</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>899</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>842</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Effect of change in valuation allowance</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>12,662</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(3,160</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6,550</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign income tax rate differentials</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(788</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(365</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,490</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Restoration of foreign deferred tax assets</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,329</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign dividend</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>383</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stock options</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,298</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Deemed distribution from foreign subsidiaries</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>149</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,533</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,152</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other, net</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>57</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>841</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(681</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:20pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Income taxes</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,646</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,394</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>312</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-26</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>

<!-- ZEQ.=1,SEQ=66,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=161201,FOLIO='F-26',FILE='DISK112:[12ZDL1.12ZDL76601]FS76601A.;9',USER='DPERRY',CD='27-FEB-2013;17:34' -->
<A NAME="page_fs76601_1_27"> </A>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Significant
components of current and long-term deferred income taxes are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="56pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="56pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=11 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>As of December&nbsp;31, </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Current </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Long Term </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Current </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Long Term </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=11 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Federal net operating loss carryforwards</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>88,088</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>79,163</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>State net operating loss carryforwards</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,181</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,685</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Foreign net operating loss carryforwards</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,853</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,821</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Federal tax credit carryforwards</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>17,814</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>15,505</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>State tax credit carryforwards</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9,051</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>9,051</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Unremitted earnings of foreign subsidiaries</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(8,580</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(10,370</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Intangible assets</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>661</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>803</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Property, plant and equipment</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5,925</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>5,589</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Accrued compensation</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>352</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>368</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>541</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Inventories</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>22,582</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(215</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>22,447</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Stock compensation</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>4,378</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>3,970</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Warranty</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>612</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>36</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,293</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>51</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Other</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,820</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>917</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,243</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(3,814</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Deferred taxes, gross</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>25,366</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>121,477</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>25,524</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>104,454</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Valuation allowance</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(25,062</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(119,605</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(24,160</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(102,814</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Deferred taxes, net</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>304</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,872</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,364</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,640</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;At
December&nbsp;31, 2012, the Company had $146.8&nbsp;million of deferred tax assets relating to net operating loss carryforwards, tax credit carryforwards and other temporary
differences, which are available to reduce income taxes in future years. A valuation allowance must be established when it is "more likely than not" that all or a portion of deferred tax assets will
not be realized. A review of all available positive and negative evidence needs to be considered, including a company's performance, the market environment in which the company operates, length of
carryback and carryforward periods, existing sales backlog, and projections of future operating results. Where there are cumulative losses in recent years there is a strong presumption that a
valuation allowance is needed. This presumption can be overcome in very limited circumstances. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company is in a three year cumulative loss position in the United States. As a result, the Company maintains a 100% valuation allowance for entities in those tax jurisdictions to
reduce the carrying value of deferred tax assets to zero. The Company will continue to maintain a full valuation allowance for those tax assets until sustainable future levels of profitability are
evident. Changes in the valuation allowance in 2012 and 2011 were attributable to changes in the composition of temporary differences and changes in net operating loss carryforwards. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;At
December&nbsp;31, 2012, the Company has federal and state net operating loss carryforwards of approximately $89.3&nbsp;million and foreign net operating loss carryforwards of
approximately $1.9&nbsp;million expiring principally between 2013 and 2032. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company has research and development and other tax credit carryforwards of approximately $21.8&nbsp;million at December&nbsp;31, 2012 that can be used to reduce future federal
and state income tax liabilities. These tax credit carryforwards expire principally between 2022 and 2028. In addition, the Company has foreign tax credit carryforwards of approximately
$5.0&nbsp;million at December&nbsp;31, 2012 that are available to reduce future U.S. income tax liabilities subject to certain limitations. These foreign tax credit carryforwards expire between
2013 and 2016. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-27</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=2,SEQ=67,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=306064,FOLIO='F-27',FILE='DISK112:[12ZDL1.12ZDL76601]FS76601A.;9',USER='DPERRY',CD='27-FEB-2013;17:34' -->
<A NAME="page_fs76601_1_28"> </A>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;It
is Company policy to provide taxes for the total anticipated tax impact of the undistributed earnings of our wholly-owned foreign subsidiaries', as such earnings are not expected to
be reinvested indefinitely. The Company anticipates that US tax resulting from remitting such earnings will be off-set by net operating loss or credit carryforwards to the extent
available. In addition, the Company does not anticipate incurring a foreign withholding tax on remitting such earnings since it does not intend to remit the earnings as dividends. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company and its subsidiaries file income tax returns in the U.S. federal jurisdiction and various states and foreign jurisdictions. The Company and most foreign subsidiaries are
subject to income tax examinations by tax authorities for all years dating back to 2001. The Company's policy is to recognize interest related to unrecognized tax benefits as interest expense and
penalties as operating expenses. The Company believes that it has appropriate support for the income tax positions taken and to be taken on its tax returns and that its accruals for tax liabilities
are adequate for all open years based on an assessment of many factors including past experience and interpretations of tax law applied to the facts of each matter. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;At
December&nbsp;31, 2012, the Company had unrecognized tax benefits of approximately $7.7&nbsp;million, of which approximately $5.1&nbsp;million reduced the Company's deferred tax
assets and the offsetting valuation allowance and $2.6&nbsp;million was recorded in other long-term liabilities. The Company does not expect any significant changes in unrecognized tax
benefits in 2013. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;A
reconciliation of the beginning and ending balance of unrecognized tax benefits are as follows: </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="39pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2012 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=5 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at beginning of year</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,089</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>6,965</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Increases in unrecognized tax benefits as a result of tax positions taken during a prior period</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>646</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,124</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Decreases in unrecognized tax benefits related to settlements with tax authorities</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(880</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Increases in unrecognized tax benefits as a result of tax positions taken during the current period</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>663</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(799</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Balance at end of year</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,719</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,089</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Recorded as other long-term liability</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>2,646</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>3,244</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Recorded as a decrease in deferred tax assets and offsetting valuation allowance</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>5,073</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,845</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:solid #000000 1.0pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>7,719</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>8,089</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR style="font-size:1.5pt;" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
<TD COLSPAN=2 ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;border-bottom:double #000000 2.25pt;">&nbsp;</TD>
<TD VALIGN="BOTTOM" style="font-family:times;">&nbsp;</TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B> Note&nbsp;19. Quarterly Results of Operations (unaudited)  </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:54%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="150%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="50pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="49pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Dec.&nbsp;31,<BR>
2012(1) </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Sept.&nbsp;30,<BR>
2012(2) </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>June&nbsp;30,<BR>
2012(3) </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>March&nbsp;31,<BR>
2012(4) </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Dec.&nbsp;31,<BR>
2011(5) </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Sept.&nbsp;30,<BR>
2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>June&nbsp;30,<BR>
2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>March&nbsp;31,<BR>
2011 </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=23 ALIGN="CENTER" style="font-family:times;"><FONT SIZE=1><B>(in thousands, except per share data)</B></FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Revenue</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>44,624</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>44,640</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>59,114</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>55,007</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>60,411</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>72,455</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>93,380</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>93,170</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Gross profit</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>480</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>14,367</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>22,788</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>20,536</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>22,623</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>26,895</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>34,138</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>31,081</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(14,818</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(8,718</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(471</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(10,027</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(2,113</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,151</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>4,227</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>1,812</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="BOTTOM">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Net income (loss) per share basic and diluted</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.14</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.08</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.00</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.09</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>(0.02</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.01</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.04</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>0.02</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
</TABLE></DIV>
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 </DIV>
<DIV style="padding:0pt;position:relative;text-align:left;margin-left:10%;">
 <DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(1)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Gross
profit and net loss include a $13.4&nbsp;million provision for excess inventory related to the Company's comprehensive review of its worldwide
inventory levels. Net loss includes a $7.9&nbsp;million gain on sale of the Company's dry strip assets and intellectual property to Lam Research; </FONT></DD></DL>
 </DIV>
 <P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-28</FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
<!-- ZEQ.=3,SEQ=68,EFW="2213243",CP="AXCELIS TECHNOLOGIES, INC.",DN="1",CHK=303612,FOLIO='F-28',FILE='DISK112:[12ZDL1.12ZDL76601]FS76601A.;9',USER='DPERRY',CD='27-FEB-2013;17:34' -->
<A NAME="page_fs76601_1_29"> </A>
 <DIV style="padding:0pt;position:relative;text-align:left;margin-left:10%;">
 <UL>

<P style="font-family:times;"><FONT SIZE=2>restructuring
charges of $0.6&nbsp;million; and a $2.1&nbsp;million one-time marketing expense associated with the Company's evaluation programs.  </FONT></P>

</UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(2)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Net
loss includes restructuring charges of $0.6&nbsp;million.
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(3)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Net
loss includes restructuring charges of $0.1&nbsp;million and a tax expense of $0.8&nbsp;million related to an uncertain tax position in a certain
foreign jurisdiction.
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(4)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Net
loss includes restructuring charges of $2.9&nbsp;million.
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(5)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Net
loss includes a tax expense of $0.9&nbsp;million related to an uncertain tax position in a certain foreign jurisdiction. </FONT></DD></DL>
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B> Note&nbsp;20. Subsequent Events  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In order to align manufacturing and operating expense levels to changing business conditions, the Company implemented a headcount
reduction in the first quarter of 2013. The Company anticipates recording employee termination benefits and other related costs of approximately $1.1&nbsp;million during the first quarter of 2013. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>F-29</FONT></P>

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</FONT></P>

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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="jc76601_signatures"> </A>
<A NAME="toc_jc76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Signatures    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Pursuant to the requirements of Section&nbsp;13 or 15(d) of the Securities Exchange Act of 1934, the Registrant has duly caused this
report to be signed on its behalf by the undersigned, thereunto duly authorized. </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

<!-- COMMAND=ADD_TABLEWIDTH,"100%" -->

<!-- User-specified TAGGED TABLE -->
<DIV ALIGN="CENTER"><TABLE width="100%"  BORDER=0 CELLSPACING=0 CELLPADDING=0>
<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="49%" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="22pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="46%" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD COLSPAN=3 style="font-family:times;"><FONT SIZE=2>AXCELIS TECHNOLOGIES,&nbsp;INC.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>
&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>By:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;MARY G. PUMA<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT>
 </TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2>Dated: March&nbsp;1, 2013</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>Mary G. Puma, </FONT><FONT SIZE=2><I>Chief Executive Officer</I></FONT></TD>
</TR>
</TABLE></DIV>
<!-- end of user-specified TAGGED TABLE -->
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Pursuant
to the requirements of the Securities Exchange Act of 1934, this report has been signed below by the following persons on behalf of the Registrant and in the capacities and on
the date indicated. </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="225pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="89pt" style="font-family:times;"></TD>
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<TR VALIGN="BOTTOM">
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Signature </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Title </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Date </B></FONT></TH>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>
&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>
&nbsp;</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>/s/&nbsp;MARY G. PUMA<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Mary G. Puma</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>Director and Principal Executive Officer</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;JAY ZAGER<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Jay Zager</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>Principal Accounting and Financial Officer</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;R. JOHN FLETCHER<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> R. John Fletcher</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>Director</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;STEPHEN R. HARDIS<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Stephen R. Hardis</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>Director</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;WILLIAM C. JENNINGS<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> William C. Jennings</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>Director</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>March&nbsp;1, 2013 </FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;JOSEPH P. KEITHLEY<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Joseph P. Keithley</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>Director</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;PATRICK H. NETTLES<BR>


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</FONT> <FONT SIZE=2> Patrick H. Nettles</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>Director</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
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<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;H. BRIAN THOMPSON<BR>


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</FONT> <FONT SIZE=2> H. Brian Thompson</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>Director</FONT></TD>
<TD VALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD ALIGN="CENTER" VALIGN="CENTER" style="font-family:times;"><BR><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
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<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="je76601_exhibit_index"> </A>
<A NAME="toc_je76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit Index    <BR>    </B></FONT></P>
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<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Exhibit No. </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Description </B></FONT></TH>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;3.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>Amended and Restated Certificate of Incorporation of the registrant, as adopted May&nbsp;6, 2009. Incorporated by reference to Exhibit&nbsp;3.1 of the Company's Form&nbsp;8-K filed with the Commission on May&nbsp;11,
2009.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>&nbsp;&nbsp;3.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Bylaws of the Company, as amended as of August&nbsp;8, 2007. Incorporated by reference to Exhibit&nbsp;3.2 of the Company's Form&nbsp;10-Q for the quarter ended June&nbsp;30, 2007, filed with the Commission on
August&nbsp;9, 2007.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>&nbsp;&nbsp;4.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Specimen Stock Certificate. Incorporated by reference to Exhibit&nbsp;4.1 of the Company's Registration Statement on Form&nbsp;S-1 (Registration No.&nbsp;333-36330).</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.1*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Axcelis Technologies,&nbsp;Inc. 2000 Stock Plan, as amended through June&nbsp;23, 2005. Incorporated by reference to Exhibit&nbsp;10.2 to the Company's Current Report on Form&nbsp;8-K filed with the Commission on
June&nbsp;28, 2005.</FONT></TD>
</TR>
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<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.2*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Axcelis Technologies,&nbsp;Inc. 2012 Equity Incentive Plan, as adopted on May&nbsp;2, 2012. Incorporated by reference to Exhibit&nbsp;99 to the Company's registration statement on Form&nbsp;S-8 filed with the
Commission on June&nbsp;30, 2012 (SEC File No.&nbsp;333-181750).</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.3*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Axcelis Management Incentive Plan, as amended and restated by the Compensation Committee of the Board of Directors on February&nbsp;11, 2010. Incorporated by reference to Exhibit&nbsp;10.2 of the Company's report on
Form&nbsp;10-K for the year ended December&nbsp;31, 2009 filed with the Commission on March&nbsp;15, 2010.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.4</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Form of Indemnification Agreement approved by the Board of Directors of the Company on February&nbsp;9, 2012 for use with each of its directors and officers, together with a schedule of each current indemnitee.
Incorporated by reference to Exhibit&nbsp;10.4 of the Company's report on Form&nbsp;10-K for the year ended December&nbsp;31, 2011 filed with the Commission on February&nbsp;29, 2012.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.5*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Form of Change in Control Agreement, as amended, as approved by the Board of Directors on April&nbsp;27, 2012 between the Company and each of its executive officers. Incorporated by reference to Exhibit&nbsp;10.5 of
the Company's report on Form&nbsp;10-Q for the quarter ended June&nbsp;30, 2012 filed with the Commission on August&nbsp;7, 2012.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.6*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Form of Employee non-qualified stock option grant under the 2000 Stock Plan, updated as of April&nbsp;5, 2002. Incorporated by reference to Exhibit&nbsp;10.1 of the Company's report on Form&nbsp;10-Q filed with the
Commission on November&nbsp;9, 2004.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.7*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Form of Non-Employee Director stock non-qualified stock option grant under the 2000 Stock Plan, updated as of July&nbsp;12, 2004. Incorporated by reference to Exhibit&nbsp;10.2 of the Company's report on
Form&nbsp;10-Q filed with the Commission on November&nbsp;9, 2004.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.8*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Form of Restricted Stock Unit Award Agreement for use under the 2000 Stock Plan. Incorporated by reference to Exhibit&nbsp;10.3 to the Company's Current Report on Form&nbsp;8-K filed with the Commission on
June&nbsp;28, 2005.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.9*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Form of Employee Non-Qualified Stock Option Certificate under the 2012 Equity Incentive Plan, adopted June&nbsp;18, 2012. Incorporated by reference to Exhibit&nbsp;10.2 of the Company's report on Form&nbsp;10-Q for
the quarter ended June&nbsp;30, 2012 filed with the Commission on August&nbsp;7, 2012.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.10*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Form of Non-Employee Director Non-Qualified Stock Option Certificate under the 2012 Equity Incentive Plan, adopted June&nbsp;18, 2012. Incorporated by reference to Exhibit&nbsp;10.3 of the Company's report on
Form&nbsp;10-Q for the quarter ended June&nbsp;30, 2012 filed with the Commission on August&nbsp;7, 2012.</FONT></TD>
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<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>10.11*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>Form of Restricted Stock Unit Award Agreement under the 2012 Equity Incentive Plan, adopted June&nbsp;18, 2012. Incorporated by reference to Exhibit&nbsp;10.4 of the Company's report on Form&nbsp;10-Q for the quarter
ended June&nbsp;30, 2012 filed with the Commission on August&nbsp;7, 2012</FONT></TD>
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<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.12*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Named Executive Officer Base Compensation at February&nbsp;29, 2012. Filed herewith.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.13*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Non-Employee Director Cash Compensation at February&nbsp;29, 2012. Filed herewith.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.14*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Amended and Restated Employment Agreement between the Company and Mary G. Puma dated November&nbsp;6, 2007. Incorporated by reference to Exhibit&nbsp;10.3 of the Company's report on Form&nbsp;10-Q for the quarter
ended September&nbsp;30, 2007 filed with the Commission on November&nbsp;8, 2007.</FONT></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.15*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Letter from Mary G. Puma to the Board of Directors dated May&nbsp;1, 2009, modifying her Amended and Restated Employment Agreement with the Company. Incorporated by reference to Exhibit&nbsp;10.1 of the Company's
report on Form&nbsp;8-K filed with the Commission on May&nbsp;11, 2009.</FONT></TD>
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<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.16*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Letter Agreement with Mary G. Puma dated September&nbsp;22, 2011. Incorporated by reference to Exhibit&nbsp;10.14 of the Company's report on Form&nbsp;10-K for the year ended December&nbsp;31, 2011 filed with the
Commission on February&nbsp;29, 2012.</FONT></TD>
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<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.17*</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Letter Agreement with Mary G. Puma dated February&nbsp;10, 2012. Filed herewith.</FONT></TD>
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<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.18</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Second Amended and Restated Loan and Security Agreement dated as of April&nbsp;25, 2011 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Incorporated by reference to
Exhibit&nbsp;10.1 to the Company's report on Form&nbsp;10-Q for the quarter ended March&nbsp;31, 2011 filed with the Commission on May&nbsp;6, 2011.</FONT></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.19</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>First Loan Modification Agreement dated as of December&nbsp;27, 2011 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank with other Company subsidiaries confirming
guaranties. Incorporated by reference to Exhibit&nbsp;10.16 of the Company's report on Form&nbsp;10-K for the year ended December&nbsp;31, 2011 filed with the Commission on February&nbsp;29, 2012.</FONT></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.20</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Second Loan Modification Agreement dated as of March&nbsp;5, 2012 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Incorporated by reference to Exhibit&nbsp;10.1 of
the Company's report on Form&nbsp;10-Q for the quarter ended March&nbsp;31, 2012 filed with the Commission on May&nbsp;4, 2012.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.21</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Third Loan Modification Agreement dated as of September&nbsp;10, 2012 between the Company and Axcelis Technologies CCS Corporation, as borrowers, and Silicon Valley Bank. Incorporated by reference to Exhibit&nbsp;10.1
of the Company's report on Form&nbsp;10-Q for the quarter ended September&nbsp;30, 2012 filed with the Commission on November&nbsp;5, 2012.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.22</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>License Agreement dated as of March&nbsp;30, 2009 between the Company and SEN Corporation. Incorporated by reference to Exhibit&nbsp;10.1 to the Company's Current Report on Form&nbsp;8-K filed with the Commission on
April&nbsp;3, 2009.</FONT></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.23</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Asset Purchase Agreement dated December&nbsp;3, 2012 between Axcelis Technologies,&nbsp;Inc. and Lam Research Corporation. Incorporated by reference to Exhibit&nbsp;10.1 to the Company's Current Report on
Form&nbsp;8-K filed with the Commission on December&nbsp;4, 2012.</FONT></TD>
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<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>10.24</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Transition Agreement dated December&nbsp;3, 2012 between Axcelis Technologies,&nbsp;Inc. and Lam Research Corporation. Incorporated by reference to Exhibit&nbsp;10.2 to the Company's Current Report on Form&nbsp;8-K
filed with the Commission on December&nbsp;4, 2012.</FONT></TD>
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<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Description </B></FONT></TH>
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<TD style="font-family:times;"><FONT SIZE=2>14.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>Ethical Business Conduct at Axcelis, revised through January 2003. Incorporated by reference to Exhibit&nbsp;14.1 of the Company's report on Form&nbsp;10-K filed with the Commission on March&nbsp;28, 2003.</FONT></TD>
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<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>21.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Subsidiaries of the Company. Filed herewith.</FONT></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>23.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Consent of Ernst&nbsp;&amp; Young&nbsp;LLP, Independent Registered Public Accounting Firm. Filed herewith.</FONT></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>31.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Certification of the Principal Executive Officer under Exchange Act Rule&nbsp;13a-14(a)/15d-14(a) (Section&nbsp;302 of the Sarbanes-Oxley Act), dated February&nbsp;29, 2012. Filed herewith.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>31.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Certification of the Principal Financial Officer under Exchange Act Rule&nbsp;13a-14(a)/15d-14(a) (Section&nbsp;302 of the Sarbanes-Oxley Act), dated February&nbsp;29, 2012. Filed herewith.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>32.1</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Certification of the Principal Executive Officer pursuant to Section&nbsp;1350 of Chapter&nbsp;63 of title 18 of the United States Code (Section&nbsp;906 of the Sarbanes-Oxley Act), dated February&nbsp;29, 2012. Filed
herewith.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>32.2</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>Certification of the Principal Financial Officer pursuant to Section&nbsp;1350 of Chapter&nbsp;63 of title 18 of the United States Code (Section&nbsp;906 of the Sarbanes-Oxley Act), dated February&nbsp;29, 2012. Filed
herewith.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>101</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>The following materials from the Company's Form&nbsp;10-K for the year ended December&nbsp;31, 2012, formatted in eXtensible Business Reporting Language (XBRL): (i)&nbsp;Consolidated Statements of Operations,
(ii)&nbsp;Consolidated Statement of Comprehensive Income (iii)&nbsp;Consolidated Balance Sheets, (iv)&nbsp;Consolidated Statements of Equity, (v)&nbsp;Consolidated Statements of Cash Flows, and (vi)&nbsp;Notes to Consolidated Financial
Statements.</FONT></TD>
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<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>*</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Indicates
a management contract or compensatory plan. </FONT></DD></DL>
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<P style="font-family:times;"><FONT SIZE=2><B>You may obtain a copy of any of these exhibits free of charge either on our website at http://www.axcelis.com or by contacting Investor Relations at Axcelis
Technologies,&nbsp;Inc., 108&nbsp;Cherry Hill Drive, Beverly, MA&nbsp;01915-1053.</B></FONT></P>

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NAME="jg76601_schedule_ii_#151;valuation_and__sch03215"> </A>
<A NAME="toc_jg76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Schedule&nbsp;II&#151;Valuation and Qualifying Accounts<BR>  Axcelis Technologies,&nbsp;Inc.<BR>  (In thousands)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:73%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TR><!-- TABLE COLUMN WIDTHS SET -->
<TD WIDTH="" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="60pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="54pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="53pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="42pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="51pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
<!-- TABLE COLUMN WIDTHS END --></TR>

<TR VALIGN="BOTTOM">
<TH ALIGN="LEFT" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT><BR></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Balance at<BR>
Beginning of<BR>
Period </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Charged to<BR>
Costs and<BR>
Expenses </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Deductions </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Other(*) </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Balance at<BR>
End of<BR>
Period </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Year Ended December&nbsp;31, 2012</B></FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Allowance&nbsp;for&nbsp;doubtful&nbsp;accounts&nbsp;and&nbsp;returns</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>411</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&#151;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(112</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>6</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>305</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Reserve for excess and obsolete inventory</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>22,778</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>14,492</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(4,819</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,150</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>33,601</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Year Ended December&nbsp;31, 2011</B></FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Allowance for doubtful accounts and returns</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,357</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(535</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(449</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>38</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>411</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Reserve for excess and obsolete inventory</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27,517</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,015</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(5,583</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(171</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>22,778</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-top:12pt;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2><B>Year Ended December&nbsp;31, 2010</B></FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Allowance for doubtful accounts and returns</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,390</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(1,120</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(17</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>104</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,357</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Reserve for excess and obsolete inventory</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>36,980</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,015</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(11,224</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>(254</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>27,517</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
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 <DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(*)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Represents
foreign currency translation adjustments. </FONT></DD></DL>
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<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="kg76601_exhibit_10.12"> </A>
<A NAME="toc_kg76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;10.12    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="kg76601_axcelis_technologies,_inc._nam__axc02916"> </A>
<A NAME="toc_kg76601_2"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Named Executive Officer Base Compensation at March&nbsp;1, 2013    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies,&nbsp;Inc. (the
"Company") and each of:</FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>the Company's principal executive officer (Mary G. Puma), </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>the Company's principal financial officer (Jay Zager), and </FONT><FONT SIZE=2>
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>&#149;</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>the three most highly compensated other executive officers serving as executive officers at December&nbsp;31, 2012. </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;These
executive officers are referred to herein as "named executive officers" or "NEOs." </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Other
than in the case of Mary G. Puma, the Company has not entered into any written agreements with its named executive officers addressing the amount of base salary due to the
executive. The Company's Amended and Restated Employment Agreement with Ms.&nbsp;Puma ("Puma Employment Agreement") is listed as an Exhibit to this Form&nbsp;10-K (incorporated by
reference to Exhibit&nbsp;10.3 to the Company's Form&nbsp;10-Q for the quarter ended September&nbsp;30, 2007 filed on November&nbsp;8, 2007). </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
Company maintains that all executive officers, other than Ms.&nbsp;Puma, are employees at will and that the Company has no obligation to continue their employment, other in cases
where such obligation arises under the Change of Control Agreements described in our Proxy Statement and filed as an Exhibit to this Form&nbsp;10-K. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Rate of Base Pay  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In the course of the employment relationship with each NEO, the Company communicates to the named executive officer the amount of base
salary approved by the Compensation Committee of the Board of Directors, which compensation is subject to change in the discretion of the Compensation Committee of the Board of Directors (provided
Ms.&nbsp;Puma's employment agreement sets a minimum base pay amount). The following table sets forth the annual base salary as communicated to the named executive officers of the Company as in
effect on March&nbsp;1, 2013, which are subject to reductions discussed below: </FONT></P>
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<TH NOWRAP  ALIGN="LEFT" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:88pt;"><FONT SIZE=1><B>Named Executive Officer

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 </B></FONT></DIV></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Title </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Rate of Annual<BR>
Base Pay Prior to<BR>
Reductions </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Mary G. Puma</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>President and Chief Executive Officer</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>550,000</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Jay Zager</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>Executive VP and Chief Financial Officer</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>350,000</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>William Bintz</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>Executive VP, Product Development, Engineering and Marketing</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>320,000</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Kevin Brewer</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>Executive VP, Global Operations</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>330,000</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Lynnette C. Fallon</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>Executive VP HR/Legal and General Counsel</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2>320,000</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
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 </DIV>
 <P style="font-family:times;"><FONT SIZE=2><B> Reductions to Base Pay in 2013  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In lieu of $125,000 of base pay in 2013, Ms.&nbsp;Puma agreed to receive a restricted stock unit grant for 147,637 shares which will
vest quarterly on March&nbsp;15, 2013, June&nbsp;15, 2013, September&nbsp;15, 2013 and December&nbsp;15, 2013, assuming continuation of employment. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;In
lieu of $32,000 of base pay in 2013, Mr.&nbsp;Bintz agreed to receive a restricted stock unit grant for 37,795 shares which will vest quarterly on March&nbsp;15, 2013,
June&nbsp;15, 2013, September&nbsp;15, 2013 and December&nbsp;15, 2013, assuming continuation of employment. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;All
of the executive officers are expected to participate in unpaid shutdown weeks announced by the Company in 2013, one of which occurred prior to March&nbsp;1, 2013. Each unpaid
shutdown week will reduce the executive's base pay by approximately 2%. </FONT></P>

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<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_kg76601_1">Exhibit 10.12</A></FONT><BR>
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<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_kg76601_2">Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 1, 2013</A></FONT><BR>
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<TYPE>EX-10.13
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<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="ki76601_exhibit_10.13"> </A>
<A NAME="toc_ki76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;10.13    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="ki76601_axcelis_technologies,_inc._non__axc02812"> </A>
<A NAME="toc_ki76601_2"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Non-Employee Director Cash Compensation at March&nbsp;14, 2012    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies,&nbsp;Inc. (the
"Company") and each of its non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows: </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="ki76601_annual_retainers_(paid_quarterly_in_advance)"> </A>
<A NAME="toc_ki76601_3"> </A>
<BR></FONT><FONT SIZE=2><B>  Annual Retainers (paid quarterly in advance)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="45pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TH NOWRAP  ALIGN="LEFT" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:85pt;"><FONT SIZE=1><B>Board Member Position

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 </B></FONT></DIV></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Amount </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Lead Director</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>50,000</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Non-Employee Board Member (not Lead Director)</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>30,000</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Audit Committee Chair*</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>15,000</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Compensation Committee Chair*</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>10,000</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Nominating Committee Chair*</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>7,500</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
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 <DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>*</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Retainers
for Committee Chairs are in addition to the retainer payable to all non-employee Board members. </FONT></DD></DL>
 </DIV>
 <P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;To
the extent that other committees are formed by the Board, similar retainers may be approved for the committee chairmen. </FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="ki76601_meeting_fees_(payable_quarterly_in_arrears)"> </A>
<A NAME="toc_ki76601_4"> </A>
<BR></FONT><FONT SIZE=2><B>  Meeting Fees (payable quarterly in arrears)    <BR>    </B></FONT></P>
 <DIV style="padding:0pt;position:relative;width:70%;margin-left:15%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="7pt" ALIGN="RIGHT" style="font-family:times;"></TD>
<TD WIDTH="97pt" style="font-family:times;"></TD>
<TD WIDTH="12pt" style="font-family:times;"></TD>
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<TH NOWRAP  ALIGN="LEFT" style="font-family:times;"><DIV style="border-bottom:solid #000000 1.0pt;margin-bottom:0pt;width:47pt;"><FONT SIZE=1><B>Meeting Type

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 </B></FONT></DIV></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
<TH COLSPAN=2 ALIGN="CENTER" style="font-family:times;border-bottom:solid #000000 1.0pt;"><FONT SIZE=1><B>Amount Per Meeting </B></FONT></TH>
<TH style="font-family:times;"><FONT SIZE=1>&nbsp;</FONT></TH>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>In Person Board Meetings</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>2,000</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="White" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>Telephone Board Meetings</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,000</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR BGCOLOR="#CCEEFF" VALIGN="TOP">
<TD VALIGN="BOTTOM" style="font-family:times;"><p style="font-family:times;margin-left:10pt;text-indent:-10pt;"><FONT SIZE=2> </FONT><FONT SIZE=2>In Person or Telephone Committee Meetings**</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD ALIGN="RIGHT"  VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>$</FONT></TD>
<TD ALIGN="RIGHT" VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>1,000</FONT></TD>
<TD VALIGN="BOTTOM" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
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<DIV style="padding:0pt;position:relative;text-align:left;margin-left:15%;">
 <DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>**</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Committee
meeting fees are paid only to committee members, and not to other Board me members, attending committee meetings. </FONT></DD></DL>
 </DIV>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Non-employee
directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings.
Non-employee directors do not receive any Company-paid perquisites. </FONT></P>

<HR NOSHADE>
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<P><br><A NAME="12ZDL76601_3">QuickLinks</A><br></P><!-- TOC_BEGIN -->
<UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ki76601_1">Exhibit 10.13</A></FONT><BR>
</UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ki76601_2">Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at March 14, 2012</A></FONT><BR>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ki76601_3">Annual Retainers (paid quarterly in advance)</A></FONT><BR>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ki76601_4">Meeting Fees (payable quarterly in arrears)</A></FONT><BR>
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<TYPE>EX-10.17
<SEQUENCE>4
<FILENAME>a2213243zex-10_17.htm
<DESCRIPTION>EX-10.17
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<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="kk76601_exhibit_10.17"> </A>
<A NAME="toc_kk76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;10.17    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B>Lynnette C. Fallon<BR>
Executive Vice President HR/Legal and General Counsel</B></FONT><BR><FONT SIZE=2><B><I>Tel: (978)&nbsp;787-4120<BR>
Fax: (978)&nbsp;787-4090</I></B></FONT></P>

<P style="font-family:times;"><FONT
SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;February&nbsp;10,
2012 </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>Mary
G. Puma, Chairman and Chief Executive Officer<BR>
Axcelis Technologies,&nbsp;Inc.<BR>
108 Cherry Hill Drive<BR>
Beverly, Massachusetts 01915 </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;</FONT><FONT
SIZE=2><I>Re: Base Compensation of Chief Executive Officer and Chairman</I></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>Dear
Mary: </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;This
letter extends the arrangement between Axcelis Technologies,&nbsp;Inc. and you regarding your base pay increase approved by the Compensation Committee on April&nbsp;26, 2011. We
have agreed to further defer the implementation of this increase until January&nbsp;1, 2013. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Notwithstanding
the delay in effectiveness of this salary increase, in the event that you are at any time entitled to separation pay under your Employment Agreement or your Change of
Control Agreement with the Company, both dated as of November&nbsp;6, 2007, your base compensation rate will be deemed to be the rate approved by the Compensation Committee on April&nbsp;26, 2011
and all amounts due to you shall be calculated as if such increase had become effective on May&nbsp;1, 2011 as initially contemplated by the Compensation Committee. </FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Please
sign below to indicate your agreement to the foregoing. Thank you. </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;margin-left:10%;">
<p style="font-family:times;"></FONT></P>

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<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD COLSPAN=3 style="font-family:times;"><FONT SIZE=2>Best regards,</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>
&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD COLSPAN=3 style="font-family:times;"><BR><FONT SIZE=2>AXCELIS TECHNOLOGIES,&nbsp;INC.</FONT></TD>
</TR>
<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2><BR>
&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>By:</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD style="font-family:times;"><BR><FONT SIZE=2>/s/&nbsp;LYNNETTE C. FALLON<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Lynnette C. Fallon<BR></FONT> <FONT SIZE=2><I>Executive Vice President HR/Legal and General Counsel</I></FONT></TD>
</TR>
</TABLE></DIV>
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<p style="font-family:times;"></FONT></P>

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<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>ACCEPTED AND AGREED:</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
</TR>
<TR VALIGN="BOTTOM">
<TD VALIGN="TOP" style="font-family:times;"><BR><FONT SIZE=2> /s/&nbsp;MARY G. PUMA<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Mary G. Puma</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2><BR>&nbsp;</FONT></TD>
<TD VALIGN="TOP" style="font-family:times;"><FONT SIZE=2><BR>
&nbsp;</FONT></TD>
</TR>
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<P><br><A NAME="12ZDL76601_4">QuickLinks</A><br></P><!-- TOC_BEGIN -->
<UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_kk76601_1">Exhibit 10.17</A></FONT><BR>
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<TYPE>EX-21.1
<SEQUENCE>5
<FILENAME>a2213243zex-21_1.htm
<DESCRIPTION>EX-21.1
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<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="km76601_exhibit_21.1"> </A>
<A NAME="toc_km76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;21.1    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="km76601_axcelis_technologies,_inc._exh__axc03127"> </A>
<A NAME="toc_km76601_2"> </A>
<BR></FONT><FONT SIZE=2><B>  Axcelis Technologies,&nbsp;Inc.<BR>  Exhibit&nbsp;21.1 to Form&nbsp;10-K for the year ended December&nbsp;31, 2012<BR>  Subsidiaries    <BR>    </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies,&nbsp;Inc. as of the date
hereof: </FONT></P>

<P style="font-family:times;"><FONT SIZE=2><B> Domestic Subsidiaries  </B></FONT></P>

<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>1.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies CCS Corporation a Delaware corporation  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>2.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Fusion
Technology International,&nbsp;Inc., a Delaware corporation  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>3.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies (Israel),&nbsp;Inc., a Delaware corporation  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>4.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Fusion
Investments,&nbsp;Inc., a Maryland corporation  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>5.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>High
Temperature Engineering Corporation, a Delaware corporation </FONT></DD></DL>

<P style="font-family:times;"><FONT SIZE=2><B> European Subsidiaries  </B></FONT></P>

<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>6.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies,&nbsp;GmbH (Germany)  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>7.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies, S.r.l (Italy)  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>8.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies, Sarl (France)  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>9.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies,&nbsp;Ltd. (U.K.) </FONT></DD></DL>

<P style="font-family:times;"><FONT SIZE=2><B> Asian Subsidiaries  </B></FONT></P>

<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>10.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies, KK (Japan)  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>11.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies Limited (Korea)  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>12.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies&nbsp;Ltd. (Taiwan)  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>13.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies Pte.&nbsp;Ltd. (Singapore)  </FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>14.</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Axcelis
Technologies Semiconductor Trading (Shanghai)&nbsp;Co.,&nbsp;Ltd. (Peoples Republic of China) </FONT></DD></DL>
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<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_km76601_1">Exhibit 21.1</A></FONT><BR>
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<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_km76601_2">Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2012 Subsidiaries</A></FONT><BR>
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<TYPE>EX-23.1
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<!-- TOC_END -->
<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="ko76601_exhibit_23.1"> </A>
<A NAME="toc_ko76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;23.1    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="ko76601_consent_of_independent__ko702330"> </A>
<A NAME="toc_ko76601_2"> </A>
<BR></FONT><FONT SIZE=2><B>  CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;We consent to the incorporation by reference in the following Registration Statements: </FONT></P>

<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(1)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Registration
Statement (Form&nbsp;S-8 No.&nbsp;333-181750) pertaining to the 2012 Equity Incentive Plan of Axcelis
Technologies,&nbsp;Inc.;
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(2)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Registration
Statement (Form&nbsp;S-8 No.&nbsp;333-49726) pertaining to the Employee Stock Purchase Plan of Axcelis
Technologies,&nbsp;Inc.; and
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(3)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Registration
Statements (Form&nbsp;S-8 No.&nbsp;333-49768 and No.&nbsp;333-120356) pertaining to the 2000 Stock
Plan of Axcelis Technologies,&nbsp;Inc.; </FONT></DD></DL>

<P style="font-family:times;"><FONT SIZE=2>of
our reports dated March&nbsp;1, 2013 with respect to the consolidated financial statements and schedule of Axcelis Technologies,&nbsp;Inc., and the effectiveness of internal control over
financial reporting of Axcelis Technologies',&nbsp;Inc., included in this Annual Report (Form&nbsp;10-K) of Axcelis Technologies,&nbsp;Inc. for the year ended December&nbsp;31,
2012. </FONT></P>

<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>
<UL>

<P style="font-family:times;"><FONT SIZE=2>/s/
Ernst&nbsp;&amp; Young&nbsp;LLP </FONT></P>

</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>Boston,
Massachusetts<BR>
March&nbsp;1, 2013 </FONT></P>

<HR NOSHADE>
<P style='font-family:times;page-break-before:always'></p>
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<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ko76601_1">Exhibit 23.1</A></FONT><BR>
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<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ko76601_2">CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM</A></FONT><BR>
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<TYPE>EX-31.1
<SEQUENCE>7
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<DESCRIPTION>EX-31.1
<TEXT>
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<!-- TOC_END -->
<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="kq76601_exhibit_31.1"> </A>
<A NAME="toc_kq76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;31.1    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="kq76601_certification_of_the_principal__cer04372"> </A>
<A NAME="toc_kq76601_2"> </A>
<BR></FONT><FONT SIZE=2><B>  CERTIFICATION<BR>  of the Principal Executive Officer<BR>  Pursuant to Rule&nbsp;13a-14(a)/15d-14(a) (implementing Section&nbsp;302 of the Sarbanes-Oxley Act)    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>I,
Mary G. Puma, certify that: </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;I
have reviewed this annual report on Form&nbsp;10-K of Axcelis Technologies,&nbsp;Inc.; </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Based
on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in
light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report; </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Based
on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition,
results of operations and cash flows of the company as of, and for, the periods presented in this report; </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
company's other certifying officer(s) and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act
Rules&nbsp;13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&nbsp;13a-15(f) and 15d-15(f))
for the company and have: </FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(a)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Designed
such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that
material information relating to the company, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being
prepared;
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(b)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Designed
such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to
provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting
principles;
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(c)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Evaluated
the effectiveness of the company's disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the
disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(d)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Disclosed
in this report any change in the company's internal control over financial reporting that occurred during the company's most recent fiscal quarter
(the registrant's fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the company's internal control over financial
reporting; and </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;5.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
company's other certifying officer(s) and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the company's
auditors and the audit committee of the company's board of directors (or persons performing the equivalent functions): </FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(a)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>All
significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to
adversely affect the company's ability to record, process, summarize and report financial information; and
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(b)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Any
fraud, whether or not material, that involves management or other employees who have a significant role in the registrant's internal control over
financial reporting. </FONT></DD></DL>
</UL>
 <DIV style="padding:0pt;position:relative;width:80%;text-align:left;margin-left:0%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="49%" style="font-family:times;"></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2>Date: March&nbsp;1, 2013</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>/s/&nbsp;MARY G. PUMA<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Mary G. Puma, </FONT><FONT SIZE=2><I>Chairman, Chief Executive Officer and President</I></FONT></TD>
</TR>
</TABLE>
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<P style='font-family:times;page-break-before:always'></p>
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<BR>
<P><br><A NAME="12ZDL76601_7">QuickLinks</A><br></P><!-- TOC_BEGIN -->
<UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_kq76601_1">Exhibit 31.1</A></FONT><BR>
</UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_kq76601_2">CERTIFICATION of the Principal Executive Officer Pursuant to Rule 13a-14(a)/15d-14(a) (implementing Section 302 of the Sarbanes-Oxley Act)</A></FONT><BR>
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</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>8
<FILENAME>a2213243zex-31_2.htm
<DESCRIPTION>EX-31.2
<TEXT>
<HTML>
<HEAD>
</HEAD>
<BODY BGCOLOR="#FFFFFF" LINK=BLUE  VLINK=PURPLE>
<BR>
<FONT SIZE=3 ><A HREF="#12ZDL76601_8">QuickLinks</A></FONT>
<font size=3> -- Click here to rapidly navigate through this document</font>

<P style="font-family:times;"><FONT SIZE=2>


<!-- COMMAND=ADD_BASECOLOR,"Black" -->




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</FONT></P>

<!-- TOC_END -->
<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="ks76601_exhibit_31.2"> </A>
<A NAME="toc_ks76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;31.2    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B> CERTIFICATION<BR>
of the Principal Financial Officer<BR>
Pursuant to Rule&nbsp;13a-14(a)/15d-14(a) (implementing Section&nbsp;302 of the Sarbanes-Oxley Act)  </B></FONT></P>


<P style="font-family:times;"><FONT SIZE=2>I,
Jay Zager, certify that: </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;I
have reviewed this annual report on Form&nbsp;10-K of Axcelis Technologies,&nbsp;Inc.; </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Based
on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in
light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report; </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Based
on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition,
results of operations and cash flows of the company as of, and for, the periods presented in this report; </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
company's other certifying officer(s) and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act
Rules&nbsp;13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&nbsp;13a-15(f) and 15d-15(f))
for the company and have: </FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(a)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Designed
such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that
material information relating to the company, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being
prepared;
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(b)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Designed
such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to
provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting
principles;
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(c)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Evaluated
the effectiveness of the company's disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the
disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(d)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Disclosed
in this report any change in the company's internal control over financial reporting that occurred during the company's most recent fiscal quarter
(the registrant's fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the company's internal control over financial
reporting; and </FONT></DD></DL>
</UL>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;5.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The
company's other certifying officer(s) and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the company's
auditors and the audit committee of the company's board of directors (or persons performing the equivalent functions): </FONT></P>

<UL>
<DL compact>
<DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(a)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>All
significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to
adversely affect the company's ability to record, process, summarize and report financial information; and
<BR><BR></FONT></DD><DT style='font-family:times;margin-bottom:-11pt;'><FONT SIZE=2>(b)</FONT></DT><DD style="font-family:times;"><FONT SIZE=2>Any
fraud, whether or not material, that involves management or other employees who have a significant role in the registrant's internal control over
financial reporting. </FONT></DD></DL>
</UL>
 <DIV style="padding:0pt;position:relative;width:80%;text-align:left;margin-left:0%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="49%" style="font-family:times;"></TD>
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<TD style="font-family:times;"><FONT SIZE=2>March&nbsp;1, 2013</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>/s/&nbsp;JAY ZAGER<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Jay Zager, </FONT><FONT SIZE=2><I>Executive Vice President and Chief Financial Officer</I></FONT></TD>
</TR>
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<BR>
<P><br><A NAME="12ZDL76601_8">QuickLinks</A><br></P><!-- TOC_BEGIN -->
<UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ks76601_1">Exhibit 31.2</A></FONT><BR>
</UL>
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</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>9
<FILENAME>a2213243zex-32_1.htm
<DESCRIPTION>EX-32.1
<TEXT>
<HTML>
<HEAD>
</HEAD>
<BODY BGCOLOR="#FFFFFF" LINK=BLUE  VLINK=PURPLE>
<BR>
<FONT SIZE=3 ><A HREF="#12ZDL76601_9">QuickLinks</A></FONT>
<font size=3> -- Click here to rapidly navigate through this document</font>

<P style="font-family:times;"><FONT SIZE=2>


<!-- COMMAND=ADD_BASECOLOR,"Black" -->




<!-- COMMAND=ADD_DEFAULTFONT,"font-family:times;" -->




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</FONT></P>

<!-- TOC_END -->
<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="ku76601_exhibit_32.1"> </A>
<A NAME="toc_ku76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;32.1    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><B> AXCELIS TECHNOLOGIES,&nbsp;INC.<BR>
Certification of the Chief Executive Officer<BR>
Pursuant to Section&nbsp;1350 of Chapter&nbsp;63 of title 18 of the United States Code  </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The undersigned Chief Executive Officer of Axcelis Technologies,&nbsp;Inc., a Delaware corporation, hereby certifies, for the
purposes of Section&nbsp;1350 of Chapter&nbsp;63 of title 18 of the United States Code (as implemented by Section&nbsp;906 of the Sarbanes-Oxley Act of 2002) as follows: </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;This
Form&nbsp;10-K annual report fully complies with the requirements of section&nbsp;13(a) or 15(d) of the Securities Exchange Act of 1934 (15 U.S.C. 78m or 78o(d)) and
the information contained herein fairly presents, in all material respects, the financial condition and results of operations of the Company. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;IN
WITNESS WHEREOF, the undersigned has executed this Certification as of March&nbsp;1, 2013. </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;text-align:left;margin-left:0%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="12pt" style="font-family:times;"></TD>
<TD WIDTH="49%" style="font-family:times;"></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>/s/&nbsp;MARY G. PUMA<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Mary G. Puma<BR></FONT> <FONT SIZE=2><I>Chairman, Chief Executive Officer and President of<BR>
Axcelis Technologies,&nbsp;Inc.</I></FONT></TD>
</TR>
</TABLE>
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<P style='font-family:times;page-break-before:always'></p>
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<BR>
<P><br><A NAME="12ZDL76601_9">QuickLinks</A><br></P><!-- TOC_BEGIN -->
<UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_ku76601_1">Exhibit 32.1</A></FONT><BR>
</UL>
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<DOCUMENT>
<TYPE>EX-32.2
<SEQUENCE>10
<FILENAME>a2213243zex-32_2.htm
<DESCRIPTION>EX-32.2
<TEXT>
<HTML>
<HEAD>
</HEAD>
<BODY BGCOLOR="#FFFFFF" LINK=BLUE  VLINK=PURPLE>
<BR>
<FONT SIZE=3 ><A HREF="#12ZDL76601_10">QuickLinks</A></FONT>
<font size=3> -- Click here to rapidly navigate through this document</font>

<P style="font-family:times;"><FONT SIZE=2>


<!-- COMMAND=ADD_BASECOLOR,"Black" -->




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<!-- TOC_END -->
<P ALIGN="RIGHT" style="font-family:times;"><FONT SIZE=2><A
NAME="kw76601_exhibit_32.2"> </A>
<A NAME="toc_kw76601_1"> </A>
<BR></FONT><FONT SIZE=2><B>  Exhibit&nbsp;32.2    <BR>    </B></FONT></P>

<P ALIGN="CENTER" style="font-family:times;"><FONT SIZE=2><A
NAME="kw76601_axcelis_technologies,_inc._cer__axc05352"> </A>
<A NAME="toc_kw76601_2"> </A>
<BR></FONT><FONT SIZE=2><B>  AXCELIS TECHNOLOGIES,&nbsp;INC.<BR>  Certification of the Chief Financial Officer<BR>  Pursuant to Section&nbsp;1350 of Chapter&nbsp;63 of title 18 of the United States Code    <BR>    </B></FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;The undersigned Chief Financial Officer of Axcelis Technologies,&nbsp;Inc., a Delaware corporation, hereby certifies, for the
purposes of Section&nbsp;1350 of Chapter&nbsp;63 of title 18 of the United States Code (as implemented by Section&nbsp;906 of the Sarbanes-Oxley Act of 2002) as follows: </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;This
Form&nbsp;10-K annual report fully complies with the requirements of section&nbsp;13(a) or 15(d) of the Securities Exchange Act of 1934 (15 U.S.C. 78m or 78o(d)) and
the information contained herein fairly presents, in all material respects, the financial condition and results of operations of the Company. </FONT></P>

<P style="font-family:times;"><FONT SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;IN
WITNESS WHEREOF, the undersigned has executed this Certification as of March&nbsp;1, 2013. </FONT></P>
 <DIV style="padding:0pt;position:relative;width:80%;text-align:left;margin-left:0%;">
<p style="font-family:times;"></FONT></P>

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<TD WIDTH="49%" style="font-family:times;"></TD>
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<TR VALIGN="TOP">
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>&nbsp;</FONT></TD>
<TD style="font-family:times;"><FONT SIZE=2>/s/&nbsp;JAY ZAGER<BR>


<HR NOSHADE SIZE="1.0pt" WIDTH="100%" COLOR="#000000">

</FONT> <FONT SIZE=2> Jay Zager<BR></FONT> <FONT SIZE=2><I>Executive Vice President and Chief Financial Officer of Axcelis Technologies,&nbsp;Inc.</I></FONT></TD>
</TR>
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<BR>
<P><br><A NAME="12ZDL76601_10">QuickLinks</A><br></P><!-- TOC_BEGIN -->
<UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_kw76601_1">Exhibit 32.2</A></FONT><BR>
</UL>
<FONT SIZE=2 style="font-family:times;"><A HREF="#toc_kw76601_2">AXCELIS TECHNOLOGIES, INC. Certification of the Chief Financial Officer Pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code</A></FONT><BR>
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<DOCUMENT>
<TYPE>EX-101.INS
<SEQUENCE>11
<FILENAME>acls-20121231.xml
<DESCRIPTION>EX-101.INS
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  <us-gaap:NonoperatingIncomeExpense id="Tag79" decimals="-3" contextRef="D2011" unitRef="USD">339000</us-gaap:NonoperatingIncomeExpense>
  <us-gaap:NonoperatingIncomeExpense id="Tag80" decimals="-3" contextRef="D2010" unitRef="USD">-3894000</us-gaap:NonoperatingIncomeExpense>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments id="Tag81" decimals="-3" contextRef="D2011" unitRef="USD">7471000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments id="Tag82" decimals="-3" contextRef="D2010" unitRef="USD">-17261000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
  <us-gaap:IncomeTaxExpenseBenefit id="Tag83" decimals="-3" contextRef="D2011" unitRef="USD">2394000</us-gaap:IncomeTaxExpenseBenefit>
  <us-gaap:IncomeTaxExpenseBenefit id="Tag84" decimals="-3" contextRef="D2010" unitRef="USD">312000</us-gaap:IncomeTaxExpenseBenefit>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag85" decimals="-3" contextRef="D2011" unitRef="USD">5077000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag86" decimals="-3" contextRef="D2010" unitRef="USD">-17573000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:ResearchAndDevelopmentExpense id="Tag87" decimals="-3" contextRef="D2012" unitRef="USD">40401000</us-gaap:ResearchAndDevelopmentExpense>
  <us-gaap:InvestmentIncomeInterest id="Tag88" decimals="-3" contextRef="D2012" unitRef="USD">45000</us-gaap:InvestmentIncomeInterest>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag89" decimals="2" contextRef="D2011" unitRef="USDPerShare">0.05</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag90" decimals="2" contextRef="D2010" unitRef="USDPerShare">-0.17</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding id="Tag91" decimals="-3" contextRef="D2011" unitRef="Shares">109098000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
  <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding id="Tag92" decimals="-3" contextRef="D2010" unitRef="Shares">104522000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
  <us-gaap:SalesRevenueGoodsNet id="Tag93" decimals="-3" contextRef="D2012" unitRef="USD">174309000</us-gaap:SalesRevenueGoodsNet>
  <us-gaap:SalesRevenueNet id="Tag94" decimals="-3" contextRef="D2012" unitRef="USD">203385000</us-gaap:SalesRevenueNet>
  <us-gaap:CostOfGoodsAndServicesSold id="Tag95" decimals="-3" contextRef="D2012" unitRef="USD">145214000</us-gaap:CostOfGoodsAndServicesSold>
  <us-gaap:RestructuringCharges id="Tag96" decimals="-3" contextRef="D2012" unitRef="USD">4169000</us-gaap:RestructuringCharges>
  <us-gaap:OperatingExpenses id="Tag97" decimals="-3" contextRef="D2012" unitRef="USD">89109000</us-gaap:OperatingExpenses>
  <us-gaap:NonoperatingIncomeExpense id="Tag98" decimals="-3" contextRef="D2012" unitRef="USD">-1450000</us-gaap:NonoperatingIncomeExpense>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag99" decimals="-3" contextRef="D2012" unitRef="USD">-34034000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic id="Tag100" decimals="-3" contextRef="D2011" unitRef="Shares">106234000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
  <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic id="Tag101" decimals="-3" contextRef="D2010" unitRef="Shares">104522000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
  <us-gaap:NetCashProvidedByUsedInOperatingActivitiesContinuingOperations id="Tag102" decimals="-3" contextRef="D2012" unitRef="USD">-10597000</us-gaap:NetCashProvidedByUsedInOperatingActivitiesContinuingOperations>
  <us-gaap:InventoryNet id="Tag103" decimals="-3" contextRef="I2011" unitRef="USD">120023000</us-gaap:InventoryNet>
  <us-gaap:AssetsCurrent id="Tag104" decimals="-3" contextRef="I2011" unitRef="USD">212033000</us-gaap:AssetsCurrent>
  <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities id="Tag105" decimals="-3" contextRef="D2010" unitRef="USD">32276000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
  <us-gaap:PropertyPlantAndEquipmentNet id="Tag106" decimals="-3" contextRef="I2011" unitRef="USD">37204000</us-gaap:PropertyPlantAndEquipmentNet>
  <us-gaap:RestrictedCashAndCashEquivalentsNoncurrent id="Tag107" decimals="-3" contextRef="I2011" unitRef="USD">104000</us-gaap:RestrictedCashAndCashEquivalentsNoncurrent>
  <us-gaap:AccountsPayableCurrent id="Tag108" decimals="-3" contextRef="I2011" unitRef="USD">19551000</us-gaap:AccountsPayableCurrent>
  <us-gaap:ProductWarrantyAccrualClassifiedCurrent id="Tag109" decimals="-3" contextRef="I2011" unitRef="USD">3556000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
  <us-gaap:LiabilitiesCurrent id="Tag110" decimals="-3" contextRef="I2011" unitRef="USD">47472000</us-gaap:LiabilitiesCurrent>
  <us-gaap:IncreaseDecreaseInDeferredRevenue id="Tag111" decimals="-3" contextRef="D2011" unitRef="USD">-4006000</us-gaap:IncreaseDecreaseInDeferredRevenue>
  <us-gaap:IncreaseDecreaseInDeferredRevenue id="Tag112" decimals="-3" contextRef="D2010" unitRef="USD">10601000</us-gaap:IncreaseDecreaseInDeferredRevenue>
  <us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable id="Tag113" decimals="-3" contextRef="D2011" unitRef="USD">507000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
  <us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable id="Tag114" decimals="-3" contextRef="D2010" unitRef="USD">-1406000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
  <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet id="Tag115" decimals="-3" contextRef="D2011" unitRef="USD">8788000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
  <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet id="Tag116" decimals="-3" contextRef="D2010" unitRef="USD">2841000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
  <us-gaap:IncomeTaxesPaidNet id="Tag117" decimals="-3" contextRef="D2012" unitRef="USD">848000</us-gaap:IncomeTaxesPaidNet>
  <us-gaap:NetCashProvidedByUsedInInvestingActivitiesContinuingOperations id="Tag118" decimals="-3" contextRef="D2012" unitRef="USD">8123000</us-gaap:NetCashProvidedByUsedInInvestingActivitiesContinuingOperations>
  <us-gaap:NetCashProvidedByUsedInOperatingActivitiesContinuingOperations id="Tag119" decimals="-3" contextRef="D2011" unitRef="USD">3533000</us-gaap:NetCashProvidedByUsedInOperatingActivitiesContinuingOperations>
  <us-gaap:NetCashProvidedByUsedInOperatingActivitiesContinuingOperations id="Tag120" decimals="-3" contextRef="D2010" unitRef="USD">-5892000</us-gaap:NetCashProvidedByUsedInOperatingActivitiesContinuingOperations>
  <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment id="Tag121" decimals="-3" contextRef="D2011" unitRef="USD">2124000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
  <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment id="Tag122" decimals="-3" contextRef="D2010" unitRef="USD">1403000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
  <us-gaap:IncreaseDecreaseInRestrictedCash id="Tag123" decimals="-3" contextRef="D2011" unitRef="USD">-3000</us-gaap:IncreaseDecreaseInRestrictedCash>
  <us-gaap:CashAndCashEquivalentsAtCarryingValue id="Tag124" decimals="-3" contextRef="I2012" unitRef="USD">44986000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
  <us-gaap:CashAndCashEquivalentsAtCarryingValue id="Tag125" decimals="-3" contextRef="I2011" unitRef="USD">46877000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
  <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment id="Tag126" decimals="-3" contextRef="D2012" unitRef="USD">591000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
  <us-gaap:IncreaseDecreaseInRestrictedCash id="Tag127" decimals="-3" contextRef="D2010" unitRef="USD">-7056000</us-gaap:IncreaseDecreaseInRestrictedCash>
  <us-gaap:NetCashProvidedByUsedInInvestingActivitiesContinuingOperations id="Tag128" decimals="-3" contextRef="D2011" unitRef="USD">-2121000</us-gaap:NetCashProvidedByUsedInInvestingActivitiesContinuingOperations>
  <us-gaap:NetCashProvidedByUsedInInvestingActivitiesContinuingOperations id="Tag129" decimals="-3" contextRef="D2010" unitRef="USD">5653000</us-gaap:NetCashProvidedByUsedInInvestingActivitiesContinuingOperations>
  <acls:PaymentsOfFinancingFeesAndOtherExpenses id="Tag130" decimals="-3" contextRef="D2011" unitRef="USD">200000</acls:PaymentsOfFinancingFeesAndOtherExpenses>
  <acls:PaymentsOfFinancingFeesAndOtherExpenses id="Tag131" decimals="-3" contextRef="D2010" unitRef="USD">523000</acls:PaymentsOfFinancingFeesAndOtherExpenses>
  <us-gaap:ProceedsFromStockOptionsExercised id="Tag132" decimals="-3" contextRef="D2011" unitRef="USD">288000</us-gaap:ProceedsFromStockOptionsExercised>
  <us-gaap:ProceedsFromStockOptionsExercised id="Tag133" decimals="-3" contextRef="D2010" unitRef="USD">553000</us-gaap:ProceedsFromStockOptionsExercised>
  <us-gaap:ProceedsFromStockPlans id="Tag134" decimals="-3" contextRef="D2011" unitRef="USD">503000</us-gaap:ProceedsFromStockPlans>
  <us-gaap:ProceedsFromStockPlans id="Tag135" decimals="-3" contextRef="D2010" unitRef="USD">569000</us-gaap:ProceedsFromStockPlans>
  <us-gaap:NetCashProvidedByUsedInFinancingActivitiesContinuingOperations id="Tag136" decimals="-3" contextRef="D2011" unitRef="USD">591000</us-gaap:NetCashProvidedByUsedInFinancingActivitiesContinuingOperations>
  <us-gaap:NetCashProvidedByUsedInFinancingActivitiesContinuingOperations id="Tag137" decimals="-3" contextRef="D2010" unitRef="USD">599000</us-gaap:NetCashProvidedByUsedInFinancingActivitiesContinuingOperations>
  <us-gaap:EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations id="Tag138" decimals="-3" contextRef="D2011" unitRef="USD">-869000</us-gaap:EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations>
  <us-gaap:EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations id="Tag139" decimals="-3" contextRef="D2010" unitRef="USD">363000</us-gaap:EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations>
  <us-gaap:NetCashProvidedByUsedInContinuingOperations id="Tag140" decimals="-3" contextRef="D2011" unitRef="USD">1134000</us-gaap:NetCashProvidedByUsedInContinuingOperations>
  <us-gaap:NetCashProvidedByUsedInContinuingOperations id="Tag141" decimals="-3" contextRef="D2010" unitRef="USD">723000</us-gaap:NetCashProvidedByUsedInContinuingOperations>
  <us-gaap:IncomeTaxesPaidNet id="Tag142" decimals="-3" contextRef="D2011" unitRef="USD">515000</us-gaap:IncomeTaxesPaidNet>
  <us-gaap:IncomeTaxesPaidNet id="Tag143" decimals="-3" contextRef="D2010" unitRef="USD">2286000</us-gaap:IncomeTaxesPaidNet>
  <us-gaap:StockIssued1 id="Tag144" decimals="-3" contextRef="D2010" unitRef="USD">570000</us-gaap:StockIssued1>
  <us-gaap:DepreciationDepletionAndAmortization id="Tag145" decimals="-3" contextRef="D2011" unitRef="USD">8497000</us-gaap:DepreciationDepletionAndAmortization>
  <us-gaap:DepreciationDepletionAndAmortization id="Tag146" decimals="-3" contextRef="D2010" unitRef="USD">7045000</us-gaap:DepreciationDepletionAndAmortization>
  <us-gaap:DeferredIncomeTaxExpenseBenefit id="Tag147" decimals="-3" contextRef="D2011" unitRef="USD">585000</us-gaap:DeferredIncomeTaxExpenseBenefit>
  <us-gaap:DeferredIncomeTaxExpenseBenefit id="Tag148" decimals="-3" contextRef="D2010" unitRef="USD">-1525000</us-gaap:DeferredIncomeTaxExpenseBenefit>
  <us-gaap:ShareBasedCompensation id="Tag149" decimals="-3" contextRef="D2010" unitRef="USD">4088000</us-gaap:ShareBasedCompensation>
  <us-gaap:IncreaseDecreaseInAccountsReceivable id="Tag150" decimals="-3" contextRef="D2011" unitRef="USD">-22692000</us-gaap:IncreaseDecreaseInAccountsReceivable>
  <us-gaap:IncreaseDecreaseInAccountsReceivable id="Tag151" decimals="-3" contextRef="D2010" unitRef="USD">38652000</us-gaap:IncreaseDecreaseInAccountsReceivable>
  <us-gaap:NetCashProvidedByUsedInFinancingActivitiesContinuingOperations id="Tag152" decimals="-3" contextRef="D2012" unitRef="USD">1299000</us-gaap:NetCashProvidedByUsedInFinancingActivitiesContinuingOperations>
  <us-gaap:CashAndCashEquivalentsAtCarryingValue id="Tag153" decimals="-3" contextRef="I2009" unitRef="USD">45020000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
  <us-gaap:CashAndCashEquivalentsAtCarryingValue id="Tag154" decimals="-3" contextRef="I2010" unitRef="USD">45743000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
  <us-gaap:EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations id="Tag155" decimals="-3" contextRef="D2012" unitRef="USD">-716000</us-gaap:EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations>
  <us-gaap:RestrictedAssetsDisclosureTextBlock id="Tag156" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;4.&amp;#160;&amp;#160;Restricted Cash&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The components of restricted cash are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="30"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="30"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Statutory liability deposit&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;106&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;104&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;In addition to the statutory liability deposit, the Company has surety bonds related to value added tax claims and refunds in Europe of approximately $1.8&amp;#160;million at December&amp;#160;31, 2012 and standby letters of credit issued under the credit line of $3.6&amp;#160;million.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:RestrictedAssetsDisclosureTextBlock>
  <us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock id="Tag157" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;5.&amp;#160;&amp;#160;Accounts Receivable, net&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The components of accounts receivable are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 94.56%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 79px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Trade receivables&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;25,148&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;35,482&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Allowance for doubtful accounts&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(305&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(411&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;24,843&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;35,071&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock>
  <us-gaap:InventoryDisclosureTextBlock id="Tag158" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;6.&amp;#160;&amp;#160;Inventories, net&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The components of inventories are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Raw materials&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;72,013&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;85,829&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Work in process&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;12,253&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;25,639&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Finished goods (completed systems)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;15,968&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;8,555&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;100,234&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;120,023&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;When recorded, inventory reserves are intended to reduce the carrying value of inventories to their net realizable value. The Company establishes inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company's products or market conditions. The Company regularly evaluates the ability to realize the value of inventories based on a combination of factors including the following: forecasted sales or usage, estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure. As of December&amp;#160;31, 2012 and 2011, inventories are stated net of inventory reserves of $33.6&amp;#160;million and $22.8&amp;#160;million respectively.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;In 2012, the Company recorded a $14.5&amp;#160;million increase to its excess inventory reserves. During the fourth quarter, as a result of industry consensus indicating that the semiconductor industry downturn will continue into 2013, along with the Company's internal projections, the Company performed a comprehensive review and analysis of its worldwide inventory levels based on historic and projected inventory requirements for all of its products, components and parts. As a result, the Company recorded a $13.4&amp;#160;million increase to inventory reserves in the fourth quarter of 2012.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;During 2012, the Company recorded a charge to cost of sales of $2.6&amp;#160;million due to production levels below normal capacity. There were no similar charges recorded for the year ended December&amp;#160;31, 2011. During 2010, the Company recorded a charge to cost of sales of $1.0&amp;#160;million due to below normal production capacity.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:InventoryDisclosureTextBlock>
  <us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock id="Tag159" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;7.&amp;#160;&amp;#160;Property, Plant and Equipment, net&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The components of property, plant and equipment are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Land and buildings&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;78,954&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;78,985&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Machinery and equipment&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;7,118&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;7,020&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Construction in process&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;455&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;541&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total cost&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;86,527&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;86,546&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accumulated depreciation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(52,114&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(49,342&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Property, plant and equipment, net&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;34,413&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;37,204&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Depreciation expense was $3.3&amp;#160;million, $3.5&amp;#160;million, and $3.6&amp;#160;million, for the years ended December&amp;#160;31, 2012, 2011, and 2010, respectively.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock>
  <acls:AssetsManufacturedForInternalUseDisclosureTextBlock id="Tag160" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;8.&amp;#160;&amp;#160;Assets Manufactured for Internal Use&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The components of assets manufactured for internal use, included in amounts reported as other assets, are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Internal use assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;21,904&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,503&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Construction in progress&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,823&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total cost&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;23,727&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,503&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accumulated depreciation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(13,948&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(10,526&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;9,779&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;16,977&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;These products are used in-house for research and development, training, and customer demonstration purposes. Costs are generally depreciated to expense over five years. Depreciation expense was $3.4&amp;#160;million, $4.9&amp;#160;million, and $3.3&amp;#160;million, for the years ended December&amp;#160;31, 2012, 2011, and 2010, respectively.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</acls:AssetsManufacturedForInternalUseDisclosureTextBlock>
  <us-gaap:RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock id="Tag161" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;9.&amp;#160;&amp;#160;Restructuring Charges&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company initiated reductions in force throughout 2012 to control costs and improve the focus of its operations in order to sustain future profitability and conserve cash. As a result, the Company recorded a total charge to restructuring expense of approximately $4.2&amp;#160;million, for severance and related costs including a $0.1&amp;#160;million non-cash charge for the modification of a share-based award. The Company did not incur restructuring charges for the years ended December&amp;#160;31, 2011 or December&amp;#160;31, 2010. The liability at December&amp;#160;31, 2012 of $0.7&amp;#160;million is expected to be paid in the first quarter of 2013.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's restructuring liability for the years ended December&amp;#160;31, 2012, 2011 and 2010 are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="70"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Severance&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(In thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2009&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;297&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash payments&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(126&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;171&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash payments&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;171&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Severance and related costs&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,169&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash payments&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(3,551&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Non-cash items&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(130&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;659&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock>
  <us-gaap:ProductWarrantyDisclosureTextBlock id="Tag162" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;10.&amp;#160;&amp;#160;Product Warranty&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company generally offers a one year warranty for all of its systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, the Company accrues a liability for the estimated cost of standard warranty at the time of system shipment and defers the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect the Company's warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. The Company periodically assesses the adequacy of its recorded liability and adjusts the amount as necessary.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The changes in the Company's product warranty liability are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years Ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at January&amp;#160;1 (beginning of year)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,697&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,713&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;726&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Warranties issued during the period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,042&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,772&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,722&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Settlements made during the period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(3,010&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(5,275&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,923&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Changes in estimate of liability for pre-existing warranties during the period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,928&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,487&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;188&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31 (end of year)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,801&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,697&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,713&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Amount classified as current&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,700&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,556&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,556&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Amount classified as long-term&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;101&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;141&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;157&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total Warranty Liability&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,801&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,697&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,713&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ProductWarrantyDisclosureTextBlock>
  <us-gaap:DebtDisclosureTextBlock id="Tag163" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;11.&amp;#160;&amp;#160;Financing Arrangements&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Bank Credit Facility&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has a revolving credit facility with a bank pursuant to an Amended and Restated Loan and Security Agreement dated April&amp;#160;25, 2011 (the "Revolving Credit Facility"). The facility provides for borrowings up to $30&amp;#160;million, based primarily on accounts receivable, and is subject to certain financial covenants requiring the Company to maintain minimum levels of operating results and liquidity. The agreement will terminate on April&amp;#160;10, 2015. The Company uses the facility to support letters of credit and for short term borrowing as needed.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;On March&amp;#160;5, 2012, the Company entered into a Second Loan Modification Agreement relating to the Revolving Credit Facility to revise financial covenants. To facilitate future availability, on September&amp;#160;10, 2012, the Company further modified the Revolving Credit Facility by entering into the Third Loan Modification Agreement (the "Third Modification Agreement"). The Third Modification Agreement revises the covenant setting the Company's minimum trailing six month Adjusted Net Income (as such capitalized term is defined in the agreement). All other material terms of the Revolving Credit Facility are unaffected by the Third Modification Agreement.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;At December&amp;#160;31, 2012, the Company's available borrowing capacity under the Revolving Credit Facility was $17.3&amp;#160;million and the Company was compliant with all covenants of the loan agreement. There were no borrowings against this facility during year the ended December&amp;#160;31, 2012.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:DebtDisclosureTextBlock>
  <us-gaap:OtherNoncashIncomeExpense id="Tag164" decimals="-3" contextRef="D2012" unitRef="USD">-186000</us-gaap:OtherNoncashIncomeExpense>
  <us-gaap:ProceedsFromStockPlans id="Tag165" decimals="-3" contextRef="D2012" unitRef="USD">331000</us-gaap:ProceedsFromStockPlans>
  <us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock id="Tag166" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;12.&amp;#160;&amp;#160;Employee Benefit Plans&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(a)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Defined Contribution Plan&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company maintains the Axcelis Long-Term Investment Plan, a defined contribution plan. All regular employees are eligible to participate and may contribute up to 35% of their compensation on a before-tax basis subject to Internal Revenue Service ("IRS") limitations. Highly compensated employees may contribute up to 16% of their compensation on a before-tax basis subject to IRS limitations. The Company does not match contributions; therefore, no expense was recorded for this plan in 2012, 2011 or 2010.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(b)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Other Compensation Plans&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company operates in foreign jurisdictions that require lump sum benefits, payable based on statutory regulations, for voluntary or involuntary termination. Where required, an annual actuarial valuation of the benefit plans is obtained.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has recorded an unfunded liability of $4.5&amp;#160;million and $3.7&amp;#160;million at December&amp;#160;31, 2012 and 2011, respectively, for costs associated with these compensation plans in foreign jurisdictions. The following table presents the classification of these liabilities in the Consolidated Balance Sheets:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;Year Ended&lt;br /&gt;
December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Current:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accrued compensation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,475&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,290&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other current liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;199&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total current liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,475&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,489&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-TOP: 12pt; MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Long-term:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other long-term liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3,042&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,243&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 40pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,517&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3,732&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The expense recorded in connection with these plans was $0.6&amp;#160;million, $0.7&amp;#160;million and $0.6&amp;#160;million during the years ended December&amp;#160;31, 2012, 2011 and 2010, respectively.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock>
  <us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock id="Tag167" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;13.&amp;#160;&amp;#160;Stock Award Plans and Stock Based Compensation&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(a)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Equity Incentive Plans&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company maintains the Axcelis Technologies,&amp;#160;Inc. 2012 Equity Incentive Plan (the "2012 Equity Plan"), which became effective on May&amp;#160;2, 2012. Our 2000 Stock Plan (the "2000 Stock Plan"), expired on May&amp;#160;1, 2012 and no new grants may be made under that plan after this date. However, awards granted under the 2000 Stock Plan prior to the expiration remain outstanding and subject to the terms of the 2000 Stock Plan.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The 2012 Equity Plan reserves 3.8&amp;#160;million shares of common stock, $0.001 par value for grant and permits the issuance of options, stock appreciation rights, restricted stock, restricted stock units, stock equivalents, and awards of shares of common stock that are not subject to restrictions or forfeiture to selected employees, directors and consultants of the Company. Shares that are not issued under an award (because such award expires, is terminated unexercised or is forfeited) that were outstanding under the 2000 Stock Plan as of the May&amp;#160;2, 2012 will increase the reserve of shares available for grant under the 2012 Equity Plan.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The term of stock options granted under these plans is specified in the award agreements. Unless a lesser term is otherwise specified by the Company's Compensation Committee of the Board of Directors, awards under the 2012 Equity Plan will expire seven years from the date of grant. In general, all awards issued under the 2000 Stock Plan expire ten years from the date of grant. Under the terms of these stock plans, the exercise price of a stock option may not be less than the fair market value of a share of the Company's common stock on the date of grant. Under the 2012 Equity Plan, fair market value is defined as the last reported sale price of a share of the common stock on a national securities exchange as of any applicable date, as long as the Company's shares are traded on such exchange.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Stock options granted to employees generally vest over a period of four years, while stock options granted to non-employee members of the Company's Board of Directors generally vest over a period of 6&amp;#160;months and, once vested, are not affected by the director's termination of service to the Company. Termination of service by an employee will cause options to cease vesting as of the date of termination, and in most cases, employees will have 90&amp;#160;days after termination to exercise options that were vested as of the termination of employment. In general, retiring employees will have one year after termination of employment to exercise vested options. The Company settles stock option exercises with newly issued common shares.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Restricted stock units granted to employees during 2012, 2011 and 2010 had both time-based vesting provisions and performance-based vesting provisions. Generally, unvested restricted stock unit awards expire upon termination of service to the Company. The Company settles restricted stock units upon vesting with newly issued common shares. No restricted stock was granted under either stock plan during the three year period.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;As of December&amp;#160;31, 2012, there were 1.5&amp;#160;million of shares available for grant under 2012 Equity Plan. No shares are available for grant under the 2000 Stock Plan.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;As of December&amp;#160;31, 2012, there were 21.3&amp;#160;million options outstanding under the 2012 Equity Plan and the 2000 Stock Plan, collectively, and 1.0&amp;#160;million unvested restricted stock units outstanding under the 2000 Stock Plan.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(b)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Employee Stock Purchase Plan&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Employee Stock Purchase Plan (the "Purchase Plan") provides effectively all of the Company's employees the opportunity to purchase common stock of the Company at less than market prices. Purchases are made through payroll deductions of up to 10% of the employee's salary as elected by the participant, subject to certain caps set forth in the Purchase Plan. Employees may purchase its common stock at 85% of the market value of the Company's common stock on the day the stock is purchased.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Purchase Plan is considered compensatory and as such, compensation expense has been recognized based on the benefit of the discounted stock price, amortized to compensation expense over each offering period of six months. Compensation expense was $0.1&amp;#160;million for each of the years ended December&amp;#160;31, 2012, 2011, and 2010.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;As of December&amp;#160;31, 2012, there were a total of 2.0&amp;#160;million shares reserved for issuance and available for purchase under the Purchase Plan. There were 0.3&amp;#160;million, 0.4&amp;#160;million and 0.3&amp;#160;million shares purchased under the Purchase Plan for the years ended December&amp;#160;31, 2012, 2011, and 2010, respectively.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(c)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Valuation of Employee Stock Options&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For the purpose of valuing stock options, the Company uses the Black-Scholes option pricing model to calculate the grant-date fair value of an award. The fair values of options granted were calculated using the following estimated weighted-average assumptions:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="77"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="24"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="24"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted-average expected volatility&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;97.8%-113.55&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;97.8&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;97.8&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted-average expected term&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3.8-6.1&amp;#160;years&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6.1&amp;#160;years&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6.2&amp;#160;years&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Risk-free interest rate&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0.45%-1.37&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.1%-2.4&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.5%-2.0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expected dividend yield&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Expected volatility&amp;#8212;The Company is responsible for estimating volatility and has considered a number of factors when estimating volatility. The Company's method of estimating expected volatility for all stock options granted relies on a combination of historical and implied volatility. The Company believes that this blended volatility results in a more accurate estimate of the grant-date fair value of employee stock options because it more appropriately reflects the market's current expectations of future volatility.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Expected term&amp;#8212;The Company calculated the weighted average expected term for stock options granted prior to July&amp;#160;1, 2012, using a forward looking lattice model of the Company's stock price incorporating a suboptimal exercise factor and a projected post-vest forfeiture rate. For stock options granted after July&amp;#160;1, 2012, the Company used the simplified method for estimating the expected life of "plain vanilla" options. The change in the expected term from 10&amp;#160;years to 7&amp;#160;years reflects the fact that options granted after May&amp;#160;1, 2012 were granted under the 2012 Equity Incentive Plan, which limits option terms to seven years.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Risk-free interest rate&amp;#8212;The yield on zero-coupon U.S. Treasury securities for a period that is commensurate with the expected term assumption is used as the risk-free interest rate.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Expected dividend yield&amp;#8212;Expected dividend yield was not considered in the option pricing formula since the Company does not pay dividends and has no current plans to do so in the future.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(d)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Summary of Share-Based Compensation Expense&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company estimates the fair value of stock options using the Black-Scholes valuation model. The fair value of the Company's restricted stock and restricted stock units is calculated based upon the fair market value of the Company's stock at the date of grant.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company uses the straight-line attribution method to recognize expense for stock-based awards such that the expense associated with awards is evenly recognized throughout the period.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The amount of stock-based compensation recognized is based on the value of the portion of the awards that are ultimately expected to vest. The Company estimates forfeitures at the time of grant and revises them, if necessary, in subsequent periods if actual forfeitures differ from those estimates. The term "forfeitures" is distinct from "cancellations" or "expirations" and represents only the unvested portion of the surrendered stock-based award. Based on a historical analysis, a forfeiture rate of 5% per year, including executive officer awards, was applied to stock-based awards for the years ended December&amp;#160;31, 2012, 2011 and 2010.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company recognized stock-based compensation expense of $3.9&amp;#160;million, $4.7&amp;#160;million and $4.1&amp;#160;million for the years ended December&amp;#160;31, 2012, 2011 and 2010, respectively. For 2012, 2011 and 2010, the Company primarily used stock options in its annual equity compensation program. During 2012, the Company recognized stock-based compensation expense of $0.1&amp;#160;million related to the modification of a stock option grant as a result of a restructuring action taken by the Company. As this related to a restructuring activity, the Company included this expense in the restructuring line item in the Consolidated Statements of Operations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The benefits of tax deductions in excess of recognized compensation cost is reported as a financing cash flow, rather than as an operating cash flow. Because the Company does not recognize the benefit of tax deductions in excess of recognized compensation cost due to its cumulative net operating loss position, this had no impact on the Company's consolidated statement of cash flows as of and for the years ended December&amp;#160;31, 2012, 2011 or 2010.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(e)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Stock Option Awards&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The following table summarizes the stock option activity for the years ended December&amp;#160;31, 2012, 2011 and 2010:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="56"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Options&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Weighted&lt;br /&gt;
Average&lt;br /&gt;
Exercise&lt;br /&gt;
Price&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Weighted&lt;br /&gt;
Average&lt;br /&gt;
Remaining&lt;br /&gt;
Contractual&lt;br /&gt;
Term&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Aggregate&lt;br /&gt;
Intrinsic&lt;br /&gt;
Value&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="left" colspan="2"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(years)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2009&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;17,368&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6.43&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5,310&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.61&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercised&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(704&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.79&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Canceled&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(333&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.23&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expired&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(2,693&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;18.26&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;18,948&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3.70&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,662&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.70&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercised&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(372&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.77&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Canceled&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(654&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.43&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expired&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,491&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;12.38&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;21,093&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.76&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,077&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;.93&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercised&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,148&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;.84&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Canceled&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,225&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.43&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expired&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,537&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;7.71&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;21,260&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.24&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6.39&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,607&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercisable at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;11,680&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.99&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5.59&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,591&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Options Vested or Expected to Vest at December&amp;#160;31, 2012(1)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;20,558&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.27&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6.44&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,015&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;!-- COMMAND=ADD_LINERULETXT,NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" --&gt;
&lt;hr style="COLOR: #000000" align="left" width="26%" noshade="noshade" size="1" /&gt;&lt;/div&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; PADDING-TOP: 0pt; POSITION: relative; TEXT-ALIGN: left"&gt;
&lt;dl compact="compact"&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(1)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;In addition to the vested options, the Company expects a portion of the unvested options to vest at some point in the future. Options expected to vest is calculated by applying an estimated forfeiture rate to the unvested options.&lt;/font&gt;&lt;/dd&gt;&lt;/dl&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Of the options outstanding at December&amp;#160;31, 2012, 2011 and 2010, 11.7&amp;#160;million, 10.2&amp;#160;million and 8.4&amp;#160;million, respectively, were vested and exercisable with a weighted average exercise price of $2.99, $4.13, and $6.68, respectively. The total intrinsic value, which is defined as the difference between the market price at exercise and the price paid by the employee to exercise the options, for options exercised during the years ended December&amp;#160;31, 2012, 2011 and 2010 was $0.9&amp;#160;million, $0.7&amp;#160;million and $1.2&amp;#160;million, respectively.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The total fair value of stock options vested during the year ended December&amp;#160;31, 2012 was $4.1&amp;#160;million. As of December&amp;#160;31, 2012, there was $7.5&amp;#160;million of total forfeiture- adjusted unrecognized compensation cost related to non-vested stock options granted under the 2012 Equity Incentive Plan and the 2000 Stock Plan. That cost is expected to be recognized over a weighted-average period of 2.5&amp;#160;years.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(f)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Restricted Stock and Restricted Stock Units&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Restricted stock units ("RSUs") represent the Company's unfunded and unsecured promise to issue shares of the common stock at a future date, subject to the terms of the RSU Award Agreement and either the 2012 Equity Incentive Plan or the 2000 Stock Plan. The purpose of these awards is to assist in attracting and retaining highly competent employees and directors and to act as an incentive in motivating selected employees and directors to achieve long-term corporate objectives. RSU awards granted in 2012, 2011 and 2010 included both time vested awards and performance vested awards for employees and executive officers. No restricted stock awards were granted, or vested, during the period. The fair value of a restricted stock unit and restricted stock awards is charged to expense ratably over the applicable service period.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Changes in the Company's non-vested restricted stock units for the years ended December&amp;#160;31, 2012, 2011, and 2010 are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="82"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Shares/units&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Weighted-Average&lt;br /&gt;
Grant Date Fair&lt;br /&gt;
Value per Share&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="left" colspan="2"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2009&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;604&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5.90&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;695&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.72&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Vested&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,052&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3.30&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Forfeited&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(19&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.94&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;228&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5.38&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;121&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.50&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Vested&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(196&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5.81&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Forfeited&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(2&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6.01&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;151&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.52&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;864&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.65&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Vested&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(47&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.82&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Forfeited&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(7&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.62&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;961&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.73&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Some restricted stock units provide for a net share settlement program to offset the personal income tax obligations of the employee's restricted stock unit vesting. Vesting activity above reflects shares vested before net share settlement. As of December&amp;#160;31, 2012, there was $0.2&amp;#160;million of total forfeiture adjusted unrecognized compensation cost related to performance based restricted stock units that did not vest, which is expected to be amortized over a weighted average amortization period of 2.2&amp;#160;years.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock>
  <us-gaap:StockholdersEquityNoteDisclosureTextBlock id="Tag168" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;14. Stockholders' Equity&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Preferred Stock&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company may issue up to 30&amp;#160;million shares of preferred stock in one or more series. The Board of Directors is authorized to fix the rights and terms for any series of preferred stock without additional shareholder approval. As of December&amp;#160;31, 2012, 2011, and 2010, there were no outstanding shares of preferred stock.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:StockholdersEquityNoteDisclosureTextBlock>
  <us-gaap:SegmentReportingDisclosureTextBlock id="Tag169" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;17. Business Segment and Geographic Region Information&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company operates in one business segment, which is the manufacture of capital equipment for the semiconductor manufacturing industry. The principal market for semiconductor manufacturing equipment is semiconductor manufacturers. Substantially all sales are made directly by the Company to its customers located in the United States, Europe and Asia Pacific.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's ion implantation systems product line includes high current, medium current and high energy implanters. Other products include dry strip equipment, curing systems, and thermal processing systems. In addition to equipment, the Company provides post-sales equipment service and support, including spare parts, equipment upgrades, maintenance services and customer training.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Revenue by product lines is as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Ion implantation systems, services, and royalties&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;156,090&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;237,857&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;232,335&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other systems and services&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;47,295&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;81,559&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;42,877&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;203,385&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;319,416&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;275,212&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Revenue and long-lived assets by geographic region, based on the physical location of the operation recording the sale or the asset, are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="54"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Revenue&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Long-Lived&lt;br /&gt;
Assets&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;132,159&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;43,440&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Europe&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,636&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Asia Pacific&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;43,590&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;752&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;203,385&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;44,192&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;234,132&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;54,472&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Europe&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;31,505&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Asia Pacific&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;53,779&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;996&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;319,416&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;55,468&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;190,819&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;50,532&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Europe&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;33,822&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Asia Pacific&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;50,571&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;442&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;275,212&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;50,974&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Long-lived assets consist of property, plant and equipment, net and assets manufactured for internal use. Operations in Europe and Asia Pacific consist of sales and service organizations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;International revenue, including export sales from U.S. manufacturing facilities to foreign customers, sales by foreign subsidiaries and branches was $142.8&amp;#160;million (70.2% of total revenue) in 2012, $231.0&amp;#160;million (72.3% of total revenue) in 2011, and $208.5&amp;#160;million (75.8% of total revenue) in 2010.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:SegmentReportingDisclosureTextBlock>
  <us-gaap:IncomeTaxDisclosureTextBlock id="Tag170" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;18. Income Taxes&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Income (loss) before income taxes are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(37,682&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,622&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(21,526&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5,294&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,849&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,265&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income (loss) before income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(32,388&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;7,471&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(17,261&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Income taxes (credits) are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Current:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Federal&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;82&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;163&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;309&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;738&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,528&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total current&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;820&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,809&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,837&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deferred:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;826&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;585&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,525&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total deferred&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;826&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;585&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,525&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,394&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;312&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Reconciliations of income taxes at the United States Federal statutory rate to the effective income tax rate are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income (credit) at the United States statutory rate&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(11,336&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,615&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(6,041&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;53&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;31&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;309&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Unrecognized tax benefits&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(832&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;899&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;842&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Effect of change in valuation allowance&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;12,662&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(3,160&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6,550&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign income tax rate differentials&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(788&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(365&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,490&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Restoration of foreign deferred tax assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,329&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign dividend&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;383&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Stock options&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,298&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deemed distribution from foreign subsidiaries&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;149&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,533&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,152&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other, net&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;57&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;841&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(681&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,394&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;312&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Significant components of current and long-term deferred income taxes are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="56"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="56"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;As of December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Current&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Long Term&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Current&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Long Term&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Federal net operating loss carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;88,088&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;79,163&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State net operating loss carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,181&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,685&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign net operating loss carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,853&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,821&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Federal tax credit carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;17,814&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;15,505&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State tax credit carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;9,051&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;9,051&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Unremitted earnings of foreign subsidiaries&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(8,580&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(10,370&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Intangible assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;661&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;803&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Property, plant and equipment&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5,925&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5,589&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accrued compensation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;352&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;368&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;541&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Inventories&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;22,582&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(215&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;22,447&lt;/font&gt;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Stock compensation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,378&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3,970&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Warranty&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;612&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;36&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,293&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,820&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;917&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,243&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(3,814&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deferred taxes, gross&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;25,366&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;121,477&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;104,454&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Valuation allowance&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(25,062&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(119,605&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(24,160&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(102,814&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deferred taxes, net&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;304&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,872&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,364&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,640&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;At December&amp;#160;31, 2012, the Company had $146.8&amp;#160;million of deferred tax assets relating to net operating loss carryforwards, tax credit carryforwards and other temporary differences, which are available to reduce income taxes in future years. A valuation allowance must be established when it is "more likely than not" that all or a portion of deferred tax assets will not be realized. A review of all available positive and negative evidence needs to be considered, including a company's performance, the market environment in which the company operates, length of carryback and carryforward periods, existing sales backlog, and projections of future operating results. Where there are cumulative losses in recent years there is a strong presumption that a valuation allowance is needed. This presumption can be overcome in very limited circumstances.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company is in a three year cumulative loss position in the United States. As a result, the Company maintains a 100% valuation allowance for entities in those tax jurisdictions to reduce the carrying value of deferred tax assets to zero. The Company will continue to maintain a full valuation allowance for those tax assets until sustainable future levels of profitability are evident. Changes in the valuation allowance in 2012 and 2011 were attributable to changes in the composition of temporary differences and changes in net operating loss carryforwards.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;At December&amp;#160;31, 2012, the Company has federal and state net operating loss carryforwards of approximately $89.3&amp;#160;million and foreign net operating loss carryforwards of approximately $1.9&amp;#160;million expiring principally between 2013 and 2032.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has research and development and other tax credit carryforwards of approximately $21.8&amp;#160;million at December&amp;#160;31, 2012 that can be used to reduce future federal and state income tax liabilities. These tax credit carryforwards expire principally between 2022 and 2028. In addition, the Company has foreign tax credit carryforwards of approximately $5.0&amp;#160;million at December&amp;#160;31, 2012 that are available to reduce future U.S. income tax liabilities subject to certain limitations. These foreign tax credit carryforwards expire between 2013 and 2016.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;It is Company policy to provide taxes for the total anticipated tax impact of the undistributed earnings of our wholly-owned foreign subsidiaries', as such earnings are not expected to be reinvested indefinitely. The Company anticipates that US tax resulting from remitting such earnings will be off-set by net operating loss or credit carryforwards to the extent available. In addition, the Company does not anticipate incurring a foreign withholding tax on remitting such earnings since it does not intend to remit the earnings as dividends.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company and its subsidiaries file income tax returns in the U.S. federal jurisdiction and various states and foreign jurisdictions. The Company and most foreign subsidiaries are subject to income tax examinations by tax authorities for all years dating back to 2001. The Company's policy is to recognize interest related to unrecognized tax benefits as interest expense and penalties as operating expenses. The Company believes that it has appropriate support for the income tax positions taken and to be taken on its tax returns and that its accruals for tax liabilities are adequate for all open years based on an assessment of many factors including past experience and interpretations of tax law applied to the facts of each matter.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;At December&amp;#160;31, 2012, the Company had unrecognized tax benefits of approximately $7.7&amp;#160;million, of which approximately $5.1&amp;#160;million reduced the Company's deferred tax assets and the offsetting valuation allowance and $2.6&amp;#160;million was recorded in other long-term liabilities. The Company does not expect any significant changes in unrecognized tax benefits in 2013.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;A reconciliation of the beginning and ending balance of unrecognized tax benefits are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at beginning of year&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;8,089&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6,965&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Increases in unrecognized tax benefits as a result of tax positions taken during a prior period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,124&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Decreases in unrecognized tax benefits related to settlements with tax authorities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(880&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Increases in unrecognized tax benefits as a result of tax positions taken during the current period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;663&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(799&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at end of year&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;7,719&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;8,089&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Recorded as other long-term liability&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,244&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Recorded as a decrease in deferred tax assets and offsetting valuation allowance&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5,073&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,845&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;7,719&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;8,089&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:IncomeTaxDisclosureTextBlock>
  <us-gaap:QuarterlyFinancialInformationTextBlock id="Tag171" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;19. Quarterly Results of Operations (unaudited)&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 54%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"150%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="150%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="49"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Dec.&amp;#160;31,&lt;br /&gt;
2012(1)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Sept.&amp;#160;30,&lt;br /&gt;
2012(2)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;June&amp;#160;30,&lt;br /&gt;
2012(3)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;March&amp;#160;31,&lt;br /&gt;
2012(4)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Dec.&amp;#160;31,&lt;br /&gt;
2011(5)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Sept.&amp;#160;30,&lt;br /&gt;
2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;June&amp;#160;30,&lt;br /&gt;
2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;March&amp;#160;31,&lt;br /&gt;
2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="23"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands, except per share data)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Revenue&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;44,624&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;44,640&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;59,114&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;55,007&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;60,411&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;72,455&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;93,380&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;93,170&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Gross profit&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;480&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;14,367&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;22,788&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;20,536&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;22,623&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;26,895&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;34,138&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;31,081&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net income (loss)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(14,818&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(8,718&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(471&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(10,027&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(2,113&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,151&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,227&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,812&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net income (loss) per share basic and diluted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.14&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.08&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.00&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.09&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.02&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.01&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.04&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.02&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;!-- COMMAND=ADD_LINERULETXT,NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" --&gt;
&lt;hr style="COLOR: #000000" align="left" width="26%" noshade="noshade" size="1" /&gt;&lt;/div&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; PADDING-TOP: 0pt; POSITION: relative; TEXT-ALIGN: left"&gt;
&lt;dl compact="compact"&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(1)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Gross profit and net loss include a $13.4&amp;#160;million provision for excess inventory related to the Company's comprehensive review of its worldwide inventory levels. Net loss includes a $7.9&amp;#160;million gain on sale of the Company's dry strip assets and intellectual property to Lam Research; restructuring charges of $0.6&amp;#160;million; and a $2.1&amp;#160;million one-time marketing expense associated with the Company's evaluation programs.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(2)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes restructuring charges of $0.6&amp;#160;million.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(3)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes restructuring charges of $0.1&amp;#160;million and a tax expense of $0.8&amp;#160;million related to an uncertain tax position in a certain foreign jurisdiction.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(4)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes restructuring charges of $2.9&amp;#160;million.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(5)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes a tax expense of $0.9&amp;#160;million related to an uncertain tax position in a certain foreign jurisdiction.&lt;/font&gt;&lt;/dd&gt;&lt;/dl&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:QuarterlyFinancialInformationTextBlock>
  <us-gaap:SubsequentEventsTextBlock id="Tag172" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;20. Subsequent Events&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;In order to align manufacturing and operating expense levels to changing business conditions, the Company implemented a headcount reduction in the first quarter of 2013. The Company anticipates recording employee termination benefits and other related costs of approximately $1.1&amp;#160;million during the first quarter of 2013.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:SubsequentEventsTextBlock>
  <us-gaap:PreferredStockValue id="Tag173" xsi:nil="true" contextRef="I2011" unitRef="USD" />
  <us-gaap:PreferredStockValue id="Tag174" xsi:nil="true" contextRef="I2012" unitRef="USD" />
  <us-gaap:IncreaseDecreaseInRestrictedCash id="Tag175" decimals="-3" contextRef="D2012" unitRef="USD">2000</us-gaap:IncreaseDecreaseInRestrictedCash>
  <us-gaap:UseOfEstimates id="Tag176" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Use of Estimates&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, the Company evaluates its estimates and judgments, including those related to revenue recognition, the realizable value of inventories, valuing share-based compensation instruments and valuation allowances for deferred tax assets. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:UseOfEstimates>
  <us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock id="Tag177" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Foreign Currency&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has determined the functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders' equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the consolidated statements of operations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For the year ended December&amp;#160;31, 2012 the Company realized $0.9&amp;#160;million of foreign exchange losses. For the year ended December&amp;#160;31, 2011 the Company realized $1.2&amp;#160;million of foreign exchange gains. For the year ended December&amp;#160;31, 2010 the Company incurred $1.9&amp;#160;million of foreign exchange losses.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock>
  <us-gaap:CashAndCashEquivalentsPolicyTextBlock id="Tag178" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Cash and Cash Equivalents&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market securities and certificates of deposit. Cash equivalents are carried on the balance sheet at fair market value.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:CashAndCashEquivalentsPolicyTextBlock>
  <us-gaap:InventoryPolicyTextBlock id="Tag179" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Inventories&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Inventories are carried at lower of cost, determined using the first-in, first-out ("FIFO") method, or market. The Company periodically reviews its inventories and makes provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or market. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company records an allowance for estimated excess inventory. The allowance is determined using management's assumptions of materials usage, based on estimates of demand and market conditions. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:InventoryPolicyTextBlock>
  <us-gaap:PropertyPlantAndEquipmentPolicyTextBlock id="Tag180" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Property, Plant and Equipment&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Property and equipment are stated at cost, less accumulated depreciation and amortization.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="left" width="101"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" nowrap="nowrap" align="left"&gt;
&lt;div style="MARGIN-BOTTOM: 0pt; WIDTH: 69pt; BORDER-BOTTOM: #000000 1pt solid"&gt;&lt;font size="1"&gt;&lt;b&gt;Asset Classification &lt;!-- COMMAND=ADD_SCROPPEDRULE,69pt --&gt;&lt;/b&gt;&lt;/font&gt;&lt;/div&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;Estimated Useful Life&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Buildings&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;40&amp;#160;years&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Machinery and equipment&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;3 to 10&amp;#160;years&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Repairs and maintenance costs are expensed as incurred. Expenditures for renewals and betterments are capitalized.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:PropertyPlantAndEquipmentPolicyTextBlock>
  <us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock id="Tag181" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Impairment of Long-Lived Assets&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company records impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is measured by a comparison of the assets' carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company completed a test for recoverability due to indicators present at December&amp;#160;31, 2012; specifically the carrying value of its net assets exceeded its current market capitalization. As of December&amp;#160;31, 2012, the undiscounted cash flows used in the analysis significantly exceeded the carrying value of the Company's assets. As a result no impairment was recorded. The undiscounted cash flows used in the analysis were derived from the Company's long-term strategic plan.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company did not record an impairment charge for the years ended December&amp;#160;31, 2011, or 2010.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Future actual performance could be materially different from our current forecasts, which could impact future estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in the Company's relationships with significant customers. The Company performs an impairment analysis when circumstances or events warrant.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock>
  <us-gaap:ConcentrationRiskCreditRisk id="Tag182" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Concentration of Risk and Off-Balance Sheet Risk&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Financial instruments that potentially subject the Company to concentrations of credit risk are principally cash equivalents and accounts receivable. The Company's cash equivalents are principally maintained in an investment grade money-market fund.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has no significant off-balance-sheet risk such as foreign exchange contracts, option contracts or other foreign hedging arrangements.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company exposure to market risk for changes in interest rates relates primarily to cash equivalents. The primary objective of the Company's investment activities is to preserve principal while maximizing yields without significantly increasing risk. This is accomplished by investing in marketable high investment grade securities. The Company does not use derivative financial instruments to manage its investment portfolio and does not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company performs ongoing credit evaluations of its customers' financial condition and generally requires no collateral to secure accounts receivable. For selected overseas sales, the Company requires customers to obtain letters of credit before product is shipped. The Company maintains an allowance for doubtful accounts based on its assessment of the collectability of accounts receivable. The Company reviews the allowance for doubtful accounts monthly. The Company does not have any off-balance sheet credit exposure related to its customers.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's customers consist of semiconductor manufacturers located throughout the world and net sales to its ten largest customers accounted for 70.6%, 68.6% and 62.7% of revenue in 2012, 2011 and 2010, respectively.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For the years ended December&amp;#160;31, 2012, 2011 and 2010, the Company had one customer represent 18.2%, 21.2% and 18.6% of total revenues, respectively, for each of the periods presented.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For the year ended December&amp;#160;31, 2012, the Company had two customers account for 11.9% and 11.5% of consolidated accounts receivable, respectively. For the year ended December&amp;#160;31, 2011, the Company had one customer represent 27.2% of consolidated accounts receivable.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Some of the components and sub-assemblies included in the Company's products are obtained either from a sole source or a limited group of suppliers. Disruption to the Company's supply source, resulting either from depressed economic conditions or other factors, could affect its ability to deliver products to its customers.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ConcentrationRiskCreditRisk>
  <us-gaap:RevenueRecognitionPolicyTextBlock id="Tag183" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Revenue Recognition&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's revenue recognition policy involves significant judgment by management. As described below, the Company considers a broad array of facts and circumstances in determining when to recognize revenue, including contractual obligations to the customer, the complexity of the customer's post-delivery acceptance provisions, payment history, customer creditworthiness and the installation process. In the future, if the post-delivery acceptance provisions and installation process become more complex or result in a materially lower rate of acceptance, the Company may have to revise its revenue recognition policy, which could delay the timing of revenue recognition.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's system sales transactions are made up of multiple elements, including the system itself and elements that are not delivered simultaneously with the system. These undelivered elements might include a combination of installation services, extended warranty and support and spare parts, all of which are covered generally by a single sales price. On January&amp;#160;1, 2011, the Company adopted the accounting standards update for multiple deliverable revenue arrangements, as required, using the prospective method. Accordingly, this guidance is being applied to all system revenue arrangements entered into or materially modified on or after January&amp;#160;1, 2011. The adoption of the amended guidance did not change the accounting for arrangements entered into prior to January&amp;#160;1, 2011. There was no material impact on our financial position, results of operations or cash flows upon adoption.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The impact of adopting this amended guidance on the Company's results of operations has been limited to transactions involving the sale of systems. The update amended the previous guidance for multiple-element arrangements. Pursuant to the amended guidance, the Company's system revenue arrangements with multiple elements are divided into separate units of accounting if specified criteria are met, including whether the delivered element has stand-alone value to the customer. If the criteria are met, then the consideration received is allocated among the separate units based on their relative selling price, and the revenue is recognized separately for each of the separate units.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company determines selling price for each unit of accounting (element) using vendor specific objective evidence (VSOE) or third-party evidence (TPE), if they exist, otherwise, the Company uses best estimated selling price (BESP). The Company generally expects that it will not be able to establish TPE due to the nature of its products, and, as such, the Company typically will determine selling price using VSOE or BESP.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Where required, the Company determines BESP for an individual element based on consideration of both market and Company-specific factors, including the selling price and profit margin for similar products, the cost to produce the deliverable and the anticipated margin on that deliverable and the characteristics of the varying markets in which the deliverable is sold.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The total consideration to be received in the transaction is allocated to each element in the arrangement based upon the relative selling price of each element when compared to the consideration received.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Systems are not sold separately and VSOE or TPE is not available for the systems element. Therefore the selling price associated with systems is based on BESP. The allocated value for installation in the arrangement includes (a)&amp;#160;the greater of (i)&amp;#160;the relative selling price of the installation or (ii)&amp;#160;the portion or the sales price that will not be received until the installation is completed (the "retention"). The selling price of installation is based upon the fair value of the service performed, including labor, which is based upon the estimated time to complete the installation at hourly rates, and material components, both of which are sold separately. The selling price of all other elements (extended warranty for support, spare parts, and labor) is based upon the price charged when these elements are sold separately, or VSOE.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Product revenue for products which have demonstrated market acceptance, generally recognized upon shipment provided title and risk of loss has passed to the customer, evidence of an arrangement exists, prices are contractually fixed or determinable, collectability is reasonably assured through historical collection results and regular credit evaluations, and there are no uncertainties regarding customer acceptance. Revenue from installation services is recognized at the time formal acceptance is received from the customer or, for certain customers, when both the formal acceptance and retention payment have been received. Revenue for other elements is recognized at the time products are shipped or the related services are performed.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company generally recognizes revenue for products which have demonstrated market acceptance at the time of shipment because the customer's post-delivery acceptance provisions and installation process have been established to be routine, commercially inconsequential and perfunctory. The majority of its systems are designed and tailored to meet the customer's specifications, as outlined in the contract between the customer and the Company, which may be the Company's standard specification. To ensure that the customer's specifications are satisfied, many customers request that new systems be tested at the Company's facilities prior to shipment, normally with the customer present, under conditions that substantially replicate the customer's production environment and the customer's criteria are confirmed to have been met. The Company believes the risk of failure to complete a system installation is remote. Should an installation not be completed successfully, the contractual provisions do not provide for forfeiture, refund or other purchase price concession beyond those prescribed by the provisions of the Uniform Commercial Code applicable generally to such transactions.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For initial shipments of systems with new technologies or in the small number of instances where the Company is unsure of meeting the customer's specifications or obtaining customer acceptance upon shipment of the system, it will defer the recognition of systems revenue and related costs until written customer acceptance of the system is obtained. This deferral period is generally within twelve months of shipment.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Product revenue includes revenue from system sales, sales of spare parts, the spare parts component of maintenance and service contracts and product upgrades. Service revenue includes the labor component of maintenance and service contract amounts charged for on-site service personnel.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:RevenueRecognitionPolicyTextBlock>
  <us-gaap:ShippingAndHandlingCostPolicyTextBlock id="Tag184" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Shipping and Handling Costs&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Shipping and handling costs are included in cost of revenue.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ShippingAndHandlingCostPolicyTextBlock>
  <us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy id="Tag185" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Stock-Based Compensation&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company recognizes compensation expense for all share-based payments to employees and directors, including grants of employee stock options, based on the grant-date fair value of those share-based payments using the Black- Sholes option pricing model, adjusted for expected forfeitures. Stock-based compensation expense is recognized ratably over the requisite service period.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;See Note&amp;#160;13 for additional information relating to stock-based compensation.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy>
  <us-gaap:IncomeTaxPolicyTextBlock id="Tag186" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Income Taxes&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company records income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax bases, and operating loss and tax credit carryforwards.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax accounting. The Company establishes a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining the Company's provision for income taxes, the Company's deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. The Company evaluates the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. The Company recognizes accrued interest related to unrecognized tax benefits as interest expense and penalties as operating expense.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:IncomeTaxPolicyTextBlock>
  <us-gaap:EarningsPerSharePolicyTextBlock id="Tag187" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Computation of Net Income (Loss) per Share&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company incurred net losses for years ended December&amp;#160;31, 2012 and December&amp;#160;31, 2010, and has excluded 1,563,417 and 3,230,705 incremental shares attributable to outstanding stock options, restricted stock and restricted stock units from the calculation of net loss per share because the effect would have been anti-dilutive.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The components of net income (loss) per share are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years Ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands, except per share data)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income (loss) available to common stockholders&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(34,034&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5,077&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(17,573&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted average common shares outstanding used in computing basic net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;107,619&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;106,234&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;104,522&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Incremental shares&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,864&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted average common shares outstanding used in computing diluted net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;107,619&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;109,098&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;104,522&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Basic&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.32&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.05&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.17&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Diluted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.32&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.05&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.17&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:EarningsPerSharePolicyTextBlock>
  <us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock id="Tag188" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Recent Accounting Guidance&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;u&gt;Accounting Standards or Updates Recently Adopted&lt;/u&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Effective January&amp;#160;1, 2012 the Company adopted Accounting Standards Update, or ASU, No.&amp;#160;2011-05,&lt;/font&gt; &lt;font size="2"&gt;&lt;i&gt;Comprehensive Income (Topic 220)&lt;/i&gt;&lt;/font&gt;&lt;font size="2"&gt;. This newly issued accounting standard requires the Company to report comprehensive income either in a single continuous statement or in two separate but consecutive financial statements. The adoption of this standard did impact the presentation of other comprehensive income, as we have elected to present two separate but consecutive statements, but did not have an impact on our financial position or results of operations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;u&gt;Accounting Standards or Updates Not Yet Effective&lt;/u&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;On February&amp;#160;5, 2013, The Financial Accounting Standards Board ("FASB") issued Accounting Standards Update No.&amp;#160;2013-02,&lt;/font&gt; &lt;font size="2"&gt;&lt;i&gt;Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income&lt;/i&gt;&lt;/font&gt;&lt;font size="2"&gt;. The update requires that companies present either in a single note or parenthetically on the face of the financial statements, the effect of significant amounts reclassified from each component of accumulated other comprehensive income based on its source and the income statement line items affected by the reclassification. If a component is not required to be reclassified to net income in its entirety, companies would instead cross reference to the related footnote for additional information. This update is effective prospectively for annual and interim reporting periods beginning after December&amp;#160;15, 2012. As this update only requires enhanced disclosure, the adoption of this update will not impact our financial position or results of operations.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock>
  <us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock id="Tag189" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years Ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands, except per share data)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income (loss) available to common stockholders&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(34,034&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5,077&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(17,573&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted average common shares outstanding used in computing basic net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;107,619&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;106,234&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;104,522&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Incremental shares&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,864&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted average common shares outstanding used in computing diluted net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;107,619&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;109,098&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;104,522&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Basic&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.32&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.05&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.17&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Diluted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.32&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.05&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.17&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock>
  <us-gaap:ForeignCurrencyTransactionGainLossRealized id="Tag190" decimals="-5" contextRef="D2012" unitRef="USD">-900000</us-gaap:ForeignCurrencyTransactionGainLossRealized>
  <us-gaap:PropertyPlantAndEquipmentUsefulLife id="Tag191" contextRef="D2012_BuildingMember">P40Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
  <us-gaap:PropertyPlantAndEquipmentUsefulLife id="Tag192" contextRef="D2012_MachineryAndEquipmentMember_MinimumMember">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
  <us-gaap:PropertyPlantAndEquipmentUsefulLife id="Tag193" contextRef="D2012_MachineryAndEquipmentMember_MaximumMember">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
  <acls:ConcentrationRiskNumberOfCustomers id="Tag194" decimals="INF" contextRef="D2012_SalesMember_CustomerConcentrationRiskMember_TenLargestCustomersMember" unitRef="Item">10</acls:ConcentrationRiskNumberOfCustomers>
  <us-gaap:ConcentrationRiskPercentage1 id="Tag195" decimals="3" contextRef="D2012_SalesMember_CustomerConcentrationRiskMember_TenLargestCustomersMember" unitRef="Pure">0.706</us-gaap:ConcentrationRiskPercentage1>
  <us-gaap:ConcentrationRiskPercentage1 id="Tag196" decimals="3" contextRef="D2011_SalesMember_CustomerConcentrationRiskMember_TenLargestCustomersMember" unitRef="Pure">0.686</us-gaap:ConcentrationRiskPercentage1>
  <us-gaap:ConcentrationRiskPercentage1 id="Tag197" decimals="3" contextRef="D2010_SalesMember_CustomerConcentrationRiskMember_TenLargestCustomersMember" unitRef="Pure">0.627</us-gaap:ConcentrationRiskPercentage1>
  <us-gaap:AccountsReceivableNetCurrent id="Tag198" decimals="-3" contextRef="I2012" unitRef="USD">24843000</us-gaap:AccountsReceivableNetCurrent>
  <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax id="Tag199" decimals="-3" contextRef="I2012" unitRef="USD">5020000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
  <us-gaap:ConcentrationRiskPercentage1 id="Tag200" decimals="3" contextRef="D2012_AccountsReceivableMember_CreditConcentrationRiskMember_LargestCustomerMember" unitRef="Pure">0.119</us-gaap:ConcentrationRiskPercentage1>
  <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic id="Tag201" decimals="-3" contextRef="D2012" unitRef="Shares">107619000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
  <us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment id="Tag202" decimals="-3" contextRef="D2011" unitRef="Shares">2864000</us-gaap:WeightedAverageNumberDilutedSharesOutstandingAdjustment>
  <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding id="Tag203" decimals="-3" contextRef="D2012" unitRef="Shares">107619000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
  <us-gaap:EarningsPerShareBasic id="Tag204" decimals="2" contextRef="D2012" unitRef="USDPerShare">-0.32</us-gaap:EarningsPerShareBasic>
  <us-gaap:EarningsPerShareBasic id="Tag205" decimals="2" contextRef="D2011" unitRef="USDPerShare">0.05</us-gaap:EarningsPerShareBasic>
  <us-gaap:EarningsPerShareBasic id="Tag206" decimals="2" contextRef="D2010" unitRef="USDPerShare">-0.17</us-gaap:EarningsPerShareBasic>
  <us-gaap:EarningsPerShareDiluted id="Tag207" decimals="2" contextRef="D2012" unitRef="USDPerShare">-0.32</us-gaap:EarningsPerShareDiluted>
  <us-gaap:EarningsPerShareDiluted id="Tag208" decimals="2" contextRef="D2011" unitRef="USDPerShare">0.05</us-gaap:EarningsPerShareDiluted>
  <us-gaap:EarningsPerShareDiluted id="Tag209" decimals="2" contextRef="D2010" unitRef="USDPerShare">-0.17</us-gaap:EarningsPerShareDiluted>
  <us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock id="Tag210" contextRef="D2012">&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; FONT-SIZE: 10pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 88.48%; PADDING-TOP: 0pt; FONT-FAMILY: Times New Roman; POSITION: relative; HEIGHT: 221px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Trade receivables&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;25,148&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;35,482&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Allowance for doubtful accounts&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(305&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(411&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;24,843&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;35,071&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
</us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock>
  <us-gaap:AccountsReceivableGrossCurrent id="Tag211" decimals="-3" contextRef="I2012" unitRef="USD">25148000</us-gaap:AccountsReceivableGrossCurrent>
  <us-gaap:AccountsReceivableGrossCurrent id="Tag212" decimals="-3" contextRef="I2011" unitRef="USD">35482000</us-gaap:AccountsReceivableGrossCurrent>
  <us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent id="Tag213" decimals="-3" contextRef="I2012" unitRef="USD">305000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
  <us-gaap:ConcentrationRiskPercentage1 id="Tag214" decimals="3" contextRef="D2011_SalesMember_CustomerConcentrationRiskMember_LargestCustomerMember" unitRef="Pure">0.212</us-gaap:ConcentrationRiskPercentage1>
  <us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent id="Tag215" decimals="-3" contextRef="I2011" unitRef="USD">411000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag216" decimals="-3" contextRef="I2012_LandAndBuildingMember" unitRef="USD">78954000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag217" decimals="-3" contextRef="I2012_MachineryAndEquipmentMember" unitRef="USD">7118000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag218" decimals="-3" contextRef="I2012_ConstructionInProgressMember" unitRef="USD">455000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag219" decimals="-3" contextRef="I2012" unitRef="USD">86527000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag220" decimals="-3" contextRef="I2011_LandAndBuildingMember" unitRef="USD">78985000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag221" decimals="-3" contextRef="I2011_MachineryAndEquipmentMember" unitRef="USD">7020000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag222" decimals="-3" contextRef="I2011_ConstructionInProgressMember" unitRef="USD">541000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag223" decimals="-3" contextRef="I2011" unitRef="USD">86546000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment id="Tag224" decimals="-3" contextRef="I2012" unitRef="USD">52114000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
  <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment id="Tag225" decimals="-3" contextRef="I2011" unitRef="USD">49342000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
  <us-gaap:PropertyPlantAndEquipmentNet id="Tag226" decimals="-3" contextRef="I2012" unitRef="USD">34413000</us-gaap:PropertyPlantAndEquipmentNet>
  <us-gaap:Depreciation id="Tag227" decimals="-5" contextRef="D2012" unitRef="USD">3300000</us-gaap:Depreciation>
  <us-gaap:Depreciation id="Tag228" decimals="-5" contextRef="D2011" unitRef="USD">3500000</us-gaap:Depreciation>
  <us-gaap:Depreciation id="Tag229" decimals="-5" contextRef="D2010" unitRef="USD">3600000</us-gaap:Depreciation>
  <us-gaap:PropertyPlantAndEquipmentTextBlock id="Tag230" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 95.75%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 20px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="left" width="101"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" nowrap="nowrap" align="left"&gt;
&lt;div style="MARGIN-BOTTOM: 0pt; WIDTH: 69pt; BORDER-BOTTOM: #000000 1pt solid"&gt;&lt;font size="1"&gt;&lt;b&gt;Asset Classification &lt;!-- COMMAND=ADD_SCROPPEDRULE,69pt --&gt;&lt;/b&gt;&lt;/font&gt;&lt;/div&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;Estimated Useful Life&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Buildings&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;40&amp;#160;years&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Machinery and equipment&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;3 to 10&amp;#160;years&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:PropertyPlantAndEquipmentTextBlock>
  <us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock id="Tag231" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 96.41%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 164px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years Ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at January&amp;#160;1 (beginning of year)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,697&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,713&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;726&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Warranties issued during the period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,042&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,772&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,722&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Settlements made during the period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(3,010&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(5,275&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,923&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Changes in estimate of liability for pre-existing warranties during the period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,928&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,487&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;188&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31 (end of year)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,801&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,697&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,713&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Amount classified as current&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,700&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,556&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,556&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Amount classified as long-term&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;101&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;141&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;157&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total Warranty Liability&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,801&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,697&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,713&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock>
  <us-gaap:ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock id="Tag232" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Operating&lt;br /&gt;
Leases&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2013&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3,057&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2014&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,681&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2015&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,181&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2016&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;224&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6,143&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock>
  <us-gaap:ProductWarrantyAccrual id="Tag233" decimals="-3" contextRef="I2010" unitRef="USD">2713000</us-gaap:ProductWarrantyAccrual>
  <us-gaap:ProductWarrantyAccrual id="Tag234" decimals="-3" contextRef="I2009" unitRef="USD">726000</us-gaap:ProductWarrantyAccrual>
  <us-gaap:ProductWarrantyAccrualWarrantiesIssued id="Tag235" decimals="-3" contextRef="D2012" unitRef="USD">3042000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
  <us-gaap:ProductWarrantyAccrualWarrantiesIssued id="Tag236" decimals="-3" contextRef="D2011" unitRef="USD">4772000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
  <us-gaap:ProductWarrantyAccrualWarrantiesIssued id="Tag237" decimals="-3" contextRef="D2010" unitRef="USD">3722000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
  <us-gaap:ProductWarrantyAccrualPayments id="Tag238" decimals="-3" contextRef="D2012" unitRef="USD">3010000</us-gaap:ProductWarrantyAccrualPayments>
  <us-gaap:ProductWarrantyAccrualPayments id="Tag239" decimals="-3" contextRef="D2011" unitRef="USD">5275000</us-gaap:ProductWarrantyAccrualPayments>
  <us-gaap:ProductWarrantyAccrualPayments id="Tag240" decimals="-3" contextRef="D2010" unitRef="USD">1923000</us-gaap:ProductWarrantyAccrualPayments>
  <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease id="Tag241" decimals="-3" contextRef="D2012" unitRef="USD">-1928000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
  <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease id="Tag242" decimals="-3" contextRef="D2011" unitRef="USD">1487000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
  <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease id="Tag243" decimals="-3" contextRef="D2010" unitRef="USD">188000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
  <us-gaap:ProductWarrantyAccrual id="Tag244" decimals="-3" contextRef="I2012" unitRef="USD">1801000</us-gaap:ProductWarrantyAccrual>
  <us-gaap:ProductWarrantyAccrual id="Tag245" decimals="-3" contextRef="I2011" unitRef="USD">3697000</us-gaap:ProductWarrantyAccrual>
  <us-gaap:OperatingLeasesRentExpenseNet id="Tag246" decimals="-5" contextRef="D2012" unitRef="USD">4300000</us-gaap:OperatingLeasesRentExpenseNet>
  <us-gaap:ProductWarrantyAccrualClassifiedCurrent id="Tag247" decimals="-3" contextRef="I2012" unitRef="USD">1700000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
  <us-gaap:ProductWarrantyAccrualClassifiedCurrent id="Tag248" decimals="-3" contextRef="I2010" unitRef="USD">2556000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
  <us-gaap:ProductWarrantyAccrualNoncurrent id="Tag249" decimals="-3" contextRef="I2012" unitRef="USD">101000</us-gaap:ProductWarrantyAccrualNoncurrent>
  <us-gaap:ProductWarrantyAccrualNoncurrent id="Tag250" decimals="-3" contextRef="I2011" unitRef="USD">141000</us-gaap:ProductWarrantyAccrualNoncurrent>
  <us-gaap:ProductWarrantyAccrualNoncurrent id="Tag251" decimals="-3" contextRef="I2010" unitRef="USD">157000</us-gaap:ProductWarrantyAccrualNoncurrent>
  <us-gaap:OperatingLeasesRentExpenseNet id="Tag252" decimals="-5" contextRef="D2011" unitRef="USD">4600000</us-gaap:OperatingLeasesRentExpenseNet>
  <us-gaap:OperatingLeasesRentExpenseNet id="Tag253" decimals="-5" contextRef="D2010" unitRef="USD">5200000</us-gaap:OperatingLeasesRentExpenseNet>
  <us-gaap:OperatingLeasesFutureMinimumPaymentsDueCurrent id="Tag254" decimals="-3" contextRef="I2012" unitRef="USD">3057000</us-gaap:OperatingLeasesFutureMinimumPaymentsDueCurrent>
  <us-gaap:OperatingLeasesFutureMinimumPaymentsDueInTwoYears id="Tag255" decimals="-3" contextRef="I2012" unitRef="USD">1681000</us-gaap:OperatingLeasesFutureMinimumPaymentsDueInTwoYears>
  <us-gaap:OperatingLeasesFutureMinimumPaymentsDueInThreeYears id="Tag256" decimals="-3" contextRef="I2012" unitRef="USD">1181000</us-gaap:OperatingLeasesFutureMinimumPaymentsDueInThreeYears>
  <us-gaap:OperatingLeasesFutureMinimumPaymentsDueInFourYears id="Tag257" decimals="-3" contextRef="I2012" unitRef="USD">224000</us-gaap:OperatingLeasesFutureMinimumPaymentsDueInFourYears>
  <us-gaap:OperatingLeasesFutureMinimumPaymentsDue id="Tag258" decimals="-3" contextRef="I2012" unitRef="USD">6143000</us-gaap:OperatingLeasesFutureMinimumPaymentsDue>
  <us-gaap:LongTermPurchaseCommitmentAmount id="Tag259" decimals="-5" contextRef="D2012" unitRef="USD">14900000</us-gaap:LongTermPurchaseCommitmentAmount>
  <acls:ProductWarrantyPeriod id="Tag260" contextRef="D2012">P1Y</acls:ProductWarrantyPeriod>
  <us-gaap:ScheduleOfInventoryCurrentTableTextBlock id="Tag261" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 90.47%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 80px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Raw materials&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;72,013&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;85,829&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Work in process&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;12,253&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;25,639&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Finished goods (completed systems)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;15,968&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;8,555&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;100,234&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;120,023&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ScheduleOfInventoryCurrentTableTextBlock>
  <us-gaap:InventoryRawMaterialsNetOfReserves id="Tag262" decimals="-3" contextRef="I2012" unitRef="USD">72013000</us-gaap:InventoryRawMaterialsNetOfReserves>
  <us-gaap:InventoryWorkInProcessNetOfReserves id="Tag263" decimals="-3" contextRef="I2012" unitRef="USD">12253000</us-gaap:InventoryWorkInProcessNetOfReserves>
  <us-gaap:InventoryFinishedGoodsNetOfReserves id="Tag264" decimals="-3" contextRef="I2012" unitRef="USD">15968000</us-gaap:InventoryFinishedGoodsNetOfReserves>
  <us-gaap:InventoryNet id="Tag265" decimals="-3" contextRef="I2012" unitRef="USD">100234000</us-gaap:InventoryNet>
  <us-gaap:InventoryValuationReserves id="Tag266" decimals="-5" contextRef="I2012" unitRef="USD">33600000</us-gaap:InventoryValuationReserves>
  <us-gaap:InventoryRawMaterialsNetOfReserves id="Tag267" decimals="-3" contextRef="I2011" unitRef="USD">85829000</us-gaap:InventoryRawMaterialsNetOfReserves>
  <us-gaap:InventoryWorkInProcessNetOfReserves id="Tag268" decimals="-3" contextRef="I2011" unitRef="USD">25639000</us-gaap:InventoryWorkInProcessNetOfReserves>
  <us-gaap:InventoryFinishedGoodsNetOfReserves id="Tag269" decimals="-3" contextRef="I2011" unitRef="USD">8555000</us-gaap:InventoryFinishedGoodsNetOfReserves>
  <us-gaap:InventoryValuationReserves id="Tag270" decimals="-5" contextRef="I2011" unitRef="USD">22800000</us-gaap:InventoryValuationReserves>
  <us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity id="Tag271" decimals="-6" contextRef="I2011Q2_M0425_RevolvingCreditFacilityMember" unitRef="USD">30000000</us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity>
  <acls:DebtInstrumentCovenantMinimumTrailingPeriod id="Tag272" contextRef="D2012Q3_M0910_RevolvingCreditFacilityMember">P6M</acls:DebtInstrumentCovenantMinimumTrailingPeriod>
  <us-gaap:LineOfCreditFacilityRemainingBorrowingCapacity id="Tag273" decimals="-5" contextRef="I2012_RevolvingCreditFacilityMember" unitRef="USD">17300000</us-gaap:LineOfCreditFacilityRemainingBorrowingCapacity>
  <us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock id="Tag274" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="54"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Revenue&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Long-Lived&lt;br /&gt;
Assets&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;132,159&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;43,440&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Europe&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,636&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Asia Pacific&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;43,590&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;752&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;203,385&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;44,192&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;234,132&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;54,472&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Europe&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;31,505&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Asia Pacific&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;53,779&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;996&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;319,416&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;55,468&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;190,819&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;50,532&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Europe&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;33,822&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Asia Pacific&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;50,571&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;442&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;275,212&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;50,974&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock>
  <us-gaap:NumberOfReportableSegments id="Tag275" decimals="INF" contextRef="D2012" unitRef="Item">1</us-gaap:NumberOfReportableSegments>
  <us-gaap:SalesRevenueNet id="Tag276" decimals="-3" contextRef="D2012_IonImplantationSystemsServicesAndRoyaltiesMember" unitRef="USD">156090000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag277" decimals="-3" contextRef="D2012_OtherProductsSystemsServicesAndRoyaltiesMember" unitRef="USD">47295000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag278" decimals="-3" contextRef="D2011_IonImplantationSystemsServicesAndRoyaltiesMember" unitRef="USD">237857000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag279" decimals="-3" contextRef="D2011_OtherProductsSystemsServicesAndRoyaltiesMember" unitRef="USD">81559000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag280" decimals="-3" contextRef="D2010_IonImplantationSystemsServicesAndRoyaltiesMember" unitRef="USD">232335000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag281" decimals="-3" contextRef="D2010_OtherProductsSystemsServicesAndRoyaltiesMember" unitRef="USD">42877000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag282" decimals="-3" contextRef="D2012_SegmentGeographicalGroupsOfCountriesGroupTwoMember" unitRef="USD">43590000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag283" decimals="-3" contextRef="D2012_US" unitRef="USD">132159000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag284" decimals="-3" contextRef="D2012_SegmentGeographicalGroupsOfCountriesGroupOneMember" unitRef="USD">27636000</us-gaap:SalesRevenueNet>
  <us-gaap:NoncurrentAssets id="Tag285" decimals="-3" contextRef="I2012_US" unitRef="USD">43440000</us-gaap:NoncurrentAssets>
  <us-gaap:NoncurrentAssets id="Tag286" decimals="-3" contextRef="I2012_SegmentGeographicalGroupsOfCountriesGroupTwoMember" unitRef="USD">752000</us-gaap:NoncurrentAssets>
  <us-gaap:SalesRevenueNet id="Tag287" decimals="-3" contextRef="D2011_US" unitRef="USD">234132000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag288" decimals="-3" contextRef="D2011_SegmentGeographicalGroupsOfCountriesGroupOneMember" unitRef="USD">31505000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag289" decimals="-3" contextRef="D2011_SegmentGeographicalGroupsOfCountriesGroupTwoMember" unitRef="USD">53779000</us-gaap:SalesRevenueNet>
  <us-gaap:NoncurrentAssets id="Tag290" decimals="-3" contextRef="I2012" unitRef="USD">44192000</us-gaap:NoncurrentAssets>
  <us-gaap:NoncurrentAssets id="Tag291" decimals="-3" contextRef="I2011_US" unitRef="USD">54472000</us-gaap:NoncurrentAssets>
  <us-gaap:NoncurrentAssets id="Tag292" decimals="-3" contextRef="I2011_SegmentGeographicalGroupsOfCountriesGroupTwoMember" unitRef="USD">996000</us-gaap:NoncurrentAssets>
  <us-gaap:NoncurrentAssets id="Tag293" decimals="-3" contextRef="I2011" unitRef="USD">55468000</us-gaap:NoncurrentAssets>
  <us-gaap:SalesRevenueNet id="Tag294" decimals="-3" contextRef="D2010_US" unitRef="USD">190819000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag295" decimals="-3" contextRef="D2010_SegmentGeographicalGroupsOfCountriesGroupOneMember" unitRef="USD">33822000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag296" decimals="-3" contextRef="D2010_SegmentGeographicalGroupsOfCountriesGroupTwoMember" unitRef="USD">50571000</us-gaap:SalesRevenueNet>
  <us-gaap:NoncurrentAssets id="Tag297" decimals="-3" contextRef="I2010_US" unitRef="USD">50532000</us-gaap:NoncurrentAssets>
  <us-gaap:NoncurrentAssets id="Tag298" decimals="-3" contextRef="I2010_SegmentGeographicalGroupsOfCountriesGroupTwoMember" unitRef="USD">442000</us-gaap:NoncurrentAssets>
  <us-gaap:NoncurrentAssets id="Tag299" decimals="-3" contextRef="I2010" unitRef="USD">50974000</us-gaap:NoncurrentAssets>
  <acls:ConcentrationRiskNumberOfCustomers id="Tag300" decimals="INF" contextRef="D2011_SalesMember_CustomerConcentrationRiskMember_LargestCustomerMember" unitRef="Item">1</acls:ConcentrationRiskNumberOfCustomers>
  <us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock id="Tag301" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 54%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="150%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="49"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Dec.&amp;#160;31,&lt;br /&gt;
2012(1)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Sept.&amp;#160;30,&lt;br /&gt;
2012(2)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;June&amp;#160;30,&lt;br /&gt;
2012(3)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;March&amp;#160;31,&lt;br /&gt;
2012(4)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Dec.&amp;#160;31,&lt;br /&gt;
2011(5)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Sept.&amp;#160;30,&lt;br /&gt;
2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;June&amp;#160;30,&lt;br /&gt;
2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;March&amp;#160;31,&lt;br /&gt;
2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="23"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands, except per share data)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Revenue&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;44,624&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;44,640&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;59,114&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;55,007&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;60,411&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;72,455&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;93,380&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;93,170&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Gross profit&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;480&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;14,367&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;22,788&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;20,536&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;22,623&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;26,895&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;34,138&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;31,081&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net income (loss)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(14,818&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(8,718&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(471&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(10,027&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(2,113&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,151&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,227&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,812&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net income (loss) per share basic and diluted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.14&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.08&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.00&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.09&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.02&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.01&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.04&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.02&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;!-- COMMAND=ADD_LINERULETXT,NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" --&gt;
&lt;hr style="COLOR: #000000" align="left" width="26%" noshade="noshade" size="1" /&gt;&lt;/div&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; PADDING-TOP: 0pt; POSITION: relative; TEXT-ALIGN: left"&gt;
&lt;dl compact="compact"&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(1)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Gross profit and net loss include a $13.4&amp;#160;million provision for excess inventory related to the Company's comprehensive review of its worldwide inventory levels. Net loss includes a $7.9&amp;#160;million gain on sale of the Company's dry strip assets and intellectual property to Lam Research; restructuring charges of $0.6&amp;#160;million; and a $2.1&amp;#160;million one-time marketing expense associated with the Company's evaluation programs.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(2)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes restructuring charges of $0.6&amp;#160;million.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(3)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes restructuring charges of $0.1&amp;#160;million and a tax expense of $0.8&amp;#160;million related to an uncertain tax position in a certain foreign jurisdiction.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(4)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes restructuring charges of $2.9&amp;#160;million.&lt;br /&gt;
&lt;br /&gt;&lt;/font&gt;&lt;/dd&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(5)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net loss includes a tax expense of $0.9&amp;#160;million related to an uncertain tax position in a certain foreign jurisdiction.&lt;/font&gt;&lt;/dd&gt;&lt;/dl&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfQuarterlyFinancialInformationTableTextBlock>
  <acls:ConcentrationRiskNumberOfCustomers id="Tag302" decimals="INF" contextRef="D2010_SalesMember_CustomerConcentrationRiskMember_LargestCustomerMember" unitRef="Item">1</acls:ConcentrationRiskNumberOfCustomers>
  <us-gaap:SalesRevenueNet id="Tag303" decimals="-3" contextRef="D2011Q3" unitRef="USD">72455000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag304" decimals="-3" contextRef="D2011Q2" unitRef="USD">93380000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag305" decimals="-3" contextRef="D2011Q1" unitRef="USD">93170000</us-gaap:SalesRevenueNet>
  <us-gaap:GrossProfit id="Tag306" decimals="-3" contextRef="D2011Q3" unitRef="USD">26895000</us-gaap:GrossProfit>
  <us-gaap:GrossProfit id="Tag307" decimals="-3" contextRef="D2011Q2" unitRef="USD">34138000</us-gaap:GrossProfit>
  <us-gaap:GrossProfit id="Tag308" decimals="-3" contextRef="D2011Q1" unitRef="USD">31081000</us-gaap:GrossProfit>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag309" decimals="-3" contextRef="D2011Q3" unitRef="USD">1151000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag310" decimals="-3" contextRef="D2011Q2" unitRef="USD">4227000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag311" decimals="-3" contextRef="D2011Q1" unitRef="USD">1812000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag312" decimals="2" contextRef="D2011Q3" unitRef="USDPerShare">0.01</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag313" decimals="2" contextRef="D2011Q2" unitRef="USDPerShare">0.04</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag314" decimals="2" contextRef="D2011Q1" unitRef="USDPerShare">0.02</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:GrossProfit id="Tag315" decimals="-3" contextRef="D2012" unitRef="USD">58171000</us-gaap:GrossProfit>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag316" decimals="2" contextRef="D2012Q4" unitRef="USDPerShare">-0.14</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag318" decimals="2" contextRef="D2012Q3" unitRef="USDPerShare">-0.08</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag319" decimals="2" contextRef="D2012Q1" unitRef="USDPerShare">-0.09</us-gaap:EarningsPerShareBasicAndDiluted>
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&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(37,682&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,622&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(21,526&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5,294&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,849&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,265&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income (loss) before income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(32,388&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;7,471&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(17,261&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
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</us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock>
  <us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock id="Tag323" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Current:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;United States&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Federal&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;82&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;163&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;309&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;738&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,528&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total current&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;820&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,809&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,837&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deferred:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;826&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;585&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,525&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total deferred&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;826&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;585&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,525&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,394&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;312&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
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&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
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&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
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&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income (credit) at the United States statutory rate&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(11,336&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,615&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(6,041&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;53&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;31&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;309&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Unrecognized tax benefits&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(832&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;899&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;842&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Effect of change in valuation allowance&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;12,662&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(3,160&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6,550&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign income tax rate differentials&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(788&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(365&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,490&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Restoration of foreign deferred tax assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,329&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign dividend&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;383&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Stock options&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,298&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deemed distribution from foreign subsidiaries&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;149&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,533&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,152&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other, net&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;57&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;841&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(681&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income taxes&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,394&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;312&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
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&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="56"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="56"&gt;&lt;/td&gt;
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&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
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&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;As of December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Current&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Long Term&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Current&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Long Term&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Federal net operating loss carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;88,088&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;79,163&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State net operating loss carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,181&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,685&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Foreign net operating loss carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,853&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,821&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Federal tax credit carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;17,814&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;15,505&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;State tax credit carryforwards&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;9,051&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;9,051&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Unremitted earnings of foreign subsidiaries&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(8,580&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(10,370&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Intangible assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;661&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;803&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Property, plant and equipment&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accrued compensation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;368&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Inventories&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(215&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;22,447&lt;/font&gt;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Stock compensation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,378&lt;/font&gt;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Warranty&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deferred taxes, gross&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Valuation allowance&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(119,605&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(24,160&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(102,814&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
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&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Deferred taxes, net&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;304&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,872&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,364&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,640&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock>
  <us-gaap:ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock id="Tag326" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at beginning of year&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;8,089&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6,965&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Increases in unrecognized tax benefits as a result of tax positions taken during a prior period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1,124&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Decreases in unrecognized tax benefits related to settlements with tax authorities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(880&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Increases in unrecognized tax benefits as a result of tax positions taken during the current period&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;663&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(799&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at end of year&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;7,719&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;8,089&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Recorded as other long-term liability&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,646&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3,244&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Recorded as a decrease in deferred tax assets and offsetting valuation allowance&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5,073&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,845&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;7,719&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;8,089&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic id="Tag327" decimals="-3" contextRef="D2012" unitRef="USD">-37682000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic id="Tag328" decimals="-3" contextRef="D2011" unitRef="USD">2622000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
  <acls:IncomeTaxExpenseBenefitUncertainTaxPositionForeign id="Tag329" decimals="-5" contextRef="D2012Q2" unitRef="USD">800000</acls:IncomeTaxExpenseBenefitUncertainTaxPositionForeign>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic id="Tag330" decimals="-3" contextRef="D2010" unitRef="USD">-21526000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign id="Tag331" decimals="-3" contextRef="D2011" unitRef="USD">4849000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign id="Tag332" decimals="-3" contextRef="D2010" unitRef="USD">4265000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments id="Tag333" decimals="-3" contextRef="D2012" unitRef="USD">-32388000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
  <us-gaap:CurrentStateAndLocalTaxExpenseBenefit id="Tag335" decimals="-3" contextRef="D2012" unitRef="USD">82000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
  <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsDomestic id="Tag336" decimals="-3" contextRef="I2011" unitRef="USD">79163000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsDomestic>
  <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal id="Tag337" decimals="-3" contextRef="I2011" unitRef="USD">2685000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal>
  <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign id="Tag338" decimals="-3" contextRef="I2011" unitRef="USD">1821000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign>
  <us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings id="Tag339" decimals="-3" contextRef="I2011" unitRef="USD">10370000</us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings>
  <us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment id="Tag340" decimals="-3" contextRef="I2011" unitRef="USD">5589000</us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment>
  <us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost id="Tag341" decimals="-3" contextRef="I2011" unitRef="USD">3970000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
  <us-gaap:DeferredTaxAssetsValuationAllowanceNoncurrent id="Tag342" decimals="-3" contextRef="I2011" unitRef="USD">102814000</us-gaap:DeferredTaxAssetsValuationAllowanceNoncurrent>
  <us-gaap:DeferredTaxAssetsLiabilitiesNetNoncurrent id="Tag343" decimals="-3" contextRef="I2011" unitRef="USD">1640000</us-gaap:DeferredTaxAssetsLiabilitiesNetNoncurrent>
  <acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent id="Tag346" decimals="-3" contextRef="I2012" unitRef="USD">-612000</acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent>
  <acls:DeferredTaxAssetsOtherCurrent id="Tag347" decimals="-3" contextRef="I2012" unitRef="USD">1820000</acls:DeferredTaxAssetsOtherCurrent>
  <acls:DeferredTaxAssetsLiabilitiesGrossCurrent id="Tag348" decimals="-3" contextRef="I2012" unitRef="USD">25366000</acls:DeferredTaxAssetsLiabilitiesGrossCurrent>
  <us-gaap:DeferredTaxAssetsValuationAllowanceCurrent id="Tag349" decimals="-3" contextRef="I2012" unitRef="USD">25062000</us-gaap:DeferredTaxAssetsValuationAllowanceCurrent>
  <us-gaap:DeferredTaxAssetsLiabilitiesNetCurrent id="Tag350" decimals="-3" contextRef="I2012" unitRef="USD">304000</us-gaap:DeferredTaxAssetsLiabilitiesNetCurrent>
  <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsDomestic id="Tag351" decimals="-3" contextRef="I2012" unitRef="USD">88088000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsDomestic>
  <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal id="Tag352" decimals="-3" contextRef="I2012" unitRef="USD">1181000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal>
  <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign id="Tag353" decimals="-3" contextRef="I2012" unitRef="USD">1853000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign>
  <us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings id="Tag354" decimals="-3" contextRef="I2012" unitRef="USD">8580000</us-gaap:DeferredTaxLiabilitiesUndistributedForeignEarnings>
  <us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment id="Tag355" decimals="-3" contextRef="I2012" unitRef="USD">5925000</us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment>
  <us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost id="Tag356" decimals="-3" contextRef="I2012" unitRef="USD">4378000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
  <us-gaap:DeferredTaxAssetsValuationAllowanceNoncurrent id="Tag357" decimals="-3" contextRef="I2012" unitRef="USD">119605000</us-gaap:DeferredTaxAssetsValuationAllowanceNoncurrent>
  <us-gaap:DeferredTaxAssetsLiabilitiesNetNoncurrent id="Tag358" decimals="-3" contextRef="I2012" unitRef="USD">1872000</us-gaap:DeferredTaxAssetsLiabilitiesNetNoncurrent>
  <us-gaap:OperatingLossCarryforwards id="Tag359" decimals="-5" contextRef="I2012_FederalAndStateMember" unitRef="USD">89300000</us-gaap:OperatingLossCarryforwards>
  <us-gaap:OperatingLossCarryforwards id="Tag360" decimals="-5" contextRef="I2012_ForeignCountryMember" unitRef="USD">1900000</us-gaap:OperatingLossCarryforwards>
  <us-gaap:UnrecognizedTaxBenefits id="Tag361" decimals="-3" contextRef="I2010" unitRef="USD">6965000</us-gaap:UnrecognizedTaxBenefits>
  <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions id="Tag362" decimals="-3" contextRef="D2011" unitRef="USD">1124000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions>
  <us-gaap:UnrecognizedTaxBenefits id="Tag363" decimals="-3" contextRef="I2012" unitRef="USD">7719000</us-gaap:UnrecognizedTaxBenefits>
  <us-gaap:UnrecognizedTaxBenefits id="Tag364" decimals="-3" contextRef="I2011" unitRef="USD">8089000</us-gaap:UnrecognizedTaxBenefits>
  <acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability id="Tag365" decimals="-3" contextRef="I2012" unitRef="USD">2646000</acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability>
  <us-gaap:CurrentStateAndLocalTaxExpenseBenefit id="Tag366" decimals="-3" contextRef="D2011" unitRef="USD">163000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
  <us-gaap:CurrentStateAndLocalTaxExpenseBenefit id="Tag367" decimals="-3" contextRef="D2010" unitRef="USD">309000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
  <us-gaap:CurrentForeignTaxExpenseBenefit id="Tag368" decimals="-3" contextRef="D2012" unitRef="USD">738000</us-gaap:CurrentForeignTaxExpenseBenefit>
  <us-gaap:CurrentForeignTaxExpenseBenefit id="Tag369" decimals="-3" contextRef="D2011" unitRef="USD">1646000</us-gaap:CurrentForeignTaxExpenseBenefit>
  <us-gaap:CurrentForeignTaxExpenseBenefit id="Tag370" decimals="-3" contextRef="D2010" unitRef="USD">1528000</us-gaap:CurrentForeignTaxExpenseBenefit>
  <us-gaap:CurrentIncomeTaxExpenseBenefit id="Tag371" decimals="-3" contextRef="D2012" unitRef="USD">820000</us-gaap:CurrentIncomeTaxExpenseBenefit>
  <us-gaap:CurrentIncomeTaxExpenseBenefit id="Tag372" decimals="-3" contextRef="D2011" unitRef="USD">1809000</us-gaap:CurrentIncomeTaxExpenseBenefit>
  <us-gaap:CurrentIncomeTaxExpenseBenefit id="Tag373" decimals="-3" contextRef="D2010" unitRef="USD">1837000</us-gaap:CurrentIncomeTaxExpenseBenefit>
  <us-gaap:DeferredForeignIncomeTaxExpenseBenefit id="Tag374" decimals="-3" contextRef="D2012" unitRef="USD">826000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
  <us-gaap:DeferredForeignIncomeTaxExpenseBenefit id="Tag375" decimals="-3" contextRef="D2011" unitRef="USD">585000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
  <us-gaap:DeferredForeignIncomeTaxExpenseBenefit id="Tag376" decimals="-3" contextRef="D2010" unitRef="USD">-1525000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
  <us-gaap:DeferredIncomeTaxExpenseBenefit id="Tag377" decimals="-3" contextRef="D2012" unitRef="USD">826000</us-gaap:DeferredIncomeTaxExpenseBenefit>
  <us-gaap:IncomeTaxExpenseBenefit id="Tag378" decimals="-3" contextRef="D2012" unitRef="USD">1646000</us-gaap:IncomeTaxExpenseBenefit>
  <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate id="Tag379" decimals="-3" contextRef="D2012" unitRef="USD">-11336000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
  <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate id="Tag380" decimals="-3" contextRef="D2011" unitRef="USD">2615000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
  <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate id="Tag381" decimals="-3" contextRef="D2010" unitRef="USD">-6041000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
  <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes id="Tag382" decimals="-3" contextRef="D2012" unitRef="USD">53000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
  <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes id="Tag383" decimals="-3" contextRef="D2011" unitRef="USD">31000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
  <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes id="Tag384" decimals="-3" contextRef="D2010" unitRef="USD">309000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
  <acls:IncomeTaxReconciliationUnrecognizedTaxBenefits id="Tag385" decimals="-3" contextRef="D2012" unitRef="USD">-832000</acls:IncomeTaxReconciliationUnrecognizedTaxBenefits>
  <acls:IncomeTaxReconciliationUnrecognizedTaxBenefits id="Tag386" decimals="-3" contextRef="D2011" unitRef="USD">899000</acls:IncomeTaxReconciliationUnrecognizedTaxBenefits>
  <acls:IncomeTaxReconciliationUnrecognizedTaxBenefits id="Tag387" decimals="-3" contextRef="D2010" unitRef="USD">842000</acls:IncomeTaxReconciliationUnrecognizedTaxBenefits>
  <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance id="Tag388" decimals="-3" contextRef="D2012" unitRef="USD">12662000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
  <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance id="Tag389" decimals="-3" contextRef="D2011" unitRef="USD">-3160000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
  <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance id="Tag390" decimals="-3" contextRef="D2010" unitRef="USD">6550000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
  <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential id="Tag391" decimals="-3" contextRef="D2012" unitRef="USD">-788000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
  <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential id="Tag392" decimals="-3" contextRef="D2011" unitRef="USD">-365000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
  <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential id="Tag393" decimals="-3" contextRef="D2010" unitRef="USD">-1490000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
  <acls:IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets id="Tag394" decimals="-3" contextRef="D2010" unitRef="USD">-1329000</acls:IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets>
  <acls:IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries id="Tag395" decimals="-3" contextRef="D2012" unitRef="USD">149000</acls:IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries>
  <acls:IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries id="Tag396" decimals="-3" contextRef="D2011" unitRef="USD">1533000</acls:IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries>
  <acls:IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries id="Tag397" decimals="-3" contextRef="D2010" unitRef="USD">2152000</acls:IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries>
  <us-gaap:IncomeTaxReconciliationOtherAdjustments id="Tag398" decimals="-3" contextRef="D2012" unitRef="USD">57000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
  <us-gaap:IncomeTaxReconciliationOtherAdjustments id="Tag399" decimals="-3" contextRef="D2011" unitRef="USD">841000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
  <us-gaap:IncomeTaxReconciliationOtherAdjustments id="Tag400" decimals="-3" contextRef="D2010" unitRef="USD">-681000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
  <acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent id="Tag403" decimals="-3" contextRef="I2011" unitRef="USD">-1293000</acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent>
  <acls:DeferredTaxAssetsOtherCurrent id="Tag404" decimals="-3" contextRef="I2011" unitRef="USD">1243000</acls:DeferredTaxAssetsOtherCurrent>
  <acls:DeferredTaxAssetsLiabilitiesGrossCurrent id="Tag405" decimals="-3" contextRef="I2011" unitRef="USD">25524000</acls:DeferredTaxAssetsLiabilitiesGrossCurrent>
  <us-gaap:DeferredTaxAssetsValuationAllowanceCurrent id="Tag406" decimals="-3" contextRef="I2011" unitRef="USD">24160000</us-gaap:DeferredTaxAssetsValuationAllowanceCurrent>
  <us-gaap:DeferredTaxAssetsLiabilitiesNetCurrent id="Tag407" decimals="-3" contextRef="I2011" unitRef="USD">1364000</us-gaap:DeferredTaxAssetsLiabilitiesNetCurrent>
  <acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability id="Tag408" decimals="-3" contextRef="I2011" unitRef="USD">3244000</acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability>
  <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions id="Tag409" decimals="-3" contextRef="D2012" unitRef="USD">646000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions>
  <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions id="Tag410" decimals="-3" contextRef="D2012" unitRef="USD">663000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign id="Tag411" decimals="-3" contextRef="D2012" unitRef="USD">5294000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
  <us-gaap:ScheduleOfRestrictedCashAndCashEquivalentsTextBlock id="Tag412" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="30"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="30"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Statutory liability deposit&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;106&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;104&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;
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  <us-gaap:PropertyPlantAndEquipmentGross id="Tag413" decimals="-3" contextRef="I2012_AssetsManufacturedForInternalUseMember" unitRef="USD">23727000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment id="Tag414" decimals="-3" contextRef="I2012_AssetsManufacturedForInternalUseMember" unitRef="USD">13948000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
  <us-gaap:PropertyPlantAndEquipmentNet id="Tag415" decimals="-3" contextRef="I2012_AssetsManufacturedForInternalUseMember" unitRef="USD">9779000</us-gaap:PropertyPlantAndEquipmentNet>
  <us-gaap:PropertyPlantAndEquipmentGross id="Tag416" decimals="-3" contextRef="I2011_AssetsManufacturedForInternalUseMember" unitRef="USD">27503000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment id="Tag417" decimals="-3" contextRef="I2011_AssetsManufacturedForInternalUseMember" unitRef="USD">10526000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
  <us-gaap:PropertyPlantAndEquipmentNet id="Tag418" decimals="-3" contextRef="I2011_AssetsManufacturedForInternalUseMember" unitRef="USD">16977000</us-gaap:PropertyPlantAndEquipmentNet>
  <us-gaap:RestructuringReserveSettledWithoutCash id="Tag421" decimals="-3" contextRef="D2012_EmployeeSeveranceMember" unitRef="USD">130000</us-gaap:RestructuringReserveSettledWithoutCash>
  <us-gaap:RestructuringReserveSettledWithCash id="Tag422" decimals="-3" contextRef="D2012_EmployeeSeveranceMember" unitRef="USD">3551000</us-gaap:RestructuringReserveSettledWithCash>
  <us-gaap:RestructuringReserve id="Tag423" decimals="-3" contextRef="I2012_EmployeeSeveranceMember" unitRef="USD">659000</us-gaap:RestructuringReserve>
  <us-gaap:RestructuringReserve id="Tag424" decimals="-3" contextRef="I2011_EmployeeSeveranceMember" unitRef="USD">171000</us-gaap:RestructuringReserve>
  <us-gaap:RestructuringReserve id="Tag425" decimals="-3" contextRef="I2010_EmployeeSeveranceMember" unitRef="USD">171000</us-gaap:RestructuringReserve>
  <us-gaap:RestructuringReserveSettledWithCash id="Tag426" decimals="-3" contextRef="D2010_EmployeeSeveranceMember" unitRef="USD">126000</us-gaap:RestructuringReserveSettledWithCash>
  <us-gaap:RestructuringReserve id="Tag427" decimals="-3" contextRef="I2009_EmployeeSeveranceMember" unitRef="USD">297000</us-gaap:RestructuringReserve>
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&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="70"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Severance&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(In thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2009&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;297&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash payments&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(126&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;171&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash payments&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;171&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Severance and related costs&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,169&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash payments&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(3,551&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Non-cash items&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(130&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Balance at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;659&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;
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  <us-gaap:ValuationAllowancesAndReservesAdjustments id="Tag436" decimals="-3" contextRef="D2012_InventoryValuationReserveMember" unitRef="USD">1150000</us-gaap:ValuationAllowancesAndReservesAdjustments>
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  <us-gaap:ValuationAllowancesAndReservesDeductions id="Tag441" decimals="-3" contextRef="D2011_AllowanceForDoubtfulAccountsAndSalesReturnsMember" unitRef="USD">449000</us-gaap:ValuationAllowancesAndReservesDeductions>
  <us-gaap:ValuationAllowancesAndReservesDeductions id="Tag442" decimals="-3" contextRef="D2011_InventoryValuationReserveMember" unitRef="USD">5583000</us-gaap:ValuationAllowancesAndReservesDeductions>
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  <us-gaap:ValuationAllowancesAndReservesAdjustments id="Tag444" decimals="-3" contextRef="D2011_InventoryValuationReserveMember" unitRef="USD">-171000</us-gaap:ValuationAllowancesAndReservesAdjustments>
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&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="77"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="24"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="24"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted-average expected volatility&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;97.8%-113.55&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;97.8&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;97.8&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted-average expected term&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3.8-6.1&amp;#160;years&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6.1&amp;#160;years&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6.2&amp;#160;years&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Risk-free interest rate&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0.45%-1.37&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.1%-2.4&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.5%-2.0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expected dividend yield&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;0&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;%&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
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&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="44"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="56"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Options&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Weighted&lt;br /&gt;
Average&lt;br /&gt;
Exercise&lt;br /&gt;
Price&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Weighted&lt;br /&gt;
Average&lt;br /&gt;
Remaining&lt;br /&gt;
Contractual&lt;br /&gt;
Term&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Aggregate&lt;br /&gt;
Intrinsic&lt;br /&gt;
Value&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="left" colspan="2"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(years)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2009&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;17,368&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6.43&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5,310&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.61&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercised&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(704&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.79&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Canceled&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(333&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.23&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expired&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(2,693&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;18.26&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;18,948&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;3.70&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,662&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.70&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercised&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(372&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.77&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Canceled&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(654&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.43&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expired&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,491&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;12.38&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;21,093&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.76&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,077&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;.93&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercised&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,148&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;.84&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Canceled&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,225&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;1.43&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Expired&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(1,537&lt;/font&gt;&lt;/td&gt;
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&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;7.71&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;21,260&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.24&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6.39&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;4,607&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Exercisable at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;11,680&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.99&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5.59&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,591&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Options Vested or Expected to Vest at December&amp;#160;31, 2012(1)&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;20,558&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2.27&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;6.44&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,015&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;!-- COMMAND=ADD_LINERULETXT,NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" --&gt;
&lt;hr style="COLOR: #000000" align="left" width="26%" noshade="noshade" size="1" /&gt;&lt;/div&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; PADDING-TOP: 0pt; POSITION: relative; TEXT-ALIGN: left"&gt;
&lt;dl compact="compact"&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(1)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;In addition to the vested options, the Company expects a portion of the unvested options to vest at some point in the future. Options expected to vest is calculated by applying an estimated forfeiture rate to the unvested options.&lt;/font&gt;&lt;/dd&gt;&lt;/dl&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock>
  <us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock id="Tag547" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="82"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Shares/units&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Weighted-Average&lt;br /&gt;
Grant Date Fair&lt;br /&gt;
Value per Share&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="left" colspan="2"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2009&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;604&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5.90&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;695&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.72&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Vested&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,052&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3.30&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Forfeited&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(19&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.94&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2010&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;228&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5.38&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;121&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.50&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Vested&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(196&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;5.81&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Forfeited&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(2&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6.01&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2011&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;151&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.52&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Granted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;864&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.65&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Vested&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(47&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2.82&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Forfeited&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(7&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.62&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Outstanding at December&amp;#160;31, 2012&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;961&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1.73&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
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  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate id="Tag550" decimals="3" contextRef="D2010_StockOptionsMember" unitRef="Pure">0.978</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate>
  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 id="Tag551" contextRef="D2012_StockPlan2000Member_MinimumMember">P3Y9M18D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 id="Tag552" contextRef="D2011_StockOptionsMember">P6Y1M6D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 id="Tag553" contextRef="D2010_StockOptionsMember">P6Y2M12D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum id="Tag554" decimals="3" contextRef="D2011_StockOptionsMember" unitRef="Pure">0.011</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum id="Tag555" decimals="3" contextRef="D2011_StockOptionsMember" unitRef="Pure">0.024</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum id="Tag556" decimals="3" contextRef="D2010_StockOptionsMember" unitRef="Pure">0.015</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum id="Tag557" decimals="3" contextRef="D2010_StockOptionsMember" unitRef="Pure">0.020</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum>
  <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet id="Tag559" decimals="-3" contextRef="D2012" unitRef="USD">-3328000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
  <us-gaap:ProceedsFromStockOptionsExercised id="Tag560" decimals="-3" contextRef="D2012" unitRef="USD">968000</us-gaap:ProceedsFromStockOptionsExercised>
  <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate id="Tag564" decimals="2" contextRef="D2012" unitRef="Pure">0.05</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate>
  <us-gaap:AllocatedShareBasedCompensationExpense id="Tag565" decimals="-5" contextRef="D2012" unitRef="USD">3900000</us-gaap:AllocatedShareBasedCompensationExpense>
  <us-gaap:AllocatedShareBasedCompensationExpense id="Tag566" decimals="-5" contextRef="D2011" unitRef="USD">4700000</us-gaap:AllocatedShareBasedCompensationExpense>
  <us-gaap:AllocatedShareBasedCompensationExpense id="Tag567" decimals="-5" contextRef="D2010" unitRef="USD">4100000</us-gaap:AllocatedShareBasedCompensationExpense>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber id="Tag568" decimals="-3" contextRef="I2009_StockOptionsMember" unitRef="Shares">17368000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber id="Tag569" decimals="-3" contextRef="I2010_StockOptionsMember" unitRef="Shares">18948000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber id="Tag570" decimals="-3" contextRef="I2011_StockOptionsMember" unitRef="Shares">21093000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber id="Tag571" decimals="-3" contextRef="I2012_StockOptionsMember" unitRef="Shares">21260000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross id="Tag572" decimals="-3" contextRef="D2010_StockOptionsMember" unitRef="Shares">5310000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross id="Tag573" decimals="-3" contextRef="D2011_StockOptionsMember" unitRef="Shares">4662000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross id="Tag574" decimals="-3" contextRef="D2012_StockOptionsMember" unitRef="Shares">4077000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
  <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised id="Tag575" decimals="-3" contextRef="D2010_StockOptionsMember" unitRef="Shares">704000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
  <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised id="Tag576" decimals="-3" contextRef="D2011_StockOptionsMember" unitRef="Shares">372000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
  <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised id="Tag577" decimals="-3" contextRef="D2012_StockOptionsMember" unitRef="Shares">1148000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod id="Tag578" decimals="-3" contextRef="D2010_StockOptionsMember" unitRef="Shares">333000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod id="Tag579" decimals="-3" contextRef="D2011_StockOptionsMember" unitRef="Shares">654000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod id="Tag580" decimals="-3" contextRef="D2012_StockOptionsMember" unitRef="Shares">1225000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod id="Tag581" decimals="-3" contextRef="D2010_StockOptionsMember" unitRef="Shares">2693000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod id="Tag582" decimals="-3" contextRef="D2011_StockOptionsMember" unitRef="Shares">1491000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod id="Tag583" decimals="-3" contextRef="D2012_StockOptionsMember" unitRef="Shares">1537000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber id="Tag584" decimals="-3" contextRef="I2012_StockOptionsMember" unitRef="Shares">11680000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber id="Tag585" decimals="-3" contextRef="I2012_StockOptionsMember" unitRef="Shares">20558000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice id="Tag586" decimals="2" contextRef="I2009_StockOptionsMember" unitRef="USDPerShare">6.43</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice id="Tag587" decimals="2" contextRef="I2010_StockOptionsMember" unitRef="USDPerShare">3.70</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice id="Tag588" decimals="2" contextRef="I2011_StockOptionsMember" unitRef="USDPerShare">2.76</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice id="Tag589" decimals="2" contextRef="I2012_StockOptionsMember" unitRef="USDPerShare">2.24</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
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  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice id="Tag592" decimals="2" contextRef="D2012_StockOptionsMember" unitRef="USDPerShare">0.93</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice id="Tag593" decimals="2" contextRef="D2010_StockOptionsMember" unitRef="USDPerShare">0.79</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice id="Tag594" decimals="2" contextRef="D2011_StockOptionsMember" unitRef="USDPerShare">0.77</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice id="Tag595" decimals="2" contextRef="D2012_StockOptionsMember" unitRef="USDPerShare">0.84</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice id="Tag596" decimals="2" contextRef="D2010_StockOptionsMember" unitRef="USDPerShare">18.26</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice id="Tag597" decimals="2" contextRef="D2010_StockOptionsMember" unitRef="USDPerShare">1.23</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice id="Tag598" decimals="2" contextRef="D2011_StockOptionsMember" unitRef="USDPerShare">1.43</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice id="Tag599" decimals="2" contextRef="D2012_StockOptionsMember" unitRef="USDPerShare">1.43</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice id="Tag600" decimals="2" contextRef="D2011_StockOptionsMember" unitRef="USDPerShare">12.38</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice>
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  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1 id="Tag606" contextRef="D2012_StockOptionsMember">P6Y5M8D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue id="Tag607" decimals="-3" contextRef="I2012_StockOptionsMember" unitRef="USD">4607000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue>
  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1 id="Tag608" decimals="-3" contextRef="I2012_StockOptionsMember" unitRef="USD">2591000</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue id="Tag609" decimals="-3" contextRef="I2012_StockOptionsMember" unitRef="USD">2015000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue id="Tag610" decimals="-5" contextRef="D2012_StockOptionsMember" unitRef="USD">900000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue id="Tag611" decimals="-5" contextRef="D2011_StockOptionsMember" unitRef="USD">700000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue id="Tag612" decimals="-5" contextRef="D2010_StockOptionsMember" unitRef="USD">1200000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue>
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  <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions id="Tag614" decimals="-5" contextRef="I2012_StockOptionsMember" unitRef="USD">7500000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions>
  <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1 id="Tag615" contextRef="D2012_StockOptionsMember">P2Y6M</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber id="Tag616" decimals="-3" contextRef="I2009_RestrictedStockUnitsRSUMember" unitRef="Shares">604000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber id="Tag617" decimals="-3" contextRef="I2010_RestrictedStockUnitsRSUMember" unitRef="Shares">228000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber id="Tag618" decimals="-3" contextRef="I2011_RestrictedStockUnitsRSUMember" unitRef="Shares">151000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
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  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod id="Tag620" decimals="-3" contextRef="D2010_RestrictedStockUnitsRSUMember" unitRef="Shares">695000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod id="Tag621" decimals="-3" contextRef="D2011_RestrictedStockUnitsRSUMember" unitRef="Shares">121000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod id="Tag622" decimals="-3" contextRef="D2012_RestrictedStockUnitsRSUMember" unitRef="Shares">864000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod id="Tag623" decimals="-3" contextRef="D2010_RestrictedStockUnitsRSUMember" unitRef="Shares">1052000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod id="Tag624" decimals="-3" contextRef="D2011_RestrictedStockUnitsRSUMember" unitRef="Shares">196000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod id="Tag625" decimals="-3" contextRef="D2012_RestrictedStockUnitsRSUMember" unitRef="Shares">47000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod id="Tag626" decimals="-3" contextRef="D2010_RestrictedStockUnitsRSUMember" unitRef="Shares">19000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod id="Tag627" decimals="-3" contextRef="D2011_RestrictedStockUnitsRSUMember" unitRef="Shares">2000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod id="Tag628" decimals="-3" contextRef="D2012_RestrictedStockUnitsRSUMember" unitRef="Shares">7000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue id="Tag629" decimals="2" contextRef="I2009_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">5.90</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue id="Tag630" decimals="2" contextRef="I2010_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">5.38</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue id="Tag631" decimals="2" contextRef="I2011_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">2.52</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue id="Tag632" decimals="2" contextRef="I2012_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">1.73</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue id="Tag633" decimals="2" contextRef="D2010_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">1.72</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue id="Tag634" decimals="2" contextRef="D2011_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">2.50</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue id="Tag635" decimals="2" contextRef="D2012_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">1.65</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue id="Tag636" decimals="2" contextRef="D2010_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">3.30</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue id="Tag637" decimals="2" contextRef="D2011_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">5.81</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue id="Tag638" decimals="2" contextRef="D2012_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">2.82</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue id="Tag639" decimals="2" contextRef="D2010_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">2.94</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue id="Tag640" decimals="2" contextRef="D2011_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">6.01</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue id="Tag641" decimals="2" contextRef="D2012_RestrictedStockUnitsRSUMember" unitRef="USDPerShare">1.62</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue>
  <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions id="Tag642" decimals="-5" contextRef="I2012_RestrictedStockUnitsRSUMember" unitRef="USD">200000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions>
  <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1 id="Tag643" contextRef="D2012_RestrictedStockUnitsRSUMember">P2Y2M12D</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1>
  <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary id="Tag644" decimals="2" contextRef="D2012_EmployeeStockMember_MaximumMember" unitRef="Pure">0.10</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary>
  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent id="Tag645" decimals="2" contextRef="D2012_EmployeeStockMember" unitRef="Pure">0.85</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent>
  <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized id="Tag646" contextRef="D2012_EmployeeStockMember">P6M</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized>
  <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans id="Tag647" decimals="-5" contextRef="D2012_EmployeeStockMember" unitRef="Shares">300000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
  <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans id="Tag648" decimals="-5" contextRef="D2011_EmployeeStockMember" unitRef="Shares">400000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
  <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans id="Tag649" decimals="-5" contextRef="D2010_EmployeeStockMember" unitRef="Shares">300000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
  <us-gaap:AllocatedShareBasedCompensationExpense id="Tag650" decimals="-5" contextRef="D2012_EmployeeStockMember" unitRef="USD">100000</us-gaap:AllocatedShareBasedCompensationExpense>
  <us-gaap:AllocatedShareBasedCompensationExpense id="Tag651" decimals="-5" contextRef="D2011_EmployeeStockMember" unitRef="USD">100000</us-gaap:AllocatedShareBasedCompensationExpense>
  <us-gaap:AllocatedShareBasedCompensationExpense id="Tag652" decimals="-5" contextRef="D2010_EmployeeStockMember" unitRef="USD">100000</us-gaap:AllocatedShareBasedCompensationExpense>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant id="Tag653" decimals="-5" contextRef="I2012_EmployeeStockMember" unitRef="Shares">2000000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice id="Tag654" decimals="2" contextRef="I2011_StockOptionsMember" unitRef="USDPerShare">4.13</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber id="Tag655" decimals="-3" contextRef="I2011_StockOptionsMember" unitRef="Shares">10200000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber id="Tag656" decimals="-3" contextRef="I2010_StockOptionsMember" unitRef="Shares">8400000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice id="Tag657" decimals="2" contextRef="I2010_StockOptionsMember" unitRef="USDPerShare">6.68</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice>
  <us-gaap:ForeignCurrencyTransactionGainLossRealized id="Tag658" decimals="-5" contextRef="D2011" unitRef="USD">1200000</us-gaap:ForeignCurrencyTransactionGainLossRealized>
  <us-gaap:PreferredStockSharesAuthorized id="Tag659" decimals="-3" contextRef="I2011" unitRef="Shares">30000000</us-gaap:PreferredStockSharesAuthorized>
  <acls:IncomeTaxExpenseBenefitUncertainTaxPositionForeign id="Tag660" decimals="-5" contextRef="D2011Q4" unitRef="USD">900000</acls:IncomeTaxExpenseBenefitUncertainTaxPositionForeign>
  <acls:DeferredTaxAssetsIntangibleAssetsNoncurrent id="Tag665" decimals="-3" contextRef="I2011" unitRef="USD">803000</acls:DeferredTaxAssetsIntangibleAssetsNoncurrent>
  <acls:DeferredTaxAssetsIntangibleAssetsNoncurrent id="Tag666" decimals="-3" contextRef="I2012" unitRef="USD">661000</acls:DeferredTaxAssetsIntangibleAssetsNoncurrent>
  <acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent id="Tag667" decimals="-3" contextRef="I2011" unitRef="USD">51000</acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent>
  <acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent id="Tag668" decimals="-3" contextRef="I2012" unitRef="USD">36000</acls:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent>
  <acls:DeferredTaxAssetsOtherNoncurrent id="Tag669" decimals="-3" contextRef="I2011" unitRef="USD">-3814000</acls:DeferredTaxAssetsOtherNoncurrent>
  <acls:DeferredTaxAssetsOtherNoncurrent id="Tag670" decimals="-3" contextRef="I2012" unitRef="USD">917000</acls:DeferredTaxAssetsOtherNoncurrent>
  <acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent id="Tag671" decimals="-3" contextRef="I2011" unitRef="USD">104454000</acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent>
  <acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent id="Tag672" decimals="-3" contextRef="I2012" unitRef="USD">121477000</acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent>
  <us-gaap:DeferredTaxAssetsLiabilitiesNet id="Tag673" decimals="-5" contextRef="I2012" unitRef="USD">146800000</us-gaap:DeferredTaxAssetsLiabilitiesNet>
  <acls:PeriodOfCumulativeLossPosition id="Tag674" contextRef="D2012_InternalRevenueServiceIRSMember">P3Y</acls:PeriodOfCumulativeLossPosition>
  <acls:DeferredTaxAssetsValuationAllowancePercentage id="Tag675" decimals="INF" contextRef="D2012_InternalRevenueServiceIRSMember" unitRef="Pure">1.00</acls:DeferredTaxAssetsValuationAllowancePercentage>
  <us-gaap:TaxCreditCarryforwardAmount id="Tag676" decimals="-5" contextRef="I2012_ResearchDevelopmentAndOtherTaxCreditMember" unitRef="USD">21800000</us-gaap:TaxCreditCarryforwardAmount>
  <us-gaap:TaxCreditCarryforwardAmount id="Tag677" decimals="-5" contextRef="I2012_ForeignCountryMember" unitRef="USD">5000000</us-gaap:TaxCreditCarryforwardAmount>
  <acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance id="Tag678" decimals="-3" contextRef="I2011" unitRef="USD">4845000</acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance>
  <acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance id="Tag679" decimals="-3" contextRef="I2012" unitRef="USD">5073000</acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance>
  <us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock id="Tag680" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table style="WIDTH: 717px; HEIGHT: 67px" cellspacing="0" cellpadding="0" width="717" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Ion implantation systems, services, and royalties&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;156,090&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;237,857&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;232,335&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other systems and services&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;47,295&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;81,559&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;42,877&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;203,385&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;319,416&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;275,212&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock>
  <us-gaap:EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries id="Tag681" decimals="-5" contextRef="D2012" unitRef="USD">142800000</us-gaap:EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries>
  <us-gaap:EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries id="Tag682" decimals="-5" contextRef="D2011" unitRef="USD">231000000</us-gaap:EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries>
  <us-gaap:EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries id="Tag683" decimals="-5" contextRef="D2010" unitRef="USD">208500000</us-gaap:EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries>
  <acls:EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries id="Tag684" decimals="3" contextRef="D2012" unitRef="Pure">0.702</acls:EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries>
  <acls:EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries id="Tag685" decimals="3" contextRef="D2011" unitRef="Pure">0.723</acls:EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries>
  <acls:EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries id="Tag686" decimals="3" contextRef="D2010" unitRef="Pure">0.758</acls:EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries>
  <us-gaap:ValuationAllowancesAndReservesBalance id="Tag687" decimals="-3" contextRef="I2009_AllowanceForDoubtfulAccountsAndSalesReturnsMember" unitRef="USD">2390000</us-gaap:ValuationAllowancesAndReservesBalance>
  <us-gaap:ValuationAllowancesAndReservesBalance id="Tag688" decimals="-3" contextRef="I2009_InventoryValuationReserveMember" unitRef="USD">36980000</us-gaap:ValuationAllowancesAndReservesBalance>
  <acls:MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts id="Tag689" contextRef="D2012">P12M</acls:MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts>
  <acls:SuretyBonds id="Tag690" decimals="-5" contextRef="I2011" unitRef="USD">1800000</acls:SuretyBonds>
  <us-gaap:NatureOfOperations id="Tag693" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;1.&amp;#160;&amp;#160;Nature of Business&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Axcelis Technologies,&amp;#160;Inc. ("Axcelis" or the "Company") was incorporated in Delaware in 1995, and is a worldwide producer of ion implantation, dry strip and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, the Company provides extensive aftermarket service and support, including spare parts, equipment upgrades, and maintenance services to the semiconductor industry.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;In December 2012, the Company sold its intellectual property rights and certain assets relating to the Company's dry strip product line for cash proceeds of $8.7&amp;#160;million. As a result of this transaction, the Company will cease the sale of 300 mm dry strip wafer processing equipment in 2013. The Company will be able to continue to sell dry strip systems for smaller wafers until December 2015 and to support its installed base of all dry strip systems indefinitely. See Note&amp;#160;3 for additional information relating to the accounting for the sale of the dry strip assets and intellectual property.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:NatureOfOperations>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 id="Tag694" contextRef="D2012_StockOptionsMember_EmployeesMember">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 id="Tag695" contextRef="D2012_StockOptionsMember_NonEmployeeMemberOfBoardOfDirectorMember">P6M</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
  <us-gaap:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock id="Tag697" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;&lt;font style="FONT-FAMILY: times" size="2"&gt;Schedule II&amp;#8212;Valuation and Qualifying Accounts Axcelis Technologies, Inc. (In thousands)&lt;/font&gt;&lt;br /&gt;
&lt;!-- TOC_END --&gt;
&lt;p style="FONT-FAMILY: times" align="center"&gt;&lt;font size="2"&gt;&lt;br /&gt;&lt;/font&gt;&lt;font size="2"&gt;&lt;b&gt;Schedule&amp;#160;II&amp;#8212;Valuation and Qualifying Accounts&lt;br /&gt;
Axcelis Technologies,&amp;#160;Inc.&lt;br /&gt;
(In thousands)&lt;br /&gt;&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 87.48%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 129px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"110%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="110%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="60"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="54"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="53"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="42"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Balance at&lt;br /&gt;
Beginning of&lt;br /&gt;
Period&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Charged to&lt;br /&gt;
Costs and&lt;br /&gt;
Expenses&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Deductions&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Other(*)&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Balance at&lt;br /&gt;
End of&lt;br /&gt;
Period&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Year Ended December&amp;#160;31, 2012&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Allowance&amp;#160;for&amp;#160;doubtful&amp;#160;accounts&amp;#160;and&amp;#160;returns&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;411&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(112&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;305&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Reserve for excess and obsolete inventory&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;22,778&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;14,492&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(4,819&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,150&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;33,601&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-TOP: 12pt; MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Year Ended December&amp;#160;31, 2011&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Allowance for doubtful accounts and returns&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,357&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(535&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(449&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;38&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;411&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Reserve for excess and obsolete inventory&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,517&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,015&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(5,583&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(171&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;22,778&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-TOP: 12pt; MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Year Ended December&amp;#160;31, 2010&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Allowance for doubtful accounts and returns&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,390&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(1,120&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(17&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;104&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,357&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Reserve for excess and obsolete inventory&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;36,980&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,015&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(11,224&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(254&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,517&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;!-- COMMAND=ADD_LINERULETXT,NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" --&gt;
&lt;hr style="COLOR: #000000" align="left" width="26%" noshade="noshade" size="1" /&gt;&lt;/div&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; PADDING-TOP: 0pt; POSITION: relative; TEXT-ALIGN: left"&gt;
&lt;dl compact="compact"&gt;
&lt;dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;(*)&lt;/font&gt;&lt;/dt&gt;
&lt;dd style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Represents foreign currency translation adjustments.&lt;/font&gt;&lt;/dd&gt;&lt;/dl&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock>
  <us-gaap:SalesRevenueNet id="Tag698" decimals="-3" contextRef="D2011Q4" unitRef="USD">60411000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag699" decimals="-3" contextRef="D2012Q1" unitRef="USD">55007000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag700" decimals="-3" contextRef="D2012Q2" unitRef="USD">59114000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag701" decimals="-3" contextRef="D2012Q3" unitRef="USD">44640000</us-gaap:SalesRevenueNet>
  <us-gaap:SalesRevenueNet id="Tag702" decimals="-3" contextRef="D2012Q4" unitRef="USD">44624000</us-gaap:SalesRevenueNet>
  <us-gaap:GrossProfit id="Tag703" decimals="-3" contextRef="D2011Q4" unitRef="USD">22623000</us-gaap:GrossProfit>
  <us-gaap:GrossProfit id="Tag704" decimals="-3" contextRef="D2012Q1" unitRef="USD">20536000</us-gaap:GrossProfit>
  <us-gaap:GrossProfit id="Tag705" decimals="-3" contextRef="D2012Q2" unitRef="USD">22788000</us-gaap:GrossProfit>
  <us-gaap:GrossProfit id="Tag706" decimals="-3" contextRef="D2012Q3" unitRef="USD">14367000</us-gaap:GrossProfit>
  <us-gaap:GrossProfit id="Tag707" decimals="-3" contextRef="D2012Q4" unitRef="USD">480000</us-gaap:GrossProfit>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag708" decimals="-3" contextRef="D2011Q4" unitRef="USD">-2113000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag709" decimals="-3" contextRef="D2012Q1" unitRef="USD">-10027000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag710" decimals="-3" contextRef="D2012Q2" unitRef="USD">-471000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag711" decimals="-3" contextRef="D2012Q3" unitRef="USD">-8718000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic id="Tag712" decimals="-3" contextRef="D2012Q4" unitRef="USD">-14818000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
  <us-gaap:EarningsPerShareBasicAndDiluted id="Tag713" decimals="2" contextRef="D2011Q4" unitRef="USDPerShare">-0.02</us-gaap:EarningsPerShareBasicAndDiluted>
  <us-gaap:LettersOfCreditOutstandingAmount id="Tag714" decimals="-5" contextRef="I2011" unitRef="USD">3600000</us-gaap:LettersOfCreditOutstandingAmount>
  <us-gaap:SignificantAccountingPoliciesTextBlock id="Tag715" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;2.&amp;#160;&amp;#160;Summary of Significant Accounting Policies&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The accompanying consolidated financial statements reflect the application of certain significant accounting policies as described in this note and elsewhere in the footnotes.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(a)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Basis of Presentation&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The accompanying consolidated financial statements include the accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Events occurring subsequent to December&amp;#160;31, 2012 have been evaluated for potential recognition or disclosure in the consolidated financial statements. See Note&amp;#160;20 for additional information relating to subsequent events.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(b)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Use of Estimates&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, the Company evaluates its estimates and judgments, including those related to revenue recognition, the realizable value of inventories, valuing share-based compensation instruments and valuation allowances for deferred tax assets. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(c)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Foreign Currency&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has determined the functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders' equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the consolidated statements of operations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For the year ended December&amp;#160;31, 2012 the Company realized $0.9&amp;#160;million of foreign exchange losses. For the year ended December&amp;#160;31, 2011 the Company realized $1.2&amp;#160;million of foreign exchange gains. For the year ended December&amp;#160;31, 2010 the Company incurred $1.9&amp;#160;million of foreign exchange losses.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(d)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Cash and Cash Equivalents&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market securities and certificates of deposit. Cash equivalents are carried on the balance sheet at fair market value.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(e)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Inventories&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Inventories are carried at lower of cost, determined using the first-in, first-out ("FIFO") method, or market. The Company periodically reviews its inventories and makes provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or market. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company records an allowance for estimated excess inventory. The allowance is determined using management's assumptions of materials usage, based on estimates of demand and market conditions. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(f)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Property, Plant and Equipment&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Property and equipment are stated at cost, less accumulated depreciation and amortization.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="left" width="101"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" nowrap="nowrap" align="left"&gt;
&lt;div style="MARGIN-BOTTOM: 0pt; WIDTH: 69pt; BORDER-BOTTOM: #000000 1pt solid"&gt;&lt;font size="1"&gt;&lt;b&gt;Asset Classification &lt;!-- COMMAND=ADD_SCROPPEDRULE,69pt --&gt;&lt;/b&gt;&lt;/font&gt;&lt;/div&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"&gt;&lt;font size="1"&gt;&lt;b&gt;Estimated Useful Life&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Buildings&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;40&amp;#160;years&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Machinery and equipment&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;3 to 10&amp;#160;years&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Repairs and maintenance costs are expensed as incurred. Expenditures for renewals and betterments are capitalized.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(g)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Impairment of Long-Lived Assets&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company records impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is measured by a comparison of the assets' carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company completed a test for recoverability due to indicators present at December&amp;#160;31, 2012; specifically the carrying value of its net assets exceeded its current market capitalization. As of December&amp;#160;31, 2012, the undiscounted cash flows used in the analysis significantly exceeded the carrying value of the Company's assets. As a result no impairment was recorded. The undiscounted cash flows used in the analysis were derived from the Company's long-term strategic plan.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company did not record an impairment charge for the years ended December&amp;#160;31, 2011, or 2010.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Future actual performance could be materially different from our current forecasts, which could impact future estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in the Company's relationships with significant customers. The Company performs an impairment analysis when circumstances or events warrant.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(h)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Concentration of Risk and Off-Balance Sheet Risk&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Financial instruments that potentially subject the Company to concentrations of credit risk are principally cash equivalents and accounts receivable. The Company's cash equivalents are principally maintained in an investment grade money-market fund.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has no significant off-balance-sheet risk such as foreign exchange contracts, option contracts or other foreign hedging arrangements.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company exposure to market risk for changes in interest rates relates primarily to cash equivalents. The primary objective of the Company's investment activities is to preserve principal while maximizing yields without significantly increasing risk. This is accomplished by investing in marketable high investment grade securities. The Company does not use derivative financial instruments to manage its investment portfolio and does not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company performs ongoing credit evaluations of its customers' financial condition and generally requires no collateral to secure accounts receivable. For selected overseas sales, the Company requires customers to obtain letters of credit before product is shipped. The Company maintains an allowance for doubtful accounts based on its assessment of the collectability of accounts receivable. The Company reviews the allowance for doubtful accounts monthly. The Company does not have any off-balance sheet credit exposure related to its customers.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's customers consist of semiconductor manufacturers located throughout the world and net sales to its ten largest customers accounted for 70.6%, 68.6% and 62.7% of revenue in 2012, 2011 and 2010, respectively.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For the years ended December&amp;#160;31, 2012, 2011 and 2010, the Company had one customer represent 18.2%, 21.2% and 18.6% of total revenues, respectively, for each of the periods presented.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For the year ended December&amp;#160;31, 2012, the Company had two customers account for 11.9% and 11.5% of consolidated accounts receivable, respectively. For the year ended December&amp;#160;31, 2011, the Company had one customer represent 27.2% of consolidated accounts receivable.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Some of the components and sub-assemblies included in the Company's products are obtained either from a sole source or a limited group of suppliers. Disruption to the Company's supply source, resulting either from depressed economic conditions or other factors, could affect its ability to deliver products to its customers.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(i)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Revenue Recognition&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's revenue recognition policy involves significant judgment by management. As described below, the Company considers a broad array of facts and circumstances in determining when to recognize revenue, including contractual obligations to the customer, the complexity of the customer's post-delivery acceptance provisions, payment history, customer creditworthiness and the installation process. In the future, if the post-delivery acceptance provisions and installation process become more complex or result in a materially lower rate of acceptance, the Company may have to revise its revenue recognition policy, which could delay the timing of revenue recognition.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's system sales transactions are made up of multiple elements, including the system itself and elements that are not delivered simultaneously with the system. These undelivered elements might include a combination of installation services, extended warranty and support and spare parts, all of which are covered generally by a single sales price. On January&amp;#160;1, 2011, the Company adopted the accounting standards update for multiple deliverable revenue arrangements, as required, using the prospective method. Accordingly, this guidance is being applied to all system revenue arrangements entered into or materially modified on or after January&amp;#160;1, 2011. The adoption of the amended guidance did not change the accounting for arrangements entered into prior to January&amp;#160;1, 2011. There was no material impact on our financial position, results of operations or cash flows upon adoption.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The impact of adopting this amended guidance on the Company's results of operations has been limited to transactions involving the sale of systems. The update amended the previous guidance for multiple-element arrangements. Pursuant to the amended guidance, the Company's system revenue arrangements with multiple elements are divided into separate units of accounting if specified criteria are met, including whether the delivered element has stand-alone value to the customer. If the criteria are met, then the consideration received is allocated among the separate units based on their relative selling price, and the revenue is recognized separately for each of the separate units.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company determines selling price for each unit of accounting (element) using vendor specific objective evidence (VSOE) or third-party evidence (TPE), if they exist, otherwise, the Company uses best estimated selling price (BESP). The Company generally expects that it will not be able to establish TPE due to the nature of its products, and, as such, the Company typically will determine selling price using VSOE or BESP.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Where required, the Company determines BESP for an individual element based on consideration of both market and Company-specific factors, including the selling price and profit margin for similar products, the cost to produce the deliverable and the anticipated margin on that deliverable and the characteristics of the varying markets in which the deliverable is sold.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The total consideration to be received in the transaction is allocated to each element in the arrangement based upon the relative selling price of each element when compared to the consideration received.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Systems are not sold separately and VSOE or TPE is not available for the systems element. Therefore the selling price associated with systems is based on BESP. The allocated value for installation in the arrangement includes (a)&amp;#160;the greater of (i)&amp;#160;the relative selling price of the installation or (ii)&amp;#160;the portion or the sales price that will not be received until the installation is completed (the "retention"). The selling price of installation is based upon the fair value of the service performed, including labor, which is based upon the estimated time to complete the installation at hourly rates, and material components, both of which are sold separately. The selling price of all other elements (extended warranty for support, spare parts, and labor) is based upon the price charged when these elements are sold separately, or VSOE.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Product revenue for products which have demonstrated market acceptance, generally recognized upon shipment provided title and risk of loss has passed to the customer, evidence of an arrangement exists, prices are contractually fixed or determinable, collectability is reasonably assured through historical collection results and regular credit evaluations, and there are no uncertainties regarding customer acceptance. Revenue from installation services is recognized at the time formal acceptance is received from the customer or, for certain customers, when both the formal acceptance and retention payment have been received. Revenue for other elements is recognized at the time products are shipped or the related services are performed.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company generally recognizes revenue for products which have demonstrated market acceptance at the time of shipment because the customer's post-delivery acceptance provisions and installation process have been established to be routine, commercially inconsequential and perfunctory. The majority of its systems are designed and tailored to meet the customer's specifications, as outlined in the contract between the customer and the Company, which may be the Company's standard specification. To ensure that the customer's specifications are satisfied, many customers request that new systems be tested at the Company's facilities prior to shipment, normally with the customer present, under conditions that substantially replicate the customer's production environment and the customer's criteria are confirmed to have been met. The Company believes the risk of failure to complete a system installation is remote. Should an installation not be completed successfully, the contractual provisions do not provide for forfeiture, refund or other purchase price concession beyond those prescribed by the provisions of the Uniform Commercial Code applicable generally to such transactions.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;For initial shipments of systems with new technologies or in the small number of instances where the Company is unsure of meeting the customer's specifications or obtaining customer acceptance upon shipment of the system, it will defer the recognition of systems revenue and related costs until written customer acceptance of the system is obtained. This deferral period is generally within twelve months of shipment.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Product revenue includes revenue from system sales, sales of spare parts, the spare parts component of maintenance and service contracts and product upgrades. Service revenue includes the labor component of maintenance and service contract amounts charged for on-site service personnel.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(j)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Shipping and Handling Costs&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Shipping and handling costs are included in cost of revenue.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(k)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Stock-Based Compensation&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company recognizes compensation expense for all share-based payments to employees and directors, including grants of employee stock options, based on the grant-date fair value of those share-based payments using the Black- Sholes option pricing model, adjusted for expected forfeitures. Stock-based compensation expense is recognized ratably over the requisite service period.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;See Note&amp;#160;13 for additional information relating to stock-based compensation.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(l)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Income Taxes&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company records income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax bases, and operating loss and tax credit carryforwards.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax accounting. The Company establishes a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining the Company's provision for income taxes, the Company's deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. The Company evaluates the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. The Company recognizes accrued interest related to unrecognized tax benefits as interest expense and penalties as operating expense.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(m)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Computation of Net Income (Loss) per Share&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company incurred net losses for years ended December&amp;#160;31, 2012 and December&amp;#160;31, 2010, and has excluded 1,563,417 and 3,230,705 incremental shares attributable to outstanding stock options, restricted stock and restricted stock units from the calculation of net loss per share because the effect would have been anti-dilutive.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The components of net income (loss) per share are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="51"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;Years Ended December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2010&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="8"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands, except per share data)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Income (loss) available to common stockholders&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(34,034&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;5,077&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(17,573&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted average common shares outstanding used in computing basic net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;107,619&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;106,234&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;104,522&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Incremental shares&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;2,864&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Weighted average common shares outstanding used in computing diluted net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;107,619&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;109,098&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;104,522&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Net income (loss) per share&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Basic&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.32&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.05&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.17&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Diluted&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.32&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;0.05&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right"&gt;&lt;font size="2"&gt;(0.17&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(n)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Recent Accounting Guidance&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;u&gt;Accounting Standards or Updates Recently Adopted&lt;/u&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Effective January&amp;#160;1, 2012 the Company adopted Accounting Standards Update, or ASU, No.&amp;#160;2011-05,&lt;/font&gt; &lt;font size="2"&gt;&lt;i&gt;Comprehensive Income (Topic 220)&lt;/i&gt;&lt;/font&gt;&lt;font size="2"&gt;. This newly issued accounting standard requires the Company to report comprehensive income either in a single continuous statement or in two separate but consecutive financial statements. The adoption of this standard did impact the presentation of other comprehensive income, as we have elected to present two separate but consecutive statements, but did not have an impact on our financial position or results of operations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;u&gt;Accounting Standards or Updates Not Yet Effective&lt;/u&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;On February&amp;#160;5, 2013, The Financial Accounting Standards Board ("FASB") issued Accounting Standards Update No.&amp;#160;2013-02,&lt;/font&gt; &lt;font size="2"&gt;&lt;i&gt;Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income&lt;/i&gt;&lt;/font&gt;&lt;font size="2"&gt;. The update requires that companies present either in a single note or parenthetically on the face of the financial statements, the effect of significant amounts reclassified from each component of accumulated other comprehensive income based on its source and the income statement line items affected by the reclassification. If a component is not required to be reclassified to net income in its entirety, companies would instead cross reference to the related footnote for additional information. This update is effective prospectively for annual and interim reporting periods beginning after December&amp;#160;15, 2012. As this update only requires enhanced disclosure, the adoption of this update will not impact our financial position or results of operations.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:SignificantAccountingPoliciesTextBlock>
  <us-gaap:CommitmentsAndContingenciesDisclosureTextBlock id="Tag716" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;16. Commitments and Contingencies&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(a)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Lease Commitments&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company leases manufacturing and office facilities and certain equipment under operating leases that expire through 2016. Rental expense was $4.3&amp;#160;million, $4.6&amp;#160;million, and $5.2&amp;#160;million under operating leases for the years ended December&amp;#160;31, 2012, 2011, and 2010 respectively.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Future minimum lease commitments on non-cancelable operating leases for the year ended December&amp;#160;31, 2012 are as follows:&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="69"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Operating&lt;br /&gt;
Leases&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2013&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3,057&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2014&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,681&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2015&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,181&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;2016&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;224&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;6,143&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(b)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Purchase Commitments&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company has non-cancelable contracts and purchase orders for inventory of $14.9&amp;#160;million at December&amp;#160;31, 2012.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(c)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Litigation&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company is not presently a party to any litigation that it believes might have a material adverse effect on its business operations. The Company is, from time to time, a party to litigation that arises in the normal course of its business operations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(d)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Indemnifications&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's system sales agreements typically include provisions under which the Company agrees to take certain actions, provide certain remedies and defend its customers against third-party claims of intellectual property infringement under specified conditions and to indemnify customers against any damage and costs awarded in connection with such claims. The Company has not incurred any material costs as a result of such indemnifications and has not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:CommitmentsAndContingenciesDisclosureTextBlock>
  <us-gaap:ScheduleOfOtherAssetsTableTextBlock id="Tag717" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 95.61%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 105px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Internal use assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;21,904&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,503&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Construction in progress&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,823&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total cost&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;23,727&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;27,503&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accumulated depreciation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(13,948&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(10,526&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;9,779&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;16,977&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
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  <acls:DefinedContributionPlanMaximumAnnualContributionByEmployeePercent id="Tag718" decimals="INF" contextRef="D2012_RegularEmployeesMember" unitRef="Pure">0.35</acls:DefinedContributionPlanMaximumAnnualContributionByEmployeePercent>
  <acls:DefinedContributionPlanMaximumAnnualContributionByEmployeePercent id="Tag719" decimals="INF" contextRef="D2012_HighlyCompensatedEmployeesMember" unitRef="Pure">0.16</acls:DefinedContributionPlanMaximumAnnualContributionByEmployeePercent>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest id="Tag720" decimals="-3" contextRef="D2011" unitRef="USD">7471000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest id="Tag721" decimals="-3" contextRef="D2010" unitRef="USD">-17261000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
  <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest id="Tag722" decimals="-3" contextRef="D2012" unitRef="USD">-32388000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
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  <us-gaap:CostOfGoodsSold id="Tag724" decimals="-3" contextRef="D2012" unitRef="USD">123593000</us-gaap:CostOfGoodsSold>
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  <us-gaap:SellingAndMarketingExpense id="Tag726" decimals="-3" contextRef="D2012" unitRef="USD">25889000</us-gaap:SellingAndMarketingExpense>
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  <us-gaap:OtherNonoperatingIncomeExpense id="Tag729" decimals="-3" contextRef="D2012" unitRef="USD">-1495000</us-gaap:OtherNonoperatingIncomeExpense>
  <us-gaap:AccountsReceivableNetCurrent id="Tag730" decimals="-3" contextRef="I2011" unitRef="USD">35071000</us-gaap:AccountsReceivableNetCurrent>
  <us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue id="Tag731" decimals="-3" contextRef="I2012" unitRef="USD">106000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
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  <us-gaap:EmployeeRelatedLiabilitiesCurrent id="Tag734" decimals="-3" contextRef="I2012" unitRef="USD">7283000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
  <us-gaap:AccruedIncomeTaxesCurrent id="Tag735" decimals="-3" contextRef="I2012" unitRef="USD">278000</us-gaap:AccruedIncomeTaxesCurrent>
  <us-gaap:OtherLiabilitiesCurrent id="Tag736" decimals="-3" contextRef="I2012" unitRef="USD">3932000</us-gaap:OtherLiabilitiesCurrent>
  <us-gaap:DeferredRevenueNoncurrent id="Tag737" decimals="-3" contextRef="I2012" unitRef="USD">456000</us-gaap:DeferredRevenueNoncurrent>
  <us-gaap:OtherLiabilitiesNoncurrent id="Tag738" decimals="-3" contextRef="I2012" unitRef="USD">5844000</us-gaap:OtherLiabilitiesNoncurrent>
  <us-gaap:Liabilities id="Tag739" decimals="-3" contextRef="I2011" unitRef="USD">54690000</us-gaap:Liabilities>
  <us-gaap:PrepaidExpenseAndOtherAssetsCurrent id="Tag740" decimals="-3" contextRef="I2012" unitRef="USD">5056000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
  <us-gaap:PrepaidExpenseAndOtherAssetsCurrent id="Tag741" decimals="-3" contextRef="I2011" unitRef="USD">10062000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
  <us-gaap:OtherAssetsNoncurrent id="Tag742" decimals="-3" contextRef="I2011" unitRef="USD">19904000</us-gaap:OtherAssetsNoncurrent>
  <us-gaap:Assets id="Tag743" decimals="-3" contextRef="I2011" unitRef="USD">269245000</us-gaap:Assets>
  <us-gaap:AccountsPayableCurrent id="Tag744" decimals="-3" contextRef="I2012" unitRef="USD">10166000</us-gaap:AccountsPayableCurrent>
  <us-gaap:EmployeeRelatedLiabilitiesCurrent id="Tag745" decimals="-3" contextRef="I2011" unitRef="USD">8437000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
  <us-gaap:AccruedIncomeTaxesCurrent id="Tag746" decimals="-3" contextRef="I2011" unitRef="USD">495000</us-gaap:AccruedIncomeTaxesCurrent>
  <us-gaap:DeferredRevenueCurrent id="Tag747" decimals="-3" contextRef="I2012" unitRef="USD">6423000</us-gaap:DeferredRevenueCurrent>
  <us-gaap:DeferredRevenueCurrent id="Tag748" decimals="-3" contextRef="I2011" unitRef="USD">10786000</us-gaap:DeferredRevenueCurrent>
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  <us-gaap:DeferredRevenueNoncurrent id="Tag750" decimals="-3" contextRef="I2011" unitRef="USD">1488000</us-gaap:DeferredRevenueNoncurrent>
  <us-gaap:OtherLiabilitiesNoncurrent id="Tag751" decimals="-3" contextRef="I2011" unitRef="USD">5730000</us-gaap:OtherLiabilitiesNoncurrent>
  <us-gaap:Liabilities id="Tag752" decimals="-3" contextRef="I2012" unitRef="USD">36082000</us-gaap:Liabilities>
  <us-gaap:CommonStockValueOutstanding id="Tag753" decimals="-3" contextRef="I2012" unitRef="USD">108000</us-gaap:CommonStockValueOutstanding>
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  <us-gaap:AdditionalPaidInCapital id="Tag755" decimals="-3" contextRef="I2011" unitRef="USD">499332000</us-gaap:AdditionalPaidInCapital>
  <us-gaap:TreasuryStockValue id="Tag756" decimals="-3" contextRef="I2012" unitRef="USD">1218000</us-gaap:TreasuryStockValue>
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  <us-gaap:ComprehensiveIncomeNetOfTax id="Tag758" decimals="-3" contextRef="D2012" unitRef="USD">-33791000</us-gaap:ComprehensiveIncomeNetOfTax>
  <us-gaap:StockholdersEquity id="Tag759" decimals="-3" contextRef="I2010" unitRef="USD">205567000</us-gaap:StockholdersEquity>
  <us-gaap:SeveranceCosts id="Tag760" decimals="-3" contextRef="D2012_EmployeeSeveranceMember" unitRef="USD">4169000</us-gaap:SeveranceCosts>
  <us-gaap:ComprehensiveIncomeNetOfTax id="Tag761" decimals="-3" contextRef="D2011" unitRef="USD">3622000</us-gaap:ComprehensiveIncomeNetOfTax>
  <us-gaap:ComprehensiveIncomeNetOfTax id="Tag762" decimals="-3" contextRef="D2010" unitRef="USD">-16480000</us-gaap:ComprehensiveIncomeNetOfTax>
  <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansTaxPortionAttributableToParent id="Tag763" decimals="-3" contextRef="D2012" unitRef="USD">178000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansTaxPortionAttributableToParent>
  <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansTaxPortionAttributableToParent id="Tag764" decimals="-3" contextRef="D2011" unitRef="USD">-4000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansTaxPortionAttributableToParent>
  <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansTaxPortionAttributableToParent id="Tag765" decimals="-3" contextRef="D2010" unitRef="USD">151000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansTaxPortionAttributableToParent>
  <us-gaap:ProceedsFromSaleOfProductiveAssets id="Tag766" decimals="-3" contextRef="D2012" unitRef="USD">8716000</us-gaap:ProceedsFromSaleOfProductiveAssets>
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  <us-gaap:ConcentrationRiskPercentage1 id="Tag769" decimals="3" contextRef="D2012_SalesMember_CustomerConcentrationRiskMember_LargestCustomerMember" unitRef="Pure">0.182</us-gaap:ConcentrationRiskPercentage1>
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  <acls:ConcentrationRiskNumberOfCustomers id="Tag771" decimals="INF" contextRef="D2012_AccountsReceivableMember_CreditConcentrationRiskMember_LargestCustomerMember" unitRef="Item">1</acls:ConcentrationRiskNumberOfCustomers>
  <acls:ConcentrationRiskNumberOfCustomers id="Tag772" decimals="INF" contextRef="D2012_AccountsReceivableMember_CreditConcentrationRiskMember_SecondLargestCustomerMember" unitRef="Item">1</acls:ConcentrationRiskNumberOfCustomers>
  <us-gaap:ConcentrationRiskPercentage1 id="Tag773" decimals="3" contextRef="D2011_AccountsReceivableMember_CreditConcentrationRiskMember_LargestCustomerMember" unitRef="Pure">0.272</us-gaap:ConcentrationRiskPercentage1>
  <acls:ConcentrationRiskNumberOfCustomers id="Tag774" decimals="INF" contextRef="D2011_AccountsReceivableMember_CreditConcentrationRiskMember_LargestCustomerMember" unitRef="Item">1</acls:ConcentrationRiskNumberOfCustomers>
  <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount id="Tag775" decimals="INF" contextRef="D2012" unitRef="Shares">1563417</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
  <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount id="Tag776" decimals="INF" contextRef="D2010" unitRef="Shares">3230705</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
  <acls:ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock id="Tag782" contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 97.86%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 104px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="50"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Land and buildings&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;78,954&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;78,985&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Machinery and equipment&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;7,118&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;7,020&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Construction in process&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;455&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;541&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total cost&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;86,527&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;86,546&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accumulated depreciation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(52,114&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;(49,342&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;)&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Property, plant and equipment, net&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;34,413&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;37,204&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</acls:ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock>
  <acls:DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock id="Tag783" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;3.&amp;#160;&amp;#160;Gain on Sale of Dry Strip Assets and Intellectual Property&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;On December&amp;#160;3, 2012, the Company entered into a purchase agreement with Lam Research Corporation ("Lam"). As part of the agreement, the Company sold its dry strip system assets and intellectual property to Lam. The purchase price was $10.7&amp;#160;million, of which $2.0&amp;#160;million is contingent upon reaching certain milestones. The $7.9&amp;#160;million gain on sale of dry strip assets and intellectual property is comprised of the $8.7&amp;#160;million proceeds received for the sale, offset by approximately $0.8&amp;#160;million of product and material costs related to the lab system and other components purchased by Lam.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company determined that the sale would not be accounted for as a discontinued operation due to the continuing involvement it has as a result of the royalty free license granted to the Company and other factors as discussed below.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Lam granted the Company a worldwide, non-exclusive, non-transferable, royalty free license to use the intellectual property rights sold by the Company under the Asset Purchase Agreement. The perpetual license allows the Company to make and sell 300 mm dry strip wafer processing equipment for semiconductor applications through September 2013, make and sell 200 mm products through December 2015 and to support the Company's installed base of all dry strip equipment on a perpetual basis. As a result of this continuing involvement, the transaction has been recorded in continuing operations.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company will recognize the contingencies as the milestones are achieved, in accordance with the accounting guidance for gain contingencies. The Company expects to achieve the transition milestones over various periods through the first half of 2014. As the milestones are achieved, the proceeds will be recorded as part of the gain on sale of dry strip assets and intellectual property.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</acls:DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock>
  <us-gaap:FairValueDisclosuresTextBlock id="Tag784" contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Note&amp;#160;15. Fair Value Measurements&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Fair value is defined as the exchange price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(a)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Fair Value Hierarchy&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument's categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:&lt;/font&gt;&lt;/p&gt;
&lt;ul&gt;
&lt;li style="list-style: none"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&lt;/font&gt;&lt;font size="2"&gt;&lt;i&gt;Level&amp;#160;1&lt;/i&gt;&lt;/font&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&lt;/font&gt;&lt;font size="2"&gt;&lt;i&gt;Level&amp;#160;2&lt;/i&gt;&lt;/font&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&lt;/font&gt;&lt;font size="2"&gt;&lt;i&gt;Level&amp;#160;3&lt;/i&gt;&lt;/font&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.&lt;/font&gt;&lt;/p&gt;&lt;/li&gt;&lt;/ul&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(b)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Assets Measured at Fair Value on a Recurring Basis&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The Company's money market funds are included in cash and cash equivalents in the Consolidated Balance Sheets, and are considered a level&amp;#160;1 investment as they are valued at quoted market prices in active markets.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The following table sets forth Company's assets which are measured at fair value on a recurring basis by level within the fair value hierarchy.&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31, 2012&lt;br /&gt;
Fair Value Measurements&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;1&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;2&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;3&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Total&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash equivalents:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Money market funds&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,179&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,179&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&lt;br /&gt;&lt;/font&gt;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31, 2011&lt;br /&gt;
Fair Value Measurements&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;1&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;2&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;3&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Total&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash equivalents:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Money market funds&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,927&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,927&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;(c)&amp;#160;&amp;#160;&amp;#160;&amp;#160;Other Financial Instruments&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The carrying amounts reflected in the consolidated balance sheets for cash and cash equivalents (which are comprised primarily of deposit and overnight sweep accounts), accounts receivable, prepaid expenses and other current and non-current assets, accounts payable and accrued expenses approximate fair value due to their short-term maturities.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:FairValueDisclosuresTextBlock>
  <acls:ChargesRelatedToBelowNormalProductionCapacity decimals="-5" contextRef="D2012" unitRef="USD">2600000</acls:ChargesRelatedToBelowNormalProductionCapacity>
  <acls:ChargesRelatedToBelowNormalProductionCapacity decimals="-5" contextRef="D2010" unitRef="USD">1000000</acls:ChargesRelatedToBelowNormalProductionCapacity>
  <us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 95.75%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 118px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="39"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;Year Ended&lt;br /&gt;
December&amp;#160;31,&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2012&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;2011&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="5"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Current:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Accrued compensation&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,475&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,290&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other current liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;199&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total current liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,475&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;1,489&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-TOP: 12pt; MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Long-term:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Other long-term liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3,042&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;2,243&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 40pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Total liabilities&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;4,517&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;3,732&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2"&gt;&amp;#160;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&amp;#160;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock>
  <us-gaap:PropertyPlantAndEquipmentGross decimals="-3" contextRef="I2012_CompletedInternalUseAssetsMember_AssetsManufacturedForInternalUseMember" unitRef="USD">21904000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross decimals="-3" contextRef="I2011_CompletedInternalUseAssetsMember_AssetsManufacturedForInternalUseMember" unitRef="USD">27503000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentGross decimals="-3" contextRef="I2012_AssetUnderConstructionMember_AssetsManufacturedForInternalUseMember" unitRef="USD">1823000</us-gaap:PropertyPlantAndEquipmentGross>
  <us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="D2012_AssetsManufacturedForInternalUseMember">P5Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
  <us-gaap:Depreciation decimals="-5" contextRef="D2012_AssetsManufacturedForInternalUseMember" unitRef="USD">3400000</us-gaap:Depreciation>
  <us-gaap:Depreciation decimals="-5" contextRef="D2011_AssetsManufacturedForInternalUseMember" unitRef="USD">4900000</us-gaap:Depreciation>
  <us-gaap:Depreciation decimals="-5" contextRef="D2010_AssetsManufacturedForInternalUseMember" unitRef="USD">3300000</us-gaap:Depreciation>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities decimals="-3" contextRef="I2012_AccruedCompensationMember" unitRef="USD">1475000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities decimals="-3" contextRef="I2011_AccruedCompensationMember" unitRef="USD">1290000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities decimals="-3" contextRef="I2011_OtherPlanLiabilitiesMember" unitRef="USD">199000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities decimals="-3" contextRef="I2012" unitRef="USD">1475000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities decimals="-3" contextRef="I2011" unitRef="USD">1489000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent decimals="-3" contextRef="I2012_OtherPlanLiabilitiesMember" unitRef="USD">3042000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent decimals="-3" contextRef="I2011_OtherPlanLiabilitiesMember" unitRef="USD">2243000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent decimals="-3" contextRef="I2012" unitRef="USD">4517000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent>
  <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent decimals="-3" contextRef="I2011" unitRef="USD">3732000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent>
  <us-gaap:DefinedBenefitPlanAdministrationExpenses decimals="-5" contextRef="D2012" unitRef="USD">600000</us-gaap:DefinedBenefitPlanAdministrationExpenses>
  <us-gaap:DefinedBenefitPlanAdministrationExpenses decimals="-5" contextRef="D2011" unitRef="USD">700000</us-gaap:DefinedBenefitPlanAdministrationExpenses>
  <us-gaap:DefinedBenefitPlanAdministrationExpenses decimals="-5" contextRef="D2010" unitRef="USD">600000</us-gaap:DefinedBenefitPlanAdministrationExpenses>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant decimals="-5" contextRef="I2012_EquityIncentivePlan2012Member" unitRef="Shares">1500000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant>
  <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested contextRef="D2012_StockOptionsMember_EmployeesMember">P90D</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested>
  <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards contextRef="D2012_StockOptionsMember_EmployeesMember">P1Y</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber decimals="-5" contextRef="I2012_RestrictedStockUnitsRSUMember_StockPlan2000Member" unitRef="Shares">1000000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 contextRef="D2012_EquityIncentivePlan2012Member">P7Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
  <acls:ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant decimals="-5" contextRef="D2012" unitRef="USD">100000</acls:ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant>
  <us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock contextRef="D2012">&lt;div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 91.92%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 51px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&amp;#160;&lt;/p&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31, 2012&lt;br /&gt;
Fair Value Measurements&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;1&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;2&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;3&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Total&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash equivalents:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Money market funds&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,179&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,179&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;br /&gt;&lt;/font&gt;&amp;#160;&lt;/p&gt;
&lt;div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 91.92%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 175px"&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;!-- COMMAND=ADD_TABLEWIDTH,"100%" --&gt;&lt;/font&gt;&lt;/p&gt;
&lt;!-- User-specified TAGGED TABLE --&gt;
&lt;div align="center"&gt;
&lt;table cellspacing="0" cellpadding="0" width="100%" border="0"&gt;
&lt;tr style="HEIGHT: 0px"&gt;&lt;!-- TABLE COLUMN WIDTHS SET --&gt;
&lt;td style="FONT-FAMILY: times" align="left"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="36"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" align="right" width="7"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="45"&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" width="12"&gt;&lt;/td&gt;&lt;!-- TABLE COLUMN WIDTHS END --&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;December&amp;#160;31, 2011&lt;br /&gt;
Fair Value Measurements&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;1&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;2&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Level&amp;#160;3&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"&gt;&lt;font size="1"&gt;&lt;b&gt;Total&lt;/b&gt;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="bottom"&gt;
&lt;th style="FONT-FAMILY: times" align="left"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times" align="center" colspan="11"&gt;&lt;font size="1"&gt;&lt;b&gt;(in thousands)&lt;/b&gt;&lt;/font&gt;&lt;br /&gt;&lt;/th&gt;
&lt;th style="FONT-FAMILY: times"&gt;&lt;font size="1"&gt;&amp;#160;&lt;/font&gt;&lt;/th&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Assets&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="white"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Cash equivalents:&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF"&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;
&lt;p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"&gt;&lt;font size="2"&gt;Money market funds&lt;/font&gt;&lt;/p&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,927&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;&amp;#8212;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;$&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom" align="right"&gt;&lt;font size="2"&gt;29,927&lt;/font&gt;&lt;/td&gt;
&lt;td style="FONT-FAMILY: times" valign="bottom"&gt;&lt;font size="2"&gt;&amp;#160;&lt;/font&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;
&lt;!-- end of user-specified TAGGED TABLE --&gt;&lt;/div&gt;&lt;/div&gt;
</us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock>
  <us-gaap:CashAndCashEquivalentsFairValueDisclosure decimals="-3" contextRef="I2012_MoneyMarketFundsMember_FairValueInputsLevel1Member_FairValueMeasurementsRecurringMember" unitRef="USD">29179000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
  <us-gaap:CashAndCashEquivalentsFairValueDisclosure decimals="-3" contextRef="I2012_MoneyMarketFundsMember_EstimateOfFairValueFairValueDisclosureMember_FairValueMeasurementsRecurringMember" unitRef="USD">29179000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
  <us-gaap:CashAndCashEquivalentsFairValueDisclosure decimals="-3" contextRef="I2011_MoneyMarketFundsMember_FairValueInputsLevel1Member_FairValueMeasurementsRecurringMember" unitRef="USD">29927000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
  <us-gaap:CashAndCashEquivalentsFairValueDisclosure decimals="-3" contextRef="I2011_MoneyMarketFundsMember_EstimateOfFairValueFairValueDisclosureMember_FairValueMeasurementsRecurringMember" unitRef="USD">29927000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
  <us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost decimals="-3" contextRef="D2012" unitRef="USD">1298000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost>
  <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities decimals="0" contextRef="D2012" unitRef="USD">880000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities>
  <us-gaap:UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations decimals="0" contextRef="D2012" unitRef="USD">799000</us-gaap:UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations>
  <acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent decimals="-3" contextRef="I2012" unitRef="USD">352000</acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent>
  <acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent decimals="-3" contextRef="I2011" unitRef="USD">541000</acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent>
  <acls:DeferredTaxAssetsInventoryCurrent decimals="-3" contextRef="I2012" unitRef="USD">22582000</acls:DeferredTaxAssetsInventoryCurrent>
  <acls:DeferredTaxAssetsInventoryCurrent decimals="-3" contextRef="I2011" unitRef="USD">22447000</acls:DeferredTaxAssetsInventoryCurrent>
  <acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent decimals="-3" contextRef="I2012" unitRef="USD">368000</acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent>
  <acls:DeferredTaxAssetsInventoryNoncurrent decimals="-3" contextRef="I2012" unitRef="USD">-215000</acls:DeferredTaxAssetsInventoryNoncurrent>
  <us-gaap:RestructuringCharges decimals="-5" contextRef="D2012Q4" unitRef="USD">600000</us-gaap:RestructuringCharges>
  <us-gaap:UnrecognizedTaxBenefits decimals="-5" contextRef="I2012Q2" unitRef="USD">800000</us-gaap:UnrecognizedTaxBenefits>
  <us-gaap:RestructuringCharges decimals="-5" contextRef="D2012Q3" unitRef="USD">600000</us-gaap:RestructuringCharges>
  <us-gaap:RestructuringCharges decimals="-5" contextRef="D2012Q2" unitRef="USD">100000</us-gaap:RestructuringCharges>
  <us-gaap:RestructuringCharges decimals="-5" contextRef="D2012Q1" unitRef="USD">2900000</us-gaap:RestructuringCharges>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum decimals="3" contextRef="D2012_StockOptionsMember" unitRef="Pure">0.978</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum decimals="4" contextRef="D2012_StockOptionsMember" unitRef="Pure">1.1355</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum>
  <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 contextRef="D2012_StockPlan2000Member_MaximumMember">P6Y1M6D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum decimals="4" contextRef="D2012_StockOptionsMember" unitRef="Pure">0.0045</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum decimals="4" contextRef="D2012_StockOptionsMember" unitRef="Pure">0.0137</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber decimals="-5" contextRef="I2012_EquityIncentivePlan2012Member" unitRef="Shares">21300000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
  <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue decimals="-3" contextRef="D2011_AdditionalPaidInCapitalMember" unitRef="USD">4687000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
  <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue decimals="-3" contextRef="D2011" unitRef="USD">4687000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
  <us-gaap:CommitmentsAndContingencies xsi:nil="true" contextRef="I2011" unitRef="USD" />
  <us-gaap:CommitmentsAndContingencies xsi:nil="true" contextRef="I2012" unitRef="USD" />
  <us-gaap:ProceedsFromSaleOfProductiveAssets decimals="-5" contextRef="D2012_DryStripProductLineMember" unitRef="USD">8700000</us-gaap:ProceedsFromSaleOfProductiveAssets>
  <acls:SizeOfDryStripWaferProcessingEquipmentCessationOfSales decimals="INF" contextRef="D2012_DryStripProductLineMember" unitRef="Millimeter">300</acls:SizeOfDryStripWaferProcessingEquipmentCessationOfSales>
  <acls:ConcentrationRiskNumberOfCustomers decimals="INF" contextRef="D2012_AccountsReceivableMember_CreditConcentrationRiskMember" unitRef="Item">2</acls:ConcentrationRiskNumberOfCustomers>
  <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense decimals="-5" contextRef="D2012Q4_InventoryValuationReserveMember" unitRef="USD">13400000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
  <us-gaap:IncomeTaxReconciliationRepatriationOfForeignEarnings decimals="-3" contextRef="D2012" unitRef="USD">383000</us-gaap:IncomeTaxReconciliationRepatriationOfForeignEarnings>
  <us-gaap:DisposalGroupNotDiscontinuedOperationGainLossOnDisposal decimals="-3" contextRef="D2012Q4_InventoryValuationReserveMember" unitRef="USD">7904000</us-gaap:DisposalGroupNotDiscontinuedOperationGainLossOnDisposal>
  <us-gaap:DisposalGroupNotDiscontinuedOperationGainLossOnDisposal decimals="-3" contextRef="D2012_InventoryValuationReserveMember" unitRef="USD">7904000</us-gaap:DisposalGroupNotDiscontinuedOperationGainLossOnDisposal>
  <us-gaap:MarketingExpense decimals="-5" contextRef="D2012Q4_OneTimeExpenseMember" unitRef="USD">2100000</us-gaap:MarketingExpense>
  <acls:DispositionOfAssetsSalePrice decimals="-5" contextRef="I2012Q4_M1203_DryStripProductLineMember" unitRef="USD">10700000</acls:DispositionOfAssetsSalePrice>
  <acls:DispositionOfAssetsContingentConsideration decimals="-5" contextRef="I2012Q4_M1203_DryStripProductLineMember" unitRef="USD">2000000</acls:DispositionOfAssetsContingentConsideration>
  <us-gaap:DisposalGroupNotDiscontinuedOperationGainLossOnDisposal decimals="-5" contextRef="D2012_DryStripProductLineMember" unitRef="USD">7900000</us-gaap:DisposalGroupNotDiscontinuedOperationGainLossOnDisposal>
  <acls:OffsetAgainstProceedsFromSaleOfAssets decimals="-5" contextRef="D2012_DryStripProductLineMember" unitRef="USD">800000</acls:OffsetAgainstProceedsFromSaleOfAssets>
  <acls:SizeOfDryStripWaferProcessingEquipmentLicenseReceived decimals="INF" contextRef="D2012_PeriodThroughSeptember2013Member_DryStripProductLineMember" unitRef="Millimeter">300</acls:SizeOfDryStripWaferProcessingEquipmentLicenseReceived>
  <acls:SizeOfDryStripWaferProcessingEquipmentLicenseReceived decimals="INF" contextRef="D2012_PeriodThroughDecember2015Member_DryStripProductLineMember" unitRef="Millimeter">200</acls:SizeOfDryStripWaferProcessingEquipmentLicenseReceived>
  <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized decimals="-5" contextRef="I2012Q2_M0502_EquityIncentivePlan2012Member" unitRef="Shares">3800000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized>
  <acls:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod contextRef="D2012_StockOptionsMember_StockPlan2000Member">P10Y</acls:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
  <acls:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod contextRef="D2012_StockOptionsMember_EquityIncentivePlan2012Member_MaximumMember">P7Y</acls:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
  <us-gaap:PreferredStockSharesAuthorized decimals="-6" contextRef="I2012_MaximumMember" unitRef="Shares">30000000</us-gaap:PreferredStockSharesAuthorized>
  <us-gaap:RestructuringReserveSettledWithCash decimals="-3" contextRef="D2011_EmployeeSeveranceMember" unitRef="USD">0</us-gaap:RestructuringReserveSettledWithCash>
  <us-gaap:ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy contextRef="D2012">&lt;div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&lt;b&gt;Basis of Presentation&lt;/b&gt;&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;The accompanying consolidated financial statements include the accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation.&lt;/font&gt;&lt;/p&gt;
&lt;p style="FONT-FAMILY: times"&gt;&lt;font size="2"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Events occurring subsequent to December&amp;#160;31, 2012 have been evaluated for potential recognition or disclosure in the consolidated financial statements. See Note&amp;#160;20 for additional information relating to subsequent events.&lt;/font&gt;&lt;/p&gt;&lt;/div&gt;
</us-gaap:ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy>
  <us-gaap:CashAndSecuritiesSegregatedUnderFederalAndOtherRegulations decimals="-3" contextRef="I2012" unitRef="USD">106000</us-gaap:CashAndSecuritiesSegregatedUnderFederalAndOtherRegulations>
  <us-gaap:CashAndSecuritiesSegregatedUnderFederalAndOtherRegulations decimals="-3" contextRef="I2011" unitRef="USD">104000</us-gaap:CashAndSecuritiesSegregatedUnderFederalAndOtherRegulations>
  <us-gaap:DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness decimals="-3" contextRef="I2011_InternalRevenueServiceIRSMember" unitRef="USD">15505000</us-gaap:DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness>
  <us-gaap:DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness decimals="-3" contextRef="I2012_InternalRevenueServiceIRSMember" unitRef="USD">17814000</us-gaap:DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness>
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<TYPE>EX-101.CAL
<SEQUENCE>13
<FILENAME>acls-20121231_cal.xml
<DESCRIPTION>EX-101.CAL
<TEXT>
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<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>14
<FILENAME>acls-20121231_lab.xml
<DESCRIPTION>EX-101.LAB
<TEXT>
<XBRL>
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncomeTaxReconciliationEquityLossFromInvestments" xlink:to="label_IncomeTaxReconciliationEquityLossFromInvestments_2" xlink:title="label: IncomeTaxReconciliationEquityLossFromInvestments to label_IncomeTaxReconciliationEquityLossFromInvestments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IncomeTaxReconciliationEquityLossFromInvestments_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_IncomeTaxReconciliationEquityLossFromInvestments" xml:lang="en-US" id="label_IncomeTaxReconciliationEquityLossFromInvestments_3">Represents the portion of the difference between total income tax expense or benefit as reported in the income statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to equity loss from investments.</link:label>
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    <link:label xlink:type="resource" xlink:label="label_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries" xml:lang="en-US" id="label_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries_3">Represents the portion of the difference between total income tax expense or benefit as reported in the income statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to deemed distribution from foreign subsidiaries.</link:label>
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsIntangibleAssetsCurrent" xlink:to="label_DeferredTaxAssetsIntangibleAssetsCurrent_2" xlink:title="label: DeferredTaxAssetsIntangibleAssetsCurrent to label_DeferredTaxAssetsIntangibleAssetsCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsIntangibleAssetsCurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsIntangibleAssetsCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsIntangibleAssetsCurrent_3">Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from intangible assets.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsIntangibleAssetsCurrent" xlink:to="label_DeferredTaxAssetsIntangibleAssetsCurrent_3" xlink:title="label: DeferredTaxAssetsIntangibleAssetsCurrent to label_DeferredTaxAssetsIntangibleAssetsCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xlink:label="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xlink:title="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent">Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent to label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent_2">Deferred Tax Assets Tax Deferred Expense Reserves and Accruals Warranty Reserves, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent_2" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent to label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent_3" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent_3">Warranty</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent_3" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent to label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsOtherCurrent" xlink:label="DeferredTaxAssetsOtherCurrent" xlink:title="DeferredTaxAssetsOtherCurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsOtherCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsOtherCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsOtherCurrent">Deferred Tax Assets Other, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsOtherCurrent" xlink:to="label_DeferredTaxAssetsOtherCurrent" xlink:title="label: DeferredTaxAssetsOtherCurrent to label_DeferredTaxAssetsOtherCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsOtherCurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DeferredTaxAssetsOtherCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsOtherCurrent_2">Other</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsOtherCurrent" xlink:to="label_DeferredTaxAssetsOtherCurrent_2" xlink:title="label: DeferredTaxAssetsOtherCurrent to label_DeferredTaxAssetsOtherCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsOtherCurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsOtherCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsOtherCurrent_3">Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences not separately disclosed.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsOtherCurrent" xlink:to="label_DeferredTaxAssetsOtherCurrent_3" xlink:title="label: DeferredTaxAssetsOtherCurrent to label_DeferredTaxAssetsOtherCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsLiabilitiesGrossCurrent" xlink:label="DeferredTaxAssetsLiabilitiesGrossCurrent" xlink:title="DeferredTaxAssetsLiabilitiesGrossCurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsLiabilitiesGrossCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsLiabilitiesGrossCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsLiabilitiesGrossCurrent">Deferred Tax Assets Liabilities Gross, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsLiabilitiesGrossCurrent" xlink:to="label_DeferredTaxAssetsLiabilitiesGrossCurrent" xlink:title="label: DeferredTaxAssetsLiabilitiesGrossCurrent to label_DeferredTaxAssetsLiabilitiesGrossCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsLiabilitiesGrossCurrent_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_DeferredTaxAssetsLiabilitiesGrossCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsLiabilitiesGrossCurrent_2">Deferred taxes, gross</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsLiabilitiesGrossCurrent" xlink:to="label_DeferredTaxAssetsLiabilitiesGrossCurrent_2" xlink:title="label: DeferredTaxAssetsLiabilitiesGrossCurrent to label_DeferredTaxAssetsLiabilitiesGrossCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsLiabilitiesGrossCurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsLiabilitiesGrossCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsLiabilitiesGrossCurrent_3">Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsLiabilitiesGrossCurrent" xlink:to="label_DeferredTaxAssetsLiabilitiesGrossCurrent_3" xlink:title="label: DeferredTaxAssetsLiabilitiesGrossCurrent to label_DeferredTaxAssetsLiabilitiesGrossCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_AmendmentDescription" xlink:label="AmendmentDescription" xlink:title="AmendmentDescription" />
    <link:label xlink:type="resource" xlink:label="label_AmendmentDescription" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AmendmentDescription" xml:lang="en-US" id="label_AmendmentDescription">Amendment Description</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AmendmentDescription" xlink:to="label_AmendmentDescription" xlink:title="label: AmendmentDescription to label_AmendmentDescription" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DocumentAndEntityInformationAbstract" xlink:label="DocumentAndEntityInformationAbstract" xlink:title="DocumentAndEntityInformationAbstract" />
    <link:label xlink:type="resource" xlink:label="label_DocumentAndEntityInformationAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DocumentAndEntityInformationAbstract" xml:lang="en-US" id="label_DocumentAndEntityInformationAbstract">Document and Entity Information</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DocumentAndEntityInformationAbstract" xlink:to="label_DocumentAndEntityInformationAbstract" xlink:title="label: DocumentAndEntityInformationAbstract to label_DocumentAndEntityInformationAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_AmendmentFlag" xlink:label="AmendmentFlag" xlink:title="AmendmentFlag" />
    <link:label xlink:type="resource" xlink:label="label_AmendmentFlag" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AmendmentFlag" xml:lang="en-US" id="label_AmendmentFlag">Amendment Flag</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AmendmentFlag" xlink:to="label_AmendmentFlag" xlink:title="label: AmendmentFlag to label_AmendmentFlag" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_RestrictedCashAbstract" xlink:label="RestrictedCashAbstract" xlink:title="RestrictedCashAbstract" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedCashAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestrictedCashAbstract" xml:lang="en-US" id="label_RestrictedCashAbstract">Restricted Cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedCashAbstract" xlink:to="label_RestrictedCashAbstract" xlink:title="label: RestrictedCashAbstract to label_RestrictedCashAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:label="PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:title="PaymentsRelatedToSaleOfEquityMethodInvestments" />
    <link:label xlink:type="resource" xlink:label="label_PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_PaymentsRelatedToSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_PaymentsRelatedToSaleOfEquityMethodInvestments">Payments related to sale of SEN</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:to="label_PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:title="label: PaymentsRelatedToSaleOfEquityMethodInvestments to label_PaymentsRelatedToSaleOfEquityMethodInvestments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PaymentsRelatedToSaleOfEquityMethodInvestments_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_PaymentsRelatedToSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_PaymentsRelatedToSaleOfEquityMethodInvestments_2">The cash outflow associated with the sale of equity method investments, which are investments in joint ventures and entities in which the entity has an equity ownership interest normally of 20 to 50 percent and exercises significant influence.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:to="label_PaymentsRelatedToSaleOfEquityMethodInvestments_2" xlink:title="label: PaymentsRelatedToSaleOfEquityMethodInvestments to label_PaymentsRelatedToSaleOfEquityMethodInvestments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PaymentsRelatedToSaleOfEquityMethodInvestments_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_PaymentsRelatedToSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_PaymentsRelatedToSaleOfEquityMethodInvestments_3">Advisor fees and other expenses</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:to="label_PaymentsRelatedToSaleOfEquityMethodInvestments_3" xlink:title="label: PaymentsRelatedToSaleOfEquityMethodInvestments to label_PaymentsRelatedToSaleOfEquityMethodInvestments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PaymentsRelatedToSaleOfEquityMethodInvestments_4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PaymentsRelatedToSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_PaymentsRelatedToSaleOfEquityMethodInvestments_4">Payments Related to Sale of Equity Method Investments</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PaymentsRelatedToSaleOfEquityMethodInvestments" xlink:to="label_PaymentsRelatedToSaleOfEquityMethodInvestments_4" xlink:title="label: PaymentsRelatedToSaleOfEquityMethodInvestments to label_PaymentsRelatedToSaleOfEquityMethodInvestments" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_PaymentsOfFinancingFeesAndOtherExpenses" xlink:label="PaymentsOfFinancingFeesAndOtherExpenses" xlink:title="PaymentsOfFinancingFeesAndOtherExpenses" />
    <link:label xlink:type="resource" xlink:label="label_PaymentsOfFinancingFeesAndOtherExpenses" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_PaymentsOfFinancingFeesAndOtherExpenses" xml:lang="en-US" id="label_PaymentsOfFinancingFeesAndOtherExpenses">Financing fees and other expenses</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PaymentsOfFinancingFeesAndOtherExpenses" xlink:to="label_PaymentsOfFinancingFeesAndOtherExpenses" xlink:title="label: PaymentsOfFinancingFeesAndOtherExpenses to label_PaymentsOfFinancingFeesAndOtherExpenses" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PaymentsOfFinancingFeesAndOtherExpenses_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PaymentsOfFinancingFeesAndOtherExpenses" xml:lang="en-US" id="label_PaymentsOfFinancingFeesAndOtherExpenses_2">Payments of Financing Fees and Other Expenses</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PaymentsOfFinancingFeesAndOtherExpenses" xlink:to="label_PaymentsOfFinancingFeesAndOtherExpenses_2" xlink:title="label: PaymentsOfFinancingFeesAndOtherExpenses to label_PaymentsOfFinancingFeesAndOtherExpenses" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PaymentsOfFinancingFeesAndOtherExpenses_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_PaymentsOfFinancingFeesAndOtherExpenses" xml:lang="en-US" id="label_PaymentsOfFinancingFeesAndOtherExpenses_3">The cash outflow paid to third parties in connection with debt financing and other related expenses.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PaymentsOfFinancingFeesAndOtherExpenses" xlink:to="label_PaymentsOfFinancingFeesAndOtherExpenses_3" xlink:title="label: PaymentsOfFinancingFeesAndOtherExpenses to label_PaymentsOfFinancingFeesAndOtherExpenses" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" xlink:label="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" xlink:title="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" xml:lang="en-US" id="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract">Revenue Recognition and New Accounting Guidance Recently Adopted</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" xlink:to="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" xlink:title="label: RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract to label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xlink:label="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xlink:title="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xml:lang="en-US" id="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock">Revenue Recognition and New Accounting Guidance Recently Adopted</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xlink:to="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xlink:title="label: RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock to label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xml:lang="en-US" id="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock_2">Disclosure related to revenue recognition or a new accounting pronouncement or a change in accounting principle, including the nature and reason for the change and the effect of the change on prior periods and the current period.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xlink:to="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock_2" xlink:title="label: RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock to label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xml:lang="en-US" id="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock_3">Revenue Recognition and New Accounting Guidance Recently Adopted Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" xlink:to="label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock_3" xlink:title="label: RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock to label_RevenueRecognitionAndNewAccountingGuidanceRecentlyAdoptedDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SaleOfInvestmentInSenDisclosureAbstract" xlink:label="SaleOfInvestmentInSenDisclosureAbstract" xlink:title="SaleOfInvestmentInSenDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_SaleOfInvestmentInSenDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SaleOfInvestmentInSenDisclosureAbstract" xml:lang="en-US" id="label_SaleOfInvestmentInSenDisclosureAbstract">Sale of Investment in SEN</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SaleOfInvestmentInSenDisclosureAbstract" xlink:to="label_SaleOfInvestmentInSenDisclosureAbstract" xlink:title="label: SaleOfInvestmentInSenDisclosureAbstract to label_SaleOfInvestmentInSenDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SaleOfInvestmentDisclosureTextBlock" xlink:label="SaleOfInvestmentDisclosureTextBlock" xlink:title="SaleOfInvestmentDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_SaleOfInvestmentDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SaleOfInvestmentDisclosureTextBlock" xml:lang="en-US" id="label_SaleOfInvestmentDisclosureTextBlock">Sale of Investment in SEN</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SaleOfInvestmentDisclosureTextBlock" xlink:to="label_SaleOfInvestmentDisclosureTextBlock" xlink:title="label: SaleOfInvestmentDisclosureTextBlock to label_SaleOfInvestmentDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SaleOfInvestmentDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SaleOfInvestmentDisclosureTextBlock" xml:lang="en-US" id="label_SaleOfInvestmentDisclosureTextBlock_2">Sale of Investment Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SaleOfInvestmentDisclosureTextBlock" xlink:to="label_SaleOfInvestmentDisclosureTextBlock_2" xlink:title="label: SaleOfInvestmentDisclosureTextBlock to label_SaleOfInvestmentDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SaleOfInvestmentDisclosureTextBlock_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SaleOfInvestmentDisclosureTextBlock" xml:lang="en-US" id="label_SaleOfInvestmentDisclosureTextBlock_3">Disclosure of the sale of the entity's equity in a joint venture including the proceeds received in the sale, expenses related to the sale, and the gain recognized by the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SaleOfInvestmentDisclosureTextBlock" xlink:to="label_SaleOfInvestmentDisclosureTextBlock_3" xlink:title="label: SaleOfInvestmentDisclosureTextBlock to label_SaleOfInvestmentDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:label="StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:title="StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xml:lang="en-US" id="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation">Value of stock related to restricted stock awards issued in satisfaction of accrued compensation during the period, net of the stock value of such awards forfeited.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:to="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:title="label: StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation to label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xml:lang="en-US" id="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation_2">Stock Issued During Period, Value, Restricted Shares in Satisfaction of Accrued Compensation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:to="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation_2" xlink:title="label: StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation to label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xml:lang="en-US" id="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation_3">Issuance of restricted shares in satisfaction of accrued compensation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:to="label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation_3" xlink:title="label: StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation to label_StockIssuedDuringPeriodValueRestrictedSharesInSatisfactionOfAccruedCompensation" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:label="StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:title="StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xml:lang="en-US" id="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation">Issuance of restricted shares in satisfaction of accrued compensation (in shares)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:to="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:title="label: StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation to label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xml:lang="en-US" id="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation_2">Number of shares issued during the period related to restricted stock awards issued in satisfaction of accrued compensation, net of any shares forfeited.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:to="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation_2" xlink:title="label: StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation to label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xml:lang="en-US" id="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation_3">Stock Issued During Period, Shares, Restricted Shares in Satisfaction of Accrued Compensation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" xlink:to="label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation_3" xlink:title="label: StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation to label_StockIssuedDuringPeriodSharesRestrictedSharesInSatisfactionOfAccruedCompensation" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:label="AssetsManufacturedForInternalUseDisclosureAbstract" xlink:title="AssetsManufacturedForInternalUseDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AssetsManufacturedForInternalUseDisclosureAbstract" xml:lang="en-US" id="label_AssetsManufacturedForInternalUseDisclosureAbstract">Assets Manufactured for Internal Use</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsManufacturedForInternalUseDisclosureAbstract" xlink:to="label_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:title="label: AssetsManufacturedForInternalUseDisclosureAbstract to label_AssetsManufacturedForInternalUseDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:label="AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:title="AssetsManufacturedForInternalUseDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AssetsManufacturedForInternalUseDisclosureTextBlock" xml:lang="en-US" id="label_AssetsManufacturedForInternalUseDisclosureTextBlock">Assets Manufactured for Internal Use</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:to="label_AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:title="label: AssetsManufacturedForInternalUseDisclosureTextBlock to label_AssetsManufacturedForInternalUseDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AssetsManufacturedForInternalUseDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_AssetsManufacturedForInternalUseDisclosureTextBlock" xml:lang="en-US" id="label_AssetsManufacturedForInternalUseDisclosureTextBlock_2">The entire disclosure of assets manufactured for internal use. This includes details regarding cost, accumulated depreciation and uses of the assets.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:to="label_AssetsManufacturedForInternalUseDisclosureTextBlock_2" xlink:title="label: AssetsManufacturedForInternalUseDisclosureTextBlock to label_AssetsManufacturedForInternalUseDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AssetsManufacturedForInternalUseDisclosureTextBlock_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AssetsManufacturedForInternalUseDisclosureTextBlock" xml:lang="en-US" id="label_AssetsManufacturedForInternalUseDisclosureTextBlock_3">Assets Manufactured for Internal Use Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:to="label_AssetsManufacturedForInternalUseDisclosureTextBlock_3" xlink:title="label: AssetsManufacturedForInternalUseDisclosureTextBlock to label_AssetsManufacturedForInternalUseDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_NatureOfOperationsDisclosureAbstract" xlink:label="NatureOfOperationsDisclosureAbstract" xlink:title="NatureOfOperationsDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_NatureOfOperationsDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NatureOfOperationsDisclosureAbstract" xml:lang="en-US" id="label_NatureOfOperationsDisclosureAbstract">Nature of Business</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NatureOfOperationsDisclosureAbstract" xlink:to="label_NatureOfOperationsDisclosureAbstract" xlink:title="label: NatureOfOperationsDisclosureAbstract to label_NatureOfOperationsDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ProductWarrantyPeriodLowEndOfRange" xlink:label="ProductWarrantyPeriodLowEndOfRange" xlink:title="ProductWarrantyPeriodLowEndOfRange" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriodLowEndOfRange" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyPeriodLowEndOfRange" xml:lang="en-US" id="label_ProductWarrantyPeriodLowEndOfRange">Product Warranty Period Low End of Range</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriodLowEndOfRange" xlink:to="label_ProductWarrantyPeriodLowEndOfRange" xlink:title="label: ProductWarrantyPeriodLowEndOfRange to label_ProductWarrantyPeriodLowEndOfRange" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriodLowEndOfRange_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ProductWarrantyPeriodLowEndOfRange" xml:lang="en-US" id="label_ProductWarrantyPeriodLowEndOfRange_2">Represents the low end of range of the period for which the warranty is offered for the products sold.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriodLowEndOfRange" xlink:to="label_ProductWarrantyPeriodLowEndOfRange_2" xlink:title="label: ProductWarrantyPeriodLowEndOfRange to label_ProductWarrantyPeriodLowEndOfRange" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriodLowEndOfRange_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyPeriodLowEndOfRange" xml:lang="en-US" id="label_ProductWarrantyPeriodLowEndOfRange_3">Product warranty period, low end of range (in years)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriodLowEndOfRange" xlink:to="label_ProductWarrantyPeriodLowEndOfRange_3" xlink:title="label: ProductWarrantyPeriodLowEndOfRange to label_ProductWarrantyPeriodLowEndOfRange" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ProductWarrantyPeriodHighEndOfRange" xlink:label="ProductWarrantyPeriodHighEndOfRange" xlink:title="ProductWarrantyPeriodHighEndOfRange" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriodHighEndOfRange" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyPeriodHighEndOfRange" xml:lang="en-US" id="label_ProductWarrantyPeriodHighEndOfRange">Product Warranty Period High End of Range</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriodHighEndOfRange" xlink:to="label_ProductWarrantyPeriodHighEndOfRange" xlink:title="label: ProductWarrantyPeriodHighEndOfRange to label_ProductWarrantyPeriodHighEndOfRange" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriodHighEndOfRange_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ProductWarrantyPeriodHighEndOfRange" xml:lang="en-US" id="label_ProductWarrantyPeriodHighEndOfRange_2">Represents the high end of range of the period for which the warranty is offered for the products sold.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriodHighEndOfRange" xlink:to="label_ProductWarrantyPeriodHighEndOfRange_2" xlink:title="label: ProductWarrantyPeriodHighEndOfRange to label_ProductWarrantyPeriodHighEndOfRange" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriodHighEndOfRange_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyPeriodHighEndOfRange" xml:lang="en-US" id="label_ProductWarrantyPeriodHighEndOfRange_3">Product warranty period, high end of range (in years)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriodHighEndOfRange" xlink:to="label_ProductWarrantyPeriodHighEndOfRange_3" xlink:title="label: ProductWarrantyPeriodHighEndOfRange to label_ProductWarrantyPeriodHighEndOfRange" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SalesRevenueNetMember" xlink:label="SalesRevenueNetMember" xlink:title="SalesRevenueNetMember" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueNetMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SalesRevenueNetMember" xml:lang="en-US" id="label_SalesRevenueNetMember">Consolidated Revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueNetMember" xlink:to="label_SalesRevenueNetMember" xlink:title="label: SalesRevenueNetMember to label_SalesRevenueNetMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueNetMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SalesRevenueNetMember" xml:lang="en-US" id="label_SalesRevenueNetMember_2">Sales Revenue Net [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueNetMember" xlink:to="label_SalesRevenueNetMember_2" xlink:title="label: SalesRevenueNetMember to label_SalesRevenueNetMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueNetMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SalesRevenueNetMember" xml:lang="en-US" id="label_SalesRevenueNetMember_3">Aggregate revenue during the period from sales of goods and services rendered in the normal course of business, after deducting returns, allowances and discounts, when it serves as a benchmark in a concentration of risk calculation.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueNetMember" xlink:to="label_SalesRevenueNetMember_3" xlink:title="label: SalesRevenueNetMember to label_SalesRevenueNetMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_LargestCustomerMember" xlink:label="LargestCustomerMember" xlink:title="LargestCustomerMember" />
    <link:label xlink:type="resource" xlink:label="label_LargestCustomerMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LargestCustomerMember" xml:lang="en-US" id="label_LargestCustomerMember">Largest Customer [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LargestCustomerMember" xlink:to="label_LargestCustomerMember" xlink:title="label: LargestCustomerMember to label_LargestCustomerMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LargestCustomerMember_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_LargestCustomerMember" xml:lang="en-US" id="label_LargestCustomerMember_2">Represents one customer on whom the entity significantly relies giving rise to the largest single concentration risk.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LargestCustomerMember" xlink:to="label_LargestCustomerMember_2" xlink:title="label: LargestCustomerMember to label_LargestCustomerMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LargestCustomerMember_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LargestCustomerMember" xml:lang="en-US" id="label_LargestCustomerMember_3">One customer</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LargestCustomerMember" xlink:to="label_LargestCustomerMember_3" xlink:title="label: LargestCustomerMember to label_LargestCustomerMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="CurrentFiscalYearEndDate" xlink:title="CurrentFiscalYearEndDate" />
    <link:label xlink:type="resource" xlink:label="label_CurrentFiscalYearEndDate" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CurrentFiscalYearEndDate" xml:lang="en-US" id="label_CurrentFiscalYearEndDate">Current Fiscal Year End Date</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CurrentFiscalYearEndDate" xlink:to="label_CurrentFiscalYearEndDate" xlink:title="label: CurrentFiscalYearEndDate to label_CurrentFiscalYearEndDate" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_CustomerOneMember" xlink:label="CustomerOneMember" xlink:title="CustomerOneMember" />
    <link:label xlink:type="resource" xlink:label="label_CustomerOneMember" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_CustomerOneMember" xml:lang="en-US" id="label_CustomerOneMember">Represents the first customer on whom the entity significantly relies giving rise to concentration risk.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerOneMember" xlink:to="label_CustomerOneMember" xlink:title="label: CustomerOneMember to label_CustomerOneMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CustomerOneMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CustomerOneMember" xml:lang="en-US" id="label_CustomerOneMember_2">Customer one</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerOneMember" xlink:to="label_CustomerOneMember_2" xlink:title="label: CustomerOneMember to label_CustomerOneMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CustomerOneMember_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CustomerOneMember" xml:lang="en-US" id="label_CustomerOneMember_3">Customer One [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerOneMember" xlink:to="label_CustomerOneMember_3" xlink:title="label: CustomerOneMember to label_CustomerOneMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_CustomerTwoMember" xlink:label="CustomerTwoMember" xlink:title="CustomerTwoMember" />
    <link:label xlink:type="resource" xlink:label="label_CustomerTwoMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CustomerTwoMember" xml:lang="en-US" id="label_CustomerTwoMember">Customer Two [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerTwoMember" xlink:to="label_CustomerTwoMember" xlink:title="label: CustomerTwoMember to label_CustomerTwoMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CustomerTwoMember_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_CustomerTwoMember" xml:lang="en-US" id="label_CustomerTwoMember_2">Represents the second customer on whom the entity significantly relies giving rise to concentration risk.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerTwoMember" xlink:to="label_CustomerTwoMember_2" xlink:title="label: CustomerTwoMember to label_CustomerTwoMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CustomerTwoMember_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CustomerTwoMember" xml:lang="en-US" id="label_CustomerTwoMember_3">Customer two</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerTwoMember" xlink:to="label_CustomerTwoMember_3" xlink:title="label: CustomerTwoMember to label_CustomerTwoMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_TenLargestCustomersMember" xlink:label="TenLargestCustomersMember" xlink:title="TenLargestCustomersMember" />
    <link:label xlink:type="resource" xlink:label="label_TenLargestCustomersMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_TenLargestCustomersMember" xml:lang="en-US" id="label_TenLargestCustomersMember">Ten largest customers</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TenLargestCustomersMember" xlink:to="label_TenLargestCustomersMember" xlink:title="label: TenLargestCustomersMember to label_TenLargestCustomersMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_TenLargestCustomersMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_TenLargestCustomersMember" xml:lang="en-US" id="label_TenLargestCustomersMember_2">Ten Largest Customers [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TenLargestCustomersMember" xlink:to="label_TenLargestCustomersMember_2" xlink:title="label: TenLargestCustomersMember to label_TenLargestCustomersMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_TenLargestCustomersMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_TenLargestCustomersMember" xml:lang="en-US" id="label_TenLargestCustomersMember_3">Represents the ten largest customers on whom the entity significantly relies giving rise to aggregate concentration risk.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TenLargestCustomersMember" xlink:to="label_TenLargestCustomersMember_3" xlink:title="label: TenLargestCustomersMember to label_TenLargestCustomersMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ConcentrationRiskNumberOfCustomers" xlink:label="ConcentrationRiskNumberOfCustomers" xlink:title="ConcentrationRiskNumberOfCustomers" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskNumberOfCustomers" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskNumberOfCustomers" xml:lang="en-US" id="label_ConcentrationRiskNumberOfCustomers">Concentration Risk Number of Customers</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskNumberOfCustomers" xlink:to="label_ConcentrationRiskNumberOfCustomers" xlink:title="label: ConcentrationRiskNumberOfCustomers to label_ConcentrationRiskNumberOfCustomers" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskNumberOfCustomers_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ConcentrationRiskNumberOfCustomers" xml:lang="en-US" id="label_ConcentrationRiskNumberOfCustomers_2">Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskNumberOfCustomers" xlink:to="label_ConcentrationRiskNumberOfCustomers_2" xlink:title="label: ConcentrationRiskNumberOfCustomers to label_ConcentrationRiskNumberOfCustomers" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskNumberOfCustomers_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConcentrationRiskNumberOfCustomers" xml:lang="en-US" id="label_ConcentrationRiskNumberOfCustomers_3">Number of customers</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskNumberOfCustomers" xlink:to="label_ConcentrationRiskNumberOfCustomers_3" xlink:title="label: ConcentrationRiskNumberOfCustomers to label_ConcentrationRiskNumberOfCustomers" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DebtInstrumentCovenantMinimumTrailingPeriod" xlink:label="DebtInstrumentCovenantMinimumTrailingPeriod" xlink:title="DebtInstrumentCovenantMinimumTrailingPeriod" />
    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentCovenantMinimumTrailingPeriod" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DebtInstrumentCovenantMinimumTrailingPeriod" xml:lang="en-US" id="label_DebtInstrumentCovenantMinimumTrailingPeriod">Debt Instrument Covenant Minimum Trailing Period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DebtInstrumentCovenantMinimumTrailingPeriod" xlink:to="label_DebtInstrumentCovenantMinimumTrailingPeriod" xlink:title="label: DebtInstrumentCovenantMinimumTrailingPeriod to label_DebtInstrumentCovenantMinimumTrailingPeriod" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentCovenantMinimumTrailingPeriod_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DebtInstrumentCovenantMinimumTrailingPeriod" xml:lang="en-US" id="label_DebtInstrumentCovenantMinimumTrailingPeriod_2">Represents the minimum trailing period for which a specified amount of adjusted net income is required as per the covenants of the debt instrument of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DebtInstrumentCovenantMinimumTrailingPeriod" xlink:to="label_DebtInstrumentCovenantMinimumTrailingPeriod_2" xlink:title="label: DebtInstrumentCovenantMinimumTrailingPeriod to label_DebtInstrumentCovenantMinimumTrailingPeriod" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentCovenantMinimumTrailingPeriod_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DebtInstrumentCovenantMinimumTrailingPeriod" xml:lang="en-US" id="label_DebtInstrumentCovenantMinimumTrailingPeriod_3">Minimum trailing period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DebtInstrumentCovenantMinimumTrailingPeriod" xlink:to="label_DebtInstrumentCovenantMinimumTrailingPeriod_3" xlink:title="label: DebtInstrumentCovenantMinimumTrailingPeriod to label_DebtInstrumentCovenantMinimumTrailingPeriod" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DebtInstrumentCovenantAdjustedNetIncomeRequired" xlink:label="DebtInstrumentCovenantAdjustedNetIncomeRequired" xlink:title="DebtInstrumentCovenantAdjustedNetIncomeRequired" />
    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentCovenantAdjustedNetIncomeRequired" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DebtInstrumentCovenantAdjustedNetIncomeRequired" xml:lang="en-US" id="label_DebtInstrumentCovenantAdjustedNetIncomeRequired">Debt Instrument Covenant Adjusted Net Income Required</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DebtInstrumentCovenantAdjustedNetIncomeRequired" xlink:to="label_DebtInstrumentCovenantAdjustedNetIncomeRequired" xlink:title="label: DebtInstrumentCovenantAdjustedNetIncomeRequired to label_DebtInstrumentCovenantAdjustedNetIncomeRequired" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentCovenantAdjustedNetIncomeRequired_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DebtInstrumentCovenantAdjustedNetIncomeRequired" xml:lang="en-US" id="label_DebtInstrumentCovenantAdjustedNetIncomeRequired_2">Adjusted net income required</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DebtInstrumentCovenantAdjustedNetIncomeRequired" xlink:to="label_DebtInstrumentCovenantAdjustedNetIncomeRequired_2" xlink:title="label: DebtInstrumentCovenantAdjustedNetIncomeRequired to label_DebtInstrumentCovenantAdjustedNetIncomeRequired" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentCovenantAdjustedNetIncomeRequired_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DebtInstrumentCovenantAdjustedNetIncomeRequired" xml:lang="en-US" id="label_DebtInstrumentCovenantAdjustedNetIncomeRequired_3">Represents the adjusted net income required for the specified trailing period as per the covenants of the debt instrument of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DebtInstrumentCovenantAdjustedNetIncomeRequired" xlink:to="label_DebtInstrumentCovenantAdjustedNetIncomeRequired_3" xlink:title="label: DebtInstrumentCovenantAdjustedNetIncomeRequired to label_DebtInstrumentCovenantAdjustedNetIncomeRequired" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ProductWarrantyPeriod" xlink:label="ProductWarrantyPeriod" xlink:title="ProductWarrantyPeriod" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriod" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyPeriod" xml:lang="en-US" id="label_ProductWarrantyPeriod">Product Warranty Period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriod" xlink:to="label_ProductWarrantyPeriod" xlink:title="label: ProductWarrantyPeriod to label_ProductWarrantyPeriod" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriod_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyPeriod" xml:lang="en-US" id="label_ProductWarrantyPeriod_2">Product warranty period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriod" xlink:to="label_ProductWarrantyPeriod_2" xlink:title="label: ProductWarrantyPeriod to label_ProductWarrantyPeriod" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyPeriod_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ProductWarrantyPeriod" xml:lang="en-US" id="label_ProductWarrantyPeriod_3">Represents the period for which the warranty is offered for the products sold.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyPeriod" xlink:to="label_ProductWarrantyPeriod_3" xlink:title="label: ProductWarrantyPeriod to label_ProductWarrantyPeriod" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_HeadcountReductionPercentage" xlink:label="HeadcountReductionPercentage" xlink:title="HeadcountReductionPercentage" />
    <link:label xlink:type="resource" xlink:label="label_HeadcountReductionPercentage" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_HeadcountReductionPercentage" xml:lang="en-US" id="label_HeadcountReductionPercentage">Represents the percentage of reduction in the headcount of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="HeadcountReductionPercentage" xlink:to="label_HeadcountReductionPercentage" xlink:title="label: HeadcountReductionPercentage to label_HeadcountReductionPercentage" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_HeadcountReductionPercentage_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_HeadcountReductionPercentage" xml:lang="en-US" id="label_HeadcountReductionPercentage_2">Headcount Reduction Percentage</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="HeadcountReductionPercentage" xlink:to="label_HeadcountReductionPercentage_2" xlink:title="label: HeadcountReductionPercentage to label_HeadcountReductionPercentage" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_HeadcountReductionPercentage_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_HeadcountReductionPercentage" xml:lang="en-US" id="label_HeadcountReductionPercentage_3">Headcount reduction (as a percent)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="HeadcountReductionPercentage" xlink:to="label_HeadcountReductionPercentage_3" xlink:title="label: HeadcountReductionPercentage to label_HeadcountReductionPercentage" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ExpectedAnnualSavingsDueToCostOutInitiatives" xlink:label="ExpectedAnnualSavingsDueToCostOutInitiatives" xlink:title="ExpectedAnnualSavingsDueToCostOutInitiatives" />
    <link:label xlink:type="resource" xlink:label="label_ExpectedAnnualSavingsDueToCostOutInitiatives" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ExpectedAnnualSavingsDueToCostOutInitiatives" xml:lang="en-US" id="label_ExpectedAnnualSavingsDueToCostOutInitiatives">Expected Annual Savings Due to Cost Out Initiatives</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ExpectedAnnualSavingsDueToCostOutInitiatives" xlink:to="label_ExpectedAnnualSavingsDueToCostOutInitiatives" xlink:title="label: ExpectedAnnualSavingsDueToCostOutInitiatives to label_ExpectedAnnualSavingsDueToCostOutInitiatives" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ExpectedAnnualSavingsDueToCostOutInitiatives_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ExpectedAnnualSavingsDueToCostOutInitiatives" xml:lang="en-US" id="label_ExpectedAnnualSavingsDueToCostOutInitiatives_2">Expected savings to be generated due to cost out initiatives</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ExpectedAnnualSavingsDueToCostOutInitiatives" xlink:to="label_ExpectedAnnualSavingsDueToCostOutInitiatives_2" xlink:title="label: ExpectedAnnualSavingsDueToCostOutInitiatives to label_ExpectedAnnualSavingsDueToCostOutInitiatives" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ExpectedAnnualSavingsDueToCostOutInitiatives_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ExpectedAnnualSavingsDueToCostOutInitiatives" xml:lang="en-US" id="label_ExpectedAnnualSavingsDueToCostOutInitiatives_3">Represents the annual savings expected to be generated due to the implementation of cost out initiatives including a small headcount reduction.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ExpectedAnnualSavingsDueToCostOutInitiatives" xlink:to="label_ExpectedAnnualSavingsDueToCostOutInitiatives_3" xlink:title="label: ExpectedAnnualSavingsDueToCostOutInitiatives to label_ExpectedAnnualSavingsDueToCostOutInitiatives" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xlink:label="OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xlink:title="OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears">Operating Leases Future Minimum Payments Due after Four Years</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueAfterFourYears to label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears_2">Thereafter</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears_2" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueAfterFourYears to label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears_3">Amount of required minimum rental payments maturing after the fourth fiscal year following the latest fiscal year for operating leases having an initial or remaining non-cancelable letter-terms in excess of one year.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears_3" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueAfterFourYears to label_OperatingLeasesFutureMinimumPaymentsDueAfterFourYears" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="DocumentPeriodEndDate" xlink:title="DocumentPeriodEndDate" />
    <link:label xlink:type="resource" xlink:label="label_DocumentPeriodEndDate" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DocumentPeriodEndDate" xml:lang="en-US" id="label_DocumentPeriodEndDate">Document Period End Date</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DocumentPeriodEndDate" xlink:to="label_DocumentPeriodEndDate" xlink:title="label: DocumentPeriodEndDate to label_DocumentPeriodEndDate" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_HighlyCompensatedEmployeesMember" xlink:label="HighlyCompensatedEmployeesMember" xlink:title="HighlyCompensatedEmployeesMember" />
    <link:label xlink:type="resource" xlink:label="label_HighlyCompensatedEmployeesMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_HighlyCompensatedEmployeesMember" xml:lang="en-US" id="label_HighlyCompensatedEmployeesMember">Highly Compensated Employees [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="HighlyCompensatedEmployeesMember" xlink:to="label_HighlyCompensatedEmployeesMember" xlink:title="label: HighlyCompensatedEmployeesMember to label_HighlyCompensatedEmployeesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_HighlyCompensatedEmployeesMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_HighlyCompensatedEmployeesMember" xml:lang="en-US" id="label_HighlyCompensatedEmployeesMember_2">Highly compensated employees</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="HighlyCompensatedEmployeesMember" xlink:to="label_HighlyCompensatedEmployeesMember_2" xlink:title="label: HighlyCompensatedEmployeesMember to label_HighlyCompensatedEmployeesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_HighlyCompensatedEmployeesMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_HighlyCompensatedEmployeesMember" xml:lang="en-US" id="label_HighlyCompensatedEmployeesMember_3">Represents the highly compensated employees of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="HighlyCompensatedEmployeesMember" xlink:to="label_HighlyCompensatedEmployeesMember_3" xlink:title="label: HighlyCompensatedEmployeesMember to label_HighlyCompensatedEmployeesMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_IonImplantationSystemsServicesAndRoyaltiesMember" xlink:label="IonImplantationSystemsServicesAndRoyaltiesMember" xlink:title="IonImplantationSystemsServicesAndRoyaltiesMember" />
    <link:label xlink:type="resource" xlink:label="label_IonImplantationSystemsServicesAndRoyaltiesMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_IonImplantationSystemsServicesAndRoyaltiesMember" xml:lang="en-US" id="label_IonImplantationSystemsServicesAndRoyaltiesMember">Ion Implantation Systems Services and Royalties [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IonImplantationSystemsServicesAndRoyaltiesMember" xlink:to="label_IonImplantationSystemsServicesAndRoyaltiesMember" xlink:title="label: IonImplantationSystemsServicesAndRoyaltiesMember to label_IonImplantationSystemsServicesAndRoyaltiesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IonImplantationSystemsServicesAndRoyaltiesMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_IonImplantationSystemsServicesAndRoyaltiesMember" xml:lang="en-US" id="label_IonImplantationSystemsServicesAndRoyaltiesMember_2">Ion implantation systems, services, and royalties</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IonImplantationSystemsServicesAndRoyaltiesMember" xlink:to="label_IonImplantationSystemsServicesAndRoyaltiesMember_2" xlink:title="label: IonImplantationSystemsServicesAndRoyaltiesMember to label_IonImplantationSystemsServicesAndRoyaltiesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IonImplantationSystemsServicesAndRoyaltiesMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_IonImplantationSystemsServicesAndRoyaltiesMember" xml:lang="en-US" id="label_IonImplantationSystemsServicesAndRoyaltiesMember_3">Represents information pertaining to the ion implantation systems, services, and royalties, a product line of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IonImplantationSystemsServicesAndRoyaltiesMember" xlink:to="label_IonImplantationSystemsServicesAndRoyaltiesMember_3" xlink:title="label: IonImplantationSystemsServicesAndRoyaltiesMember to label_IonImplantationSystemsServicesAndRoyaltiesMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_OtherProductsSystemsServicesAndRoyaltiesMember" xlink:label="OtherProductsSystemsServicesAndRoyaltiesMember" xlink:title="OtherProductsSystemsServicesAndRoyaltiesMember" />
    <link:label xlink:type="resource" xlink:label="label_OtherProductsSystemsServicesAndRoyaltiesMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OtherProductsSystemsServicesAndRoyaltiesMember" xml:lang="en-US" id="label_OtherProductsSystemsServicesAndRoyaltiesMember">Other systems and services</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherProductsSystemsServicesAndRoyaltiesMember" xlink:to="label_OtherProductsSystemsServicesAndRoyaltiesMember" xlink:title="label: OtherProductsSystemsServicesAndRoyaltiesMember to label_OtherProductsSystemsServicesAndRoyaltiesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OtherProductsSystemsServicesAndRoyaltiesMember_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_OtherProductsSystemsServicesAndRoyaltiesMember" xml:lang="en-US" id="label_OtherProductsSystemsServicesAndRoyaltiesMember_2">Represents information pertaining to the other products systems, services, and royalties of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherProductsSystemsServicesAndRoyaltiesMember" xlink:to="label_OtherProductsSystemsServicesAndRoyaltiesMember_2" xlink:title="label: OtherProductsSystemsServicesAndRoyaltiesMember to label_OtherProductsSystemsServicesAndRoyaltiesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OtherProductsSystemsServicesAndRoyaltiesMember_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OtherProductsSystemsServicesAndRoyaltiesMember" xml:lang="en-US" id="label_OtherProductsSystemsServicesAndRoyaltiesMember_3">Other Products Systems Services and Royalties [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherProductsSystemsServicesAndRoyaltiesMember" xlink:to="label_OtherProductsSystemsServicesAndRoyaltiesMember_3" xlink:title="label: OtherProductsSystemsServicesAndRoyaltiesMember to label_OtherProductsSystemsServicesAndRoyaltiesMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xlink:label="EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xlink:title="EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" />
    <link:label xlink:type="resource" xlink:label="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xml:lang="en-US" id="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries">Entity Wide Disclosure on Geographic Areas Percentage of Revenue from External Customers Attributed to Foreign Countries</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xlink:to="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xlink:title="label: EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries to label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" use="optional" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xlink:to="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries_2" xlink:title="label: EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries to label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries" xml:lang="en-US" id="label_EntityWideDisclosureOnGeographicAreasPercentageOfRevenueFromExternalCustomersAttributedToForeignCountries_3">Percentage of revenues from external customers attributed to all foreign countries, in total, from which the entity derives its revenues.</link:label>
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    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xlink:label="IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xlink:title="IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" />
    <link:label xlink:type="resource" xlink:label="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xml:lang="en-US" id="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets">Income Tax Reconciliation Restoration of Foreign Deferred Tax Assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xlink:to="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xlink:title="label: IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets to label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xml:lang="en-US" id="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets_2">Represents the portion of the difference between total income tax expense or benefit as reported in the income statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to restoration of foreign deferred tax assets.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xlink:to="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets_2" xlink:title="label: IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets to label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xml:lang="en-US" id="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets_3">Restoration of foreign deferred tax assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" xlink:to="label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets_3" xlink:title="label: IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets to label_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xlink:label="ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xlink:title="ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xml:lang="en-US" id="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract">Components of Deferred Tax Assets and Liabilities Noncurrent [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xlink:to="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xlink:title="label: ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract to label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xml:lang="en-US" id="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract_2">Significant components of long-term deferred income taxes</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" xlink:to="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract_2" xlink:title="label: ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract to label_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityDomain" xlink:label="EntityDomain" xlink:title="EntityDomain" />
    <link:label xlink:type="resource" xlink:label="label_EntityDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityDomain" xml:lang="en-US" id="label_EntityDomain">Entity [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityDomain" xlink:to="label_EntityDomain" xlink:title="label: EntityDomain to label_EntityDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsIntangibleAssetsNoncurrent" xlink:label="DeferredTaxAssetsIntangibleAssetsNoncurrent" xlink:title="DeferredTaxAssetsIntangibleAssetsNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsIntangibleAssetsNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsIntangibleAssetsNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsIntangibleAssetsNoncurrent">Deferred Tax Assets Intangible Assets Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsIntangibleAssetsNoncurrent" xlink:to="label_DeferredTaxAssetsIntangibleAssetsNoncurrent" xlink:title="label: DeferredTaxAssetsIntangibleAssetsNoncurrent to label_DeferredTaxAssetsIntangibleAssetsNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsIntangibleAssetsNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DeferredTaxAssetsIntangibleAssetsNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsIntangibleAssetsNoncurrent_2">Intangible assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsIntangibleAssetsNoncurrent" xlink:to="label_DeferredTaxAssetsIntangibleAssetsNoncurrent_2" xlink:title="label: DeferredTaxAssetsIntangibleAssetsNoncurrent to label_DeferredTaxAssetsIntangibleAssetsNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsIntangibleAssetsNoncurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsIntangibleAssetsNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsIntangibleAssetsNoncurrent_3">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from intangible assets.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsIntangibleAssetsNoncurrent" xlink:to="label_DeferredTaxAssetsIntangibleAssetsNoncurrent_3" xlink:title="label: DeferredTaxAssetsIntangibleAssetsNoncurrent to label_DeferredTaxAssetsIntangibleAssetsNoncurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xlink:label="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xlink:title="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent">Deferred Tax Assets Tax Deferred Expense Reserves and Accruals Warranty Reserves Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent to label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent_2">Warranty</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent_2" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent to label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent_3">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent_3" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent to label_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsOtherNoncurrent" xlink:label="DeferredTaxAssetsOtherNoncurrent" xlink:title="DeferredTaxAssetsOtherNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsOtherNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsOtherNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsOtherNoncurrent">Deferred Tax Assets Other Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsOtherNoncurrent" xlink:to="label_DeferredTaxAssetsOtherNoncurrent" xlink:title="label: DeferredTaxAssetsOtherNoncurrent to label_DeferredTaxAssetsOtherNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsOtherNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DeferredTaxAssetsOtherNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsOtherNoncurrent_2">Other</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsOtherNoncurrent" xlink:to="label_DeferredTaxAssetsOtherNoncurrent_2" xlink:title="label: DeferredTaxAssetsOtherNoncurrent to label_DeferredTaxAssetsOtherNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsOtherNoncurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsOtherNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsOtherNoncurrent_3">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences not separately disclosed.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsOtherNoncurrent" xlink:to="label_DeferredTaxAssetsOtherNoncurrent_3" xlink:title="label: DeferredTaxAssetsOtherNoncurrent to label_DeferredTaxAssetsOtherNoncurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:label="DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:title="DeferredTaxAssetsLiabilitiesGrossNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:to="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:title="label: DeferredTaxAssetsLiabilitiesGrossNoncurrent to label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent_2">Deferred Tax Assets Liabilities Gross Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:to="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent_2" xlink:title="label: DeferredTaxAssetsLiabilitiesGrossNoncurrent to label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent_3" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent_3">Deferred taxes, gross</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:to="label_DeferredTaxAssetsLiabilitiesGrossNoncurrent_3" xlink:title="label: DeferredTaxAssetsLiabilitiesGrossNoncurrent to label_DeferredTaxAssetsLiabilitiesGrossNoncurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_PeriodOfCumulativeLossPosition" xlink:label="PeriodOfCumulativeLossPosition" xlink:title="PeriodOfCumulativeLossPosition" />
    <link:label xlink:type="resource" xlink:label="label_PeriodOfCumulativeLossPosition" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PeriodOfCumulativeLossPosition" xml:lang="en-US" id="label_PeriodOfCumulativeLossPosition">Period of Cumulative Loss Position</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodOfCumulativeLossPosition" xlink:to="label_PeriodOfCumulativeLossPosition" xlink:title="label: PeriodOfCumulativeLossPosition to label_PeriodOfCumulativeLossPosition" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PeriodOfCumulativeLossPosition_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PeriodOfCumulativeLossPosition" xml:lang="en-US" id="label_PeriodOfCumulativeLossPosition_2">Period of cumulative loss position</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodOfCumulativeLossPosition" xlink:to="label_PeriodOfCumulativeLossPosition_2" xlink:title="label: PeriodOfCumulativeLossPosition to label_PeriodOfCumulativeLossPosition" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PeriodOfCumulativeLossPosition_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_PeriodOfCumulativeLossPosition" xml:lang="en-US" id="label_PeriodOfCumulativeLossPosition_3">Represents the number of consecutive years during which the reporting entity has been in a loss position for income tax reporting purposes.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodOfCumulativeLossPosition" xlink:to="label_PeriodOfCumulativeLossPosition_3" xlink:title="label: PeriodOfCumulativeLossPosition to label_PeriodOfCumulativeLossPosition" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsValuationAllowancePercentage" xlink:label="DeferredTaxAssetsValuationAllowancePercentage" xlink:title="DeferredTaxAssetsValuationAllowancePercentage" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsValuationAllowancePercentage" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsValuationAllowancePercentage" xml:lang="en-US" id="label_DeferredTaxAssetsValuationAllowancePercentage">Deferred Tax Assets Valuation Allowance Percentage</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsValuationAllowancePercentage" xlink:to="label_DeferredTaxAssetsValuationAllowancePercentage" xlink:title="label: DeferredTaxAssetsValuationAllowancePercentage to label_DeferredTaxAssetsValuationAllowancePercentage" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsValuationAllowancePercentage_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DeferredTaxAssetsValuationAllowancePercentage" xml:lang="en-US" id="label_DeferredTaxAssetsValuationAllowancePercentage_2">Percentage of valuation allowance</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsValuationAllowancePercentage" xlink:to="label_DeferredTaxAssetsValuationAllowancePercentage_2" xlink:title="label: DeferredTaxAssetsValuationAllowancePercentage to label_DeferredTaxAssetsValuationAllowancePercentage" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsValuationAllowancePercentage_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsValuationAllowancePercentage" xml:lang="en-US" id="label_DeferredTaxAssetsValuationAllowancePercentage_3">Represents the percentage of valuation allowance.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsValuationAllowancePercentage" xlink:to="label_DeferredTaxAssetsValuationAllowancePercentage_3" xlink:title="label: DeferredTaxAssetsValuationAllowancePercentage to label_DeferredTaxAssetsValuationAllowancePercentage" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_FederalAndStateMember" xlink:label="FederalAndStateMember" xlink:title="FederalAndStateMember" />
    <link:label xlink:type="resource" xlink:label="label_FederalAndStateMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FederalAndStateMember" xml:lang="en-US" id="label_FederalAndStateMember">Federal and State [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FederalAndStateMember" xlink:to="label_FederalAndStateMember" xlink:title="label: FederalAndStateMember to label_FederalAndStateMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_FederalAndStateMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_FederalAndStateMember" xml:lang="en-US" id="label_FederalAndStateMember_2">Federal and state</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FederalAndStateMember" xlink:to="label_FederalAndStateMember_2" xlink:title="label: FederalAndStateMember to label_FederalAndStateMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_FederalAndStateMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_FederalAndStateMember" xml:lang="en-US" id="label_FederalAndStateMember_3">Represents information pertaining to the designated tax department of the government of the United States of America and state or local government entitled to levy and collect income taxes from the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FederalAndStateMember" xlink:to="label_FederalAndStateMember_3" xlink:title="label: FederalAndStateMember to label_FederalAndStateMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:label="UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:title="UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" />
    <link:label xlink:type="resource" xlink:label="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xml:lang="en-US" id="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability">Unrecognized Tax Benefits Recorded as Other Long Term Liability</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:to="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:title="label: UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability to label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xml:lang="en-US" id="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_2">Recorded as other long-term liability</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:to="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_2" xlink:title="label: UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability to label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xml:lang="en-US" id="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_3">The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as other long-term liability, as of the balance sheet date.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:to="label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_3" xlink:title="label: UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability to label_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:label="UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:title="UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" />
    <link:label xlink:type="resource" xlink:label="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xml:lang="en-US" id="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance">Unrecognized Tax Benefits Recorded as Decrease in Deferred Tax Assets and Offsetting Valuation Allowance</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:to="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:title="label: UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance to label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xml:lang="en-US" id="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_2">Recorded as a decrease in deferred tax assets and offsetting valuation allowance</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:to="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_2" xlink:title="label: UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance to label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xml:lang="en-US" id="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_3">The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as a decrease in deferred tax assets and offsetting valuation allowance, as of the balance sheet date.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:to="label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_3" xlink:title="label: UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance to label_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SENMember" xlink:label="SENMember" xlink:title="SENMember" />
    <link:label xlink:type="resource" xlink:label="label_SENMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SENMember" xml:lang="en-US" id="label_SENMember">SEN [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SENMember" xlink:to="label_SENMember" xlink:title="label: SENMember to label_SENMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SENMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SENMember" xml:lang="en-US" id="label_SENMember_2">SEN</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SENMember" xlink:to="label_SENMember_2" xlink:title="label: SENMember to label_SENMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SENMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SENMember" xml:lang="en-US" id="label_SENMember_3">Represents information pertaining to SEN Corporation.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SENMember" xlink:to="label_SENMember_3" xlink:title="label: SENMember to label_SENMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SumitomoHeavyIndustriesLtdMember" xlink:label="SumitomoHeavyIndustriesLtdMember" xlink:title="SumitomoHeavyIndustriesLtdMember" />
    <link:label xlink:type="resource" xlink:label="label_SumitomoHeavyIndustriesLtdMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SumitomoHeavyIndustriesLtdMember" xml:lang="en-US" id="label_SumitomoHeavyIndustriesLtdMember">Sumitomo Heavy Industries Ltd [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SumitomoHeavyIndustriesLtdMember" xlink:to="label_SumitomoHeavyIndustriesLtdMember" xlink:title="label: SumitomoHeavyIndustriesLtdMember to label_SumitomoHeavyIndustriesLtdMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SumitomoHeavyIndustriesLtdMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SumitomoHeavyIndustriesLtdMember" xml:lang="en-US" id="label_SumitomoHeavyIndustriesLtdMember_2">SHI</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SumitomoHeavyIndustriesLtdMember" xlink:to="label_SumitomoHeavyIndustriesLtdMember_2" xlink:title="label: SumitomoHeavyIndustriesLtdMember to label_SumitomoHeavyIndustriesLtdMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SumitomoHeavyIndustriesLtdMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SumitomoHeavyIndustriesLtdMember" xml:lang="en-US" id="label_SumitomoHeavyIndustriesLtdMember_3">Represents information pertaining to Sumitomo Heavy Industries, Ltd.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SumitomoHeavyIndustriesLtdMember" xlink:to="label_SumitomoHeavyIndustriesLtdMember_3" xlink:title="label: SumitomoHeavyIndustriesLtdMember to label_SumitomoHeavyIndustriesLtdMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_LicenseAgreementTermOfSoleExclusiveLicenses" xlink:label="LicenseAgreementTermOfSoleExclusiveLicenses" xlink:title="LicenseAgreementTermOfSoleExclusiveLicenses" />
    <link:label xlink:type="resource" xlink:label="label_LicenseAgreementTermOfSoleExclusiveLicenses" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LicenseAgreementTermOfSoleExclusiveLicenses" xml:lang="en-US" id="label_LicenseAgreementTermOfSoleExclusiveLicenses">License Agreement Term of Sole Exclusive Licenses</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LicenseAgreementTermOfSoleExclusiveLicenses" xlink:to="label_LicenseAgreementTermOfSoleExclusiveLicenses" xlink:title="label: LicenseAgreementTermOfSoleExclusiveLicenses to label_LicenseAgreementTermOfSoleExclusiveLicenses" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LicenseAgreementTermOfSoleExclusiveLicenses_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LicenseAgreementTermOfSoleExclusiveLicenses" xml:lang="en-US" id="label_LicenseAgreementTermOfSoleExclusiveLicenses_2">Term of sole exclusive licenses</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LicenseAgreementTermOfSoleExclusiveLicenses" xlink:to="label_LicenseAgreementTermOfSoleExclusiveLicenses_2" xlink:title="label: LicenseAgreementTermOfSoleExclusiveLicenses to label_LicenseAgreementTermOfSoleExclusiveLicenses" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LicenseAgreementTermOfSoleExclusiveLicenses_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_LicenseAgreementTermOfSoleExclusiveLicenses" xml:lang="en-US" id="label_LicenseAgreementTermOfSoleExclusiveLicenses_3">Represents the term of sole exclusive licenses under the license agreement.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LicenseAgreementTermOfSoleExclusiveLicenses" xlink:to="label_LicenseAgreementTermOfSoleExclusiveLicenses_3" xlink:title="label: LicenseAgreementTermOfSoleExclusiveLicenses to label_LicenseAgreementTermOfSoleExclusiveLicenses" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SuretyBonds" xlink:label="SuretyBonds" xlink:title="SuretyBonds" />
    <link:label xlink:type="resource" xlink:label="label_SuretyBonds" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SuretyBonds" xml:lang="en-US" id="label_SuretyBonds">Surety bonds</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SuretyBonds" xlink:to="label_SuretyBonds" xlink:title="label: SuretyBonds to label_SuretyBonds" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SuretyBonds_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SuretyBonds" xml:lang="en-US" id="label_SuretyBonds_2">Represents the amount of surety bonds that are available for the future payments.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SuretyBonds" xlink:to="label_SuretyBonds_2" xlink:title="label: SuretyBonds to label_SuretyBonds" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SuretyBonds_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SuretyBonds" xml:lang="en-US" id="label_SuretyBonds_3">Surety Bonds</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SuretyBonds" xlink:to="label_SuretyBonds_3" xlink:title="label: SuretyBonds to label_SuretyBonds" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_AssetsManufacturedForInternalUseMember" xlink:label="AssetsManufacturedForInternalUseMember" xlink:title="AssetsManufacturedForInternalUseMember" />
    <link:label xlink:type="resource" xlink:label="label_AssetsManufacturedForInternalUseMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AssetsManufacturedForInternalUseMember" xml:lang="en-US" id="label_AssetsManufacturedForInternalUseMember">Assets Manufactured for Internal Use [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsManufacturedForInternalUseMember" xlink:to="label_AssetsManufacturedForInternalUseMember" xlink:title="label: AssetsManufacturedForInternalUseMember to label_AssetsManufacturedForInternalUseMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AssetsManufacturedForInternalUseMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AssetsManufacturedForInternalUseMember" xml:lang="en-US" id="label_AssetsManufacturedForInternalUseMember_2">Assets Manufactured for Internal Use</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsManufacturedForInternalUseMember" xlink:to="label_AssetsManufacturedForInternalUseMember_2" xlink:title="label: AssetsManufacturedForInternalUseMember to label_AssetsManufacturedForInternalUseMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AssetsManufacturedForInternalUseMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_AssetsManufacturedForInternalUseMember" xml:lang="en-US" id="label_AssetsManufacturedForInternalUseMember_3">Represents the details pertaining to assets manufactured for internal use and reported a part as other assets within the balance sheet.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsManufacturedForInternalUseMember" xlink:to="label_AssetsManufacturedForInternalUseMember_3" xlink:title="label: AssetsManufacturedForInternalUseMember to label_AssetsManufacturedForInternalUseMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_AllowanceForDoubtfulAccountsAndSalesReturnsMember" xlink:label="AllowanceForDoubtfulAccountsAndSalesReturnsMember" xlink:title="AllowanceForDoubtfulAccountsAndSalesReturnsMember" />
    <link:label xlink:type="resource" xlink:label="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" xml:lang="en-US" id="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember">Allowance for doubtful accounts and returns</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AllowanceForDoubtfulAccountsAndSalesReturnsMember" xlink:to="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" xlink:title="label: AllowanceForDoubtfulAccountsAndSalesReturnsMember to label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" xml:lang="en-US" id="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember_2">A valuation allowance for trade and other receivables due to the entity that are expected to be uncollectible and valuation allowance for the amount of products sold that the entity expects to be returned by the purchaser.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AllowanceForDoubtfulAccountsAndSalesReturnsMember" xlink:to="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember_2" xlink:title="label: AllowanceForDoubtfulAccountsAndSalesReturnsMember to label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" xml:lang="en-US" id="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember_3">Allowance for Doubtful Accounts and Sales Returns [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AllowanceForDoubtfulAccountsAndSalesReturnsMember" xlink:to="label_AllowanceForDoubtfulAccountsAndSalesReturnsMember_3" xlink:title="label: AllowanceForDoubtfulAccountsAndSalesReturnsMember to label_AllowanceForDoubtfulAccountsAndSalesReturnsMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_StockPlan2000Member" xlink:label="StockPlan2000Member" xlink:title="StockPlan2000Member" />
    <link:label xlink:type="resource" xlink:label="label_StockPlan2000Member" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockPlan2000Member" xml:lang="en-US" id="label_StockPlan2000Member">Stock Plan 2000 [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockPlan2000Member" xlink:to="label_StockPlan2000Member" xlink:title="label: StockPlan2000Member to label_StockPlan2000Member" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockPlan2000Member_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockPlan2000Member" xml:lang="en-US" id="label_StockPlan2000Member_2">2000 Stock Plan</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockPlan2000Member" xlink:to="label_StockPlan2000Member_2" xlink:title="label: StockPlan2000Member to label_StockPlan2000Member" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockPlan2000Member_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_StockPlan2000Member" xml:lang="en-US" id="label_StockPlan2000Member_3">Represents information pertaining to the 2000 Stock Plan of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockPlan2000Member" xlink:to="label_StockPlan2000Member_3" xlink:title="label: StockPlan2000Member to label_StockPlan2000Member" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountingChangesAndErrorCorrectionsTextBlock" xlink:label="AccountingChangesAndErrorCorrectionsTextBlock" xlink:title="AccountingChangesAndErrorCorrectionsTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_AccountingChangesAndErrorCorrectionsTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AccountingChangesAndErrorCorrectionsTextBlock" xml:lang="en-US" id="label_AccountingChangesAndErrorCorrectionsTextBlock">New Accounting Guidance Recently Adopted - Comprehensive Income</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountingChangesAndErrorCorrectionsTextBlock" xlink:to="label_AccountingChangesAndErrorCorrectionsTextBlock" xlink:title="label: AccountingChangesAndErrorCorrectionsTextBlock to label_AccountingChangesAndErrorCorrectionsTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AccountingChangesAndErrorCorrectionsTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AccountingChangesAndErrorCorrectionsTextBlock" xml:lang="en-US" id="label_AccountingChangesAndErrorCorrectionsTextBlock_2">Accounting Changes and Error Corrections [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountingChangesAndErrorCorrectionsTextBlock" xlink:to="label_AccountingChangesAndErrorCorrectionsTextBlock_2" xlink:title="label: AccountingChangesAndErrorCorrectionsTextBlock to label_AccountingChangesAndErrorCorrectionsTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:title="SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">Sharebased Compensation Arrangement by Sharebased Payment Award, Expiration Period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod to label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_2">Expiration period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_2" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod to label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_3">Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_3" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod to label_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_EmployeeStockPurchasePlanAbstract" xlink:label="EmployeeStockPurchasePlanAbstract" xlink:title="EmployeeStockPurchasePlanAbstract" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeStockPurchasePlanAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeStockPurchasePlanAbstract" xml:lang="en-US" id="label_EmployeeStockPurchasePlanAbstract">Employee Stock Purchase Plan [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeeStockPurchasePlanAbstract" xlink:to="label_EmployeeStockPurchasePlanAbstract" xlink:title="label: EmployeeStockPurchasePlanAbstract to label_EmployeeStockPurchasePlanAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeStockPurchasePlanAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeeStockPurchasePlanAbstract" xml:lang="en-US" id="label_EmployeeStockPurchasePlanAbstract_2">Employee Stock Purchase Plan</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeeStockPurchasePlanAbstract" xlink:to="label_EmployeeStockPurchasePlanAbstract_2" xlink:title="label: EmployeeStockPurchasePlanAbstract to label_EmployeeStockPurchasePlanAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary">Share Based Compensation, Arrangement by Share Based Payment, Award Payroll Deductions as Percentage of Employees Salary</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_2">Payroll deductions as a percentage of employee's salary</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_3">Represents the amount of payroll deductions, expressed as a percentage of employees' salary, subject to certain caps set forth in the employee stock purchase plan, through which purchases are made.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_3" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized">Share Based Compensation, Arrangement by Share Based Payment Award Offering Period Over which Compensation Expense is Amortized</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_2">Offering period over which compensation expense is amortized</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_3">Represents the offering period over which compensation expense is amortized.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_3" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract">Share Based Compensation, Arrangement by Share Based Payment, Award, Options Aggregate Intrinsic Value [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_2">Aggregate Intrinsic Value</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract">Share Based Compensation, Arrangement by Share Based Payment Award Options, Weighted Average Remaining Contractual Term [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_2">Weighted Average Remaining Contractual Term</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate">Share Based Compensation, Arrangement by Share Based Payment, Award Fair Value Assumptions Forfeiture Rate</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_2">Forfeiture rate (as a percent)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_3">Represents the estimated annual forfeiture rate of the unvested portion of share-based compensation awards, based on historical analysis.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_3" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_EmployeesMember" xlink:label="EmployeesMember" xlink:title="EmployeesMember" />
    <link:label xlink:type="resource" xlink:label="label_EmployeesMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeesMember" xml:lang="en-US" id="label_EmployeesMember">Employees [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeesMember" xlink:to="label_EmployeesMember" xlink:title="label: EmployeesMember to label_EmployeesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EmployeesMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeesMember" xml:lang="en-US" id="label_EmployeesMember_2">Employees</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeesMember" xlink:to="label_EmployeesMember_2" xlink:title="label: EmployeesMember to label_EmployeesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EmployeesMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_EmployeesMember" xml:lang="en-US" id="label_EmployeesMember_3">Represents the employees of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeesMember" xlink:to="label_EmployeesMember_3" xlink:title="label: EmployeesMember to label_EmployeesMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_NonEmployeeMemberOfBoardOfDirectorMember" xlink:label="NonEmployeeMemberOfBoardOfDirectorMember" xlink:title="NonEmployeeMemberOfBoardOfDirectorMember" />
    <link:label xlink:type="resource" xlink:label="label_NonEmployeeMemberOfBoardOfDirectorMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_NonEmployeeMemberOfBoardOfDirectorMember" xml:lang="en-US" id="label_NonEmployeeMemberOfBoardOfDirectorMember">Board of Directors (nonemployees)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NonEmployeeMemberOfBoardOfDirectorMember" xlink:to="label_NonEmployeeMemberOfBoardOfDirectorMember" xlink:title="label: NonEmployeeMemberOfBoardOfDirectorMember to label_NonEmployeeMemberOfBoardOfDirectorMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_NonEmployeeMemberOfBoardOfDirectorMember_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_NonEmployeeMemberOfBoardOfDirectorMember" xml:lang="en-US" id="label_NonEmployeeMemberOfBoardOfDirectorMember_2">Represents the non-employee members of the entity's Board of Directors.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NonEmployeeMemberOfBoardOfDirectorMember" xlink:to="label_NonEmployeeMemberOfBoardOfDirectorMember_2" xlink:title="label: NonEmployeeMemberOfBoardOfDirectorMember to label_NonEmployeeMemberOfBoardOfDirectorMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_NonEmployeeMemberOfBoardOfDirectorMember_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NonEmployeeMemberOfBoardOfDirectorMember" xml:lang="en-US" id="label_NonEmployeeMemberOfBoardOfDirectorMember_3">Non Employee Member of Board of Director [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NonEmployeeMemberOfBoardOfDirectorMember" xlink:to="label_NonEmployeeMemberOfBoardOfDirectorMember_3" xlink:title="label: NonEmployeeMemberOfBoardOfDirectorMember to label_NonEmployeeMemberOfBoardOfDirectorMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_RegularEmployeesMember" xlink:label="RegularEmployeesMember" xlink:title="RegularEmployeesMember" />
    <link:label xlink:type="resource" xlink:label="label_RegularEmployeesMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RegularEmployeesMember" xml:lang="en-US" id="label_RegularEmployeesMember">Regular Employees [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RegularEmployeesMember" xlink:to="label_RegularEmployeesMember" xlink:title="label: RegularEmployeesMember to label_RegularEmployeesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RegularEmployeesMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RegularEmployeesMember" xml:lang="en-US" id="label_RegularEmployeesMember_2">Regular employees</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RegularEmployeesMember" xlink:to="label_RegularEmployeesMember_2" xlink:title="label: RegularEmployeesMember to label_RegularEmployeesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RegularEmployeesMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_RegularEmployeesMember" xml:lang="en-US" id="label_RegularEmployeesMember_3">Represents the regular employees of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RegularEmployeesMember" xlink:to="label_RegularEmployeesMember_3" xlink:title="label: RegularEmployeesMember to label_RegularEmployeesMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ResearchDevelopmentAndOtherTaxCreditMember" xlink:label="ResearchDevelopmentAndOtherTaxCreditMember" xlink:title="ResearchDevelopmentAndOtherTaxCreditMember" />
    <link:label xlink:type="resource" xlink:label="label_ResearchDevelopmentAndOtherTaxCreditMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ResearchDevelopmentAndOtherTaxCreditMember" xml:lang="en-US" id="label_ResearchDevelopmentAndOtherTaxCreditMember">Research Development and Other Tax Credit [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ResearchDevelopmentAndOtherTaxCreditMember" xlink:to="label_ResearchDevelopmentAndOtherTaxCreditMember" xlink:title="label: ResearchDevelopmentAndOtherTaxCreditMember to label_ResearchDevelopmentAndOtherTaxCreditMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ResearchDevelopmentAndOtherTaxCreditMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ResearchDevelopmentAndOtherTaxCreditMember" xml:lang="en-US" id="label_ResearchDevelopmentAndOtherTaxCreditMember_2">Research and development and other tax credit carryforwards</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ResearchDevelopmentAndOtherTaxCreditMember" xlink:to="label_ResearchDevelopmentAndOtherTaxCreditMember_2" xlink:title="label: ResearchDevelopmentAndOtherTaxCreditMember to label_ResearchDevelopmentAndOtherTaxCreditMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ResearchDevelopmentAndOtherTaxCreditMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ResearchDevelopmentAndOtherTaxCreditMember" xml:lang="en-US" id="label_ResearchDevelopmentAndOtherTaxCreditMember_3">Represents research and development and other tax credit carryforwards arising from certain qualifying expenditures.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ResearchDevelopmentAndOtherTaxCreditMember" xlink:to="label_ResearchDevelopmentAndOtherTaxCreditMember_3" xlink:title="label: ResearchDevelopmentAndOtherTaxCreditMember to label_ResearchDevelopmentAndOtherTaxCreditMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xlink:label="MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xlink:title="MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" />
    <link:label xlink:type="resource" xlink:label="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xml:lang="en-US" id="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts">Maximum Deferral Period from Shipment for Recognition of Systems Revenue and Related Costs</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xlink:to="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xlink:title="label: MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts to label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xml:lang="en-US" id="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts_2">Maximum deferral period from shipment for recognition of systems revenue and related costs</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xlink:to="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts_2" xlink:title="label: MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts to label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xml:lang="en-US" id="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts_3">Represents the maximum deferral period from shipment for recognition of systems revenue and related costs.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" xlink:to="label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts_3" xlink:title="label: MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts to label_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xlink:label="DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xlink:title="DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" />
    <link:label xlink:type="resource" xlink:label="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xml:lang="en-US" id="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent">Defined Contribution Plan, Maximum Annual Contribution by Employee Percent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xlink:to="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xlink:title="label: DefinedContributionPlanMaximumAnnualContributionByEmployeePercent to label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xml:lang="en-US" id="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent_2">Maximum percentage of employee gross pay, by the terms of the plan, that the employee may contribute to a defined contribution plan.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xlink:to="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent_2" xlink:title="label: DefinedContributionPlanMaximumAnnualContributionByEmployeePercent to label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xml:lang="en-US" id="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent_3">Maximum contribution per employee under the Axcelis Long-Term Investment Plan (as a percent)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" xlink:to="label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent_3" xlink:title="label: DefinedContributionPlanMaximumAnnualContributionByEmployeePercent to label_DefinedContributionPlanMaximumAnnualContributionByEmployeePercent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" xlink:label="DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" xlink:title="DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" xml:lang="en-US" id="label_DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract">Gain on Sale of Dry Strip Assets and Intellectual Property</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" xlink:to="label_DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" xlink:title="label: DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract to label_DisposalOfTangibleAndIntangibleAssetsDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xlink:label="DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xlink:title="DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xml:lang="en-US" id="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock">Disposal of Tangible and Intangible Assets Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xlink:to="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xlink:title="label: DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock to label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xml:lang="en-US" id="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock_2">Gain on Sale of Dry Strip Assets and Intellectual Property</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xlink:to="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock_2" xlink:title="label: DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock to label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xml:lang="en-US" id="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock_3">The entire disclosure for assets that are sold under contractual agreements. This would include both tangible and intangible assets.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" xlink:to="label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock_3" xlink:title="label: DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock to label_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DispositionOfAssetsSalePrice" xlink:label="DispositionOfAssetsSalePrice" xlink:title="DispositionOfAssetsSalePrice" />
    <link:label xlink:type="resource" xlink:label="label_DispositionOfAssetsSalePrice" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DispositionOfAssetsSalePrice" xml:lang="en-US" id="label_DispositionOfAssetsSalePrice">Disposition of Assets, Sale Price</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DispositionOfAssetsSalePrice" xlink:to="label_DispositionOfAssetsSalePrice" xlink:title="label: DispositionOfAssetsSalePrice to label_DispositionOfAssetsSalePrice" />
    <link:label xlink:type="resource" xlink:label="label_DispositionOfAssetsSalePrice_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DispositionOfAssetsSalePrice" xml:lang="en-US" id="label_DispositionOfAssetsSalePrice_2">Purchase price</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DispositionOfAssetsSalePrice" xlink:to="label_DispositionOfAssetsSalePrice_2" xlink:title="label: DispositionOfAssetsSalePrice to label_DispositionOfAssetsSalePrice" />
    <link:label xlink:type="resource" xlink:label="label_DispositionOfAssetsSalePrice_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DispositionOfAssetsSalePrice" xml:lang="en-US" id="label_DispositionOfAssetsSalePrice_3">Represents the sale price, including contingent consideration, of the assets sold.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DispositionOfAssetsSalePrice" xlink:to="label_DispositionOfAssetsSalePrice_3" xlink:title="label: DispositionOfAssetsSalePrice to label_DispositionOfAssetsSalePrice" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DispositionOfAssetsContingentConsideration" xlink:label="DispositionOfAssetsContingentConsideration" xlink:title="DispositionOfAssetsContingentConsideration" />
    <link:label xlink:type="resource" xlink:label="label_DispositionOfAssetsContingentConsideration" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DispositionOfAssetsContingentConsideration" xml:lang="en-US" id="label_DispositionOfAssetsContingentConsideration">Disposition of Assets, Contingent Consideration</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DispositionOfAssetsContingentConsideration" xlink:to="label_DispositionOfAssetsContingentConsideration" xlink:title="label: DispositionOfAssetsContingentConsideration to label_DispositionOfAssetsContingentConsideration" />
    <link:label xlink:type="resource" xlink:label="label_DispositionOfAssetsContingentConsideration_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DispositionOfAssetsContingentConsideration" xml:lang="en-US" id="label_DispositionOfAssetsContingentConsideration_2">Contingent purchase price</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DispositionOfAssetsContingentConsideration" xlink:to="label_DispositionOfAssetsContingentConsideration_2" xlink:title="label: DispositionOfAssetsContingentConsideration to label_DispositionOfAssetsContingentConsideration" />
    <link:label xlink:type="resource" xlink:label="label_DispositionOfAssetsContingentConsideration_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DispositionOfAssetsContingentConsideration" xml:lang="en-US" id="label_DispositionOfAssetsContingentConsideration_3">Represents the contingent consideration relating to the sale of assets.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DispositionOfAssetsContingentConsideration" xlink:to="label_DispositionOfAssetsContingentConsideration_3" xlink:title="label: DispositionOfAssetsContingentConsideration to label_DispositionOfAssetsContingentConsideration" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_OffsetAgainstProceedsFromSaleOfAssets" xlink:label="OffsetAgainstProceedsFromSaleOfAssets" xlink:title="OffsetAgainstProceedsFromSaleOfAssets" />
    <link:label xlink:type="resource" xlink:label="label_OffsetAgainstProceedsFromSaleOfAssets" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OffsetAgainstProceedsFromSaleOfAssets" xml:lang="en-US" id="label_OffsetAgainstProceedsFromSaleOfAssets">Offset Against Proceeds from Sale of Assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OffsetAgainstProceedsFromSaleOfAssets" xlink:to="label_OffsetAgainstProceedsFromSaleOfAssets" xlink:title="label: OffsetAgainstProceedsFromSaleOfAssets to label_OffsetAgainstProceedsFromSaleOfAssets" />
    <link:label xlink:type="resource" xlink:label="label_OffsetAgainstProceedsFromSaleOfAssets_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OffsetAgainstProceedsFromSaleOfAssets" xml:lang="en-US" id="label_OffsetAgainstProceedsFromSaleOfAssets_2">Offset against proceeds, product and material costs relating to assets sold</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OffsetAgainstProceedsFromSaleOfAssets" xlink:to="label_OffsetAgainstProceedsFromSaleOfAssets_2" xlink:title="label: OffsetAgainstProceedsFromSaleOfAssets to label_OffsetAgainstProceedsFromSaleOfAssets" />
    <link:label xlink:type="resource" xlink:label="label_OffsetAgainstProceedsFromSaleOfAssets_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_OffsetAgainstProceedsFromSaleOfAssets" xml:lang="en-US" id="label_OffsetAgainstProceedsFromSaleOfAssets_3">Offset against proceeds when determining the gain on the sale of assets.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OffsetAgainstProceedsFromSaleOfAssets" xlink:to="label_OffsetAgainstProceedsFromSaleOfAssets_3" xlink:title="label: OffsetAgainstProceedsFromSaleOfAssets to label_OffsetAgainstProceedsFromSaleOfAssets" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="AccountingPoliciesAbstract" xlink:title="AccountingPoliciesAbstract" />
    <link:label xlink:type="resource" xlink:label="label_AccountingPoliciesAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AccountingPoliciesAbstract" xml:lang="en-US" id="label_AccountingPoliciesAbstract">Summary of Significant Accounting Policies</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountingPoliciesAbstract" xlink:to="label_AccountingPoliciesAbstract" xlink:title="label: AccountingPoliciesAbstract to label_AccountingPoliciesAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xlink:label="ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xlink:title="ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xml:lang="en-US" id="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock">Schedule of Property Plant and Equipment Components [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xlink:to="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xlink:title="label: ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock to label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xml:lang="en-US" id="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock_2">Schedule of components of property, plant and equipment</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xlink:to="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock_2" xlink:title="label: ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock to label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xml:lang="en-US" id="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock_3">Tabular disclosure of the components of property, plant and equipment.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" xlink:to="label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock_3" xlink:title="label: ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock to label_ScheduleOfPropertyPlantAndEquipmentComponentsTableTextBlock" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xlink:label="SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xlink:title="SizeOfDryStripWaferProcessingEquipmentCessationOfSales" />
    <link:label xlink:type="resource" xlink:label="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xml:lang="en-US" id="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales">Represents the size of dry strip wafer processing equipment that the entity will stop selling.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xlink:to="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xlink:title="label: SizeOfDryStripWaferProcessingEquipmentCessationOfSales to label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" />
    <link:label xlink:type="resource" xlink:label="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xml:lang="en-US" id="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales_2">Size of Dry Strip Wafer Processing Equipment Cessation of Sales</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xlink:to="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales_2" xlink:title="label: SizeOfDryStripWaferProcessingEquipmentCessationOfSales to label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" />
    <link:label xlink:type="resource" xlink:label="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xml:lang="en-US" id="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales_3">Size of dry strip wafer processing equipment (in millimeters)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SizeOfDryStripWaferProcessingEquipmentCessationOfSales" xlink:to="label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales_3" xlink:title="label: SizeOfDryStripWaferProcessingEquipmentCessationOfSales to label_SizeOfDryStripWaferProcessingEquipmentCessationOfSales" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="EntityWellKnownSeasonedIssuer" xlink:title="EntityWellKnownSeasonedIssuer" />
    <link:label xlink:type="resource" xlink:label="label_EntityWellKnownSeasonedIssuer" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityWellKnownSeasonedIssuer" xml:lang="en-US" id="label_EntityWellKnownSeasonedIssuer">Entity Well-known Seasoned Issuer</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityWellKnownSeasonedIssuer" xlink:to="label_EntityWellKnownSeasonedIssuer" xlink:title="label: EntityWellKnownSeasonedIssuer to label_EntityWellKnownSeasonedIssuer" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SecondLargestCustomerMember" xlink:label="SecondLargestCustomerMember" xlink:title="SecondLargestCustomerMember" />
    <link:label xlink:type="resource" xlink:label="label_SecondLargestCustomerMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SecondLargestCustomerMember" xml:lang="en-US" id="label_SecondLargestCustomerMember">Second Largest Customer [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SecondLargestCustomerMember" xlink:to="label_SecondLargestCustomerMember" xlink:title="label: SecondLargestCustomerMember to label_SecondLargestCustomerMember" />
    <link:label xlink:type="resource" xlink:label="label_SecondLargestCustomerMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SecondLargestCustomerMember" xml:lang="en-US" id="label_SecondLargestCustomerMember_2">Second customer</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SecondLargestCustomerMember" xlink:to="label_SecondLargestCustomerMember_2" xlink:title="label: SecondLargestCustomerMember to label_SecondLargestCustomerMember" />
    <link:label xlink:type="resource" xlink:label="label_SecondLargestCustomerMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SecondLargestCustomerMember" xml:lang="en-US" id="label_SecondLargestCustomerMember_3">Represents one customer on whom the entity significantly relies giving rise to the second largest single concentration risk.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SecondLargestCustomerMember" xlink:to="label_SecondLargestCustomerMember_3" xlink:title="label: SecondLargestCustomerMember to label_SecondLargestCustomerMember" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityVoluntaryFilers" xlink:label="EntityVoluntaryFilers" xlink:title="EntityVoluntaryFilers" />
    <link:label xlink:type="resource" xlink:label="label_EntityVoluntaryFilers" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityVoluntaryFilers" xml:lang="en-US" id="label_EntityVoluntaryFilers">Entity Voluntary Filers</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityVoluntaryFilers" xlink:to="label_EntityVoluntaryFilers" xlink:title="label: EntityVoluntaryFilers to label_EntityVoluntaryFilers" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityCurrentReportingStatus" xlink:label="EntityCurrentReportingStatus" xlink:title="EntityCurrentReportingStatus" />
    <link:label xlink:type="resource" xlink:label="label_EntityCurrentReportingStatus" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityCurrentReportingStatus" xml:lang="en-US" id="label_EntityCurrentReportingStatus">Entity Current Reporting Status</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityCurrentReportingStatus" xlink:to="label_EntityCurrentReportingStatus" xlink:title="label: EntityCurrentReportingStatus to label_EntityCurrentReportingStatus" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_EquipmentProductionAndSellingPeriodAxis" xlink:label="EquipmentProductionAndSellingPeriodAxis" xlink:title="EquipmentProductionAndSellingPeriodAxis" />
    <link:label xlink:type="resource" xlink:label="label_EquipmentProductionAndSellingPeriodAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquipmentProductionAndSellingPeriodAxis" xml:lang="en-US" id="label_EquipmentProductionAndSellingPeriodAxis">Equipment Production and Selling Period [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquipmentProductionAndSellingPeriodAxis" xlink:to="label_EquipmentProductionAndSellingPeriodAxis" xlink:title="label: EquipmentProductionAndSellingPeriodAxis to label_EquipmentProductionAndSellingPeriodAxis" />
    <link:label xlink:type="resource" xlink:label="label_EquipmentProductionAndSellingPeriodAxis_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_EquipmentProductionAndSellingPeriodAxis" xml:lang="en-US" id="label_EquipmentProductionAndSellingPeriodAxis_2">Information by period for making and selling equipment.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquipmentProductionAndSellingPeriodAxis" xlink:to="label_EquipmentProductionAndSellingPeriodAxis_2" xlink:title="label: EquipmentProductionAndSellingPeriodAxis to label_EquipmentProductionAndSellingPeriodAxis" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityFilerCategory" xlink:label="EntityFilerCategory" xlink:title="EntityFilerCategory" />
    <link:label xlink:type="resource" xlink:label="label_EntityFilerCategory" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityFilerCategory" xml:lang="en-US" id="label_EntityFilerCategory">Entity Filer Category</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityFilerCategory" xlink:to="label_EntityFilerCategory" xlink:title="label: EntityFilerCategory to label_EntityFilerCategory" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_EquipmentProductionAndSellingPeriodDomain" xlink:label="EquipmentProductionAndSellingPeriodDomain" xlink:title="EquipmentProductionAndSellingPeriodDomain" />
    <link:label xlink:type="resource" xlink:label="label_EquipmentProductionAndSellingPeriodDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquipmentProductionAndSellingPeriodDomain" xml:lang="en-US" id="label_EquipmentProductionAndSellingPeriodDomain">Equipment Production and Selling Period [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquipmentProductionAndSellingPeriodDomain" xlink:to="label_EquipmentProductionAndSellingPeriodDomain" xlink:title="label: EquipmentProductionAndSellingPeriodDomain to label_EquipmentProductionAndSellingPeriodDomain" />
    <link:label xlink:type="resource" xlink:label="label_EquipmentProductionAndSellingPeriodDomain_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_EquipmentProductionAndSellingPeriodDomain" xml:lang="en-US" id="label_EquipmentProductionAndSellingPeriodDomain_2">Period of making and selling equipment.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquipmentProductionAndSellingPeriodDomain" xlink:to="label_EquipmentProductionAndSellingPeriodDomain_2" xlink:title="label: EquipmentProductionAndSellingPeriodDomain to label_EquipmentProductionAndSellingPeriodDomain" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityPublicFloat" xlink:label="EntityPublicFloat" xlink:title="EntityPublicFloat" />
    <link:label xlink:type="resource" xlink:label="label_EntityPublicFloat" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityPublicFloat" xml:lang="en-US" id="label_EntityPublicFloat">Entity Public Float</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityPublicFloat" xlink:to="label_EntityPublicFloat" xlink:title="label: EntityPublicFloat to label_EntityPublicFloat" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_PeriodThroughSeptember2013Member" xlink:label="PeriodThroughSeptember2013Member" xlink:title="PeriodThroughSeptember2013Member" />
    <link:label xlink:type="resource" xlink:label="label_PeriodThroughSeptember2013Member" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PeriodThroughSeptember2013Member" xml:lang="en-US" id="label_PeriodThroughSeptember2013Member">Period Through September 2013 [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodThroughSeptember2013Member" xlink:to="label_PeriodThroughSeptember2013Member" xlink:title="label: PeriodThroughSeptember2013Member to label_PeriodThroughSeptember2013Member" />
    <link:label xlink:type="resource" xlink:label="label_PeriodThroughSeptember2013Member_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PeriodThroughSeptember2013Member" xml:lang="en-US" id="label_PeriodThroughSeptember2013Member_2">Period through September 2013</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodThroughSeptember2013Member" xlink:to="label_PeriodThroughSeptember2013Member_2" xlink:title="label: PeriodThroughSeptember2013Member to label_PeriodThroughSeptember2013Member" />
    <link:label xlink:type="resource" xlink:label="label_PeriodThroughSeptember2013Member_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_PeriodThroughSeptember2013Member" xml:lang="en-US" id="label_PeriodThroughSeptember2013Member_3">Represents the period through September 2013.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodThroughSeptember2013Member" xlink:to="label_PeriodThroughSeptember2013Member_3" xlink:title="label: PeriodThroughSeptember2013Member to label_PeriodThroughSeptember2013Member" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityRegistrantName" xlink:label="EntityRegistrantName" xlink:title="EntityRegistrantName" />
    <link:label xlink:type="resource" xlink:label="label_EntityRegistrantName" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityRegistrantName" xml:lang="en-US" id="label_EntityRegistrantName">Entity Registrant Name</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityRegistrantName" xlink:to="label_EntityRegistrantName" xlink:title="label: EntityRegistrantName to label_EntityRegistrantName" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_PeriodThroughDecember2015Member" xlink:label="PeriodThroughDecember2015Member" xlink:title="PeriodThroughDecember2015Member" />
    <link:label xlink:type="resource" xlink:label="label_PeriodThroughDecember2015Member" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PeriodThroughDecember2015Member" xml:lang="en-US" id="label_PeriodThroughDecember2015Member">Period Through December 2015 [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodThroughDecember2015Member" xlink:to="label_PeriodThroughDecember2015Member" xlink:title="label: PeriodThroughDecember2015Member to label_PeriodThroughDecember2015Member" />
    <link:label xlink:type="resource" xlink:label="label_PeriodThroughDecember2015Member_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PeriodThroughDecember2015Member" xml:lang="en-US" id="label_PeriodThroughDecember2015Member_2">Period through December 2015</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodThroughDecember2015Member" xlink:to="label_PeriodThroughDecember2015Member_2" xlink:title="label: PeriodThroughDecember2015Member to label_PeriodThroughDecember2015Member" />
    <link:label xlink:type="resource" xlink:label="label_PeriodThroughDecember2015Member_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_PeriodThroughDecember2015Member" xml:lang="en-US" id="label_PeriodThroughDecember2015Member_3">Represents the period through December 2015.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PeriodThroughDecember2015Member" xlink:to="label_PeriodThroughDecember2015Member_3" xlink:title="label: PeriodThroughDecember2015Member to label_PeriodThroughDecember2015Member" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="EntityCentralIndexKey" xlink:title="EntityCentralIndexKey" />
    <link:label xlink:type="resource" xlink:label="label_EntityCentralIndexKey" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityCentralIndexKey" xml:lang="en-US" id="label_EntityCentralIndexKey">Entity Central Index Key</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityCentralIndexKey" xlink:to="label_EntityCentralIndexKey" xlink:title="label: EntityCentralIndexKey to label_EntityCentralIndexKey" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xlink:label="SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xlink:title="SizeOfDryStripWaferProcessingEquipmentLicenseReceived" />
    <link:label xlink:type="resource" xlink:label="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xml:lang="en-US" id="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived">Size of Dry Strip Wafer Processing Equipment License Received</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xlink:to="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xlink:title="label: SizeOfDryStripWaferProcessingEquipmentLicenseReceived to label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" />
    <link:label xlink:type="resource" xlink:label="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xml:lang="en-US" id="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived_2">Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xlink:to="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived_2" xlink:title="label: SizeOfDryStripWaferProcessingEquipmentLicenseReceived to label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" />
    <link:label xlink:type="resource" xlink:label="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xml:lang="en-US" id="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived_3">Represents the size of dry strip wafer processing equipment for which the entity was granted a license to make and sell.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SizeOfDryStripWaferProcessingEquipmentLicenseReceived" xlink:to="label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived_3" xlink:title="label: SizeOfDryStripWaferProcessingEquipmentLicenseReceived to label_SizeOfDryStripWaferProcessingEquipmentLicenseReceived" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="EntityCommonStockSharesOutstanding" xlink:title="EntityCommonStockSharesOutstanding" />
    <link:label xlink:type="resource" xlink:label="label_EntityCommonStockSharesOutstanding" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EntityCommonStockSharesOutstanding" xml:lang="en-US" id="label_EntityCommonStockSharesOutstanding">Entity Common Stock, Shares Outstanding</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EntityCommonStockSharesOutstanding" xlink:to="label_EntityCommonStockSharesOutstanding" xlink:title="label: EntityCommonStockSharesOutstanding to label_EntityCommonStockSharesOutstanding" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="DocumentFiscalYearFocus" xlink:title="DocumentFiscalYearFocus" />
    <link:label xlink:type="resource" xlink:label="label_DocumentFiscalYearFocus" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DocumentFiscalYearFocus" xml:lang="en-US" id="label_DocumentFiscalYearFocus">Document Fiscal Year Focus</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DocumentFiscalYearFocus" xlink:to="label_DocumentFiscalYearFocus" xlink:title="label: DocumentFiscalYearFocus to label_DocumentFiscalYearFocus" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="DocumentFiscalPeriodFocus" xlink:title="DocumentFiscalPeriodFocus" />
    <link:label xlink:type="resource" xlink:label="label_DocumentFiscalPeriodFocus" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DocumentFiscalPeriodFocus" xml:lang="en-US" id="label_DocumentFiscalPeriodFocus">Document Fiscal Period Focus</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DocumentFiscalPeriodFocus" xlink:to="label_DocumentFiscalPeriodFocus" xlink:title="label: DocumentFiscalPeriodFocus to label_DocumentFiscalPeriodFocus" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_LegalEntityAxis" xlink:label="LegalEntityAxis" xlink:title="LegalEntityAxis" />
    <link:label xlink:type="resource" xlink:label="label_LegalEntityAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LegalEntityAxis" xml:lang="en-US" id="label_LegalEntityAxis">Legal Entity [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LegalEntityAxis" xlink:to="label_LegalEntityAxis" xlink:title="label: LegalEntityAxis to label_LegalEntityAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.sec.gov/dei/2012/dei-2012-01-31.xsd#dei_DocumentType" xlink:label="DocumentType" xlink:title="DocumentType" />
    <link:label xlink:type="resource" xlink:label="label_DocumentType" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DocumentType" xml:lang="en-US" id="label_DocumentType">Document Type</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DocumentType" xlink:to="label_DocumentType" xlink:title="label: DocumentType to label_DocumentType" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="AccountsReceivableNetCurrent" xlink:title="AccountsReceivableNetCurrent" />
    <link:label xlink:type="resource" xlink:label="label_AccountsReceivableNetCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AccountsReceivableNetCurrent" xml:lang="en-US" id="label_AccountsReceivableNetCurrent">Accounts Receivable, Net, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountsReceivableNetCurrent" xlink:to="label_AccountsReceivableNetCurrent" xlink:title="label: AccountsReceivableNetCurrent to label_AccountsReceivableNetCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AccountsReceivableNetCurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AccountsReceivableNetCurrent" xml:lang="en-US" id="label_AccountsReceivableNetCurrent_2">Accounts receivable, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountsReceivableNetCurrent" xlink:to="label_AccountsReceivableNetCurrent_2" xlink:title="label: AccountsReceivableNetCurrent to label_AccountsReceivableNetCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AccountsReceivableNetCurrent_3" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_AccountsReceivableNetCurrent" xml:lang="en-US" id="label_AccountsReceivableNetCurrent_3">Accounts receivable, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountsReceivableNetCurrent" xlink:to="label_AccountsReceivableNetCurrent_3" xlink:title="label: AccountsReceivableNetCurrent to label_AccountsReceivableNetCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccountsReceivableGrossCurrent" xlink:label="AccountsReceivableGrossCurrent" xlink:title="AccountsReceivableGrossCurrent" />
    <link:label xlink:type="resource" xlink:label="label_AccountsReceivableGrossCurrent" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AccountsReceivableGrossCurrent" xml:lang="en-US" id="label_AccountsReceivableGrossCurrent">Trade receivables</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountsReceivableGrossCurrent" xlink:to="label_AccountsReceivableGrossCurrent" xlink:title="label: AccountsReceivableGrossCurrent to label_AccountsReceivableGrossCurrent" use="optional" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccountsReceivableGrossCurrent" xlink:to="label_AccountsReceivableGrossCurrent_2" xlink:title="label: AccountsReceivableGrossCurrent to label_AccountsReceivableGrossCurrent" use="optional" />
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    <link:label xlink:type="resource" xlink:label="label_AccruedIncomeTaxesCurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AccruedIncomeTaxesCurrent" xml:lang="en-US" id="label_AccruedIncomeTaxesCurrent_2">Income taxes</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccruedIncomeTaxesCurrent" xlink:to="label_AccruedIncomeTaxesCurrent_2" xlink:title="label: AccruedIncomeTaxesCurrent to label_AccruedIncomeTaxesCurrent" use="optional" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="AccumulatedOtherComprehensiveIncomeMember" xlink:title="AccumulatedOtherComprehensiveIncomeMember" />
    <link:label xlink:type="resource" xlink:label="label_AccumulatedOtherComprehensiveIncomeMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AccumulatedOtherComprehensiveIncomeMember" xml:lang="en-US" id="label_AccumulatedOtherComprehensiveIncomeMember">Accumulated Other Comprehensive Income (Loss)</link:label>
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    <link:label xlink:type="resource" xlink:label="label_AccumulatedOtherComprehensiveIncomeMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AccumulatedOtherComprehensiveIncomeMember" xml:lang="en-US" id="label_AccumulatedOtherComprehensiveIncomeMember_2">Accumulated Other Comprehensive Income (Loss) [Member]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossDefinedBenefitPensionAndOtherPostretirementPlansNetOfTax" xlink:label="AccumulatedOtherComprehensiveIncomeLossDefinedBenefitPensionAndOtherPostretirementPlansNetOfTax" xlink:title="AccumulatedOtherComprehensiveIncomeLossDefinedBenefitPensionAndOtherPostretirementPlansNetOfTax" />
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    <link:label xlink:type="resource" xlink:label="label_AccumulatedOtherComprehensiveIncomeLossDefinedBenefitPensionAndOtherPostretirementPlansNetOfTax_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AccumulatedOtherComprehensiveIncomeLossDefinedBenefitPensionAndOtherPostretirementPlansNetOfTax" xml:lang="en-US" id="label_AccumulatedOtherComprehensiveIncomeLossDefinedBenefitPensionAndOtherPostretirementPlansNetOfTax_2">Accumulated Other Comprehensive Income (Loss), Pension and Other Postretirement Benefit Plans, Net of Tax</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:label="AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:title="AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" />
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    <link:label xlink:type="resource" xlink:label="label_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xml:lang="en-US" id="label_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_2">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</link:label>
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AllocatedShareBasedCompensationExpense" xlink:to="label_AllocatedShareBasedCompensationExpense_2" xlink:title="label: AllocatedShareBasedCompensationExpense to label_AllocatedShareBasedCompensationExpense" use="optional" />
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    <link:label xlink:type="resource" xlink:label="label_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_AllowanceForDoubtfulAccountsReceivableCurrent" xml:lang="en-US" id="label_AllowanceForDoubtfulAccountsReceivableCurrent">Allowance for doubtful accounts</link:label>
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    <link:label xlink:type="resource" xlink:label="label_AllowanceForDoubtfulAccountsReceivableCurrent_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AllowanceForDoubtfulAccountsReceivableCurrent" xml:lang="en-US" id="label_AllowanceForDoubtfulAccountsReceivableCurrent_2">Allowance for Doubtful Accounts Receivable, Current</link:label>
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    <link:label xlink:type="resource" xlink:label="label_AmortizationOfDebtDiscountPremium_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AmortizationOfDebtDiscountPremium" xml:lang="en-US" id="label_AmortizationOfDebtDiscountPremium_2">Accretion of premium on convertible debt</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:title="AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" />
    <link:label xlink:type="resource" xlink:label="label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xml:lang="en-US" id="label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">Anti-dilutive shares excluded from calculation of net loss per share</link:label>
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    <link:label xlink:type="resource" xlink:label="label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xml:lang="en-US" id="label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_2">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:to="label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_2" xlink:title="label: AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount to label_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" />
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    <link:label xlink:type="resource" xlink:label="label_AssetsCurrentAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AssetsCurrentAbstract" xml:lang="en-US" id="label_AssetsCurrentAbstract">Current assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsCurrentAbstract" xlink:to="label_AssetsCurrentAbstract" xlink:title="label: AssetsCurrentAbstract to label_AssetsCurrentAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AssetsCurrentAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AssetsCurrentAbstract" xml:lang="en-US" id="label_AssetsCurrentAbstract_2">Assets, Current [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsCurrentAbstract" xlink:to="label_AssetsCurrentAbstract_2" xlink:title="label: AssetsCurrentAbstract to label_AssetsCurrentAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="AssetsAbstract" xlink:title="AssetsAbstract" />
    <link:label xlink:type="resource" xlink:label="label_AssetsAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AssetsAbstract" xml:lang="en-US" id="label_AssetsAbstract">ASSETS</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsAbstract" xlink:to="label_AssetsAbstract" xlink:title="label: AssetsAbstract to label_AssetsAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_AssetsAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AssetsAbstract" xml:lang="en-US" id="label_AssetsAbstract_2">Assets [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsAbstract" xlink:to="label_AssetsAbstract_2" xlink:title="label: AssetsAbstract to label_AssetsAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="AssetsCurrent" xlink:title="AssetsCurrent" />
    <link:label xlink:type="resource" xlink:label="label_AssetsCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AssetsCurrent" xml:lang="en-US" id="label_AssetsCurrent">Assets, Current</link:label>
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    <link:label xlink:type="resource" xlink:label="label_AssetsCurrent_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_AssetsCurrent" xml:lang="en-US" id="label_AssetsCurrent_2">Total current assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AssetsCurrent" xlink:to="label_AssetsCurrent_2" xlink:title="label: AssetsCurrent to label_AssetsCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Assets" xlink:label="Assets" xlink:title="Assets" />
    <link:label xlink:type="resource" xlink:label="label_Assets" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_Assets" xml:lang="en-US" id="label_Assets">Assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="Assets" xlink:to="label_Assets" xlink:title="label: Assets to label_Assets" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_Assets_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_Assets" xml:lang="en-US" id="label_Assets_2">Total assets</link:label>
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    <link:label xlink:type="resource" xlink:label="label_BasisOfAccountingPolicyPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_BasisOfAccountingPolicyPolicyTextBlock" xml:lang="en-US" id="label_BasisOfAccountingPolicyPolicyTextBlock">Basis of Presentation</link:label>
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    <link:label xlink:type="resource" xlink:label="label_BasisOfAccountingPolicyPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_BasisOfAccountingPolicyPolicyTextBlock" xml:lang="en-US" id="label_BasisOfAccountingPolicyPolicyTextBlock_2">Basis of Accounting, Policy [Policy Text Block]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CommitmentsAndContingenciesDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommitmentsAndContingenciesDisclosureTextBlock" xml:lang="en-US" id="label_CommitmentsAndContingenciesDisclosureTextBlock_2">Commitments and Contingencies</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="CommitmentsAndContingenciesDisclosureAbstract" xlink:title="CommitmentsAndContingenciesDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_CommitmentsAndContingenciesDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommitmentsAndContingenciesDisclosureAbstract" xml:lang="en-US" id="label_CommitmentsAndContingenciesDisclosureAbstract">Commitments and Contingencies</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="CommitmentsAndContingencies" xlink:title="CommitmentsAndContingencies" />
    <link:label xlink:type="resource" xlink:label="label_CommitmentsAndContingencies" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommitmentsAndContingencies" xml:lang="en-US" id="label_CommitmentsAndContingencies">Commitments and contingencies (Note 16)</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CommitmentsAndContingencies_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommitmentsAndContingencies" xml:lang="en-US" id="label_CommitmentsAndContingencies_2">Commitments and Contingencies.</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CommonStockMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommonStockMember" xml:lang="en-US" id="label_CommonStockMember">Common Stock</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CommonStockMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommonStockMember" xml:lang="en-US" id="label_CommonStockMember_2">Common Stock [Member]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CommonStockSharesOutstanding" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommonStockSharesOutstanding" xml:lang="en-US" id="label_CommonStockSharesOutstanding">Common stock, shares outstanding</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockSharesOutstanding" xlink:to="label_CommonStockSharesOutstanding" xlink:title="label: CommonStockSharesOutstanding to label_CommonStockSharesOutstanding" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockSharesOutstanding_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommonStockSharesOutstanding" xml:lang="en-US" id="label_CommonStockSharesOutstanding_2">Common Stock, Shares, Outstanding</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockSharesOutstanding" xlink:to="label_CommonStockSharesOutstanding_2" xlink:title="label: CommonStockSharesOutstanding to label_CommonStockSharesOutstanding" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockValue" xlink:label="CommonStockValue" xlink:title="CommonStockValue" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockValue" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommonStockValue" xml:lang="en-US" id="label_CommonStockValue">Common Stock, Value, Issued</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockValue" xlink:to="label_CommonStockValue" xlink:title="label: CommonStockValue to label_CommonStockValue" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockValue_2" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_CommonStockValue" xml:lang="en-US" id="label_CommonStockValue_2">Common stock, $0.001 par value, 300,000 shares authorized; 106,809 shares issued and 106,689 shares outstanding at December 31, 2011; 105,906 shares issued and 105,786 shares outstanding at December 31, 2010</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="CommonStockSharesIssued" xlink:title="CommonStockSharesIssued" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockSharesIssued" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommonStockSharesIssued" xml:lang="en-US" id="label_CommonStockSharesIssued">Common stock, shares issued</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockSharesIssued" xlink:to="label_CommonStockSharesIssued" xlink:title="label: CommonStockSharesIssued to label_CommonStockSharesIssued" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockSharesIssued_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommonStockSharesIssued" xml:lang="en-US" id="label_CommonStockSharesIssued_2">Common Stock, Shares, Issued</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockSharesIssued" xlink:to="label_CommonStockSharesIssued_2" xlink:title="label: CommonStockSharesIssued to label_CommonStockSharesIssued" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="CommonStockValueOutstanding" xlink:title="CommonStockValueOutstanding" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockValueOutstanding" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommonStockValueOutstanding" xml:lang="en-US" id="label_CommonStockValueOutstanding">Common Stock, Value, Outstanding</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockValueOutstanding" xlink:to="label_CommonStockValueOutstanding" xlink:title="label: CommonStockValueOutstanding to label_CommonStockValueOutstanding" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockValueOutstanding_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommonStockValueOutstanding" xml:lang="en-US" id="label_CommonStockValueOutstanding_2">Common stock, $0.001 par value, 300,000 shares authorized; 108,293 shares issued and 108,173 shares outstanding at December 31, 2012; 106,809 shares issued and 106,689 shares outstanding at December 31, 2011</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockValueOutstanding" xlink:to="label_CommonStockValueOutstanding_2" xlink:title="label: CommonStockValueOutstanding to label_CommonStockValueOutstanding" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="CommonStockParOrStatedValuePerShare" xlink:title="CommonStockParOrStatedValuePerShare" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockParOrStatedValuePerShare" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommonStockParOrStatedValuePerShare" xml:lang="en-US" id="label_CommonStockParOrStatedValuePerShare">Common stock, par value (in dollars per share)</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CommonStockParOrStatedValuePerShare_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommonStockParOrStatedValuePerShare" xml:lang="en-US" id="label_CommonStockParOrStatedValuePerShare_2">Common Stock, Par or Stated Value Per Share</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="CommonStockSharesAuthorized" xlink:title="CommonStockSharesAuthorized" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockSharesAuthorized" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CommonStockSharesAuthorized" xml:lang="en-US" id="label_CommonStockSharesAuthorized">Common stock, shares authorized</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockSharesAuthorized" xlink:to="label_CommonStockSharesAuthorized" xlink:title="label: CommonStockSharesAuthorized to label_CommonStockSharesAuthorized" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CommonStockSharesAuthorized_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CommonStockSharesAuthorized" xml:lang="en-US" id="label_CommonStockSharesAuthorized_2">Common Stock, Shares Authorized</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CommonStockSharesAuthorized" xlink:to="label_CommonStockSharesAuthorized_2" xlink:title="label: CommonStockSharesAuthorized to label_CommonStockSharesAuthorized" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="CompensationAndRetirementDisclosureAbstract" xlink:title="CompensationAndRetirementDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_CompensationAndRetirementDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CompensationAndRetirementDisclosureAbstract" xml:lang="en-US" id="label_CompensationAndRetirementDisclosureAbstract">Employee Benefit Plans</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CompensationAndRetirementDisclosureAbstract" xlink:to="label_CompensationAndRetirementDisclosureAbstract" xlink:title="label: CompensationAndRetirementDisclosureAbstract to label_CompensationAndRetirementDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:title="ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xml:lang="en-US" id="label_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract">Income taxes (credits)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="label_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:title="label: ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract to label_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" use="optional" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="label_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_2" xlink:title="label: ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract to label_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xlink:label="ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xlink:title="ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xml:lang="en-US" id="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract">Significant components of current and long-term deferred income taxes</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xml:lang="en-US" id="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_2">Components of Deferred Tax Assets and Liabilities [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" xlink:to="label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract_2" xlink:title="label: ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract to label_ComponentsOfDeferredTaxAssetsAndLiabilitiesAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:label="ComprehensiveIncomeNetOfTaxAbstract" xlink:title="ComprehensiveIncomeNetOfTaxAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomeNetOfTaxAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ComprehensiveIncomeNetOfTaxAbstract" xml:lang="en-US" id="label_ComprehensiveIncomeNetOfTaxAbstract">Comprehensive Income (Loss)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomeNetOfTaxAbstract" xlink:to="label_ComprehensiveIncomeNetOfTaxAbstract" xlink:title="label: ComprehensiveIncomeNetOfTaxAbstract to label_ComprehensiveIncomeNetOfTaxAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomeNetOfTaxAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ComprehensiveIncomeNetOfTaxAbstract" xml:lang="en-US" id="label_ComprehensiveIncomeNetOfTaxAbstract_2">Comprehensive income (loss)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomeNetOfTaxAbstract" xlink:to="label_ComprehensiveIncomeNetOfTaxAbstract_2" xlink:title="label: ComprehensiveIncomeNetOfTaxAbstract to label_ComprehensiveIncomeNetOfTaxAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="ComprehensiveIncomeNetOfTax" xlink:title="ComprehensiveIncomeNetOfTax" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomeNetOfTax" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_ComprehensiveIncomeNetOfTax" xml:lang="en-US" id="label_ComprehensiveIncomeNetOfTax">Comprehensive income (loss)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomeNetOfTax" xlink:to="label_ComprehensiveIncomeNetOfTax" xlink:title="label: ComprehensiveIncomeNetOfTax to label_ComprehensiveIncomeNetOfTax" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomeNetOfTax_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ComprehensiveIncomeNetOfTax" xml:lang="en-US" id="label_ComprehensiveIncomeNetOfTax_2">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomeNetOfTax" xlink:to="label_ComprehensiveIncomeNetOfTax_2" xlink:title="label: ComprehensiveIncomeNetOfTax to label_ComprehensiveIncomeNetOfTax" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComprehensiveIncomeNoteTextBlock" xlink:label="ComprehensiveIncomeNoteTextBlock" xlink:title="ComprehensiveIncomeNoteTextBlock" />
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    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomeNoteTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ComprehensiveIncomeNoteTextBlock" xml:lang="en-US" id="label_ComprehensiveIncomeNoteTextBlock_2">Comprehensive Income (Loss)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomeNoteTextBlock" xlink:to="label_ComprehensiveIncomeNoteTextBlock_2" xlink:title="label: ComprehensiveIncomeNoteTextBlock to label_ComprehensiveIncomeNoteTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComprehensiveIncomePolicyPolicyTextBlock" xlink:label="ComprehensiveIncomePolicyPolicyTextBlock" xlink:title="ComprehensiveIncomePolicyPolicyTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomePolicyPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ComprehensiveIncomePolicyPolicyTextBlock" xml:lang="en-US" id="label_ComprehensiveIncomePolicyPolicyTextBlock">Accumulated Other Comprehensive Income</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomePolicyPolicyTextBlock" xlink:to="label_ComprehensiveIncomePolicyPolicyTextBlock" xlink:title="label: ComprehensiveIncomePolicyPolicyTextBlock to label_ComprehensiveIncomePolicyPolicyTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomePolicyPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ComprehensiveIncomePolicyPolicyTextBlock" xml:lang="en-US" id="label_ComprehensiveIncomePolicyPolicyTextBlock_2">Comprehensive Income, Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomePolicyPolicyTextBlock" xlink:to="label_ComprehensiveIncomePolicyPolicyTextBlock_2" xlink:title="label: ComprehensiveIncomePolicyPolicyTextBlock to label_ComprehensiveIncomePolicyPolicyTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ComprehensiveIncomeMember" xlink:label="ComprehensiveIncomeMember" xlink:title="ComprehensiveIncomeMember" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomeMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ComprehensiveIncomeMember" xml:lang="en-US" id="label_ComprehensiveIncomeMember">Comprehensive Income (Loss)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomeMember" xlink:to="label_ComprehensiveIncomeMember" xlink:title="label: ComprehensiveIncomeMember to label_ComprehensiveIncomeMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ComprehensiveIncomeMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ComprehensiveIncomeMember" xml:lang="en-US" id="label_ComprehensiveIncomeMember_2">Comprehensive Income [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ComprehensiveIncomeMember" xlink:to="label_ComprehensiveIncomeMember_2" xlink:title="label: ComprehensiveIncomeMember to label_ComprehensiveIncomeMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="ConcentrationRiskTypeDomain" xlink:title="ConcentrationRiskTypeDomain" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskTypeDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskTypeDomain" xml:lang="en-US" id="label_ConcentrationRiskTypeDomain">Concentration Risk Type [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskTypeDomain" xlink:to="label_ConcentrationRiskTypeDomain" xlink:title="label: ConcentrationRiskTypeDomain to label_ConcentrationRiskTypeDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="ConcentrationRiskLineItems" xlink:title="ConcentrationRiskLineItems" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskLineItems" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskLineItems" xml:lang="en-US" id="label_ConcentrationRiskLineItems">Concentration Risk [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskLineItems" xlink:to="label_ConcentrationRiskLineItems" xlink:title="label: ConcentrationRiskLineItems to label_ConcentrationRiskLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskLineItems_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConcentrationRiskLineItems" xml:lang="en-US" id="label_ConcentrationRiskLineItems_2">Significant Customers</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskLineItems" xlink:to="label_ConcentrationRiskLineItems_2" xlink:title="label: ConcentrationRiskLineItems to label_ConcentrationRiskLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskLineItems_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_ConcentrationRiskLineItems" xml:lang="en-US" id="label_ConcentrationRiskLineItems_3">Concentration of risk</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskLineItems" xlink:to="label_ConcentrationRiskLineItems_3" xlink:title="label: ConcentrationRiskLineItems to label_ConcentrationRiskLineItems" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="ConcentrationRiskBenchmarkDomain" xlink:title="ConcentrationRiskBenchmarkDomain" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskBenchmarkDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskBenchmarkDomain" xml:lang="en-US" id="label_ConcentrationRiskBenchmarkDomain">Concentration Risk Benchmark [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskBenchmarkDomain" xlink:to="label_ConcentrationRiskBenchmarkDomain" xlink:title="label: ConcentrationRiskBenchmarkDomain to label_ConcentrationRiskBenchmarkDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="ConcentrationRiskTable" xlink:title="ConcentrationRiskTable" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskTable" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskTable" xml:lang="en-US" id="label_ConcentrationRiskTable">Concentration Risk [Table]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskTable" xlink:to="label_ConcentrationRiskTable" xlink:title="label: ConcentrationRiskTable to label_ConcentrationRiskTable" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="ConcentrationRiskByBenchmarkAxis" xlink:title="ConcentrationRiskByBenchmarkAxis" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskByBenchmarkAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskByBenchmarkAxis" xml:lang="en-US" id="label_ConcentrationRiskByBenchmarkAxis">Concentration Risk Benchmark [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskByBenchmarkAxis" xlink:to="label_ConcentrationRiskByBenchmarkAxis" xlink:title="label: ConcentrationRiskByBenchmarkAxis to label_ConcentrationRiskByBenchmarkAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="ConcentrationRiskCreditRisk" xlink:title="ConcentrationRiskCreditRisk" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskCreditRisk" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConcentrationRiskCreditRisk" xml:lang="en-US" id="label_ConcentrationRiskCreditRisk">Concentration of Risk and Off-Balance Sheet Risk</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskCreditRisk" xlink:to="label_ConcentrationRiskCreditRisk" xlink:title="label: ConcentrationRiskCreditRisk to label_ConcentrationRiskCreditRisk" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskCreditRisk_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskCreditRisk" xml:lang="en-US" id="label_ConcentrationRiskCreditRisk_2">Concentration Risk, Credit Risk, Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskCreditRisk" xlink:to="label_ConcentrationRiskCreditRisk_2" xlink:title="label: ConcentrationRiskCreditRisk to label_ConcentrationRiskCreditRisk" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:label="ConcentrationRiskDisclosureTextBlock" xlink:title="ConcentrationRiskDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConcentrationRiskDisclosureTextBlock" xml:lang="en-US" id="label_ConcentrationRiskDisclosureTextBlock">Significant Customers</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskDisclosureTextBlock" xlink:to="label_ConcentrationRiskDisclosureTextBlock" xlink:title="label: ConcentrationRiskDisclosureTextBlock to label_ConcentrationRiskDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskDisclosureTextBlock" xml:lang="en-US" id="label_ConcentrationRiskDisclosureTextBlock_2">Concentration Risk Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskDisclosureTextBlock" xlink:to="label_ConcentrationRiskDisclosureTextBlock_2" xlink:title="label: ConcentrationRiskDisclosureTextBlock to label_ConcentrationRiskDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="ConcentrationRiskByTypeAxis" xlink:title="ConcentrationRiskByTypeAxis" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskByTypeAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskByTypeAxis" xml:lang="en-US" id="label_ConcentrationRiskByTypeAxis">Concentration Risk Type [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskByTypeAxis" xlink:to="label_ConcentrationRiskByTypeAxis" xlink:title="label: ConcentrationRiskByTypeAxis to label_ConcentrationRiskByTypeAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="ConcentrationRiskPercentage1" xlink:title="ConcentrationRiskPercentage1" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskPercentage1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConcentrationRiskPercentage1" xml:lang="en-US" id="label_ConcentrationRiskPercentage1">Concentration Risk, Percentage</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskPercentage1" xlink:to="label_ConcentrationRiskPercentage1" xlink:title="label: ConcentrationRiskPercentage1 to label_ConcentrationRiskPercentage1" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConcentrationRiskPercentage1_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConcentrationRiskPercentage1" xml:lang="en-US" id="label_ConcentrationRiskPercentage1_2">Percentage of concentration risk</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConcentrationRiskPercentage1" xlink:to="label_ConcentrationRiskPercentage1_2" xlink:title="label: ConcentrationRiskPercentage1 to label_ConcentrationRiskPercentage1" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConsolidationPolicyTextBlock" xlink:label="ConsolidationPolicyTextBlock" xlink:title="ConsolidationPolicyTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ConsolidationPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConsolidationPolicyTextBlock" xml:lang="en-US" id="label_ConsolidationPolicyTextBlock">Principles of Consolidation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConsolidationPolicyTextBlock" xlink:to="label_ConsolidationPolicyTextBlock" xlink:title="label: ConsolidationPolicyTextBlock to label_ConsolidationPolicyTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConsolidationPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConsolidationPolicyTextBlock" xml:lang="en-US" id="label_ConsolidationPolicyTextBlock_2">Consolidation, Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConsolidationPolicyTextBlock" xlink:to="label_ConsolidationPolicyTextBlock_2" xlink:title="label: ConsolidationPolicyTextBlock to label_ConsolidationPolicyTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConstructionInProgressMember" xlink:label="ConstructionInProgressMember" xlink:title="ConstructionInProgressMember" />
    <link:label xlink:type="resource" xlink:label="label_ConstructionInProgressMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConstructionInProgressMember" xml:lang="en-US" id="label_ConstructionInProgressMember">Construction in process</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConstructionInProgressMember" xlink:to="label_ConstructionInProgressMember" xlink:title="label: ConstructionInProgressMember to label_ConstructionInProgressMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConstructionInProgressMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConstructionInProgressMember" xml:lang="en-US" id="label_ConstructionInProgressMember_2">Construction in Progress [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConstructionInProgressMember" xlink:to="label_ConstructionInProgressMember_2" xlink:title="label: ConstructionInProgressMember to label_ConstructionInProgressMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ConvertibleSubordinatedDebtMember" xlink:label="ConvertibleSubordinatedDebtMember" xlink:title="ConvertibleSubordinatedDebtMember" />
    <link:label xlink:type="resource" xlink:label="label_ConvertibleSubordinatedDebtMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ConvertibleSubordinatedDebtMember" xml:lang="en-US" id="label_ConvertibleSubordinatedDebtMember">Convertible Subordinated Debt</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConvertibleSubordinatedDebtMember" xlink:to="label_ConvertibleSubordinatedDebtMember" xlink:title="label: ConvertibleSubordinatedDebtMember to label_ConvertibleSubordinatedDebtMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConvertibleSubordinatedDebtMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ConvertibleSubordinatedDebtMember" xml:lang="en-US" id="label_ConvertibleSubordinatedDebtMember_2">Convertible Subordinated Debt [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConvertibleSubordinatedDebtMember" xlink:to="label_ConvertibleSubordinatedDebtMember_2" xlink:title="label: ConvertibleSubordinatedDebtMember to label_ConvertibleSubordinatedDebtMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ConvertibleSubordinatedDebtMember_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_ConvertibleSubordinatedDebtMember" xml:lang="en-US" id="label_ConvertibleSubordinatedDebtMember_3">4.25% Convertible Senior Subordinated Notes</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ConvertibleSubordinatedDebtMember" xlink:to="label_ConvertibleSubordinatedDebtMember_3" xlink:title="label: ConvertibleSubordinatedDebtMember to label_ConvertibleSubordinatedDebtMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="CostOfRevenueAbstract" xlink:title="CostOfRevenueAbstract" />
    <link:label xlink:type="resource" xlink:label="label_CostOfRevenueAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CostOfRevenueAbstract" xml:lang="en-US" id="label_CostOfRevenueAbstract">Cost of revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfRevenueAbstract" xlink:to="label_CostOfRevenueAbstract" xlink:title="label: CostOfRevenueAbstract to label_CostOfRevenueAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CostOfRevenueAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CostOfRevenueAbstract" xml:lang="en-US" id="label_CostOfRevenueAbstract_2">Cost of Revenue [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfRevenueAbstract" xlink:to="label_CostOfRevenueAbstract_2" xlink:title="label: CostOfRevenueAbstract to label_CostOfRevenueAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfGoodsSold" xlink:label="CostOfGoodsSold" xlink:title="CostOfGoodsSold" />
    <link:label xlink:type="resource" xlink:label="label_CostOfGoodsSold" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CostOfGoodsSold" xml:lang="en-US" id="label_CostOfGoodsSold">Product</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfGoodsSold" xlink:to="label_CostOfGoodsSold" xlink:title="label: CostOfGoodsSold to label_CostOfGoodsSold" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CostOfGoodsSold_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CostOfGoodsSold" xml:lang="en-US" id="label_CostOfGoodsSold_2">Cost of Goods Sold</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfGoodsSold" xlink:to="label_CostOfGoodsSold_2" xlink:title="label: CostOfGoodsSold to label_CostOfGoodsSold" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="CostOfGoodsAndServicesSold" xlink:title="CostOfGoodsAndServicesSold" />
    <link:label xlink:type="resource" xlink:label="label_CostOfGoodsAndServicesSold" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_CostOfGoodsAndServicesSold" xml:lang="en-US" id="label_CostOfGoodsAndServicesSold">Total cost of revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfGoodsAndServicesSold" xlink:to="label_CostOfGoodsAndServicesSold" xlink:title="label: CostOfGoodsAndServicesSold to label_CostOfGoodsAndServicesSold" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CostOfGoodsAndServicesSold_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CostOfGoodsAndServicesSold" xml:lang="en-US" id="label_CostOfGoodsAndServicesSold_2">Cost of Goods and Services Sold</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfGoodsAndServicesSold" xlink:to="label_CostOfGoodsAndServicesSold_2" xlink:title="label: CostOfGoodsAndServicesSold to label_CostOfGoodsAndServicesSold" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CostOfServices" xlink:label="CostOfServices" xlink:title="CostOfServices" />
    <link:label xlink:type="resource" xlink:label="label_CostOfServices" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CostOfServices" xml:lang="en-US" id="label_CostOfServices">Services</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfServices" xlink:to="label_CostOfServices" xlink:title="label: CostOfServices to label_CostOfServices" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CostOfServices_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CostOfServices" xml:lang="en-US" id="label_CostOfServices_2">Cost of Services</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CostOfServices" xlink:to="label_CostOfServices_2" xlink:title="label: CostOfServices to label_CostOfServices" use="optional" />
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    <link:label xlink:type="resource" xlink:label="label_CurrentStateAndLocalTaxExpenseBenefit" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CurrentStateAndLocalTaxExpenseBenefit" xml:lang="en-US" id="label_CurrentStateAndLocalTaxExpenseBenefit">United States, State</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CurrentIncomeTaxExpenseBenefit_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CurrentIncomeTaxExpenseBenefit" xml:lang="en-US" id="label_CurrentIncomeTaxExpenseBenefit_2">Current Income Tax Expense (Benefit)</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CurrentForeignTaxExpenseBenefit" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CurrentForeignTaxExpenseBenefit" xml:lang="en-US" id="label_CurrentForeignTaxExpenseBenefit">Foreign</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CurrentForeignTaxExpenseBenefit_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CurrentForeignTaxExpenseBenefit" xml:lang="en-US" id="label_CurrentForeignTaxExpenseBenefit_2">Current Foreign Tax Expense (Benefit)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CurrentForeignTaxExpenseBenefit" xlink:to="label_CurrentForeignTaxExpenseBenefit_2" xlink:title="label: CurrentForeignTaxExpenseBenefit to label_CurrentForeignTaxExpenseBenefit" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CurrentFederalTaxExpenseBenefit" xlink:label="CurrentFederalTaxExpenseBenefit" xlink:title="CurrentFederalTaxExpenseBenefit" />
    <link:label xlink:type="resource" xlink:label="label_CurrentFederalTaxExpenseBenefit" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CurrentFederalTaxExpenseBenefit" xml:lang="en-US" id="label_CurrentFederalTaxExpenseBenefit">United States, Federal</link:label>
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    <link:label xlink:type="resource" xlink:label="label_CurrentFederalTaxExpenseBenefit_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CurrentFederalTaxExpenseBenefit" xml:lang="en-US" id="label_CurrentFederalTaxExpenseBenefit_2">Current Federal Tax Expense (Benefit)</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="CustomerConcentrationRiskMember" xlink:title="CustomerConcentrationRiskMember" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerConcentrationRiskMember" xlink:to="label_CustomerConcentrationRiskMember" xlink:title="label: CustomerConcentrationRiskMember to label_CustomerConcentrationRiskMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_CustomerConcentrationRiskMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CustomerConcentrationRiskMember" xml:lang="en-US" id="label_CustomerConcentrationRiskMember_2">Customer concentration risk</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CustomerConcentrationRiskMember" xlink:to="label_CustomerConcentrationRiskMember_2" xlink:title="label: CustomerConcentrationRiskMember to label_CustomerConcentrationRiskMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="DebtInstrumentLineItems" xlink:title="DebtInstrumentLineItems" />
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    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentLineItems_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DebtInstrumentLineItems" xml:lang="en-US" id="label_DebtInstrumentLineItems_2">Financial Arrangements</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="DebtInstrumentTable" xlink:title="DebtInstrumentTable" />
    <link:label xlink:type="resource" xlink:label="label_DebtInstrumentTable" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DebtInstrumentTable" xml:lang="en-US" id="label_DebtInstrumentTable">Schedule of Long-term Debt Instruments [Table]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="DebtDisclosureTextBlock" xlink:title="DebtDisclosureTextBlock" />
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    <link:label xlink:type="resource" xlink:label="label_DebtDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DebtDisclosureTextBlock" xml:lang="en-US" id="label_DebtDisclosureTextBlock_2">Financing Arrangements</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="DebtDisclosureAbstract" xlink:title="DebtDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_DebtDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DebtDisclosureAbstract" xml:lang="en-US" id="label_DebtDisclosureAbstract">Financing Arrangements</link:label>
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    <link:label xlink:type="resource" xlink:label="label_DepreciationDepletionAndAmortization_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DepreciationDepletionAndAmortization" xml:lang="en-US" id="label_DepreciationDepletionAndAmortization_2">Depreciation and amortization</link:label>
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    <link:label xlink:type="resource" xlink:label="label_Depreciation_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_Depreciation" xml:lang="en-US" id="label_Depreciation_2">Depreciation</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal" xlink:label="DisposalGroupNotDiscontinuedOperationGainLossOnDisposal" xlink:title="DisposalGroupNotDiscontinuedOperationGainLossOnDisposal" />
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    <link:label xlink:type="resource" xlink:label="label_EarningsPerSharePolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EarningsPerSharePolicyTextBlock" xml:lang="en-US" id="label_EarningsPerSharePolicyTextBlock_2">Earnings Per Share, Policy [Policy Text Block]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="EarningsPerShareAbstract" xlink:title="EarningsPerShareAbstract" />
    <link:label xlink:type="resource" xlink:label="label_EarningsPerShareAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EarningsPerShareAbstract" xml:lang="en-US" id="label_EarningsPerShareAbstract">Net income (loss) per share</link:label>
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    <link:label xlink:type="resource" xlink:label="label_EarningsPerShareAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EarningsPerShareAbstract" xml:lang="en-US" id="label_EarningsPerShareAbstract_2">Net Income (Loss) Per Share</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EarningsPerShareAbstract" xlink:to="label_EarningsPerShareAbstract_2" xlink:title="label: EarningsPerShareAbstract to label_EarningsPerShareAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations" xlink:label="EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations" xlink:title="EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations" />
    <link:label xlink:type="resource" xlink:label="label_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations" xml:lang="en-US" id="label_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations">Effect of exchange rate changes on cash</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="EmployeeRelatedLiabilitiesCurrent" xlink:title="EmployeeRelatedLiabilitiesCurrent" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeRelatedLiabilitiesCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeRelatedLiabilitiesCurrent" xml:lang="en-US" id="label_EmployeeRelatedLiabilitiesCurrent">Employee-related Liabilities, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeeRelatedLiabilitiesCurrent" xlink:to="label_EmployeeRelatedLiabilitiesCurrent" xlink:title="label: EmployeeRelatedLiabilitiesCurrent to label_EmployeeRelatedLiabilitiesCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeRelatedLiabilitiesCurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeeRelatedLiabilitiesCurrent" xml:lang="en-US" id="label_EmployeeRelatedLiabilitiesCurrent_2">Accrued compensation</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:title="EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1">Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition</link:label>
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    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_2">Weighted-average period over which unrecognized compensation cost is expected to be recognized</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeStockMember" xlink:label="EmployeeStockMember" xlink:title="EmployeeStockMember" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeStockMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeStockMember" xml:lang="en-US" id="label_EmployeeStockMember">Employee Stock [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeeStockMember" xlink:to="label_EmployeeStockMember" xlink:title="label: EmployeeStockMember to label_EmployeeStockMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeStockMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeeStockMember" xml:lang="en-US" id="label_EmployeeStockMember_2">Employee stock purchase plan</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xlink:label="EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xlink:title="EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions">Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Stock Options</link:label>
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    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions_2">Total forfeiture adjusted unrecognized compensation cost (in dollars)</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" xlink:label="EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" xlink:title="EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions">Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Share-based Awards Other than Options</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" xlink:to="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" xlink:title="label: EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions to label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions_2">Total forfeiture adjusted unrecognized compensation cost (in dollars)</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:title="EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" />
    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract">Employee Service Share-based Compensation, Aggregate Disclosures [Abstract]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xml:lang="en-US" id="label_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_2">Stock-Based Compensation Expense</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EmployeeSeveranceMember" xlink:label="EmployeeSeveranceMember" xlink:title="EmployeeSeveranceMember" />
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    <link:label xlink:type="resource" xlink:label="label_EmployeeSeveranceMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EmployeeSeveranceMember" xml:lang="en-US" id="label_EmployeeSeveranceMember_2">Employee Severance [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EmployeeSeveranceMember" xlink:to="label_EmployeeSeveranceMember_2" xlink:title="label: EmployeeSeveranceMember to label_EmployeeSeveranceMember" use="optional" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries" xlink:label="EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries" xlink:title="EntityWideDisclosureOnGeographicAreasRevenueFromExternalCustomersAttributedToForeignCountries" />
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    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvestmentRealizedGainLossOnDisposal_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_EquityMethodInvestmentRealizedGainLossOnDisposal" xml:lang="en-US" id="label_EquityMethodInvestmentRealizedGainLossOnDisposal_2">Gain on sale of dry strip assets and intellectual property</link:label>
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    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvestmentRealizedGainLossOnDisposal_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EquityMethodInvestmentRealizedGainLossOnDisposal" xml:lang="en-US" id="label_EquityMethodInvestmentRealizedGainLossOnDisposal_3">Gain on sale of SEN</link:label>
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityMethodInvestmentRealizedGainLossOnDisposal" xlink:to="label_EquityMethodInvestmentRealizedGainLossOnDisposal_4" xlink:title="label: EquityMethodInvestmentRealizedGainLossOnDisposal to label_EquityMethodInvestmentRealizedGainLossOnDisposal" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="EquityComponentDomain" xlink:title="EquityComponentDomain" />
    <link:label xlink:type="resource" xlink:label="label_EquityComponentDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquityComponentDomain" xml:lang="en-US" id="label_EquityComponentDomain">Equity Component [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityComponentDomain" xlink:to="label_EquityComponentDomain" xlink:title="label: EquityComponentDomain to label_EquityComponentDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="EquityMethodInvesteeNameDomain" xlink:title="EquityMethodInvesteeNameDomain" />
    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvesteeNameDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquityMethodInvesteeNameDomain" xml:lang="en-US" id="label_EquityMethodInvesteeNameDomain">Equity Method Investee, Name [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityMethodInvesteeNameDomain" xlink:to="label_EquityMethodInvesteeNameDomain" xlink:title="label: EquityMethodInvesteeNameDomain to label_EquityMethodInvesteeNameDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityMethodInvestmentNetSalesProceeds" xlink:label="EquityMethodInvestmentNetSalesProceeds" xlink:title="EquityMethodInvestmentNetSalesProceeds" />
    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvestmentNetSalesProceeds" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquityMethodInvestmentNetSalesProceeds" xml:lang="en-US" id="label_EquityMethodInvestmentNetSalesProceeds">Equity Method Investment, Net Sales Proceeds</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityMethodInvestmentNetSalesProceeds" xlink:to="label_EquityMethodInvestmentNetSalesProceeds" xlink:title="label: EquityMethodInvestmentNetSalesProceeds to label_EquityMethodInvestmentNetSalesProceeds" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvestmentNetSalesProceeds_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EquityMethodInvestmentNetSalesProceeds" xml:lang="en-US" id="label_EquityMethodInvestmentNetSalesProceeds_2">Net proceeds from sale</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityMethodInvestmentNetSalesProceeds" xlink:to="label_EquityMethodInvestmentNetSalesProceeds_2" xlink:title="label: EquityMethodInvestmentNetSalesProceeds to label_EquityMethodInvestmentNetSalesProceeds" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract" xlink:label="EquityMethodInvestmentsAndJointVenturesAbstract" xlink:title="EquityMethodInvestmentsAndJointVenturesAbstract" />
    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvestmentsAndJointVenturesAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquityMethodInvestmentsAndJointVenturesAbstract" xml:lang="en-US" id="label_EquityMethodInvestmentsAndJointVenturesAbstract">SEN</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityMethodInvestmentsAndJointVenturesAbstract" xlink:to="label_EquityMethodInvestmentsAndJointVenturesAbstract" xlink:title="label: EquityMethodInvestmentsAndJointVenturesAbstract to label_EquityMethodInvestmentsAndJointVenturesAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_EquityMethodInvestmentSoldCarryingAmount" xlink:label="EquityMethodInvestmentSoldCarryingAmount" xlink:title="EquityMethodInvestmentSoldCarryingAmount" />
    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvestmentSoldCarryingAmount" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquityMethodInvestmentSoldCarryingAmount" xml:lang="en-US" id="label_EquityMethodInvestmentSoldCarryingAmount">Equity Method Investment Sold, Carrying Amount</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityMethodInvestmentSoldCarryingAmount" xlink:to="label_EquityMethodInvestmentSoldCarryingAmount" xlink:title="label: EquityMethodInvestmentSoldCarryingAmount to label_EquityMethodInvestmentSoldCarryingAmount" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_EquityMethodInvestmentSoldCarryingAmount_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EquityMethodInvestmentSoldCarryingAmount" xml:lang="en-US" id="label_EquityMethodInvestmentSoldCarryingAmount_2">Carrying value of the investment on the date of sale</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityMethodInvestmentSoldCarryingAmount" xlink:to="label_EquityMethodInvestmentSoldCarryingAmount_2" xlink:title="label: EquityMethodInvestmentSoldCarryingAmount to label_EquityMethodInvestmentSoldCarryingAmount" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="FairValueDisclosuresAbstract" xlink:title="FairValueDisclosuresAbstract" />
    <link:label xlink:type="resource" xlink:label="label_FairValueDisclosuresAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueDisclosuresAbstract" xml:lang="en-US" id="label_FairValueDisclosuresAbstract">Fair Value Measurements</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueDisclosuresAbstract" xlink:to="label_FairValueDisclosuresAbstract" xlink:title="label: FairValueDisclosuresAbstract to label_FairValueDisclosuresAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="FairValueDisclosuresTextBlock" xlink:title="FairValueDisclosuresTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_FairValueDisclosuresTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_FairValueDisclosuresTextBlock" xml:lang="en-US" id="label_FairValueDisclosuresTextBlock">Fair Value Measurements</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueDisclosuresTextBlock" xlink:to="label_FairValueDisclosuresTextBlock" xlink:title="label: FairValueDisclosuresTextBlock to label_FairValueDisclosuresTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_FairValueDisclosuresTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueDisclosuresTextBlock" xml:lang="en-US" id="label_FairValueDisclosuresTextBlock_2">Fair Value Disclosures [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueDisclosuresTextBlock" xlink:to="label_FairValueDisclosuresTextBlock_2" xlink:title="label: FairValueDisclosuresTextBlock to label_FairValueDisclosuresTextBlock" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:label="FairValueOfFinancialInstrumentsPolicy" xlink:title="FairValueOfFinancialInstrumentsPolicy" />
    <link:label xlink:type="resource" xlink:label="label_FairValueOfFinancialInstrumentsPolicy" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_FairValueOfFinancialInstrumentsPolicy" xml:lang="en-US" id="label_FairValueOfFinancialInstrumentsPolicy">Fair Value of Financial Instruments</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueOfFinancialInstrumentsPolicy" xlink:to="label_FairValueOfFinancialInstrumentsPolicy" xlink:title="label: FairValueOfFinancialInstrumentsPolicy to label_FairValueOfFinancialInstrumentsPolicy" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_FairValueOfFinancialInstrumentsPolicy_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueOfFinancialInstrumentsPolicy" xml:lang="en-US" id="label_FairValueOfFinancialInstrumentsPolicy_2">Fair Value of Financial Instruments, Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueOfFinancialInstrumentsPolicy" xlink:to="label_FairValueOfFinancialInstrumentsPolicy_2" xlink:title="label: FairValueOfFinancialInstrumentsPolicy to label_FairValueOfFinancialInstrumentsPolicy" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ForeignCountryMember" xlink:label="ForeignCountryMember" xlink:title="ForeignCountryMember" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCountryMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ForeignCountryMember" xml:lang="en-US" id="label_ForeignCountryMember">Foreign</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCountryMember" xlink:to="label_ForeignCountryMember" xlink:title="label: ForeignCountryMember to label_ForeignCountryMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCountryMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ForeignCountryMember" xml:lang="en-US" id="label_ForeignCountryMember_2">Foreign Tax Authority [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCountryMember" xlink:to="label_ForeignCountryMember_2" xlink:title="label: ForeignCountryMember to label_ForeignCountryMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:label="ForeignCurrencyTransactionGainLossRealized" xlink:title="ForeignCurrencyTransactionGainLossRealized" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCurrencyTransactionGainLossRealized" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ForeignCurrencyTransactionGainLossRealized" xml:lang="en-US" id="label_ForeignCurrencyTransactionGainLossRealized">Foreign exchange gains (losses) realized</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCurrencyTransactionGainLossRealized" xlink:to="label_ForeignCurrencyTransactionGainLossRealized" xlink:title="label: ForeignCurrencyTransactionGainLossRealized to label_ForeignCurrencyTransactionGainLossRealized" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCurrencyTransactionGainLossRealized_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ForeignCurrencyTransactionGainLossRealized" xml:lang="en-US" id="label_ForeignCurrencyTransactionGainLossRealized_2">Foreign Currency Transaction Gain (Loss), Realized</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCurrencyTransactionGainLossRealized" xlink:to="label_ForeignCurrencyTransactionGainLossRealized_2" xlink:title="label: ForeignCurrencyTransactionGainLossRealized to label_ForeignCurrencyTransactionGainLossRealized" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:title="ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xml:lang="en-US" id="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock">Foreign Currency</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:to="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:title="label: ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock to label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xml:lang="en-US" id="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_2">Foreign Currency Transactions and Translations Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:to="label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_2" xlink:title="label: ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock to label_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ForeignCurrencyTransactionAbstract" xlink:label="ForeignCurrencyTransactionAbstract" xlink:title="ForeignCurrencyTransactionAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCurrencyTransactionAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ForeignCurrencyTransactionAbstract" xml:lang="en-US" id="label_ForeignCurrencyTransactionAbstract">Foreign Currency</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCurrencyTransactionAbstract" xlink:to="label_ForeignCurrencyTransactionAbstract" xlink:title="label: ForeignCurrencyTransactionAbstract to label_ForeignCurrencyTransactionAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ForeignCurrencyTransactionAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ForeignCurrencyTransactionAbstract" xml:lang="en-US" id="label_ForeignCurrencyTransactionAbstract_2">Foreign Currency Transaction [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ForeignCurrencyTransactionAbstract" xlink:to="label_ForeignCurrencyTransactionAbstract_2" xlink:title="label: ForeignCurrencyTransactionAbstract to label_ForeignCurrencyTransactionAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="GeneralAndAdministrativeExpense" xlink:title="GeneralAndAdministrativeExpense" />
    <link:label xlink:type="resource" xlink:label="label_GeneralAndAdministrativeExpense" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_GeneralAndAdministrativeExpense" xml:lang="en-US" id="label_GeneralAndAdministrativeExpense">General and Administrative Expense</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="GeneralAndAdministrativeExpense" xlink:to="label_GeneralAndAdministrativeExpense" xlink:title="label: GeneralAndAdministrativeExpense to label_GeneralAndAdministrativeExpense" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_GeneralAndAdministrativeExpense_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_GeneralAndAdministrativeExpense" xml:lang="en-US" id="label_GeneralAndAdministrativeExpense_2">General and administrative</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="GeneralAndAdministrativeExpense" xlink:to="label_GeneralAndAdministrativeExpense_2" xlink:title="label: GeneralAndAdministrativeExpense to label_GeneralAndAdministrativeExpense" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_GrossProfit" xlink:label="GrossProfit" xlink:title="GrossProfit" />
    <link:label xlink:type="resource" xlink:label="label_GrossProfit" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_GrossProfit" xml:lang="en-US" id="label_GrossProfit">Gross Profit</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="GrossProfit" xlink:to="label_GrossProfit" xlink:title="label: GrossProfit to label_GrossProfit" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_GrossProfit_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_GrossProfit" xml:lang="en-US" id="label_GrossProfit_2">Gross profit</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="GrossProfit" xlink:to="label_GrossProfit_2" xlink:title="label: GrossProfit to label_GrossProfit" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_GrossProfit_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_GrossProfit" xml:lang="en-US" id="label_GrossProfit_3">Gross profit</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="GrossProfit" xlink:to="label_GrossProfit_3" xlink:title="label: GrossProfit to label_GrossProfit" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:label="ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:title="ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xml:lang="en-US" id="label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock">Impairment of Long-Lived Assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:to="label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:title="label: ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock to label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xml:lang="en-US" id="label_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_2">Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xml:lang="en-US" id="label_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_2">Prepaid expenses and other current assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:to="label_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_2" xlink:title="label: IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets to label_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="IncreaseDecreaseInInventories" xlink:title="IncreaseDecreaseInInventories" />
    <link:label xlink:type="resource" xlink:label="label_IncreaseDecreaseInInventories" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_IncreaseDecreaseInInventories" xml:lang="en-US" id="label_IncreaseDecreaseInInventories">Increase (Decrease) in Inventories</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncreaseDecreaseInInventories" xlink:to="label_IncreaseDecreaseInInventories" xlink:title="label: IncreaseDecreaseInInventories to label_IncreaseDecreaseInInventories" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IncreaseDecreaseInInventories_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_IncreaseDecreaseInInventories" xml:lang="en-US" id="label_IncreaseDecreaseInInventories_2">Inventories</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncreaseDecreaseInInventories" xlink:to="label_IncreaseDecreaseInInventories_2" xlink:title="label: IncreaseDecreaseInInventories to label_IncreaseDecreaseInInventories" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInRestrictedCash" xlink:label="IncreaseDecreaseInRestrictedCash" xlink:title="IncreaseDecreaseInRestrictedCash" />
    <link:label xlink:type="resource" xlink:label="label_IncreaseDecreaseInRestrictedCash" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_IncreaseDecreaseInRestrictedCash" xml:lang="en-US" id="label_IncreaseDecreaseInRestrictedCash">Increase (Decrease) in Restricted Cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncreaseDecreaseInRestrictedCash" xlink:to="label_IncreaseDecreaseInRestrictedCash" xlink:title="label: IncreaseDecreaseInRestrictedCash to label_IncreaseDecreaseInRestrictedCash" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IncreaseDecreaseInRestrictedCash_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_IncreaseDecreaseInRestrictedCash" xml:lang="en-US" id="label_IncreaseDecreaseInRestrictedCash_2">(Increase) decrease in restricted cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncreaseDecreaseInRestrictedCash" xlink:to="label_IncreaseDecreaseInRestrictedCash_2" xlink:title="label: IncreaseDecreaseInRestrictedCash to label_IncreaseDecreaseInRestrictedCash" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="IncreaseDecreaseInStockholdersEquityRollForward" xlink:title="IncreaseDecreaseInStockholdersEquityRollForward" />
    <link:label xlink:type="resource" xlink:label="label_IncreaseDecreaseInStockholdersEquityRollForward" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_IncreaseDecreaseInStockholdersEquityRollForward" xml:lang="en-US" id="label_IncreaseDecreaseInStockholdersEquityRollForward">Increase (Decrease) in Stockholders' Equity [Roll Forward]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="label_IncreaseDecreaseInStockholdersEquityRollForward" xlink:title="label: IncreaseDecreaseInStockholdersEquityRollForward to label_IncreaseDecreaseInStockholdersEquityRollForward" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_IncreaseDecreaseInStockholdersEquityRollForward_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_IncreaseDecreaseInStockholdersEquityRollForward" xml:lang="en-US" id="label_IncreaseDecreaseInStockholdersEquityRollForward_2">Increase (Decrease) in Stockholders' Equity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="label_IncreaseDecreaseInStockholdersEquityRollForward_2" xlink:title="label: IncreaseDecreaseInStockholdersEquityRollForward to label_IncreaseDecreaseInStockholdersEquityRollForward" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InterestExpense" xlink:label="InterestExpense" xlink:title="InterestExpense" />
    <link:label xlink:type="resource" xlink:label="label_InterestExpense" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InterestExpense" xml:lang="en-US" id="label_InterestExpense">Interest Expense</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InterestExpense" xlink:to="label_InterestExpense" xlink:title="label: InterestExpense to label_InterestExpense" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InterestExpense_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_InterestExpense" xml:lang="en-US" id="label_InterestExpense_2">Interest expense</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InterestExpense" xlink:to="label_InterestExpense_2" xlink:title="label: InterestExpense to label_InterestExpense" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InterestPaid" xlink:label="InterestPaid" xlink:title="InterestPaid" />
    <link:label xlink:type="resource" xlink:label="label_InterestPaid" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InterestPaid" xml:lang="en-US" id="label_InterestPaid">Cash paid for interest</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InterestPaid" xlink:to="label_InterestPaid" xlink:title="label: InterestPaid to label_InterestPaid" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InterestPaid_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InterestPaid" xml:lang="en-US" id="label_InterestPaid_2">Interest Paid</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InterestPaid" xlink:to="label_InterestPaid_2" xlink:title="label: InterestPaid to label_InterestPaid" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InternalRevenueServiceIRSMember" xlink:label="InternalRevenueServiceIRSMember" xlink:title="InternalRevenueServiceIRSMember" />
    <link:label xlink:type="resource" xlink:label="label_InternalRevenueServiceIRSMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InternalRevenueServiceIRSMember" xml:lang="en-US" id="label_InternalRevenueServiceIRSMember">Internal Revenue Service (IRS) [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InternalRevenueServiceIRSMember" xlink:to="label_InternalRevenueServiceIRSMember" xlink:title="label: InternalRevenueServiceIRSMember to label_InternalRevenueServiceIRSMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InternalRevenueServiceIRSMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InternalRevenueServiceIRSMember" xml:lang="en-US" id="label_InternalRevenueServiceIRSMember_2">United States</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InternalRevenueServiceIRSMember" xlink:to="label_InternalRevenueServiceIRSMember_2" xlink:title="label: InternalRevenueServiceIRSMember to label_InternalRevenueServiceIRSMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InternalRevenueServiceIRSMember_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_InternalRevenueServiceIRSMember" xml:lang="en-US" id="label_InternalRevenueServiceIRSMember_3">Federal</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InternalRevenueServiceIRSMember" xlink:to="label_InternalRevenueServiceIRSMember_3" xlink:title="label: InternalRevenueServiceIRSMember to label_InternalRevenueServiceIRSMember" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="InventoryPolicyTextBlock" xlink:title="InventoryPolicyTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_InventoryPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryPolicyTextBlock" xml:lang="en-US" id="label_InventoryPolicyTextBlock">Inventories</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryPolicyTextBlock" xlink:to="label_InventoryPolicyTextBlock" xlink:title="label: InventoryPolicyTextBlock to label_InventoryPolicyTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryPolicyTextBlock" xml:lang="en-US" id="label_InventoryPolicyTextBlock_2">Inventory, Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryPolicyTextBlock" xlink:to="label_InventoryPolicyTextBlock_2" xlink:title="label: InventoryPolicyTextBlock to label_InventoryPolicyTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryValuationReserves" xlink:label="InventoryValuationReserves" xlink:title="InventoryValuationReserves" />
    <link:label xlink:type="resource" xlink:label="label_InventoryValuationReserves" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryValuationReserves" xml:lang="en-US" id="label_InventoryValuationReserves">Inventory Valuation Reserves</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryValuationReserves" xlink:to="label_InventoryValuationReserves" xlink:title="label: InventoryValuationReserves to label_InventoryValuationReserves" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryValuationReserves_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryValuationReserves" xml:lang="en-US" id="label_InventoryValuationReserves_2">Inventory reserves</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryValuationReserves" xlink:to="label_InventoryValuationReserves_2" xlink:title="label: InventoryValuationReserves to label_InventoryValuationReserves" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="InventoryWriteDown" xlink:title="InventoryWriteDown" />
    <link:label xlink:type="resource" xlink:label="label_InventoryWriteDown" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryWriteDown" xml:lang="en-US" id="label_InventoryWriteDown">Inventory Write-down</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryWriteDown" xlink:to="label_InventoryWriteDown" xlink:title="label: InventoryWriteDown to label_InventoryWriteDown" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryWriteDown_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryWriteDown" xml:lang="en-US" id="label_InventoryWriteDown_2">Provision for excess inventory</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryWriteDown" xlink:to="label_InventoryWriteDown_2" xlink:title="label: InventoryWriteDown to label_InventoryWriteDown" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="InventoryFinishedGoodsNetOfReserves" xlink:title="InventoryFinishedGoodsNetOfReserves" />
    <link:label xlink:type="resource" xlink:label="label_InventoryFinishedGoodsNetOfReserves" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryFinishedGoodsNetOfReserves" xml:lang="en-US" id="label_InventoryFinishedGoodsNetOfReserves">Inventory, Finished Goods, Net of Reserves</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryFinishedGoodsNetOfReserves" xlink:to="label_InventoryFinishedGoodsNetOfReserves" xlink:title="label: InventoryFinishedGoodsNetOfReserves to label_InventoryFinishedGoodsNetOfReserves" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryFinishedGoodsNetOfReserves_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryFinishedGoodsNetOfReserves" xml:lang="en-US" id="label_InventoryFinishedGoodsNetOfReserves_2">Finished goods (completed systems)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryFinishedGoodsNetOfReserves" xlink:to="label_InventoryFinishedGoodsNetOfReserves_2" xlink:title="label: InventoryFinishedGoodsNetOfReserves to label_InventoryFinishedGoodsNetOfReserves" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryValuationReserveMember" xlink:label="InventoryValuationReserveMember" xlink:title="InventoryValuationReserveMember" />
    <link:label xlink:type="resource" xlink:label="label_InventoryValuationReserveMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryValuationReserveMember" xml:lang="en-US" id="label_InventoryValuationReserveMember">Inventory Valuation Reserve [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryValuationReserveMember" xlink:to="label_InventoryValuationReserveMember" xlink:title="label: InventoryValuationReserveMember to label_InventoryValuationReserveMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryValuationReserveMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryValuationReserveMember" xml:lang="en-US" id="label_InventoryValuationReserveMember_2">Reserve for excess and obsolete inventory</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryValuationReserveMember" xlink:to="label_InventoryValuationReserveMember_2" xlink:title="label: InventoryValuationReserveMember to label_InventoryValuationReserveMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryValuationReserveMember_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_InventoryValuationReserveMember" xml:lang="en-US" id="label_InventoryValuationReserveMember_3">Inventory reserves</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryValuationReserveMember" xlink:to="label_InventoryValuationReserveMember_3" xlink:title="label: InventoryValuationReserveMember to label_InventoryValuationReserveMember" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="InventoryRawMaterialsNetOfReserves" xlink:title="InventoryRawMaterialsNetOfReserves" />
    <link:label xlink:type="resource" xlink:label="label_InventoryRawMaterialsNetOfReserves" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryRawMaterialsNetOfReserves" xml:lang="en-US" id="label_InventoryRawMaterialsNetOfReserves">Inventory, Raw Materials, Net of Reserves</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryRawMaterialsNetOfReserves" xlink:to="label_InventoryRawMaterialsNetOfReserves" xlink:title="label: InventoryRawMaterialsNetOfReserves to label_InventoryRawMaterialsNetOfReserves" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryRawMaterialsNetOfReserves_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryRawMaterialsNetOfReserves" xml:lang="en-US" id="label_InventoryRawMaterialsNetOfReserves_2">Raw materials</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryRawMaterialsNetOfReserves" xlink:to="label_InventoryRawMaterialsNetOfReserves_2" xlink:title="label: InventoryRawMaterialsNetOfReserves to label_InventoryRawMaterialsNetOfReserves" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="InventoryDisclosureTextBlock" xlink:title="InventoryDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_InventoryDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryDisclosureTextBlock" xml:lang="en-US" id="label_InventoryDisclosureTextBlock">Inventory Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryDisclosureTextBlock" xlink:to="label_InventoryDisclosureTextBlock" xlink:title="label: InventoryDisclosureTextBlock to label_InventoryDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryDisclosureTextBlock" xml:lang="en-US" id="label_InventoryDisclosureTextBlock_2">Inventories, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryDisclosureTextBlock" xlink:to="label_InventoryDisclosureTextBlock_2" xlink:title="label: InventoryDisclosureTextBlock to label_InventoryDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryNet" xlink:label="InventoryNet" xlink:title="InventoryNet" />
    <link:label xlink:type="resource" xlink:label="label_InventoryNet" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryNet" xml:lang="en-US" id="label_InventoryNet">Inventory, Net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryNet" xlink:to="label_InventoryNet" xlink:title="label: InventoryNet to label_InventoryNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryNet_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryNet" xml:lang="en-US" id="label_InventoryNet_2">Inventories, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryNet" xlink:to="label_InventoryNet_2" xlink:title="label: InventoryNet to label_InventoryNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryNet_3" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_InventoryNet" xml:lang="en-US" id="label_InventoryNet_3">Inventories, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryNet" xlink:to="label_InventoryNet_3" xlink:title="label: InventoryNet to label_InventoryNet" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="InventoryDisclosureAbstract" xlink:title="InventoryDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_InventoryDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryDisclosureAbstract" xml:lang="en-US" id="label_InventoryDisclosureAbstract">Inventories, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryDisclosureAbstract" xlink:to="label_InventoryDisclosureAbstract" xlink:title="label: InventoryDisclosureAbstract to label_InventoryDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="InventoryWorkInProcessNetOfReserves" xlink:title="InventoryWorkInProcessNetOfReserves" />
    <link:label xlink:type="resource" xlink:label="label_InventoryWorkInProcessNetOfReserves" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InventoryWorkInProcessNetOfReserves" xml:lang="en-US" id="label_InventoryWorkInProcessNetOfReserves">Inventory, Work in Process, Net of Reserves</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryWorkInProcessNetOfReserves" xlink:to="label_InventoryWorkInProcessNetOfReserves" xlink:title="label: InventoryWorkInProcessNetOfReserves to label_InventoryWorkInProcessNetOfReserves" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InventoryWorkInProcessNetOfReserves_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InventoryWorkInProcessNetOfReserves" xml:lang="en-US" id="label_InventoryWorkInProcessNetOfReserves_2">Work in process</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InventoryWorkInProcessNetOfReserves" xlink:to="label_InventoryWorkInProcessNetOfReserves_2" xlink:title="label: InventoryWorkInProcessNetOfReserves to label_InventoryWorkInProcessNetOfReserves" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="InvestmentIncomeInterest" xlink:title="InvestmentIncomeInterest" />
    <link:label xlink:type="resource" xlink:label="label_InvestmentIncomeInterest" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InvestmentIncomeInterest" xml:lang="en-US" id="label_InvestmentIncomeInterest">Investment Income, Interest</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InvestmentIncomeInterest" xlink:to="label_InvestmentIncomeInterest" xlink:title="label: InvestmentIncomeInterest to label_InvestmentIncomeInterest" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_InvestmentIncomeInterest_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_InvestmentIncomeInterest" xml:lang="en-US" id="label_InvestmentIncomeInterest_2">Interest income</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InvestmentIncomeInterest" xlink:to="label_InvestmentIncomeInterest_2" xlink:title="label: InvestmentIncomeInterest to label_InvestmentIncomeInterest" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="LettersOfCreditOutstandingAmount" xlink:title="LettersOfCreditOutstandingAmount" />
    <link:label xlink:type="resource" xlink:label="label_LettersOfCreditOutstandingAmount" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LettersOfCreditOutstandingAmount" xml:lang="en-US" id="label_LettersOfCreditOutstandingAmount">Letters of Credit Outstanding, Amount</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LettersOfCreditOutstandingAmount" xlink:to="label_LettersOfCreditOutstandingAmount" xlink:title="label: LettersOfCreditOutstandingAmount to label_LettersOfCreditOutstandingAmount" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LettersOfCreditOutstandingAmount_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LettersOfCreditOutstandingAmount" xml:lang="en-US" id="label_LettersOfCreditOutstandingAmount_2">Standby letters of credit issued under the credit line</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LettersOfCreditOutstandingAmount" xlink:to="label_LettersOfCreditOutstandingAmount_2" xlink:title="label: LettersOfCreditOutstandingAmount to label_LettersOfCreditOutstandingAmount" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="LongtermDebtTypeDomain" xlink:title="LongtermDebtTypeDomain" />
    <link:label xlink:type="resource" xlink:label="label_LongtermDebtTypeDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LongtermDebtTypeDomain" xml:lang="en-US" id="label_LongtermDebtTypeDomain">Long-term Debt, Type [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LongtermDebtTypeDomain" xlink:to="label_LongtermDebtTypeDomain" xlink:title="label: LongtermDebtTypeDomain to label_LongtermDebtTypeDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="LongtermDebtTypeAxis" xlink:title="LongtermDebtTypeAxis" />
    <link:label xlink:type="resource" xlink:label="label_LongtermDebtTypeAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LongtermDebtTypeAxis" xml:lang="en-US" id="label_LongtermDebtTypeAxis">Long-term Debt, Type [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LongtermDebtTypeAxis" xlink:to="label_LongtermDebtTypeAxis" xlink:title="label: LongtermDebtTypeAxis to label_LongtermDebtTypeAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LandAndBuildingMember" xlink:label="LandAndBuildingMember" xlink:title="LandAndBuildingMember" />
    <link:label xlink:type="resource" xlink:label="label_LandAndBuildingMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LandAndBuildingMember" xml:lang="en-US" id="label_LandAndBuildingMember">Land and buildings</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LandAndBuildingMember" xlink:to="label_LandAndBuildingMember" xlink:title="label: LandAndBuildingMember to label_LandAndBuildingMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LandAndBuildingMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LandAndBuildingMember" xml:lang="en-US" id="label_LandAndBuildingMember_2">Land and Building [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LandAndBuildingMember" xlink:to="label_LandAndBuildingMember_2" xlink:title="label: LandAndBuildingMember to label_LandAndBuildingMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LeasesOperatingAbstract" xlink:label="LeasesOperatingAbstract" xlink:title="LeasesOperatingAbstract" />
    <link:label xlink:type="resource" xlink:label="label_LeasesOperatingAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LeasesOperatingAbstract" xml:lang="en-US" id="label_LeasesOperatingAbstract">Lease Commitments</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LeasesOperatingAbstract" xlink:to="label_LeasesOperatingAbstract" xlink:title="label: LeasesOperatingAbstract to label_LeasesOperatingAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LeasesOperatingAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LeasesOperatingAbstract" xml:lang="en-US" id="label_LeasesOperatingAbstract_2">Leases, Operating [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LeasesOperatingAbstract" xlink:to="label_LeasesOperatingAbstract_2" xlink:title="label: LeasesOperatingAbstract to label_LeasesOperatingAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="LiabilitiesCurrent" xlink:title="LiabilitiesCurrent" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LiabilitiesCurrent" xml:lang="en-US" id="label_LiabilitiesCurrent">Liabilities, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesCurrent" xlink:to="label_LiabilitiesCurrent" xlink:title="label: LiabilitiesCurrent to label_LiabilitiesCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesCurrent_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_LiabilitiesCurrent" xml:lang="en-US" id="label_LiabilitiesCurrent_2">Total current liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesCurrent" xlink:to="label_LiabilitiesCurrent_2" xlink:title="label: LiabilitiesCurrent to label_LiabilitiesCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="LiabilitiesCurrentAbstract" xlink:title="LiabilitiesCurrentAbstract" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesCurrentAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LiabilitiesCurrentAbstract" xml:lang="en-US" id="label_LiabilitiesCurrentAbstract">Current liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesCurrentAbstract" xlink:to="label_LiabilitiesCurrentAbstract" xlink:title="label: LiabilitiesCurrentAbstract to label_LiabilitiesCurrentAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesCurrentAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LiabilitiesCurrentAbstract" xml:lang="en-US" id="label_LiabilitiesCurrentAbstract_2">Liabilities, Current [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesCurrentAbstract" xlink:to="label_LiabilitiesCurrentAbstract_2" xlink:title="label: LiabilitiesCurrentAbstract to label_LiabilitiesCurrentAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_Liabilities" xlink:label="Liabilities" xlink:title="Liabilities" />
    <link:label xlink:type="resource" xlink:label="label_Liabilities" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_Liabilities" xml:lang="en-US" id="label_Liabilities">Total liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="Liabilities" xlink:to="label_Liabilities" xlink:title="label: Liabilities to label_Liabilities" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_Liabilities_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_Liabilities" xml:lang="en-US" id="label_Liabilities_2">Liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="Liabilities" xlink:to="label_Liabilities_2" xlink:title="label: Liabilities to label_Liabilities" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="LiabilitiesAndStockholdersEquityAbstract" xlink:title="LiabilitiesAndStockholdersEquityAbstract" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesAndStockholdersEquityAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LiabilitiesAndStockholdersEquityAbstract" xml:lang="en-US" id="label_LiabilitiesAndStockholdersEquityAbstract">Liabilities and Equity [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesAndStockholdersEquityAbstract" xlink:to="label_LiabilitiesAndStockholdersEquityAbstract" xlink:title="label: LiabilitiesAndStockholdersEquityAbstract to label_LiabilitiesAndStockholdersEquityAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesAndStockholdersEquityAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LiabilitiesAndStockholdersEquityAbstract" xml:lang="en-US" id="label_LiabilitiesAndStockholdersEquityAbstract_2">LIABILITIES AND STOCKHOLDERS' EQUITY</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesAndStockholdersEquityAbstract" xlink:to="label_LiabilitiesAndStockholdersEquityAbstract_2" xlink:title="label: LiabilitiesAndStockholdersEquityAbstract to label_LiabilitiesAndStockholdersEquityAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="LiabilitiesAndStockholdersEquity" xlink:title="LiabilitiesAndStockholdersEquity" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesAndStockholdersEquity" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LiabilitiesAndStockholdersEquity" xml:lang="en-US" id="label_LiabilitiesAndStockholdersEquity">Liabilities and Equity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesAndStockholdersEquity" xlink:to="label_LiabilitiesAndStockholdersEquity" xlink:title="label: LiabilitiesAndStockholdersEquity to label_LiabilitiesAndStockholdersEquity" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LiabilitiesAndStockholdersEquity_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_LiabilitiesAndStockholdersEquity" xml:lang="en-US" id="label_LiabilitiesAndStockholdersEquity_2">Total liabilities and stockholders' equity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LiabilitiesAndStockholdersEquity" xlink:to="label_LiabilitiesAndStockholdersEquity_2" xlink:title="label: LiabilitiesAndStockholdersEquity to label_LiabilitiesAndStockholdersEquity" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="LineOfCreditFacilityMaximumBorrowingCapacity" xlink:title="LineOfCreditFacilityMaximumBorrowingCapacity" />
    <link:label xlink:type="resource" xlink:label="label_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LineOfCreditFacilityMaximumBorrowingCapacity" xml:lang="en-US" id="label_LineOfCreditFacilityMaximumBorrowingCapacity">Line of Credit Facility, Maximum Borrowing Capacity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LineOfCreditFacilityMaximumBorrowingCapacity" xlink:to="label_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:title="label: LineOfCreditFacilityMaximumBorrowingCapacity to label_LineOfCreditFacilityMaximumBorrowingCapacity" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LineOfCreditFacilityMaximumBorrowingCapacity_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LineOfCreditFacilityMaximumBorrowingCapacity" xml:lang="en-US" id="label_LineOfCreditFacilityMaximumBorrowingCapacity_2">Maximum borrowing capacity under the credit facility</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LineOfCreditFacilityMaximumBorrowingCapacity" xlink:to="label_LineOfCreditFacilityMaximumBorrowingCapacity_2" xlink:title="label: LineOfCreditFacilityMaximumBorrowingCapacity to label_LineOfCreditFacilityMaximumBorrowingCapacity" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:label="LineOfCreditFacilityRemainingBorrowingCapacity" xlink:title="LineOfCreditFacilityRemainingBorrowingCapacity" />
    <link:label xlink:type="resource" xlink:label="label_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LineOfCreditFacilityRemainingBorrowingCapacity" xml:lang="en-US" id="label_LineOfCreditFacilityRemainingBorrowingCapacity">Line of Credit Facility, Remaining Borrowing Capacity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LineOfCreditFacilityRemainingBorrowingCapacity" xlink:to="label_LineOfCreditFacilityRemainingBorrowingCapacity" xlink:title="label: LineOfCreditFacilityRemainingBorrowingCapacity to label_LineOfCreditFacilityRemainingBorrowingCapacity" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LineOfCreditFacilityRemainingBorrowingCapacity_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LineOfCreditFacilityRemainingBorrowingCapacity" xml:lang="en-US" id="label_LineOfCreditFacilityRemainingBorrowingCapacity_2">Available borrowing capacity under the credit facility</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LineOfCreditFacilityRemainingBorrowingCapacity" xlink:to="label_LineOfCreditFacilityRemainingBorrowingCapacity_2" xlink:title="label: LineOfCreditFacilityRemainingBorrowingCapacity to label_LineOfCreditFacilityRemainingBorrowingCapacity" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:label="LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:title="LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xml:lang="en-US" id="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock">Loans, Notes, Trade and Other Receivables Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:to="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:title="label: LoansNotesTradeAndOtherReceivablesDisclosureTextBlock to label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xml:lang="en-US" id="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_2">Accounts Receivable, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:to="label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_2" xlink:title="label: LoansNotesTradeAndOtherReceivablesDisclosureTextBlock to label_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:label="LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:title="LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" />
    <link:label xlink:type="resource" xlink:label="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xml:lang="en-US" id="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract">Long-term Commitment (Excluding Unconditional Purchase Obligation) [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:to="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:title="label: LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract to label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xml:lang="en-US" id="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_2">Purchase Commitments</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:to="label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_2" xlink:title="label: LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract to label_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_LongTermPurchaseCommitmentAmount" xlink:label="LongTermPurchaseCommitmentAmount" xlink:title="LongTermPurchaseCommitmentAmount" />
    <link:label xlink:type="resource" xlink:label="label_LongTermPurchaseCommitmentAmount" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_LongTermPurchaseCommitmentAmount" xml:lang="en-US" id="label_LongTermPurchaseCommitmentAmount">Non-cancelable contracts and purchase orders for inventory</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="LongTermPurchaseCommitmentAmount" xlink:to="label_LongTermPurchaseCommitmentAmount" xlink:title="label: LongTermPurchaseCommitmentAmount to label_LongTermPurchaseCommitmentAmount" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_LongTermPurchaseCommitmentAmount_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_LongTermPurchaseCommitmentAmount" xml:lang="en-US" id="label_LongTermPurchaseCommitmentAmount_2">Long-term Purchase Commitment, Amount</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="MachineryAndEquipmentMember" xlink:title="MachineryAndEquipmentMember" />
    <link:label xlink:type="resource" xlink:label="label_MachineryAndEquipmentMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_MachineryAndEquipmentMember" xml:lang="en-US" id="label_MachineryAndEquipmentMember">Machinery and equipment</link:label>
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    <link:label xlink:type="resource" xlink:label="label_MachineryAndEquipmentMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_MachineryAndEquipmentMember" xml:lang="en-US" id="label_MachineryAndEquipmentMember_2">Machinery and Equipment [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MachineryAndEquipmentMember" xlink:to="label_MachineryAndEquipmentMember_2" xlink:title="label: MachineryAndEquipmentMember to label_MachineryAndEquipmentMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="MajorCustomersAxis" xlink:title="MajorCustomersAxis" />
    <link:label xlink:type="resource" xlink:label="label_MajorCustomersAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_MajorCustomersAxis" xml:lang="en-US" id="label_MajorCustomersAxis">Major Customers [Axis]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MaximumMember" xlink:label="MaximumMember" xlink:title="MaximumMember" />
    <link:label xlink:type="resource" xlink:label="label_MaximumMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_MaximumMember" xml:lang="en-US" id="label_MaximumMember">Maximum</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MaximumMember" xlink:to="label_MaximumMember" xlink:title="label: MaximumMember to label_MaximumMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_MaximumMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_MaximumMember" xml:lang="en-US" id="label_MaximumMember_2">Maximum [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MaximumMember" xlink:to="label_MaximumMember_2" xlink:title="label: MaximumMember to label_MaximumMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MinimumMember" xlink:label="MinimumMember" xlink:title="MinimumMember" />
    <link:label xlink:type="resource" xlink:label="label_MinimumMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_MinimumMember" xml:lang="en-US" id="label_MinimumMember">Minimum</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MinimumMember" xlink:to="label_MinimumMember" xlink:title="label: MinimumMember to label_MinimumMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_MinimumMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_MinimumMember" xml:lang="en-US" id="label_MinimumMember_2">Minimum [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MinimumMember" xlink:to="label_MinimumMember_2" xlink:title="label: MinimumMember to label_MinimumMember" use="optional" />
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    <link:label xlink:type="resource" xlink:label="label_MovementInValuationAllowancesAndReservesRollForward" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_MovementInValuationAllowancesAndReservesRollForward" xml:lang="en-US" id="label_MovementInValuationAllowancesAndReservesRollForward">Movement in Valuation Allowances and Reserves [Roll Forward]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_MovementInValuationAllowancesAndReservesRollForward_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_MovementInValuationAllowancesAndReservesRollForward" xml:lang="en-US" id="label_MovementInValuationAllowancesAndReservesRollForward_2">Changes in Valuation and Qualifying Accounts</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:label="MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:title="MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:to="label_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:title="label: MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward to label_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" use="optional" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NoncurrentAssets" xlink:label="NoncurrentAssets" xlink:title="NoncurrentAssets" />
    <link:label xlink:type="resource" xlink:label="label_NoncurrentAssets" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_NoncurrentAssets" xml:lang="en-US" id="label_NoncurrentAssets">Long-Lived Assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NoncurrentAssets" xlink:to="label_NoncurrentAssets" xlink:title="label: NoncurrentAssets to label_NoncurrentAssets" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_NoncurrentAssets_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NoncurrentAssets" xml:lang="en-US" id="label_NoncurrentAssets_2">Long-Lived Assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NoncurrentAssets" xlink:to="label_NoncurrentAssets_2" xlink:title="label: NoncurrentAssets to label_NoncurrentAssets" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="NameOfMajorCustomerDomain" xlink:title="NameOfMajorCustomerDomain" />
    <link:label xlink:type="resource" xlink:label="label_NameOfMajorCustomerDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NameOfMajorCustomerDomain" xml:lang="en-US" id="label_NameOfMajorCustomerDomain">Name of Major Customer [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NameOfMajorCustomerDomain" xlink:to="label_NameOfMajorCustomerDomain" xlink:title="label: NameOfMajorCustomerDomain to label_NameOfMajorCustomerDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NatureOfOperations" xlink:label="NatureOfOperations" xlink:title="NatureOfOperations" />
    <link:label xlink:type="resource" xlink:label="label_NatureOfOperations" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NatureOfOperations" xml:lang="en-US" id="label_NatureOfOperations">Nature of Operations [Text Block]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_NatureOfOperations_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_NatureOfOperations" xml:lang="en-US" id="label_NatureOfOperations_2">Nature of Business</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NatureOfOperations" xlink:to="label_NatureOfOperations_2" xlink:title="label: NatureOfOperations to label_NatureOfOperations" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xlink:label="NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xlink:title="NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" />
    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xml:lang="en-US" id="label_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract">Cash flows from financing activities</link:label>
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    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract" xml:lang="en-US" id="label_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract_2">Net Cash Provided by (Used in) Financing Activities, Continuing Operations [Abstract]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations" xlink:label="NetCashProvidedByUsedInOperatingActivitiesContinuingOperations" xlink:title="NetCashProvidedByUsedInOperatingActivitiesContinuingOperations" />
    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations" xml:lang="en-US" id="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations">Net cash (used for) provided by operating activities</link:label>
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    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations" xml:lang="en-US" id="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations_2">Net Cash Provided by (Used in) Operating Activities, Continuing Operations</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xlink:label="NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xlink:title="NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" />
    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xml:lang="en-US" id="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract">Cash flows from operating activities</link:label>
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    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract" xml:lang="en-US" id="label_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract_2">Net Cash Provided by (Used in) Operating Activities, Continuing Operations [Abstract]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInContinuingOperations" xlink:label="NetCashProvidedByUsedInContinuingOperations" xlink:title="NetCashProvidedByUsedInContinuingOperations" />
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    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInContinuingOperations_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NetCashProvidedByUsedInContinuingOperations" xml:lang="en-US" id="label_NetCashProvidedByUsedInContinuingOperations_2">Net Cash Provided by (Used in) Continuing Operations</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="NetCashProvidedByUsedInContinuingOperations" xlink:to="label_NetCashProvidedByUsedInContinuingOperations_2" xlink:title="label: NetCashProvidedByUsedInContinuingOperations to label_NetCashProvidedByUsedInContinuingOperations" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations" xlink:label="NetCashProvidedByUsedInInvestingActivitiesContinuingOperations" xlink:title="NetCashProvidedByUsedInInvestingActivitiesContinuingOperations" />
    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations" xml:lang="en-US" id="label_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations">Net cash provided by (used for) investing activities</link:label>
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    <link:label xlink:type="resource" xlink:label="label_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations" xml:lang="en-US" id="label_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations_2">Net Cash Provided by (Used in) Investing Activities, Continuing Operations</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="NetIncomeLossAvailableToCommonStockholdersBasic" xlink:title="NetIncomeLossAvailableToCommonStockholdersBasic" />
    <link:label xlink:type="resource" xlink:label="label_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_NetIncomeLossAvailableToCommonStockholdersBasic" xml:lang="en-US" id="label_NetIncomeLossAvailableToCommonStockholdersBasic">Net income (loss)</link:label>
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    <link:label xlink:type="resource" xlink:label="label_NetIncomeLossAvailableToCommonStockholdersBasic_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_NetIncomeLossAvailableToCommonStockholdersBasic" xml:lang="en-US" id="label_NetIncomeLossAvailableToCommonStockholdersBasic_2">Net income (loss)</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="NonoperatingIncomeExpense" xlink:title="NonoperatingIncomeExpense" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="NonoperatingIncomeExpenseAbstract" xlink:title="NonoperatingIncomeExpenseAbstract" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingLeasesRentExpenseNet" xlink:label="OperatingLeasesRentExpenseNet" xlink:title="OperatingLeasesRentExpenseNet" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesRentExpenseNet" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OperatingLeasesRentExpenseNet" xml:lang="en-US" id="label_OperatingLeasesRentExpenseNet">Rental expense under operating leases</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesRentExpenseNet" xlink:to="label_OperatingLeasesRentExpenseNet" xlink:title="label: OperatingLeasesRentExpenseNet to label_OperatingLeasesRentExpenseNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesRentExpenseNet_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLeasesRentExpenseNet" xml:lang="en-US" id="label_OperatingLeasesRentExpenseNet_2">Operating Leases, Rent Expense, Net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesRentExpenseNet" xlink:to="label_OperatingLeasesRentExpenseNet_2" xlink:title="label: OperatingLeasesRentExpenseNet to label_OperatingLeasesRentExpenseNet" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="OperatingIncomeLoss" xlink:title="OperatingIncomeLoss" />
    <link:label xlink:type="resource" xlink:label="label_OperatingIncomeLoss" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingIncomeLoss" xml:lang="en-US" id="label_OperatingIncomeLoss">Operating Income (Loss)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingIncomeLoss" xlink:to="label_OperatingIncomeLoss" xlink:title="label: OperatingIncomeLoss to label_OperatingIncomeLoss" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingIncomeLoss_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_OperatingIncomeLoss" xml:lang="en-US" id="label_OperatingIncomeLoss_2">Income (loss) from operations</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingIncomeLoss" xlink:to="label_OperatingIncomeLoss_2" xlink:title="label: OperatingIncomeLoss to label_OperatingIncomeLoss" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xlink:label="OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xlink:title="OperatingLeasesFutureMinimumPaymentsDueInThreeYears" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears">2015</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueInThreeYears to label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears_2">Operating Leases, Future Minimum Payments, Due in Three Years</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueInThreeYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears_2" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueInThreeYears to label_OperatingLeasesFutureMinimumPaymentsDueInThreeYears" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xlink:label="OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xlink:title="OperatingLeasesFutureMinimumPaymentsDueInTwoYears" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears">2014</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueInTwoYears to label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears_2">Operating Leases, Future Minimum Payments, Due in Two Years</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueInTwoYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears_2" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueInTwoYears to label_OperatingLeasesFutureMinimumPaymentsDueInTwoYears" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingLeasesFutureMinimumPaymentsDueCurrent" xlink:label="OperatingLeasesFutureMinimumPaymentsDueCurrent" xlink:title="OperatingLeasesFutureMinimumPaymentsDueCurrent" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueCurrent" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueCurrent" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueCurrent">2013</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueCurrent" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueCurrent" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueCurrent to label_OperatingLeasesFutureMinimumPaymentsDueCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueCurrent_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueCurrent" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueCurrent_2">Operating Leases, Future Minimum Payments Due, Next Twelve Months</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueCurrent" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueCurrent_2" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueCurrent to label_OperatingLeasesFutureMinimumPaymentsDueCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingLeasesFutureMinimumPaymentsDueInFourYears" xlink:label="OperatingLeasesFutureMinimumPaymentsDueInFourYears" xlink:title="OperatingLeasesFutureMinimumPaymentsDueInFourYears" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears">2016</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueInFourYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueInFourYears to label_OperatingLeasesFutureMinimumPaymentsDueInFourYears" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears_2">Operating Leases, Future Minimum Payments, Due in Four Years</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDueInFourYears" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDueInFourYears_2" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDueInFourYears to label_OperatingLeasesFutureMinimumPaymentsDueInFourYears" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingLossCarryforwardsLineItems" xlink:label="OperatingLossCarryforwardsLineItems" xlink:title="OperatingLossCarryforwardsLineItems" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLossCarryforwardsLineItems" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OperatingLossCarryforwardsLineItems" xml:lang="en-US" id="label_OperatingLossCarryforwardsLineItems">Operating loss carryforwards</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLossCarryforwardsLineItems" xlink:to="label_OperatingLossCarryforwardsLineItems" xlink:title="label: OperatingLossCarryforwardsLineItems to label_OperatingLossCarryforwardsLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLossCarryforwardsLineItems_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLossCarryforwardsLineItems" xml:lang="en-US" id="label_OperatingLossCarryforwardsLineItems_2">Operating Loss Carryforwards [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLossCarryforwardsLineItems" xlink:to="label_OperatingLossCarryforwardsLineItems_2" xlink:title="label: OperatingLossCarryforwardsLineItems to label_OperatingLossCarryforwardsLineItems" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OperatingLeasesFutureMinimumPaymentsDue" xlink:label="OperatingLeasesFutureMinimumPaymentsDue" xlink:title="OperatingLeasesFutureMinimumPaymentsDue" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDue" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDue" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDue">Total</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDue" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDue" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDue to label_OperatingLeasesFutureMinimumPaymentsDue" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OperatingLeasesFutureMinimumPaymentsDue_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OperatingLeasesFutureMinimumPaymentsDue" xml:lang="en-US" id="label_OperatingLeasesFutureMinimumPaymentsDue_2">Operating Leases, Future Minimum Payments Due</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OperatingLeasesFutureMinimumPaymentsDue" xlink:to="label_OperatingLeasesFutureMinimumPaymentsDue_2" xlink:title="label: OperatingLeasesFutureMinimumPaymentsDue to label_OperatingLeasesFutureMinimumPaymentsDue" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:title="OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <link:label xlink:type="resource" xlink:label="label_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xml:lang="en-US" id="label_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">Nature of Business and Basis of Presentation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="label_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:title="label: OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract to label_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:label="OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:title="OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xml:lang="en-US" id="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock">Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:to="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:title="label: OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock to label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xml:lang="en-US" id="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_2">Nature of Business and Basis of Presentation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:to="label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_2" xlink:title="label: OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock to label_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherNoncashIncomeExpense" xlink:label="OtherNoncashIncomeExpense" xlink:title="OtherNoncashIncomeExpense" />
    <link:label xlink:type="resource" xlink:label="label_OtherNoncashIncomeExpense" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OtherNoncashIncomeExpense" xml:lang="en-US" id="label_OtherNoncashIncomeExpense">Other Noncash Income (Expense)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherNoncashIncomeExpense" xlink:to="label_OtherNoncashIncomeExpense" xlink:title="label: OtherNoncashIncomeExpense to label_OtherNoncashIncomeExpense" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OtherNoncashIncomeExpense_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_OtherNoncashIncomeExpense" xml:lang="en-US" id="label_OtherNoncashIncomeExpense_2">Other</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherNoncashIncomeExpense" xlink:to="label_OtherNoncashIncomeExpense_2" xlink:title="label: OtherNoncashIncomeExpense to label_OtherNoncashIncomeExpense" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="OtherAssetsNoncurrent" xlink:title="OtherAssetsNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_OtherAssetsNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OtherAssetsNoncurrent" xml:lang="en-US" id="label_OtherAssetsNoncurrent">Other Assets, Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherAssetsNoncurrent" xlink:to="label_OtherAssetsNoncurrent" xlink:title="label: OtherAssetsNoncurrent to label_OtherAssetsNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OtherAssetsNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OtherAssetsNoncurrent" xml:lang="en-US" id="label_OtherAssetsNoncurrent_2">Other assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherAssetsNoncurrent" xlink:to="label_OtherAssetsNoncurrent_2" xlink:title="label: OtherAssetsNoncurrent to label_OtherAssetsNoncurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xlink:label="OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xlink:title="OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" />
    <link:label xlink:type="resource" xlink:label="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xml:lang="en-US" id="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax">Other Comprehensive Income (Loss), Foreign Currency Translation Gain (Loss) Arising During Period, Tax</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xlink:to="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xlink:title="label: OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax to label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xml:lang="en-US" id="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax_2">Cumulative foreign translation gain, previously recorded in other comprehensive income</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" xlink:to="label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax_2" xlink:title="label: OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax to label_OtherComprehensiveIncomeForeignCurrencyTranslationGainLossArisingDuringPeriodTax" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" xlink:label="OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" xlink:title="OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" />
    <link:label xlink:type="resource" xlink:label="label_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" xml:lang="en-US" id="label_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract">Other Comprehensive Income (Loss), Pension and Other Postretirement Benefit Plans, Adjustment, Net of Tax [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" xlink:to="label_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" xlink:title="label: OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract to label_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPeriodIncreaseDecreaseAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="OtherLiabilitiesCurrent" xlink:title="OtherLiabilitiesCurrent" />
    <link:label xlink:type="resource" xlink:label="label_OtherLiabilitiesCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OtherLiabilitiesCurrent" xml:lang="en-US" id="label_OtherLiabilitiesCurrent">Other Liabilities, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherLiabilitiesCurrent" xlink:to="label_OtherLiabilitiesCurrent" xlink:title="label: OtherLiabilitiesCurrent to label_OtherLiabilitiesCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_OtherLiabilitiesCurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OtherLiabilitiesCurrent" xml:lang="en-US" id="label_OtherLiabilitiesCurrent_2">Other current liabilities</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductsAndServicesDomain" xlink:label="ProductsAndServicesDomain" xlink:title="ProductsAndServicesDomain" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="PaymentsToAcquirePropertyPlantAndEquipment" xlink:title="PaymentsToAcquirePropertyPlantAndEquipment" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:label="PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:title="PensionAndOtherPostretirementBenefitsDisclosureTextBlock" />
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    <link:label xlink:type="resource" xlink:label="label_PreferredStockParOrStatedValuePerShare" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PreferredStockParOrStatedValuePerShare" xml:lang="en-US" id="label_PreferredStockParOrStatedValuePerShare">Preferred stock, par value (in dollars per share)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PreferredStockParOrStatedValuePerShare" xlink:to="label_PreferredStockParOrStatedValuePerShare" xlink:title="label: PreferredStockParOrStatedValuePerShare to label_PreferredStockParOrStatedValuePerShare" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PreferredStockParOrStatedValuePerShare_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PreferredStockParOrStatedValuePerShare" xml:lang="en-US" id="label_PreferredStockParOrStatedValuePerShare_2">Preferred Stock, Par or Stated Value Per Share</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PreferredStockParOrStatedValuePerShare" xlink:to="label_PreferredStockParOrStatedValuePerShare_2" xlink:title="label: PreferredStockParOrStatedValuePerShare to label_PreferredStockParOrStatedValuePerShare" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PreferredStockSharesOutstanding" xlink:label="PreferredStockSharesOutstanding" xlink:title="PreferredStockSharesOutstanding" />
    <link:label xlink:type="resource" xlink:label="label_PreferredStockSharesOutstanding" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PreferredStockSharesOutstanding" xml:lang="en-US" id="label_PreferredStockSharesOutstanding">Preferred stock, shares outstanding</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PreferredStockSharesOutstanding" xlink:to="label_PreferredStockSharesOutstanding" xlink:title="label: PreferredStockSharesOutstanding to label_PreferredStockSharesOutstanding" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PreferredStockSharesOutstanding_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PreferredStockSharesOutstanding" xml:lang="en-US" id="label_PreferredStockSharesOutstanding_2">Preferred Stock, Shares Outstanding</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PreferredStockSharesOutstanding" xlink:to="label_PreferredStockSharesOutstanding_2" xlink:title="label: PreferredStockSharesOutstanding to label_PreferredStockSharesOutstanding" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="PrepaidExpenseAndOtherAssetsCurrent" xlink:title="PrepaidExpenseAndOtherAssetsCurrent" />
    <link:label xlink:type="resource" xlink:label="label_PrepaidExpenseAndOtherAssetsCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PrepaidExpenseAndOtherAssetsCurrent" xml:lang="en-US" id="label_PrepaidExpenseAndOtherAssetsCurrent">Prepaid Expense and Other Assets, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PrepaidExpenseAndOtherAssetsCurrent" xlink:to="label_PrepaidExpenseAndOtherAssetsCurrent" xlink:title="label: PrepaidExpenseAndOtherAssetsCurrent to label_PrepaidExpenseAndOtherAssetsCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PrepaidExpenseAndOtherAssetsCurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PrepaidExpenseAndOtherAssetsCurrent" xml:lang="en-US" id="label_PrepaidExpenseAndOtherAssetsCurrent_2">Prepaid expenses and other current assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PrepaidExpenseAndOtherAssetsCurrent" xlink:to="label_PrepaidExpenseAndOtherAssetsCurrent_2" xlink:title="label: PrepaidExpenseAndOtherAssetsCurrent to label_PrepaidExpenseAndOtherAssetsCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromSaleOfEquityMethodInvestments" xlink:label="ProceedsFromSaleOfEquityMethodInvestments" xlink:title="ProceedsFromSaleOfEquityMethodInvestments" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfEquityMethodInvestments" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProceedsFromSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_ProceedsFromSaleOfEquityMethodInvestments">Proceeds from sale of SEN</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfEquityMethodInvestments" xlink:to="label_ProceedsFromSaleOfEquityMethodInvestments" xlink:title="label: ProceedsFromSaleOfEquityMethodInvestments to label_ProceedsFromSaleOfEquityMethodInvestments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfEquityMethodInvestments_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProceedsFromSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_ProceedsFromSaleOfEquityMethodInvestments_2">Proceeds from Sale of Equity Method Investments</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfEquityMethodInvestments" xlink:to="label_ProceedsFromSaleOfEquityMethodInvestments_2" xlink:title="label: ProceedsFromSaleOfEquityMethodInvestments to label_ProceedsFromSaleOfEquityMethodInvestments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfEquityMethodInvestments_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_ProceedsFromSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_ProceedsFromSaleOfEquityMethodInvestments_3">Proceeds from the sale of common shares</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfEquityMethodInvestments" xlink:to="label_ProceedsFromSaleOfEquityMethodInvestments_3" xlink:title="label: ProceedsFromSaleOfEquityMethodInvestments to label_ProceedsFromSaleOfEquityMethodInvestments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfEquityMethodInvestments_4" xlink:role="http://www.xbrl.org/2003/role/positiveLabel" xlink:title="label_ProceedsFromSaleOfEquityMethodInvestments" xml:lang="en-US" id="label_ProceedsFromSaleOfEquityMethodInvestments_4">Proceeds from sale under Share Purchase Agreement</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfEquityMethodInvestments" xlink:to="label_ProceedsFromSaleOfEquityMethodInvestments_4" xlink:title="label: ProceedsFromSaleOfEquityMethodInvestments to label_ProceedsFromSaleOfEquityMethodInvestments" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromSaleOfProductiveAssets" xlink:label="ProceedsFromSaleOfProductiveAssets" xlink:title="ProceedsFromSaleOfProductiveAssets" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfProductiveAssets" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProceedsFromSaleOfProductiveAssets" xml:lang="en-US" id="label_ProceedsFromSaleOfProductiveAssets">Proceeds from sale of dry strip assets and intellectual property</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfProductiveAssets" xlink:to="label_ProceedsFromSaleOfProductiveAssets" xlink:title="label: ProceedsFromSaleOfProductiveAssets to label_ProceedsFromSaleOfProductiveAssets" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfProductiveAssets_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProceedsFromSaleOfProductiveAssets" xml:lang="en-US" id="label_ProceedsFromSaleOfProductiveAssets_2">Proceeds from Sale of Productive Assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfProductiveAssets" xlink:to="label_ProceedsFromSaleOfProductiveAssets_2" xlink:title="label: ProceedsFromSaleOfProductiveAssets to label_ProceedsFromSaleOfProductiveAssets" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfProductiveAssets_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_ProceedsFromSaleOfProductiveAssets" xml:lang="en-US" id="label_ProceedsFromSaleOfProductiveAssets_3">Cash proceeds</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfProductiveAssets" xlink:to="label_ProceedsFromSaleOfProductiveAssets_3" xlink:title="label: ProceedsFromSaleOfProductiveAssets to label_ProceedsFromSaleOfProductiveAssets" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromSaleOfProductiveAssets_4" xlink:role="http://www.xbrl.org/2003/role/positiveLabel" xlink:title="label_ProceedsFromSaleOfProductiveAssets" xml:lang="en-US" id="label_ProceedsFromSaleOfProductiveAssets_4">Proceeds</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromSaleOfProductiveAssets" xlink:to="label_ProceedsFromSaleOfProductiveAssets_4" xlink:title="label: ProceedsFromSaleOfProductiveAssets to label_ProceedsFromSaleOfProductiveAssets" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="ProceedsFromStockOptionsExercised" xlink:title="ProceedsFromStockOptionsExercised" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromStockOptionsExercised" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProceedsFromStockOptionsExercised" xml:lang="en-US" id="label_ProceedsFromStockOptionsExercised">Proceeds from Stock Options Exercised</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromStockOptionsExercised" xlink:to="label_ProceedsFromStockOptionsExercised" xlink:title="label: ProceedsFromStockOptionsExercised to label_ProceedsFromStockOptionsExercised" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromStockOptionsExercised_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProceedsFromStockOptionsExercised" xml:lang="en-US" id="label_ProceedsFromStockOptionsExercised_2">Proceeds from exercise of stock options</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromStockOptionsExercised" xlink:to="label_ProceedsFromStockOptionsExercised_2" xlink:title="label: ProceedsFromStockOptionsExercised to label_ProceedsFromStockOptionsExercised" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="ProceedsFromStockPlans" xlink:title="ProceedsFromStockPlans" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromStockPlans" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProceedsFromStockPlans" xml:lang="en-US" id="label_ProceedsFromStockPlans">Proceeds from Stock Plans</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromStockPlans" xlink:to="label_ProceedsFromStockPlans" xlink:title="label: ProceedsFromStockPlans to label_ProceedsFromStockPlans" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProceedsFromStockPlans_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProceedsFromStockPlans" xml:lang="en-US" id="label_ProceedsFromStockPlans_2">Proceeds from Employee Stock Purchase Plan</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProceedsFromStockPlans" xlink:to="label_ProceedsFromStockPlans_2" xlink:title="label: ProceedsFromStockPlans to label_ProceedsFromStockPlans" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:label="ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:title="ProductWarrantyAccrualBalanceSheetClassificationAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xml:lang="en-US" id="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract">Product Warranty Accrual, Balance Sheet Classification [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:to="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:title="label: ProductWarrantyAccrualBalanceSheetClassificationAbstract to label_ProductWarrantyAccrualBalanceSheetClassificationAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xml:lang="en-US" id="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract_2">Product warranty classification</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:to="label_ProductWarrantyAccrualBalanceSheetClassificationAbstract_2" xlink:title="label: ProductWarrantyAccrualBalanceSheetClassificationAbstract to label_ProductWarrantyAccrualBalanceSheetClassificationAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="ProductWarrantyDisclosureTextBlock" xlink:title="ProductWarrantyDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyDisclosureTextBlock" xml:lang="en-US" id="label_ProductWarrantyDisclosureTextBlock">Product Warranty Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyDisclosureTextBlock" xlink:to="label_ProductWarrantyDisclosureTextBlock" xlink:title="label: ProductWarrantyDisclosureTextBlock to label_ProductWarrantyDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyDisclosureTextBlock" xml:lang="en-US" id="label_ProductWarrantyDisclosureTextBlock_2">Product Warranty</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyDisclosureTextBlock" xlink:to="label_ProductWarrantyDisclosureTextBlock_2" xlink:title="label: ProductWarrantyDisclosureTextBlock to label_ProductWarrantyDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="ProductWarrantyAccrualNoncurrent" xlink:title="ProductWarrantyAccrualNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyAccrualNoncurrent" xml:lang="en-US" id="label_ProductWarrantyAccrualNoncurrent">Product Warranty Accrual, Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualNoncurrent" xlink:to="label_ProductWarrantyAccrualNoncurrent" xlink:title="label: ProductWarrantyAccrualNoncurrent to label_ProductWarrantyAccrualNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyAccrualNoncurrent" xml:lang="en-US" id="label_ProductWarrantyAccrualNoncurrent_2">Amount classified as long-term</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualNoncurrent" xlink:to="label_ProductWarrantyAccrualNoncurrent_2" xlink:title="label: ProductWarrantyAccrualNoncurrent to label_ProductWarrantyAccrualNoncurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="ProductWarrantyAccrualWarrantiesIssued" xlink:title="ProductWarrantyAccrualWarrantiesIssued" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualWarrantiesIssued" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyAccrualWarrantiesIssued" xml:lang="en-US" id="label_ProductWarrantyAccrualWarrantiesIssued">Product Warranty Accrual, Warranties Issued</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualWarrantiesIssued" xlink:to="label_ProductWarrantyAccrualWarrantiesIssued" xlink:title="label: ProductWarrantyAccrualWarrantiesIssued to label_ProductWarrantyAccrualWarrantiesIssued" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualWarrantiesIssued_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyAccrualWarrantiesIssued" xml:lang="en-US" id="label_ProductWarrantyAccrualWarrantiesIssued_2">Warranties issued during the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualWarrantiesIssued" xlink:to="label_ProductWarrantyAccrualWarrantiesIssued_2" xlink:title="label: ProductWarrantyAccrualWarrantiesIssued to label_ProductWarrantyAccrualWarrantiesIssued" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductOrServiceAxis" xlink:label="ProductOrServiceAxis" xlink:title="ProductOrServiceAxis" />
    <link:label xlink:type="resource" xlink:label="label_ProductOrServiceAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductOrServiceAxis" xml:lang="en-US" id="label_ProductOrServiceAxis">Products and Services [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductOrServiceAxis" xlink:to="label_ProductOrServiceAxis" xlink:title="label: ProductOrServiceAxis to label_ProductOrServiceAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="ProductWarrantiesDisclosuresAbstract" xlink:title="ProductWarrantiesDisclosuresAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantiesDisclosuresAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantiesDisclosuresAbstract" xml:lang="en-US" id="label_ProductWarrantiesDisclosuresAbstract">Product Warranty</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantiesDisclosuresAbstract" xlink:to="label_ProductWarrantiesDisclosuresAbstract" xlink:title="label: ProductWarrantiesDisclosuresAbstract to label_ProductWarrantiesDisclosuresAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="ProductWarrantyAccrual" xlink:title="ProductWarrantyAccrual" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrual" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyAccrual" xml:lang="en-US" id="label_ProductWarrantyAccrual">Product Warranty Accrual</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrual" xlink:to="label_ProductWarrantyAccrual" xlink:title="label: ProductWarrantyAccrual to label_ProductWarrantyAccrual" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrual_2" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:title="label_ProductWarrantyAccrual" xml:lang="en-US" id="label_ProductWarrantyAccrual_2">Balance at the beginning of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrual" xlink:to="label_ProductWarrantyAccrual_2" xlink:title="label: ProductWarrantyAccrual to label_ProductWarrantyAccrual" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrual_3" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:title="label_ProductWarrantyAccrual" xml:lang="en-US" id="label_ProductWarrantyAccrual_3">Balance at the end of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrual" xlink:to="label_ProductWarrantyAccrual_3" xlink:title="label: ProductWarrantyAccrual to label_ProductWarrantyAccrual" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrual_4" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_ProductWarrantyAccrual" xml:lang="en-US" id="label_ProductWarrantyAccrual_4">Total Warranty liability</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrual" xlink:to="label_ProductWarrantyAccrual_4" xlink:title="label: ProductWarrantyAccrual to label_ProductWarrantyAccrual" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="ProductWarrantyAccrualClassifiedCurrent" xlink:title="ProductWarrantyAccrualClassifiedCurrent" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualClassifiedCurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyAccrualClassifiedCurrent" xml:lang="en-US" id="label_ProductWarrantyAccrualClassifiedCurrent">Product Warranty Accrual, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualClassifiedCurrent" xlink:to="label_ProductWarrantyAccrualClassifiedCurrent" xlink:title="label: ProductWarrantyAccrualClassifiedCurrent to label_ProductWarrantyAccrualClassifiedCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualClassifiedCurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyAccrualClassifiedCurrent" xml:lang="en-US" id="label_ProductWarrantyAccrualClassifiedCurrent_2">Warranty</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualClassifiedCurrent" xlink:to="label_ProductWarrantyAccrualClassifiedCurrent_2" xlink:title="label: ProductWarrantyAccrualClassifiedCurrent to label_ProductWarrantyAccrualClassifiedCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualClassifiedCurrent_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_ProductWarrantyAccrualClassifiedCurrent" xml:lang="en-US" id="label_ProductWarrantyAccrualClassifiedCurrent_3">Amount classified as current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualClassifiedCurrent" xlink:to="label_ProductWarrantyAccrualClassifiedCurrent_3" xlink:title="label: ProductWarrantyAccrualClassifiedCurrent to label_ProductWarrantyAccrualClassifiedCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:title="ProductWarrantyAccrualPreexistingIncreaseDecrease" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyAccrualPreexistingIncreaseDecrease" xml:lang="en-US" id="label_ProductWarrantyAccrualPreexistingIncreaseDecrease">Product Warranty Accrual, Preexisting, Increase (Decrease)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:to="label_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:title="label: ProductWarrantyAccrualPreexistingIncreaseDecrease to label_ProductWarrantyAccrualPreexistingIncreaseDecrease" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualPreexistingIncreaseDecrease_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ProductWarrantyAccrualPreexistingIncreaseDecrease" xml:lang="en-US" id="label_ProductWarrantyAccrualPreexistingIncreaseDecrease_2">Changes in estimate of liability for pre-existing warranties during the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:to="label_ProductWarrantyAccrualPreexistingIncreaseDecrease_2" xlink:title="label: ProductWarrantyAccrualPreexistingIncreaseDecrease to label_ProductWarrantyAccrualPreexistingIncreaseDecrease" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="ProductWarrantyAccrualPayments" xlink:title="ProductWarrantyAccrualPayments" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualPayments" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ProductWarrantyAccrualPayments" xml:lang="en-US" id="label_ProductWarrantyAccrualPayments">Product Warranty Accrual, Payments</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualPayments" xlink:to="label_ProductWarrantyAccrualPayments" xlink:title="label: ProductWarrantyAccrualPayments to label_ProductWarrantyAccrualPayments" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ProductWarrantyAccrualPayments_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_ProductWarrantyAccrualPayments" xml:lang="en-US" id="label_ProductWarrantyAccrualPayments_2">Settlements made during the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ProductWarrantyAccrualPayments" xlink:to="label_ProductWarrantyAccrualPayments_2" xlink:title="label: ProductWarrantyAccrualPayments to label_ProductWarrantyAccrualPayments" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="PropertyPlantAndEquipmentUsefulLife" xlink:title="PropertyPlantAndEquipmentUsefulLife" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentUsefulLife" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PropertyPlantAndEquipmentUsefulLife" xml:lang="en-US" id="label_PropertyPlantAndEquipmentUsefulLife">Useful life</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentUsefulLife" xlink:to="label_PropertyPlantAndEquipmentUsefulLife" xlink:title="label: PropertyPlantAndEquipmentUsefulLife to label_PropertyPlantAndEquipmentUsefulLife" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentUsefulLife_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentUsefulLife" xml:lang="en-US" id="label_PropertyPlantAndEquipmentUsefulLife_2">Property, Plant and Equipment, Useful Life</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentUsefulLife" xlink:to="label_PropertyPlantAndEquipmentUsefulLife_2" xlink:title="label: PropertyPlantAndEquipmentUsefulLife to label_PropertyPlantAndEquipmentUsefulLife" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentUsefulLife_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_PropertyPlantAndEquipmentUsefulLife" xml:lang="en-US" id="label_PropertyPlantAndEquipmentUsefulLife_3">Depreciable period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentUsefulLife" xlink:to="label_PropertyPlantAndEquipmentUsefulLife_3" xlink:title="label: PropertyPlantAndEquipmentUsefulLife to label_PropertyPlantAndEquipmentUsefulLife" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="PropertyPlantAndEquipmentTypeDomain" xlink:title="PropertyPlantAndEquipmentTypeDomain" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentTypeDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentTypeDomain" xml:lang="en-US" id="label_PropertyPlantAndEquipmentTypeDomain">Property, Plant and Equipment, Type [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentTypeDomain" xlink:to="label_PropertyPlantAndEquipmentTypeDomain" xlink:title="label: PropertyPlantAndEquipmentTypeDomain to label_PropertyPlantAndEquipmentTypeDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="PropertyPlantAndEquipmentAbstract" xlink:title="PropertyPlantAndEquipmentAbstract" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentAbstract" xml:lang="en-US" id="label_PropertyPlantAndEquipmentAbstract">Property, Plant and Equipment, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentAbstract" xlink:to="label_PropertyPlantAndEquipmentAbstract" xlink:title="label: PropertyPlantAndEquipmentAbstract to label_PropertyPlantAndEquipmentAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="PropertyPlantAndEquipmentPolicyTextBlock" xlink:title="PropertyPlantAndEquipmentPolicyTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PropertyPlantAndEquipmentPolicyTextBlock" xml:lang="en-US" id="label_PropertyPlantAndEquipmentPolicyTextBlock">Property, Plant and Equipment</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentPolicyTextBlock" xlink:to="label_PropertyPlantAndEquipmentPolicyTextBlock" xlink:title="label: PropertyPlantAndEquipmentPolicyTextBlock to label_PropertyPlantAndEquipmentPolicyTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentPolicyTextBlock" xml:lang="en-US" id="label_PropertyPlantAndEquipmentPolicyTextBlock_2">Property, Plant and Equipment, Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentPolicyTextBlock" xlink:to="label_PropertyPlantAndEquipmentPolicyTextBlock_2" xlink:title="label: PropertyPlantAndEquipmentPolicyTextBlock to label_PropertyPlantAndEquipmentPolicyTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="PropertyPlantAndEquipmentNet" xlink:title="PropertyPlantAndEquipmentNet" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentNet" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentNet" xml:lang="en-US" id="label_PropertyPlantAndEquipmentNet">Property, Plant and Equipment, Net.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentNet" xlink:to="label_PropertyPlantAndEquipmentNet" xlink:title="label: PropertyPlantAndEquipmentNet to label_PropertyPlantAndEquipmentNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentNet_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PropertyPlantAndEquipmentNet" xml:lang="en-US" id="label_PropertyPlantAndEquipmentNet_2">Property, plant and equipment, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentNet" xlink:to="label_PropertyPlantAndEquipmentNet_2" xlink:title="label: PropertyPlantAndEquipmentNet to label_PropertyPlantAndEquipmentNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentNet_3" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_PropertyPlantAndEquipmentNet" xml:lang="en-US" id="label_PropertyPlantAndEquipmentNet_3">Net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentNet" xlink:to="label_PropertyPlantAndEquipmentNet_3" xlink:title="label: PropertyPlantAndEquipmentNet to label_PropertyPlantAndEquipmentNet" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="PropertyPlantAndEquipmentLineItems" xlink:title="PropertyPlantAndEquipmentLineItems" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentLineItems" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PropertyPlantAndEquipmentLineItems" xml:lang="en-US" id="label_PropertyPlantAndEquipmentLineItems">Property, plant and equipment</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentLineItems" xlink:to="label_PropertyPlantAndEquipmentLineItems" xlink:title="label: PropertyPlantAndEquipmentLineItems to label_PropertyPlantAndEquipmentLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentLineItems_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentLineItems" xml:lang="en-US" id="label_PropertyPlantAndEquipmentLineItems_2">Property, Plant and Equipment [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentLineItems" xlink:to="label_PropertyPlantAndEquipmentLineItems_2" xlink:title="label: PropertyPlantAndEquipmentLineItems to label_PropertyPlantAndEquipmentLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentLineItems_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_PropertyPlantAndEquipmentLineItems" xml:lang="en-US" id="label_PropertyPlantAndEquipmentLineItems_3">Assets manufactured for internal use</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentLineItems" xlink:to="label_PropertyPlantAndEquipmentLineItems_3" xlink:title="label: PropertyPlantAndEquipmentLineItems to label_PropertyPlantAndEquipmentLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentLineItems_4" xlink:role="http://www.xbrl.org/2003/role/positiveLabel" xlink:title="label_PropertyPlantAndEquipmentLineItems" xml:lang="en-US" id="label_PropertyPlantAndEquipmentLineItems_4">Property, plant and equipment, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentLineItems" xlink:to="label_PropertyPlantAndEquipmentLineItems_4" xlink:title="label: PropertyPlantAndEquipmentLineItems to label_PropertyPlantAndEquipmentLineItems" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="PropertyPlantAndEquipmentGross" xlink:title="PropertyPlantAndEquipmentGross" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentGross" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PropertyPlantAndEquipmentGross" xml:lang="en-US" id="label_PropertyPlantAndEquipmentGross">Gross</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentGross" xlink:to="label_PropertyPlantAndEquipmentGross" xlink:title="label: PropertyPlantAndEquipmentGross to label_PropertyPlantAndEquipmentGross" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentGross_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentGross" xml:lang="en-US" id="label_PropertyPlantAndEquipmentGross_2">Property, Plant and Equipment, Gross</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentGross" xlink:to="label_PropertyPlantAndEquipmentGross_2" xlink:title="label: PropertyPlantAndEquipmentGross to label_PropertyPlantAndEquipmentGross" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentGross_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_PropertyPlantAndEquipmentGross" xml:lang="en-US" id="label_PropertyPlantAndEquipmentGross_3">Cost</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentGross" xlink:to="label_PropertyPlantAndEquipmentGross_3" xlink:title="label: PropertyPlantAndEquipmentGross to label_PropertyPlantAndEquipmentGross" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="PropertyPlantAndEquipmentTextBlock" xlink:title="PropertyPlantAndEquipmentTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PropertyPlantAndEquipmentTextBlock" xml:lang="en-US" id="label_PropertyPlantAndEquipmentTextBlock">Schedule of estimated useful lives of the related assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentTextBlock" xlink:to="label_PropertyPlantAndEquipmentTextBlock" xlink:title="label: PropertyPlantAndEquipmentTextBlock to label_PropertyPlantAndEquipmentTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentTextBlock" xml:lang="en-US" id="label_PropertyPlantAndEquipmentTextBlock_2">Property, Plant and Equipment [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentTextBlock" xlink:to="label_PropertyPlantAndEquipmentTextBlock_2" xlink:title="label: PropertyPlantAndEquipmentTextBlock to label_PropertyPlantAndEquipmentTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="PropertyPlantAndEquipmentByTypeAxis" xlink:title="PropertyPlantAndEquipmentByTypeAxis" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentByTypeAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentByTypeAxis" xml:lang="en-US" id="label_PropertyPlantAndEquipmentByTypeAxis">Property, Plant and Equipment, Type [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentByTypeAxis" xlink:to="label_PropertyPlantAndEquipmentByTypeAxis" xlink:title="label: PropertyPlantAndEquipmentByTypeAxis to label_PropertyPlantAndEquipmentByTypeAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="PropertyPlantAndEquipmentDisclosureTextBlock" xlink:title="PropertyPlantAndEquipmentDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PropertyPlantAndEquipmentDisclosureTextBlock" xml:lang="en-US" id="label_PropertyPlantAndEquipmentDisclosureTextBlock">Property, Plant and Equipment, net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentDisclosureTextBlock" xlink:to="label_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:title="label: PropertyPlantAndEquipmentDisclosureTextBlock to label_PropertyPlantAndEquipmentDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_PropertyPlantAndEquipmentDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PropertyPlantAndEquipmentDisclosureTextBlock" xml:lang="en-US" id="label_PropertyPlantAndEquipmentDisclosureTextBlock_2">Property, Plant and Equipment Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PropertyPlantAndEquipmentDisclosureTextBlock" xlink:to="label_PropertyPlantAndEquipmentDisclosureTextBlock_2" xlink:title="label: PropertyPlantAndEquipmentDisclosureTextBlock to label_PropertyPlantAndEquipmentDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_QuarterlyFinancialInformationTextBlock" xlink:label="QuarterlyFinancialInformationTextBlock" xlink:title="QuarterlyFinancialInformationTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_QuarterlyFinancialInformationTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_QuarterlyFinancialInformationTextBlock" xml:lang="en-US" id="label_QuarterlyFinancialInformationTextBlock">Quarterly Results of Operations (unaudited)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="QuarterlyFinancialInformationTextBlock" xlink:to="label_QuarterlyFinancialInformationTextBlock" xlink:title="label: QuarterlyFinancialInformationTextBlock to label_QuarterlyFinancialInformationTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_QuarterlyFinancialInformationTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_QuarterlyFinancialInformationTextBlock" xml:lang="en-US" id="label_QuarterlyFinancialInformationTextBlock_2">Quarterly Financial Information [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="QuarterlyFinancialInformationTextBlock" xlink:to="label_QuarterlyFinancialInformationTextBlock_2" xlink:title="label: QuarterlyFinancialInformationTextBlock to label_QuarterlyFinancialInformationTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_QuarterlyFinancialInformationDisclosureAbstract" xlink:label="QuarterlyFinancialInformationDisclosureAbstract" xlink:title="QuarterlyFinancialInformationDisclosureAbstract" />
    <link:label xlink:type="resource" xlink:label="label_QuarterlyFinancialInformationDisclosureAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_QuarterlyFinancialInformationDisclosureAbstract" xml:lang="en-US" id="label_QuarterlyFinancialInformationDisclosureAbstract">Quarterly Results of Operations (unaudited)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="QuarterlyFinancialInformationDisclosureAbstract" xlink:to="label_QuarterlyFinancialInformationDisclosureAbstract" xlink:title="label: QuarterlyFinancialInformationDisclosureAbstract to label_QuarterlyFinancialInformationDisclosureAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeAxis" xlink:label="RangeAxis" xlink:title="RangeAxis" />
    <link:label xlink:type="resource" xlink:label="label_RangeAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RangeAxis" xml:lang="en-US" id="label_RangeAxis">Range [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RangeAxis" xlink:to="label_RangeAxis" xlink:title="label: RangeAxis to label_RangeAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RangeMember" xlink:label="RangeMember" xlink:title="RangeMember" />
    <link:label xlink:type="resource" xlink:label="label_RangeMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RangeMember" xml:lang="en-US" id="label_RangeMember">Range [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RangeMember" xlink:to="label_RangeMember" xlink:title="label: RangeMember to label_RangeMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:label="ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:title="ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" />
    <link:label xlink:type="resource" xlink:label="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xml:lang="en-US" id="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward">Reconciliation of the beginning and ending balance of unrecognized tax benefits</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:to="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:title="label: ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward to label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xml:lang="en-US" id="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_2">Reconciliation of Unrecognized Tax Benefits, Excluding Amounts Pertaining to Examined Tax Returns [Roll Forward]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:to="label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_2" xlink:title="label: ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward to label_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RepaymentsOfConvertibleDebt" xlink:label="RepaymentsOfConvertibleDebt" xlink:title="RepaymentsOfConvertibleDebt" />
    <link:label xlink:type="resource" xlink:label="label_RepaymentsOfConvertibleDebt" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RepaymentsOfConvertibleDebt" xml:lang="en-US" id="label_RepaymentsOfConvertibleDebt">Repayments of Convertible Debt</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RepaymentsOfConvertibleDebt" xlink:to="label_RepaymentsOfConvertibleDebt" xlink:title="label: RepaymentsOfConvertibleDebt to label_RepaymentsOfConvertibleDebt" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RepaymentsOfConvertibleDebt_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_RepaymentsOfConvertibleDebt" xml:lang="en-US" id="label_RepaymentsOfConvertibleDebt_2">Repayment of convertible debt</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RepaymentsOfConvertibleDebt" xlink:to="label_RepaymentsOfConvertibleDebt_2" xlink:title="label: RepaymentsOfConvertibleDebt to label_RepaymentsOfConvertibleDebt" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="ResearchAndDevelopmentExpense" xlink:title="ResearchAndDevelopmentExpense" />
    <link:label xlink:type="resource" xlink:label="label_ResearchAndDevelopmentExpense" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ResearchAndDevelopmentExpense" xml:lang="en-US" id="label_ResearchAndDevelopmentExpense">Research and Development Expense</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ResearchAndDevelopmentExpense" xlink:to="label_ResearchAndDevelopmentExpense" xlink:title="label: ResearchAndDevelopmentExpense to label_ResearchAndDevelopmentExpense" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ResearchAndDevelopmentExpense_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ResearchAndDevelopmentExpense" xml:lang="en-US" id="label_ResearchAndDevelopmentExpense_2">Research and development</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ResearchAndDevelopmentExpense" xlink:to="label_ResearchAndDevelopmentExpense_2" xlink:title="label: ResearchAndDevelopmentExpense to label_ResearchAndDevelopmentExpense" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestrictedAssetsDisclosureTextBlock" xlink:label="RestrictedAssetsDisclosureTextBlock" xlink:title="RestrictedAssetsDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedAssetsDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RestrictedAssetsDisclosureTextBlock" xml:lang="en-US" id="label_RestrictedAssetsDisclosureTextBlock">Restricted Cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedAssetsDisclosureTextBlock" xlink:to="label_RestrictedAssetsDisclosureTextBlock" xlink:title="label: RestrictedAssetsDisclosureTextBlock to label_RestrictedAssetsDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedAssetsDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestrictedAssetsDisclosureTextBlock" xml:lang="en-US" id="label_RestrictedAssetsDisclosureTextBlock_2">Restricted Assets Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedAssetsDisclosureTextBlock" xlink:to="label_RestrictedAssetsDisclosureTextBlock_2" xlink:title="label: RestrictedAssetsDisclosureTextBlock to label_RestrictedAssetsDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:title="RestrictedCashAndCashEquivalentsAtCarryingValue" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestrictedCashAndCashEquivalentsAtCarryingValue" xml:lang="en-US" id="label_RestrictedCashAndCashEquivalentsAtCarryingValue">Restricted Cash and Cash Equivalents, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:to="label_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:title="label: RestrictedCashAndCashEquivalentsAtCarryingValue to label_RestrictedCashAndCashEquivalentsAtCarryingValue" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedCashAndCashEquivalentsAtCarryingValue_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RestrictedCashAndCashEquivalentsAtCarryingValue" xml:lang="en-US" id="label_RestrictedCashAndCashEquivalentsAtCarryingValue_2">Restricted cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:to="label_RestrictedCashAndCashEquivalentsAtCarryingValue_2" xlink:title="label: RestrictedCashAndCashEquivalentsAtCarryingValue to label_RestrictedCashAndCashEquivalentsAtCarryingValue" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="RestrictedCashAndCashEquivalentsNoncurrent" xlink:title="RestrictedCashAndCashEquivalentsNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedCashAndCashEquivalentsNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestrictedCashAndCashEquivalentsNoncurrent" xml:lang="en-US" id="label_RestrictedCashAndCashEquivalentsNoncurrent">Restricted Cash and Cash Equivalents, Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedCashAndCashEquivalentsNoncurrent" xlink:to="label_RestrictedCashAndCashEquivalentsNoncurrent" xlink:title="label: RestrictedCashAndCashEquivalentsNoncurrent to label_RestrictedCashAndCashEquivalentsNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedCashAndCashEquivalentsNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RestrictedCashAndCashEquivalentsNoncurrent" xml:lang="en-US" id="label_RestrictedCashAndCashEquivalentsNoncurrent_2">Long-term restricted cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedCashAndCashEquivalentsNoncurrent" xlink:to="label_RestrictedCashAndCashEquivalentsNoncurrent_2" xlink:title="label: RestrictedCashAndCashEquivalentsNoncurrent to label_RestrictedCashAndCashEquivalentsNoncurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestrictedCashAndCashEquivalentsNoncurrent_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_RestrictedCashAndCashEquivalentsNoncurrent" xml:lang="en-US" id="label_RestrictedCashAndCashEquivalentsNoncurrent_3">Restricted cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestrictedCashAndCashEquivalentsNoncurrent" xlink:to="label_RestrictedCashAndCashEquivalentsNoncurrent_3" xlink:title="label: RestrictedCashAndCashEquivalentsNoncurrent to label_RestrictedCashAndCashEquivalentsNoncurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringCostAndReserveAxis" xlink:label="RestructuringCostAndReserveAxis" xlink:title="RestructuringCostAndReserveAxis" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringCostAndReserveAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringCostAndReserveAxis" xml:lang="en-US" id="label_RestructuringCostAndReserveAxis">Restructuring Type [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringCostAndReserveAxis" xlink:to="label_RestructuringCostAndReserveAxis" xlink:title="label: RestructuringCostAndReserveAxis to label_RestructuringCostAndReserveAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringCharges" xlink:label="RestructuringCharges" xlink:title="RestructuringCharges" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringCharges" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringCharges" xml:lang="en-US" id="label_RestructuringCharges">Restructuring Charges.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringCharges" xlink:to="label_RestructuringCharges" xlink:title="label: RestructuringCharges to label_RestructuringCharges" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringCharges_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RestructuringCharges" xml:lang="en-US" id="label_RestructuringCharges_2">Restructuring charges</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringCharges" xlink:to="label_RestructuringCharges_2" xlink:title="label: RestructuringCharges to label_RestructuringCharges" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringCharges_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_RestructuringCharges" xml:lang="en-US" id="label_RestructuringCharges_3">Restructuring expense</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringCharges" xlink:to="label_RestructuringCharges_3" xlink:title="label: RestructuringCharges to label_RestructuringCharges" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringReserveCurrent" xlink:label="RestructuringReserveCurrent" xlink:title="RestructuringReserveCurrent" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveCurrent" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:title="label_RestructuringReserveCurrent" xml:lang="en-US" id="label_RestructuringReserveCurrent">Balance at the beginning of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveCurrent" xlink:to="label_RestructuringReserveCurrent" xlink:title="label: RestructuringReserveCurrent to label_RestructuringReserveCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveCurrent_2" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:title="label_RestructuringReserveCurrent" xml:lang="en-US" id="label_RestructuringReserveCurrent_2">Balance at the end of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveCurrent" xlink:to="label_RestructuringReserveCurrent_2" xlink:title="label: RestructuringReserveCurrent to label_RestructuringReserveCurrent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveCurrent_3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringReserveCurrent" xml:lang="en-US" id="label_RestructuringReserveCurrent_3">Restructuring Reserve, Current</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveCurrent" xlink:to="label_RestructuringReserveCurrent_3" xlink:title="label: RestructuringReserveCurrent to label_RestructuringReserveCurrent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringReserveSettledWithCash" xlink:label="RestructuringReserveSettledWithCash" xlink:title="RestructuringReserveSettledWithCash" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveSettledWithCash" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringReserveSettledWithCash" xml:lang="en-US" id="label_RestructuringReserveSettledWithCash">Restructuring Reserve, Settled with Cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveSettledWithCash" xlink:to="label_RestructuringReserveSettledWithCash" xlink:title="label: RestructuringReserveSettledWithCash to label_RestructuringReserveSettledWithCash" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveSettledWithCash_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_RestructuringReserveSettledWithCash" xml:lang="en-US" id="label_RestructuringReserveSettledWithCash_2">Cash payments</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveSettledWithCash" xlink:to="label_RestructuringReserveSettledWithCash_2" xlink:title="label: RestructuringReserveSettledWithCash to label_RestructuringReserveSettledWithCash" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:label="RestructuringAndRelatedActivitiesAbstract" xlink:title="RestructuringAndRelatedActivitiesAbstract" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringAndRelatedActivitiesAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringAndRelatedActivitiesAbstract" xml:lang="en-US" id="label_RestructuringAndRelatedActivitiesAbstract">Restructuring Charges</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringAndRelatedActivitiesAbstract" xlink:to="label_RestructuringAndRelatedActivitiesAbstract" xlink:title="label: RestructuringAndRelatedActivitiesAbstract to label_RestructuringAndRelatedActivitiesAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringReserveRollForward" xlink:label="RestructuringReserveRollForward" xlink:title="RestructuringReserveRollForward" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveRollForward" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringReserveRollForward" xml:lang="en-US" id="label_RestructuringReserveRollForward">Restructuring Reserve [Roll Forward]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveRollForward" xlink:to="label_RestructuringReserveRollForward" xlink:title="label: RestructuringReserveRollForward to label_RestructuringReserveRollForward" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveRollForward_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RestructuringReserveRollForward" xml:lang="en-US" id="label_RestructuringReserveRollForward_2">Changes in restructuring liability</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveRollForward" xlink:to="label_RestructuringReserveRollForward_2" xlink:title="label: RestructuringReserveRollForward to label_RestructuringReserveRollForward" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringReserveSettledWithoutCash" xlink:label="RestructuringReserveSettledWithoutCash" xlink:title="RestructuringReserveSettledWithoutCash" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveSettledWithoutCash" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringReserveSettledWithoutCash" xml:lang="en-US" id="label_RestructuringReserveSettledWithoutCash">Restructuring Reserve, Settled without Cash</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveSettledWithoutCash" xlink:to="label_RestructuringReserveSettledWithoutCash" xlink:title="label: RestructuringReserveSettledWithoutCash to label_RestructuringReserveSettledWithoutCash" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserveSettledWithoutCash_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_RestructuringReserveSettledWithoutCash" xml:lang="en-US" id="label_RestructuringReserveSettledWithoutCash_2">Non-cash items, modification of share-based award</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserveSettledWithoutCash" xlink:to="label_RestructuringReserveSettledWithoutCash_2" xlink:title="label: RestructuringReserveSettledWithoutCash to label_RestructuringReserveSettledWithoutCash" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xlink:label="RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xlink:title="RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xml:lang="en-US" id="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock">Restructuring, Impairment, and Other Activities Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xlink:to="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xlink:title="label: RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock to label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xml:lang="en-US" id="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock_2">Restructuring Charges</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" xlink:to="label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock_2" xlink:title="label: RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock to label_RestructuringImpairmentAndOtherActivitiesDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringCostAndReserveLineItems" xlink:label="RestructuringCostAndReserveLineItems" xlink:title="RestructuringCostAndReserveLineItems" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringCostAndReserveLineItems" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringCostAndReserveLineItems" xml:lang="en-US" id="label_RestructuringCostAndReserveLineItems">Restructuring Cost and Reserve [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringCostAndReserveLineItems" xlink:to="label_RestructuringCostAndReserveLineItems" xlink:title="label: RestructuringCostAndReserveLineItems to label_RestructuringCostAndReserveLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringCostAndReserveLineItems_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RestructuringCostAndReserveLineItems" xml:lang="en-US" id="label_RestructuringCostAndReserveLineItems_2">Restructuring charges</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringCostAndReserveLineItems" xlink:to="label_RestructuringCostAndReserveLineItems_2" xlink:title="label: RestructuringCostAndReserveLineItems to label_RestructuringCostAndReserveLineItems" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RestructuringReserve" xlink:label="RestructuringReserve" xlink:title="RestructuringReserve" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserve" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RestructuringReserve" xml:lang="en-US" id="label_RestructuringReserve">Restructuring Reserve</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserve" xlink:to="label_RestructuringReserve" xlink:title="label: RestructuringReserve to label_RestructuringReserve" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserve_2" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:title="label_RestructuringReserve" xml:lang="en-US" id="label_RestructuringReserve_2">Balance at the beginning of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserve" xlink:to="label_RestructuringReserve_2" xlink:title="label: RestructuringReserve to label_RestructuringReserve" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RestructuringReserve_3" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:title="label_RestructuringReserve" xml:lang="en-US" id="label_RestructuringReserve_3">Balance at the end of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RestructuringReserve" xlink:to="label_RestructuringReserve_3" xlink:title="label: RestructuringReserve to label_RestructuringReserve" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="RetainedEarningsAccumulatedDeficit" xlink:title="RetainedEarningsAccumulatedDeficit" />
    <link:label xlink:type="resource" xlink:label="label_RetainedEarningsAccumulatedDeficit" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RetainedEarningsAccumulatedDeficit" xml:lang="en-US" id="label_RetainedEarningsAccumulatedDeficit">Retained Earnings (Accumulated Deficit)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RetainedEarningsAccumulatedDeficit" xlink:to="label_RetainedEarningsAccumulatedDeficit" xlink:title="label: RetainedEarningsAccumulatedDeficit to label_RetainedEarningsAccumulatedDeficit" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RetainedEarningsAccumulatedDeficit_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RetainedEarningsAccumulatedDeficit" xml:lang="en-US" id="label_RetainedEarningsAccumulatedDeficit_2">Accumulated deficit</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RetainedEarningsAccumulatedDeficit" xlink:to="label_RetainedEarningsAccumulatedDeficit_2" xlink:title="label: RetainedEarningsAccumulatedDeficit to label_RetainedEarningsAccumulatedDeficit" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RetainedEarningsMember" xlink:label="RetainedEarningsMember" xlink:title="RetainedEarningsMember" />
    <link:label xlink:type="resource" xlink:label="label_RetainedEarningsMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RetainedEarningsMember" xml:lang="en-US" id="label_RetainedEarningsMember">Accumulated Deficit</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RetainedEarningsMember" xlink:to="label_RetainedEarningsMember" xlink:title="label: RetainedEarningsMember to label_RetainedEarningsMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RetainedEarningsMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RetainedEarningsMember" xml:lang="en-US" id="label_RetainedEarningsMember_2">Retained Earnings [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RetainedEarningsMember" xlink:to="label_RetainedEarningsMember_2" xlink:title="label: RetainedEarningsMember to label_RetainedEarningsMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevenueRecognitionAbstract" xlink:label="RevenueRecognitionAbstract" xlink:title="RevenueRecognitionAbstract" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RevenueRecognitionAbstract" xml:lang="en-US" id="label_RevenueRecognitionAbstract">Revenue Recognition [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionAbstract" xlink:to="label_RevenueRecognitionAbstract" xlink:title="label: RevenueRecognitionAbstract to label_RevenueRecognitionAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionAbstract_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RevenueRecognitionAbstract" xml:lang="en-US" id="label_RevenueRecognitionAbstract_2">Revenue recognition</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionAbstract" xlink:to="label_RevenueRecognitionAbstract_2" xlink:title="label: RevenueRecognitionAbstract to label_RevenueRecognitionAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="RevenueRecognitionPolicyTextBlock" xlink:title="RevenueRecognitionPolicyTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionPolicyTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RevenueRecognitionPolicyTextBlock" xml:lang="en-US" id="label_RevenueRecognitionPolicyTextBlock">Revenue Recognition</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionPolicyTextBlock" xlink:to="label_RevenueRecognitionPolicyTextBlock" xlink:title="label: RevenueRecognitionPolicyTextBlock to label_RevenueRecognitionPolicyTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RevenueRecognitionPolicyTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RevenueRecognitionPolicyTextBlock" xml:lang="en-US" id="label_RevenueRecognitionPolicyTextBlock_2">Revenue Recognition, Policy [Policy Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenueRecognitionPolicyTextBlock" xlink:to="label_RevenueRecognitionPolicyTextBlock_2" xlink:title="label: RevenueRecognitionPolicyTextBlock to label_RevenueRecognitionPolicyTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:title="RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" />
    <link:label xlink:type="resource" xlink:label="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xml:lang="en-US" id="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems">Revenue and long-lived assets by geographic region</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:title="label: RevenuesFromExternalCustomersAndLongLivedAssetsLineItems to label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xml:lang="en-US" id="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_2">Revenues from External Customers and Long-Lived Assets [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_2" xlink:title="label: RevenuesFromExternalCustomersAndLongLivedAssetsLineItems to label_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevenuesAbstract" xlink:label="RevenuesAbstract" xlink:title="RevenuesAbstract" />
    <link:label xlink:type="resource" xlink:label="label_RevenuesAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RevenuesAbstract" xml:lang="en-US" id="label_RevenuesAbstract">Revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenuesAbstract" xlink:to="label_RevenuesAbstract" xlink:title="label: RevenuesAbstract to label_RevenuesAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RevenuesAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RevenuesAbstract" xml:lang="en-US" id="label_RevenuesAbstract_2">Revenues [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevenuesAbstract" xlink:to="label_RevenuesAbstract_2" xlink:title="label: RevenuesAbstract to label_RevenuesAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="RevolvingCreditFacilityMember" xlink:title="RevolvingCreditFacilityMember" />
    <link:label xlink:type="resource" xlink:label="label_RevolvingCreditFacilityMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RevolvingCreditFacilityMember" xml:lang="en-US" id="label_RevolvingCreditFacilityMember">Revolving Credit Facility [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevolvingCreditFacilityMember" xlink:to="label_RevolvingCreditFacilityMember" xlink:title="label: RevolvingCreditFacilityMember to label_RevolvingCreditFacilityMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RevolvingCreditFacilityMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RevolvingCreditFacilityMember" xml:lang="en-US" id="label_RevolvingCreditFacilityMember_2">Revolving credit facility</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RevolvingCreditFacilityMember" xlink:to="label_RevolvingCreditFacilityMember_2" xlink:title="label: RevolvingCreditFacilityMember to label_RevolvingCreditFacilityMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RisksAndUncertaintiesAbstract" xlink:label="RisksAndUncertaintiesAbstract" xlink:title="RisksAndUncertaintiesAbstract" />
    <link:label xlink:type="resource" xlink:label="label_RisksAndUncertaintiesAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RisksAndUncertaintiesAbstract" xml:lang="en-US" id="label_RisksAndUncertaintiesAbstract">Significant Customers.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RisksAndUncertaintiesAbstract" xlink:to="label_RisksAndUncertaintiesAbstract" xlink:title="label: RisksAndUncertaintiesAbstract to label_RisksAndUncertaintiesAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_RoyaltyRevenue" xlink:label="RoyaltyRevenue" xlink:title="RoyaltyRevenue" />
    <link:label xlink:type="resource" xlink:label="label_RoyaltyRevenue" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_RoyaltyRevenue" xml:lang="en-US" id="label_RoyaltyRevenue">Royalty Revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RoyaltyRevenue" xlink:to="label_RoyaltyRevenue" xlink:title="label: RoyaltyRevenue to label_RoyaltyRevenue" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_RoyaltyRevenue_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_RoyaltyRevenue" xml:lang="en-US" id="label_RoyaltyRevenue_2">Royalties, primarily from SEN</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="RoyaltyRevenue" xlink:to="label_RoyaltyRevenue_2" xlink:title="label: RoyaltyRevenue to label_RoyaltyRevenue" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:title="SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent">Share-based Compensation Arrangement by Share-based Payment Award, Purchase Price of Common Stock, Percent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent to label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_2">Purchase price as a percentage of the market value of a common stock on the day the stock is purchased</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_2" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent to label_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:label="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:title="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1 to label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" use="optional" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_2" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1 to label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xlink:label="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xlink:title="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" />
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    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1_2">Options Vested or Expected to Vest at the end of the period</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:title="SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 to label_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" use="optional" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:label="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:title="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1 to label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_2">Exercisable at the end of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_2" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1 to label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:label="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:title="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2 to label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xml:lang="en-US" id="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_2">Outstanding at the end of the period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:to="label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_2" xlink:title="label: SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2 to label_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueGoodsNet" xlink:label="SalesRevenueGoodsNet" xlink:title="SalesRevenueGoodsNet" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueGoodsNet" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SalesRevenueGoodsNet" xml:lang="en-US" id="label_SalesRevenueGoodsNet">Sales Revenue, Goods, Net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueGoodsNet" xlink:to="label_SalesRevenueGoodsNet" xlink:title="label: SalesRevenueGoodsNet to label_SalesRevenueGoodsNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueGoodsNet_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SalesRevenueGoodsNet" xml:lang="en-US" id="label_SalesRevenueGoodsNet_2">Product</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueGoodsNet" xlink:to="label_SalesRevenueGoodsNet_2" xlink:title="label: SalesRevenueGoodsNet to label_SalesRevenueGoodsNet" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="SalesRevenueNet" xlink:title="SalesRevenueNet" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueNet" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SalesRevenueNet" xml:lang="en-US" id="label_SalesRevenueNet">Revenue, Net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueNet" xlink:to="label_SalesRevenueNet" xlink:title="label: SalesRevenueNet to label_SalesRevenueNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueNet_2" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_SalesRevenueNet" xml:lang="en-US" id="label_SalesRevenueNet_2">Total revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueNet" xlink:to="label_SalesRevenueNet_2" xlink:title="label: SalesRevenueNet to label_SalesRevenueNet" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueNet_3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SalesRevenueNet" xml:lang="en-US" id="label_SalesRevenueNet_3">Revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueNet" xlink:to="label_SalesRevenueNet_3" xlink:title="label: SalesRevenueNet to label_SalesRevenueNet" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesMember" xlink:label="SalesMember" xlink:title="SalesMember" />
    <link:label xlink:type="resource" xlink:label="label_SalesMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SalesMember" xml:lang="en-US" id="label_SalesMember">Sales [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesMember" xlink:to="label_SalesMember" xlink:title="label: SalesMember to label_SalesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SalesMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SalesMember" xml:lang="en-US" id="label_SalesMember_2">Consolidated Revenue</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesMember" xlink:to="label_SalesMember_2" xlink:title="label: SalesMember to label_SalesMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SalesMember_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_SalesMember" xml:lang="en-US" id="label_SalesMember_3">Total revenues</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesMember" xlink:to="label_SalesMember_3" xlink:title="label: SalesMember to label_SalesMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SalesRevenueServicesNet" xlink:label="SalesRevenueServicesNet" xlink:title="SalesRevenueServicesNet" />
    <link:label xlink:type="resource" xlink:label="label_SalesRevenueServicesNet" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SalesRevenueServicesNet" xml:lang="en-US" id="label_SalesRevenueServicesNet">Sales Revenue, Services, Net</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueServicesNet" xlink:to="label_SalesRevenueServicesNet" xlink:title="label: SalesRevenueServicesNet to label_SalesRevenueServicesNet" use="optional" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SalesRevenueServicesNet" xlink:to="label_SalesRevenueServicesNet_2" xlink:title="label: SalesRevenueServicesNet to label_SalesRevenueServicesNet" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScenarioUnspecifiedDomain" xlink:label="ScenarioUnspecifiedDomain" xlink:title="ScenarioUnspecifiedDomain" />
    <link:label xlink:type="resource" xlink:label="label_ScenarioUnspecifiedDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScenarioUnspecifiedDomain" xml:lang="en-US" id="label_ScenarioUnspecifiedDomain">Scenario, Unspecified [Domain]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:title="ScheduleOfProductWarrantyLiabilityTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfProductWarrantyLiabilityTableTextBlock" xml:lang="en-US" id="label_ScheduleOfProductWarrantyLiabilityTableTextBlock">Schedule of product warranty</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ScheduleOfProductWarrantyLiabilityTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfProductWarrantyLiabilityTableTextBlock" xml:lang="en-US" id="label_ScheduleOfProductWarrantyLiabilityTableTextBlock_2">Schedule of Product Warranty Liability [Table Text Block]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfOtherAssetsTableTextBlock" xlink:label="ScheduleOfOtherAssetsTableTextBlock" xlink:title="ScheduleOfOtherAssetsTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfOtherAssetsTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfOtherAssetsTableTextBlock" xml:lang="en-US" id="label_ScheduleOfOtherAssetsTableTextBlock">Schedule of Other Assets [Table Text Block]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ScheduleOfOtherAssetsTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfOtherAssetsTableTextBlock" xml:lang="en-US" id="label_ScheduleOfOtherAssetsTableTextBlock_2">Schedule of components of assets manufactured for internal use</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfOtherAssetsTableTextBlock" xlink:to="label_ScheduleOfOtherAssetsTableTextBlock_2" xlink:title="label: ScheduleOfOtherAssetsTableTextBlock to label_ScheduleOfOtherAssetsTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:title="ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xml:lang="en-US" id="label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock">Schedule of components of income taxes (credits)</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xml:lang="en-US" id="label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_2">Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:to="label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_2" xlink:title="label: ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock to label_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:title="ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xml:lang="en-US" id="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock">Summary of stock option activity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:to="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:title="label: ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock to label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xml:lang="en-US" id="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_2">Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:to="label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_2" xlink:title="label: ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock to label_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:label="ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:title="ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xml:lang="en-US" id="label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock">Schedule of income (loss) before income taxes</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xml:lang="en-US" id="label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_2">Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:to="label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_2" xlink:title="label: ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock to label_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfComprehensiveIncomeLossTableTextBlock" xlink:label="ScheduleOfComprehensiveIncomeLossTableTextBlock" xlink:title="ScheduleOfComprehensiveIncomeLossTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfComprehensiveIncomeLossTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfComprehensiveIncomeLossTableTextBlock" xml:lang="en-US" id="label_ScheduleOfComprehensiveIncomeLossTableTextBlock">Schedule of Comprehensive Income (Loss) [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfComprehensiveIncomeLossTableTextBlock" xlink:to="label_ScheduleOfComprehensiveIncomeLossTableTextBlock" xlink:title="label: ScheduleOfComprehensiveIncomeLossTableTextBlock to label_ScheduleOfComprehensiveIncomeLossTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfComprehensiveIncomeLossTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfComprehensiveIncomeLossTableTextBlock" xml:lang="en-US" id="label_ScheduleOfComprehensiveIncomeLossTableTextBlock_2">Schedule of components of comprehensive income (loss)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfComprehensiveIncomeLossTableTextBlock" xlink:to="label_ScheduleOfComprehensiveIncomeLossTableTextBlock_2" xlink:title="label: ScheduleOfComprehensiveIncomeLossTableTextBlock to label_ScheduleOfComprehensiveIncomeLossTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:label="ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:title="ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xml:lang="en-US" id="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock">Schedule of estimated weighted-average assumptions used in calculation of fair value of options granted</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:to="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:title="label: ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock to label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xml:lang="en-US" id="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_2">Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:to="label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_2" xlink:title="label: ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock to label_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:title="ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xml:lang="en-US" id="label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xml:lang="en-US" id="label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_2">Schedule of components of net income (loss) per share</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:to="label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_2" xlink:title="label: ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock to label_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="ScheduleOfInventoryCurrentTableTextBlock" xlink:title="ScheduleOfInventoryCurrentTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfInventoryCurrentTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfInventoryCurrentTableTextBlock" xml:lang="en-US" id="label_ScheduleOfInventoryCurrentTableTextBlock">Schedule of Inventory, Current [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfInventoryCurrentTableTextBlock" xlink:to="label_ScheduleOfInventoryCurrentTableTextBlock" xlink:title="label: ScheduleOfInventoryCurrentTableTextBlock to label_ScheduleOfInventoryCurrentTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfInventoryCurrentTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfInventoryCurrentTableTextBlock" xml:lang="en-US" id="label_ScheduleOfInventoryCurrentTableTextBlock_2">Schedule of components of inventories</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfInventoryCurrentTableTextBlock" xlink:to="label_ScheduleOfInventoryCurrentTableTextBlock_2" xlink:title="label: ScheduleOfInventoryCurrentTableTextBlock to label_ScheduleOfInventoryCurrentTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:title="ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xml:lang="en-US" id="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock">Schedule of reconciliations of income taxes at the United States Federal statutory rate to the effective income tax rate</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:to="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:title="label: ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock to label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xml:lang="en-US" id="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_2">Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:to="label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_2" xlink:title="label: ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock to label_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:label="ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:title="ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xml:lang="en-US" id="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock">Schedule of reconciliation of the beginning and ending balance of unrecognized tax benefits</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:to="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:title="label: ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock to label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xml:lang="en-US" id="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_2">Schedule of Unrecognized Tax Benefits Roll Forward [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:to="label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_2" xlink:title="label: ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock to label_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xlink:label="ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xlink:title="ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xml:lang="en-US" id="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock">Schedule of future minimum lease commitments on non-cancelable operating leases</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xlink:to="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xlink:title="label: ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock to label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xml:lang="en-US" id="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock_2">Schedule of Future Minimum Rental Payments for Operating Leases [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" xlink:to="label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock_2" xlink:title="label: ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock to label_ScheduleOfFutureMinimumRentalPaymentsForOperatingLeasesTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfQuarterlyFinancialInformationTableTextBlock" xlink:label="ScheduleOfQuarterlyFinancialInformationTableTextBlock" xlink:title="ScheduleOfQuarterlyFinancialInformationTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock" xml:lang="en-US" id="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock">Schedule of quarterly results of operations</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfQuarterlyFinancialInformationTableTextBlock" xlink:to="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock" xlink:title="label: ScheduleOfQuarterlyFinancialInformationTableTextBlock to label_ScheduleOfQuarterlyFinancialInformationTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock" xml:lang="en-US" id="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock_2">Schedule of Quarterly Financial Information [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfQuarterlyFinancialInformationTableTextBlock" xlink:to="label_ScheduleOfQuarterlyFinancialInformationTableTextBlock_2" xlink:title="label: ScheduleOfQuarterlyFinancialInformationTableTextBlock to label_ScheduleOfQuarterlyFinancialInformationTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:title="ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xml:lang="en-US" id="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock">Schedule of significant components of current and long-term deferred income taxes</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:to="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:title="label: ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock to label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xml:lang="en-US" id="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_2">Schedule of Deferred Tax Assets and Liabilities [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:to="label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_2" xlink:title="label: ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock to label_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:title="ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xml:lang="en-US" id="label_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable">Schedule of Revenues from External Customers and Long-Lived Assets [Table]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="label_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:title="label: ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable to label_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:title="ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:label="ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:title="ScheduleOfDefinedBenefitPlansDisclosuresTable" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfDefinedBenefitPlansDisclosuresTable" xml:lang="en-US" id="label_ScheduleOfDefinedBenefitPlansDisclosuresTable">Schedule of Defined Benefit Plans Disclosures [Table]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfRestructuringAndRelatedCostsTable" xlink:label="ScheduleOfRestructuringAndRelatedCostsTable" xlink:title="ScheduleOfRestructuringAndRelatedCostsTable" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="SellingAndMarketingExpense" xlink:title="SellingAndMarketingExpense" />
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    <link:label xlink:type="resource" xlink:label="label_SeveranceCosts_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SeveranceCosts" xml:lang="en-US" id="label_SeveranceCosts_2">Severance Costs</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SeveranceCosts" xlink:to="label_SeveranceCosts_2" xlink:title="label: SeveranceCosts to label_SeveranceCosts" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SeveranceCosts_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_SeveranceCosts" xml:lang="en-US" id="label_SeveranceCosts_3">Employee termination benefits and other related costs</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardAcceleratedCompensationCost_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardAcceleratedCompensationCost" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardAcceleratedCompensationCost_2">Stock-based compensation expense related to accelerated vesting of options</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Additional Disclosures [Abstract]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="ShareBasedCompensation" xlink:title="ShareBasedCompensation" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensation" xlink:to="label_ShareBasedCompensation" xlink:title="label: ShareBasedCompensation to label_ShareBasedCompensation" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensation_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensation" xml:lang="en-US" id="label_ShareBasedCompensation_2">Stock-based compensation expense</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:title="ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedInPeriodFairValue" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedInPeriodFairValue" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedInPeriodFairValue" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:title="ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice" xlink:label="ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice" xlink:title="ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant">Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue">Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Aggregate Intrinsic Value</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue_2">Options Vested or Expected to Vest at the end of the period (in dollars)</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:title="ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" />
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    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationOptionAndIncentivePlansPolicy" xml:lang="en-US" id="label_ShareBasedCompensationOptionAndIncentivePlansPolicy">Stock-Based Compensation</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice">Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Exercise Price</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StatementOfStockholdersEquityAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StatementOfStockholdersEquityAbstract" xml:lang="en-US" id="label_StatementOfStockholdersEquityAbstract">Consolidated Statements of Stockholders' Equity</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="StatementOfCashFlowsAbstract" xlink:title="StatementOfCashFlowsAbstract" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="StatementEquityComponentsAxis" xlink:title="StatementEquityComponentsAxis" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="StatementOfFinancialPositionAbstract" xlink:title="StatementOfFinancialPositionAbstract" />
    <link:label xlink:type="resource" xlink:label="label_StatementOfFinancialPositionAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StatementOfFinancialPositionAbstract" xml:lang="en-US" id="label_StatementOfFinancialPositionAbstract">Consolidated Balance Sheets</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:title="StatementOfIncomeAndComprehensiveIncomeAbstract" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:to="label_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:title="label: StatementOfIncomeAndComprehensiveIncomeAbstract to label_StatementOfIncomeAndComprehensiveIncomeAbstract" use="optional" />
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    <link:label xlink:type="resource" xlink:label="label_StatementGeographicalAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StatementGeographicalAxis" xml:lang="en-US" id="label_StatementGeographicalAxis">Geographical [Axis]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesPeriodIncreaseDecrease" xlink:label="StockIssuedDuringPeriodSharesPeriodIncreaseDecrease" xlink:title="StockIssuedDuringPeriodSharesPeriodIncreaseDecrease" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodSharesPeriodIncreaseDecrease" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssuedDuringPeriodSharesPeriodIncreaseDecrease" xml:lang="en-US" id="label_StockIssuedDuringPeriodSharesPeriodIncreaseDecrease">Stock Issued During Period, Shares, Period Increase (Decrease)</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockOptionsMember" xlink:label="StockOptionsMember" xlink:title="StockOptionsMember" />
    <link:label xlink:type="resource" xlink:label="label_StockOptionsMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockOptionsMember" xml:lang="en-US" id="label_StockOptionsMember">Stock Options [Member]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StockOptionsMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockOptionsMember" xml:lang="en-US" id="label_StockOptionsMember_2">Stock Options</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockOptionsMember" xlink:to="label_StockOptionsMember_2" xlink:title="label: StockOptionsMember to label_StockOptionsMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:label="StockIssuedDuringPeriodValueStockOptionsExercised" xlink:title="StockIssuedDuringPeriodValueStockOptionsExercised" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssuedDuringPeriodValueStockOptionsExercised" xml:lang="en-US" id="label_StockIssuedDuringPeriodValueStockOptionsExercised">Stock Issued During Period, Value, Stock Options Exercised</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodValueStockOptionsExercised_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockIssuedDuringPeriodValueStockOptionsExercised" xml:lang="en-US" id="label_StockIssuedDuringPeriodValueStockOptionsExercised_2">Exercise of stock options</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockIssued1" xlink:label="StockIssued1" xlink:title="StockIssued1" />
    <link:label xlink:type="resource" xlink:label="label_StockIssued1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssued1" xml:lang="en-US" id="label_StockIssued1">Stock Issued</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockIssued1" xlink:to="label_StockIssued1" xlink:title="label: StockIssued1 to label_StockIssued1" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockIssued1_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockIssued1" xml:lang="en-US" id="label_StockIssued1_2">Issuance of restricted common stock in satisfaction of accrued compensation</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssuedDuringPeriodSharesStockOptionsExercised" xml:lang="en-US" id="label_StockIssuedDuringPeriodSharesStockOptionsExercised">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodSharesStockOptionsExercised_3" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_StockIssuedDuringPeriodSharesStockOptionsExercised" xml:lang="en-US" id="label_StockIssuedDuringPeriodSharesStockOptionsExercised_3">Exercised (in shares)</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:label="StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:title="StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" />
    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xml:lang="en-US" id="label_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan">Stock Issued During Period, Value, Employee Stock Purchase Plan</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xml:lang="en-US" id="label_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_2">Issuance of shares under Employee Stock Purchase Plan</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:label="StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:title="StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" />
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    <link:label xlink:type="resource" xlink:label="label_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xml:lang="en-US" id="label_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">Stock Issued During Period, Shares, Employee Stock Purchase Plans</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StockholdersEquityAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockholdersEquityAbstract" xml:lang="en-US" id="label_StockholdersEquityAbstract">Stockholders' equity</link:label>
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    <link:label xlink:type="resource" xlink:label="label_StockholdersEquityAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockholdersEquityAbstract" xml:lang="en-US" id="label_StockholdersEquityAbstract_2">Stockholders' Equity Attributable to Parent [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquityAbstract" xlink:to="label_StockholdersEquityAbstract_2" xlink:title="label: StockholdersEquityAbstract to label_StockholdersEquityAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="StockholdersEquity" xlink:title="StockholdersEquity" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquity" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_StockholdersEquity" xml:lang="en-US" id="label_StockholdersEquity">Total stockholders' equity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquity" xlink:to="label_StockholdersEquity" xlink:title="label: StockholdersEquity to label_StockholdersEquity" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquity_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockholdersEquity" xml:lang="en-US" id="label_StockholdersEquity_2">Stockholders' Equity Attributable to Parent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquity" xlink:to="label_StockholdersEquity_2" xlink:title="label: StockholdersEquity to label_StockholdersEquity" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquity_3" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:title="label_StockholdersEquity" xml:lang="en-US" id="label_StockholdersEquity_3">Balance</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquity" xlink:to="label_StockholdersEquity_3" xlink:title="label: StockholdersEquity to label_StockholdersEquity" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquity_4" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:title="label_StockholdersEquity" xml:lang="en-US" id="label_StockholdersEquity_4">Balance</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquity" xlink:to="label_StockholdersEquity_4" xlink:title="label: StockholdersEquity to label_StockholdersEquity" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="StockholdersEquityNoteAbstract" xlink:title="StockholdersEquityNoteAbstract" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquityNoteAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockholdersEquityNoteAbstract" xml:lang="en-US" id="label_StockholdersEquityNoteAbstract">Stockholders' Equity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquityNoteAbstract" xlink:to="label_StockholdersEquityNoteAbstract" xlink:title="label: StockholdersEquityNoteAbstract to label_StockholdersEquityNoteAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="StockholdersEquityNoteDisclosureTextBlock" xlink:title="StockholdersEquityNoteDisclosureTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquityNoteDisclosureTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockholdersEquityNoteDisclosureTextBlock" xml:lang="en-US" id="label_StockholdersEquityNoteDisclosureTextBlock">Stockholders' Equity Note Disclosure [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquityNoteDisclosureTextBlock" xlink:to="label_StockholdersEquityNoteDisclosureTextBlock" xlink:title="label: StockholdersEquityNoteDisclosureTextBlock to label_StockholdersEquityNoteDisclosureTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquityNoteDisclosureTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_StockholdersEquityNoteDisclosureTextBlock" xml:lang="en-US" id="label_StockholdersEquityNoteDisclosureTextBlock_2">Stockholders' Equity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquityNoteDisclosureTextBlock" xlink:to="label_StockholdersEquityNoteDisclosureTextBlock_2" xlink:title="label: StockholdersEquityNoteDisclosureTextBlock to label_StockholdersEquityNoteDisclosureTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_StockholdersEquityPeriodIncreaseDecrease" xlink:label="StockholdersEquityPeriodIncreaseDecrease" xlink:title="StockholdersEquityPeriodIncreaseDecrease" />
    <link:label xlink:type="resource" xlink:label="label_StockholdersEquityPeriodIncreaseDecrease" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_StockholdersEquityPeriodIncreaseDecrease" xml:lang="en-US" id="label_StockholdersEquityPeriodIncreaseDecrease">Stockholders' Equity, Period Increase (Decrease)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="StockholdersEquityPeriodIncreaseDecrease" xlink:to="label_StockholdersEquityPeriodIncreaseDecrease" xlink:title="label: StockholdersEquityPeriodIncreaseDecrease to label_StockholdersEquityPeriodIncreaseDecrease" use="optional" />
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    <link:label xlink:type="resource" xlink:label="label_SubsequentEventsTextBlock" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SubsequentEventsTextBlock" xml:lang="en-US" id="label_SubsequentEventsTextBlock">Subsequent Events [Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventsTextBlock" xlink:to="label_SubsequentEventsTextBlock" xlink:title="label: SubsequentEventsTextBlock to label_SubsequentEventsTextBlock" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventsTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SubsequentEventsTextBlock" xml:lang="en-US" id="label_SubsequentEventsTextBlock_2">Subsequent Events</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventsTextBlock" xlink:to="label_SubsequentEventsTextBlock_2" xlink:title="label: SubsequentEventsTextBlock to label_SubsequentEventsTextBlock" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="SubsequentEventsAbstract" xlink:title="SubsequentEventsAbstract" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventsAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SubsequentEventsAbstract" xml:lang="en-US" id="label_SubsequentEventsAbstract">Subsequent Events</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventsAbstract" xlink:to="label_SubsequentEventsAbstract" xlink:title="label: SubsequentEventsAbstract to label_SubsequentEventsAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="SubsequentEventTypeDomain" xlink:title="SubsequentEventTypeDomain" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventTypeDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SubsequentEventTypeDomain" xml:lang="en-US" id="label_SubsequentEventTypeDomain">Subsequent Event Type [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventTypeDomain" xlink:to="label_SubsequentEventTypeDomain" xlink:title="label: SubsequentEventTypeDomain to label_SubsequentEventTypeDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="SubsequentEventLineItems" xlink:title="SubsequentEventLineItems" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventLineItems" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SubsequentEventLineItems" xml:lang="en-US" id="label_SubsequentEventLineItems">Subsequent events</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventLineItems" xlink:to="label_SubsequentEventLineItems" xlink:title="label: SubsequentEventLineItems to label_SubsequentEventLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventLineItems_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SubsequentEventLineItems" xml:lang="en-US" id="label_SubsequentEventLineItems_2">Subsequent Event [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventLineItems" xlink:to="label_SubsequentEventLineItems_2" xlink:title="label: SubsequentEventLineItems to label_SubsequentEventLineItems" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="SubsequentEventTypeAxis" xlink:title="SubsequentEventTypeAxis" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventTypeAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SubsequentEventTypeAxis" xml:lang="en-US" id="label_SubsequentEventTypeAxis">Subsequent Event Type [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventTypeAxis" xlink:to="label_SubsequentEventTypeAxis" xlink:title="label: SubsequentEventTypeAxis to label_SubsequentEventTypeAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="SubsequentEventTable" xlink:title="SubsequentEventTable" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventTable" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SubsequentEventTable" xml:lang="en-US" id="label_SubsequentEventTable">Subsequent Event [Table]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventTable" xlink:to="label_SubsequentEventTable" xlink:title="label: SubsequentEventTable to label_SubsequentEventTable" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="SubsequentEventMember" xlink:title="SubsequentEventMember" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SubsequentEventMember" xml:lang="en-US" id="label_SubsequentEventMember">Subsequent event</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventMember" xlink:to="label_SubsequentEventMember" xlink:title="label: SubsequentEventMember to label_SubsequentEventMember" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SubsequentEventMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SubsequentEventMember" xml:lang="en-US" id="label_SubsequentEventMember_2">Subsequent Event [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SubsequentEventMember" xlink:to="label_SubsequentEventMember_2" xlink:title="label: SubsequentEventMember to label_SubsequentEventMember" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="SupplementalCashFlowInformationAbstract" xlink:title="SupplementalCashFlowInformationAbstract" />
    <link:label xlink:type="resource" xlink:label="label_SupplementalCashFlowInformationAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_SupplementalCashFlowInformationAbstract" xml:lang="en-US" id="label_SupplementalCashFlowInformationAbstract">Cash paid for:</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SupplementalCashFlowInformationAbstract" xlink:to="label_SupplementalCashFlowInformationAbstract" xlink:title="label: SupplementalCashFlowInformationAbstract to label_SupplementalCashFlowInformationAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_SupplementalCashFlowInformationAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_SupplementalCashFlowInformationAbstract" xml:lang="en-US" id="label_SupplementalCashFlowInformationAbstract_2">Supplemental Cash Flow Information [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="SupplementalCashFlowInformationAbstract" xlink:to="label_SupplementalCashFlowInformationAbstract_2" xlink:title="label: SupplementalCashFlowInformationAbstract to label_SupplementalCashFlowInformationAbstract" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TaxCreditCarryforwardAmount" xlink:label="TaxCreditCarryforwardAmount" xlink:title="TaxCreditCarryforwardAmount" />
    <link:label xlink:type="resource" xlink:label="label_TaxCreditCarryforwardAmount" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_TaxCreditCarryforwardAmount" xml:lang="en-US" id="label_TaxCreditCarryforwardAmount">Tax Credit Carryforward, Amount</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TaxCreditCarryforwardAmount" xlink:to="label_TaxCreditCarryforwardAmount" xlink:title="label: TaxCreditCarryforwardAmount to label_TaxCreditCarryforwardAmount" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_TaxCreditCarryforwardAmount_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_TaxCreditCarryforwardAmount" xml:lang="en-US" id="label_TaxCreditCarryforwardAmount_2">Tax credit carryforwards</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TaxCreditCarryforwardAmount" xlink:to="label_TaxCreditCarryforwardAmount_2" xlink:title="label: TaxCreditCarryforwardAmount to label_TaxCreditCarryforwardAmount" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="TaxCreditCarryforwardNameDomain" xlink:title="TaxCreditCarryforwardNameDomain" />
    <link:label xlink:type="resource" xlink:label="label_TaxCreditCarryforwardNameDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_TaxCreditCarryforwardNameDomain" xml:lang="en-US" id="label_TaxCreditCarryforwardNameDomain">Tax Credit Carryforward, Name [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TaxCreditCarryforwardNameDomain" xlink:to="label_TaxCreditCarryforwardNameDomain" xlink:title="label: TaxCreditCarryforwardNameDomain to label_TaxCreditCarryforwardNameDomain" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TaxCreditCarryforwardLineItems" xlink:label="TaxCreditCarryforwardLineItems" xlink:title="TaxCreditCarryforwardLineItems" />
    <link:label xlink:type="resource" xlink:label="label_TaxCreditCarryforwardLineItems" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_TaxCreditCarryforwardLineItems" xml:lang="en-US" id="label_TaxCreditCarryforwardLineItems">Tax Credit Carryforward [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TaxCreditCarryforwardLineItems" xlink:to="label_TaxCreditCarryforwardLineItems" xlink:title="label: TaxCreditCarryforwardLineItems to label_TaxCreditCarryforwardLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_TaxCreditCarryforwardLineItems_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_TaxCreditCarryforwardLineItems" xml:lang="en-US" id="label_TaxCreditCarryforwardLineItems_2">Tax credit carryforwards</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TaxCreditCarryforwardLineItems" xlink:to="label_TaxCreditCarryforwardLineItems_2" xlink:title="label: TaxCreditCarryforwardLineItems to label_TaxCreditCarryforwardLineItems" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="TaxCreditCarryforwardAxis" xlink:title="TaxCreditCarryforwardAxis" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TaxCreditCarryforwardAxis" xlink:to="label_TaxCreditCarryforwardAxis" xlink:title="label: TaxCreditCarryforwardAxis to label_TaxCreditCarryforwardAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_TaxCreditCarryforwardTable" xlink:label="TaxCreditCarryforwardTable" xlink:title="TaxCreditCarryforwardTable" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="TaxCreditCarryforwardTable" xlink:to="label_TaxCreditCarryforwardTable" xlink:title="label: TaxCreditCarryforwardTable to label_TaxCreditCarryforwardTable" use="optional" />
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    <link:label xlink:type="resource" xlink:label="label_TitleOfIndividualWithRelationshipToEntityDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_TitleOfIndividualWithRelationshipToEntityDomain" xml:lang="en-US" id="label_TitleOfIndividualWithRelationshipToEntityDomain">Title of Individual with Relationship to Entity [Domain]</link:label>
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    <link:label xlink:type="resource" xlink:label="label_UnrecognizedTaxBenefits" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_UnrecognizedTaxBenefits" xml:lang="en-US" id="label_UnrecognizedTaxBenefits">Net loss related to uncertain tax position in a certain foreign jurisdiction</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:label="UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:title="UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_UseOfEstimates" xlink:label="UseOfEstimates" xlink:title="UseOfEstimates" />
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    <link:label xlink:type="resource" xlink:label="label_ValuationAllowancesAndReservesDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ValuationAllowancesAndReservesDomain" xml:lang="en-US" id="label_ValuationAllowancesAndReservesDomain">Valuation Allowances and Reserves [Domain]</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ValuationAllowanceLineItems" xlink:label="ValuationAllowanceLineItems" xlink:title="ValuationAllowanceLineItems" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:title="ValuationAllowancesAndReservesChargedToCostAndExpense" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ValuationAllowancesAndReservesChargedToCostAndExpense" xml:lang="en-US" id="label_ValuationAllowancesAndReservesChargedToCostAndExpense">Valuation Allowances and Reserves, Charged to Cost and Expense</link:label>
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    <link:label xlink:type="resource" xlink:label="label_ValuationAllowancesAndReservesBalance_3" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:title="label_ValuationAllowancesAndReservesBalance" xml:lang="en-US" id="label_ValuationAllowancesAndReservesBalance_3">Balance at End of Period</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAllowancesAndReservesBalance" xlink:to="label_ValuationAllowancesAndReservesBalance_3" xlink:title="label: ValuationAllowancesAndReservesBalance to label_ValuationAllowancesAndReservesBalance" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ValuationAllowanceTable" xlink:label="ValuationAllowanceTable" xlink:title="ValuationAllowanceTable" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAllowanceTable" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ValuationAllowanceTable" xml:lang="en-US" id="label_ValuationAllowanceTable">Valuation Allowance [Table]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAllowanceTable" xlink:to="label_ValuationAllowanceTable" xlink:title="label: ValuationAllowanceTable to label_ValuationAllowanceTable" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="ValuationAllowancesAndReservesDeductions" xlink:title="ValuationAllowancesAndReservesDeductions" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAllowancesAndReservesDeductions" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ValuationAllowancesAndReservesDeductions" xml:lang="en-US" id="label_ValuationAllowancesAndReservesDeductions">Valuation Allowances and Reserves, Deductions</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAllowancesAndReservesDeductions" xlink:to="label_ValuationAllowancesAndReservesDeductions" xlink:title="label: ValuationAllowancesAndReservesDeductions to label_ValuationAllowancesAndReservesDeductions" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAllowancesAndReservesDeductions_2" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:title="label_ValuationAllowancesAndReservesDeductions" xml:lang="en-US" id="label_ValuationAllowancesAndReservesDeductions_2">Deductions</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAllowancesAndReservesDeductions" xlink:to="label_ValuationAllowancesAndReservesDeductions_2" xlink:title="label: ValuationAllowancesAndReservesDeductions to label_ValuationAllowancesAndReservesDeductions" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ValuationAndQualifyingAccountsAbstract" xlink:label="ValuationAndQualifyingAccountsAbstract" xlink:title="ValuationAndQualifyingAccountsAbstract" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAndQualifyingAccountsAbstract" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ValuationAndQualifyingAccountsAbstract" xml:lang="en-US" id="label_ValuationAndQualifyingAccountsAbstract">Schedule II-Valuation and Qualifying Accounts</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAndQualifyingAccountsAbstract" xlink:to="label_ValuationAndQualifyingAccountsAbstract" xlink:title="label: ValuationAndQualifyingAccountsAbstract to label_ValuationAndQualifyingAccountsAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:label="ValuationAndQualifyingAccountsDisclosureLineItems" xlink:title="ValuationAndQualifyingAccountsDisclosureLineItems" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ValuationAndQualifyingAccountsDisclosureLineItems" xml:lang="en-US" id="label_ValuationAndQualifyingAccountsDisclosureLineItems">Valuation and Qualifying Accounts Disclosure [Line Items]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="label_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:title="label: ValuationAndQualifyingAccountsDisclosureLineItems to label_ValuationAndQualifyingAccountsDisclosureLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAndQualifyingAccountsDisclosureLineItems_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ValuationAndQualifyingAccountsDisclosureLineItems" xml:lang="en-US" id="label_ValuationAndQualifyingAccountsDisclosureLineItems_2">Valuation and Qualifying Accounts</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="label_ValuationAndQualifyingAccountsDisclosureLineItems_2" xlink:title="label: ValuationAndQualifyingAccountsDisclosureLineItems to label_ValuationAndQualifyingAccountsDisclosureLineItems" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAndQualifyingAccountsDisclosureLineItems_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_ValuationAndQualifyingAccountsDisclosureLineItems" xml:lang="en-US" id="label_ValuationAndQualifyingAccountsDisclosureLineItems_3">Reserves</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="label_ValuationAndQualifyingAccountsDisclosureLineItems_3" xlink:title="label: ValuationAndQualifyingAccountsDisclosureLineItems to label_ValuationAndQualifyingAccountsDisclosureLineItems" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="ValuationAllowancesAndReservesTypeAxis" xlink:title="ValuationAllowancesAndReservesTypeAxis" />
    <link:label xlink:type="resource" xlink:label="label_ValuationAllowancesAndReservesTypeAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ValuationAllowancesAndReservesTypeAxis" xml:lang="en-US" id="label_ValuationAllowancesAndReservesTypeAxis">Valuation Allowances and Reserves Type [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ValuationAllowancesAndReservesTypeAxis" xlink:to="label_ValuationAllowancesAndReservesTypeAxis" xlink:title="label: ValuationAllowancesAndReservesTypeAxis to label_ValuationAllowancesAndReservesTypeAxis" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="WeightedAverageNumberOfSharesOutstandingAbstract" xlink:title="WeightedAverageNumberOfSharesOutstandingAbstract" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_WeightedAverageNumberOfSharesOutstandingAbstract" xml:lang="en-US" id="label_WeightedAverageNumberOfSharesOutstandingAbstract">Shares used in computing net income (loss) per share</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="label_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:title="label: WeightedAverageNumberOfSharesOutstandingAbstract to label_WeightedAverageNumberOfSharesOutstandingAbstract" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfSharesOutstandingAbstract_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_WeightedAverageNumberOfSharesOutstandingAbstract" xml:lang="en-US" id="label_WeightedAverageNumberOfSharesOutstandingAbstract_2">Weighted Average Number of Shares Outstanding, Diluted [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="label_WeightedAverageNumberOfSharesOutstandingAbstract_2" xlink:title="label: WeightedAverageNumberOfSharesOutstandingAbstract to label_WeightedAverageNumberOfSharesOutstandingAbstract" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="WeightedAverageNumberOfSharesOutstandingBasic" xlink:title="WeightedAverageNumberOfSharesOutstandingBasic" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfSharesOutstandingBasic" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_WeightedAverageNumberOfSharesOutstandingBasic" xml:lang="en-US" id="label_WeightedAverageNumberOfSharesOutstandingBasic">Weighted Average Number of Shares Outstanding, Basic</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfSharesOutstandingBasic" xlink:to="label_WeightedAverageNumberOfSharesOutstandingBasic" xlink:title="label: WeightedAverageNumberOfSharesOutstandingBasic to label_WeightedAverageNumberOfSharesOutstandingBasic" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfSharesOutstandingBasic_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_WeightedAverageNumberOfSharesOutstandingBasic" xml:lang="en-US" id="label_WeightedAverageNumberOfSharesOutstandingBasic_2">Basic (in shares)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfSharesOutstandingBasic" xlink:to="label_WeightedAverageNumberOfSharesOutstandingBasic_2" xlink:title="label: WeightedAverageNumberOfSharesOutstandingBasic to label_WeightedAverageNumberOfSharesOutstandingBasic" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfSharesOutstandingBasic_3" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_WeightedAverageNumberOfSharesOutstandingBasic" xml:lang="en-US" id="label_WeightedAverageNumberOfSharesOutstandingBasic_3">Weighted average common shares outstanding used in computing basic net income (loss) per share</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfSharesOutstandingBasic" xlink:to="label_WeightedAverageNumberOfSharesOutstandingBasic_3" xlink:title="label: WeightedAverageNumberOfSharesOutstandingBasic to label_WeightedAverageNumberOfSharesOutstandingBasic" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="WeightedAverageNumberOfDilutedSharesOutstanding" xlink:title="WeightedAverageNumberOfDilutedSharesOutstanding" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_WeightedAverageNumberOfDilutedSharesOutstanding" xml:lang="en-US" id="label_WeightedAverageNumberOfDilutedSharesOutstanding">Weighted Average Number of Shares Outstanding, Diluted</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="label_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:title="label: WeightedAverageNumberOfDilutedSharesOutstanding to label_WeightedAverageNumberOfDilutedSharesOutstanding" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfDilutedSharesOutstanding_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_WeightedAverageNumberOfDilutedSharesOutstanding" xml:lang="en-US" id="label_WeightedAverageNumberOfDilutedSharesOutstanding_2">Diluted (in shares)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="label_WeightedAverageNumberOfDilutedSharesOutstanding_2" xlink:title="label: WeightedAverageNumberOfDilutedSharesOutstanding to label_WeightedAverageNumberOfDilutedSharesOutstanding" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfDilutedSharesOutstanding_3" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_WeightedAverageNumberOfDilutedSharesOutstanding" xml:lang="en-US" id="label_WeightedAverageNumberOfDilutedSharesOutstanding_3">Weighted average common shares outstanding used in computing diluted net income (loss) per share</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="label_WeightedAverageNumberOfDilutedSharesOutstanding_3" xlink:title="label: WeightedAverageNumberOfDilutedSharesOutstanding to label_WeightedAverageNumberOfDilutedSharesOutstanding" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberOfDilutedSharesOutstanding_4" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:title="label_WeightedAverageNumberOfDilutedSharesOutstanding" xml:lang="en-US" id="label_WeightedAverageNumberOfDilutedSharesOutstanding_4">Weighted average common shares outstanding used in computing diluted net income (loss) per share</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="label_WeightedAverageNumberOfDilutedSharesOutstanding_4" xlink:title="label: WeightedAverageNumberOfDilutedSharesOutstanding to label_WeightedAverageNumberOfDilutedSharesOutstanding" use="optional" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:label="WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:title="WeightedAverageNumberDilutedSharesOutstandingAdjustment" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xml:lang="en-US" id="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment">Weighted Average Number Diluted Shares Outstanding Adjustment</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:to="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:title="label: WeightedAverageNumberDilutedSharesOutstandingAdjustment to label_WeightedAverageNumberDilutedSharesOutstandingAdjustment" use="optional" />
    <link:label xlink:type="resource" xlink:label="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment" xml:lang="en-US" id="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment_2">Incremental shares</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="WeightedAverageNumberDilutedSharesOutstandingAdjustment" xlink:to="label_WeightedAverageNumberDilutedSharesOutstandingAdjustment_2" xlink:title="label: WeightedAverageNumberDilutedSharesOutstandingAdjustment to label_WeightedAverageNumberDilutedSharesOutstandingAdjustment" use="optional" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ChargesRelatedToBelowNormalProductionCapacity" xlink:label="ChargesRelatedToBelowNormalProductionCapacity" xlink:title="ChargesRelatedToBelowNormalProductionCapacity" />
    <link:label xlink:type="resource" xlink:label="label_ChargesRelatedToBelowNormalProductionCapacity" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ChargesRelatedToBelowNormalProductionCapacity" xml:lang="en-US" id="label_ChargesRelatedToBelowNormalProductionCapacity">Charges Related to Below Normal Production Capacity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ChargesRelatedToBelowNormalProductionCapacity" xlink:to="label_ChargesRelatedToBelowNormalProductionCapacity" xlink:title="label: ChargesRelatedToBelowNormalProductionCapacity to label_ChargesRelatedToBelowNormalProductionCapacity" />
    <link:label xlink:type="resource" xlink:label="label_ChargesRelatedToBelowNormalProductionCapacity_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ChargesRelatedToBelowNormalProductionCapacity" xml:lang="en-US" id="label_ChargesRelatedToBelowNormalProductionCapacity_2">Cost of sales due to below normal production capacity</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ChargesRelatedToBelowNormalProductionCapacity" xlink:to="label_ChargesRelatedToBelowNormalProductionCapacity_2" xlink:title="label: ChargesRelatedToBelowNormalProductionCapacity to label_ChargesRelatedToBelowNormalProductionCapacity" />
    <link:label xlink:type="resource" xlink:label="label_ChargesRelatedToBelowNormalProductionCapacity_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ChargesRelatedToBelowNormalProductionCapacity" xml:lang="en-US" id="label_ChargesRelatedToBelowNormalProductionCapacity_3">Represents the amount charged to cost of sales due to below normal production capacity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ChargesRelatedToBelowNormalProductionCapacity" xlink:to="label_ChargesRelatedToBelowNormalProductionCapacity_3" xlink:title="label: ChargesRelatedToBelowNormalProductionCapacity to label_ChargesRelatedToBelowNormalProductionCapacity" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:label="ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:title="ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xml:lang="en-US" id="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_2">Schedule of Amounts Recognized in Balance Sheet [Table Text Block]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:to="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_2" xlink:title="label: ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock to label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" />
    <link:label xlink:type="resource" xlink:label="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xml:lang="en-US" id="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock">Schedule of classification of liabilities in consolidated balance sheets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:to="label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:title="label: ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock to label_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_AccruedCompensationMember" xlink:label="AccruedCompensationMember" xlink:title="AccruedCompensationMember" />
    <link:label xlink:type="resource" xlink:label="label_AccruedCompensationMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_AccruedCompensationMember" xml:lang="en-US" id="label_AccruedCompensationMember">Accrued Compensation [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccruedCompensationMember" xlink:to="label_AccruedCompensationMember" xlink:title="label: AccruedCompensationMember to label_AccruedCompensationMember" />
    <link:label xlink:type="resource" xlink:label="label_AccruedCompensationMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_AccruedCompensationMember" xml:lang="en-US" id="label_AccruedCompensationMember_2">Accrued compensation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccruedCompensationMember" xlink:to="label_AccruedCompensationMember_2" xlink:title="label: AccruedCompensationMember to label_AccruedCompensationMember" />
    <link:label xlink:type="resource" xlink:label="label_AccruedCompensationMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_AccruedCompensationMember" xml:lang="en-US" id="label_AccruedCompensationMember_3">Represents the accrued compensation line item in the statement of financial position in which the amount is included.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="AccruedCompensationMember" xlink:to="label_AccruedCompensationMember_3" xlink:title="label: AccruedCompensationMember to label_AccruedCompensationMember" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_CompletedInternalUseAssetsMember" xlink:label="CompletedInternalUseAssetsMember" xlink:title="CompletedInternalUseAssetsMember" />
    <link:label xlink:type="resource" xlink:label="label_CompletedInternalUseAssetsMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CompletedInternalUseAssetsMember" xml:lang="en-US" id="label_CompletedInternalUseAssetsMember">Completed Internal Use Assets [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CompletedInternalUseAssetsMember" xlink:to="label_CompletedInternalUseAssetsMember" xlink:title="label: CompletedInternalUseAssetsMember to label_CompletedInternalUseAssetsMember" />
    <link:label xlink:type="resource" xlink:label="label_CompletedInternalUseAssetsMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CompletedInternalUseAssetsMember" xml:lang="en-US" id="label_CompletedInternalUseAssetsMember_2">Internal use assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CompletedInternalUseAssetsMember" xlink:to="label_CompletedInternalUseAssetsMember_2" xlink:title="label: CompletedInternalUseAssetsMember to label_CompletedInternalUseAssetsMember" />
    <link:label xlink:type="resource" xlink:label="label_CompletedInternalUseAssetsMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_CompletedInternalUseAssetsMember" xml:lang="en-US" id="label_CompletedInternalUseAssetsMember_3">Represents the information pertaining to internal used assets that have been completed and placed into use.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CompletedInternalUseAssetsMember" xlink:to="label_CompletedInternalUseAssetsMember_3" xlink:title="label: CompletedInternalUseAssetsMember to label_CompletedInternalUseAssetsMember" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_InternalUsedAssetsTypeDomain" xlink:label="InternalUsedAssetsTypeDomain" xlink:title="InternalUsedAssetsTypeDomain" />
    <link:label xlink:type="resource" xlink:label="label_InternalUsedAssetsTypeDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InternalUsedAssetsTypeDomain" xml:lang="en-US" id="label_InternalUsedAssetsTypeDomain">Internal Used Assets Type [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InternalUsedAssetsTypeDomain" xlink:to="label_InternalUsedAssetsTypeDomain" xlink:title="label: InternalUsedAssetsTypeDomain to label_InternalUsedAssetsTypeDomain" />
    <link:label xlink:type="resource" xlink:label="label_InternalUsedAssetsTypeDomain_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_InternalUsedAssetsTypeDomain" xml:lang="en-US" id="label_InternalUsedAssetsTypeDomain_2">Listing of assets used for internal purpose which are not intended to sale.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InternalUsedAssetsTypeDomain" xlink:to="label_InternalUsedAssetsTypeDomain_2" xlink:title="label: InternalUsedAssetsTypeDomain to label_InternalUsedAssetsTypeDomain" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_InternalUsedAssetsTypeAxis" xlink:label="InternalUsedAssetsTypeAxis" xlink:title="InternalUsedAssetsTypeAxis" />
    <link:label xlink:type="resource" xlink:label="label_InternalUsedAssetsTypeAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_InternalUsedAssetsTypeAxis" xml:lang="en-US" id="label_InternalUsedAssetsTypeAxis">Internal Used Assets Type [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InternalUsedAssetsTypeAxis" xlink:to="label_InternalUsedAssetsTypeAxis" xlink:title="label: InternalUsedAssetsTypeAxis to label_InternalUsedAssetsTypeAxis" />
    <link:label xlink:type="resource" xlink:label="label_InternalUsedAssetsTypeAxis_2" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_InternalUsedAssetsTypeAxis" xml:lang="en-US" id="label_InternalUsedAssetsTypeAxis_2">Information by type of assets used for internal purpose and not intended to sale.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="InternalUsedAssetsTypeAxis" xlink:to="label_InternalUsedAssetsTypeAxis_2" xlink:title="label: InternalUsedAssetsTypeAxis to label_InternalUsedAssetsTypeAxis" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_OtherPlanLiabilitiesMember" xlink:label="OtherPlanLiabilitiesMember" xlink:title="OtherPlanLiabilitiesMember" />
    <link:label xlink:type="resource" xlink:label="label_OtherPlanLiabilitiesMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_OtherPlanLiabilitiesMember" xml:lang="en-US" id="label_OtherPlanLiabilitiesMember">Other liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherPlanLiabilitiesMember" xlink:to="label_OtherPlanLiabilitiesMember" xlink:title="label: OtherPlanLiabilitiesMember to label_OtherPlanLiabilitiesMember" />
    <link:label xlink:type="resource" xlink:label="label_OtherPlanLiabilitiesMember_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_OtherPlanLiabilitiesMember" xml:lang="en-US" id="label_OtherPlanLiabilitiesMember_2">Other Plan Liabilities [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherPlanLiabilitiesMember" xlink:to="label_OtherPlanLiabilitiesMember_2" xlink:title="label: OtherPlanLiabilitiesMember to label_OtherPlanLiabilitiesMember" />
    <link:label xlink:type="resource" xlink:label="label_OtherPlanLiabilitiesMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_OtherPlanLiabilitiesMember" xml:lang="en-US" id="label_OtherPlanLiabilitiesMember_3">Represents the other liabilities line item in the statement of financial position in which the amount is included.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="OtherPlanLiabilitiesMember" xlink:to="label_OtherPlanLiabilitiesMember_3" xlink:title="label: OtherPlanLiabilitiesMember to label_OtherPlanLiabilitiesMember" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xlink:label="PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xlink:title="PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" />
    <link:label xlink:type="resource" xlink:label="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xml:lang="en-US" id="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities_2">Pension and Other Postretirement Defined Benefit Plans, Current Liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xlink:to="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities_2" xlink:title="label: PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities to label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" />
    <link:label xlink:type="resource" xlink:label="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xml:lang="en-US" id="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities">Current liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xlink:to="label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" xlink:title="label: PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities to label_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:label="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:title="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xml:lang="en-US" id="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_2">Pension and Other Postretirement Defined Benefit Plans, Liabilities, Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:to="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_2" xlink:title="label: PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent to label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xml:lang="en-US" id="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent">Long-term liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:to="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:title="label: PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent to label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:label="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:title="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xml:lang="en-US" id="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_2">Pension and Other Postretirement Defined Benefit Plans, Liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:to="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_2" xlink:title="label: PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent to label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:title="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xml:lang="en-US" id="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent">Total liabilities</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:to="label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:title="label: PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent to label_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_DefinedBenefitPlanAdministrationExpenses" xlink:label="DefinedBenefitPlanAdministrationExpenses" xlink:title="DefinedBenefitPlanAdministrationExpenses" />
    <link:label xlink:type="resource" xlink:label="label_DefinedBenefitPlanAdministrationExpenses_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DefinedBenefitPlanAdministrationExpenses" xml:lang="en-US" id="label_DefinedBenefitPlanAdministrationExpenses_2">Defined Benefit Plan, Administration Expenses</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DefinedBenefitPlanAdministrationExpenses" xlink:to="label_DefinedBenefitPlanAdministrationExpenses_2" xlink:title="label: DefinedBenefitPlanAdministrationExpenses to label_DefinedBenefitPlanAdministrationExpenses" />
    <link:label xlink:type="resource" xlink:label="label_DefinedBenefitPlanAdministrationExpenses" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DefinedBenefitPlanAdministrationExpenses" xml:lang="en-US" id="label_DefinedBenefitPlanAdministrationExpenses">Plan expenses</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DefinedBenefitPlanAdministrationExpenses" xlink:to="label_DefinedBenefitPlanAdministrationExpenses" xlink:title="label: DefinedBenefitPlanAdministrationExpenses to label_DefinedBenefitPlanAdministrationExpenses" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_EquityIncentivePlan2012Member" xlink:label="EquityIncentivePlan2012Member" xlink:title="EquityIncentivePlan2012Member" />
    <link:label xlink:type="resource" xlink:label="label_EquityIncentivePlan2012Member" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_EquityIncentivePlan2012Member" xml:lang="en-US" id="label_EquityIncentivePlan2012Member">Equity Incentive Plan 2012 [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityIncentivePlan2012Member" xlink:to="label_EquityIncentivePlan2012Member" xlink:title="label: EquityIncentivePlan2012Member to label_EquityIncentivePlan2012Member" />
    <link:label xlink:type="resource" xlink:label="label_EquityIncentivePlan2012Member_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EquityIncentivePlan2012Member" xml:lang="en-US" id="label_EquityIncentivePlan2012Member_2">2012 Equity Incentive Plan</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityIncentivePlan2012Member" xlink:to="label_EquityIncentivePlan2012Member_2" xlink:title="label: EquityIncentivePlan2012Member to label_EquityIncentivePlan2012Member" />
    <link:label xlink:type="resource" xlink:label="label_EquityIncentivePlan2012Member_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_EquityIncentivePlan2012Member" xml:lang="en-US" id="label_EquityIncentivePlan2012Member_3">Represents information pertaining to 2012 Equity Incentive Plan of the entity.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="EquityIncentivePlan2012Member" xlink:to="label_EquityIncentivePlan2012Member_3" xlink:title="label: EquityIncentivePlan2012Member to label_EquityIncentivePlan2012Member" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested">Share-based Compensation Arrangement by Share-based Payment Award Period After Termination to Exercise Awards that were Vested</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_2">Period after termination to exercise awards that were vested</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_3">Represents the period after termination to exercise share-based awards that were vested.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_3" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards">Share-based Compensation Arrangement by Share-based Payment Award Period After Termination to Retiring Employeesto Exercise Vested Awards</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards_2">Period after termination to retiring employees to exercise vested awards</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards_3">Represents the period after termination to retiring employees to exercise vested share-based awards.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards_3" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" xlink:label="ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" xlink:title="ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" xml:lang="en-US" id="label_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant">Share-based Compensation Expenses Related to Modification of Stock Option Grant</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" xlink:to="label_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" xlink:title="label: ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant to label_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant" />
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    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueInputsLevel1Member" xlink:to="label_FairValueInputsLevel1Member_2" xlink:title="label: FairValueInputsLevel1Member to label_FairValueInputsLevel1Member" />
    <link:label xlink:type="resource" xlink:label="label_FairValueInputsLevel1Member" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_FairValueInputsLevel1Member" xml:lang="en-US" id="label_FairValueInputsLevel1Member">Level 1</link:label>
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    <link:label xlink:type="resource" xlink:label="label_EstimateOfFairValueFairValueDisclosureMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_EstimateOfFairValueFairValueDisclosureMember" xml:lang="en-US" id="label_EstimateOfFairValueFairValueDisclosureMember">Total</link:label>
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MoneyMarketFundsMember" xlink:label="MoneyMarketFundsMember" xlink:title="MoneyMarketFundsMember" />
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    <link:label xlink:type="resource" xlink:label="label_MoneyMarketFundsMember" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_MoneyMarketFundsMember" xml:lang="en-US" id="label_MoneyMarketFundsMember">Money market funds</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MoneyMarketFundsMember" xlink:to="label_MoneyMarketFundsMember" xlink:title="label: MoneyMarketFundsMember to label_MoneyMarketFundsMember" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="CashAndCashEquivalentsFairValueDisclosure" xlink:title="CashAndCashEquivalentsFairValueDisclosure" />
    <link:label xlink:type="resource" xlink:label="label_CashAndCashEquivalentsFairValueDisclosure_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_CashAndCashEquivalentsFairValueDisclosure" xml:lang="en-US" id="label_CashAndCashEquivalentsFairValueDisclosure_2">Cash and Cash Equivalents, Fair Value Disclosure</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CashAndCashEquivalentsFairValueDisclosure" xlink:to="label_CashAndCashEquivalentsFairValueDisclosure_2" xlink:title="label: CashAndCashEquivalentsFairValueDisclosure to label_CashAndCashEquivalentsFairValueDisclosure" />
    <link:label xlink:type="resource" xlink:label="label_CashAndCashEquivalentsFairValueDisclosure" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_CashAndCashEquivalentsFairValueDisclosure" xml:lang="en-US" id="label_CashAndCashEquivalentsFairValueDisclosure">Cash equivalents</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="CashAndCashEquivalentsFairValueDisclosure" xlink:to="label_CashAndCashEquivalentsFairValueDisclosure" xlink:title="label: CashAndCashEquivalentsFairValueDisclosure to label_CashAndCashEquivalentsFairValueDisclosure" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:title="FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:title="IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:label="UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:title="UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" />
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    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent" xlink:label="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent" xlink:title="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent" />
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    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsInventoryCurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsInventoryCurrent" xml:lang="en-US" id="label_DeferredTaxAssetsInventoryCurrent_3">Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsInventoryCurrent" xlink:to="label_DeferredTaxAssetsInventoryCurrent_3" xlink:title="label: DeferredTaxAssetsInventoryCurrent to label_DeferredTaxAssetsInventoryCurrent" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:label="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:title="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent">Deferred Tax Assets Tax Deferred Expense Compensation and Benefits Employee Compensation Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent to label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_2">Accrued compensation</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_2" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent to label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_3">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from employee compensation.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:to="label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_3" xlink:title="label: DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent to label_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DeferredTaxAssetsInventoryNoncurrent" xlink:label="DeferredTaxAssetsInventoryNoncurrent" xlink:title="DeferredTaxAssetsInventoryNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsInventoryNoncurrent" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DeferredTaxAssetsInventoryNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsInventoryNoncurrent">Deferred Tax Assets Inventory Noncurrent</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsInventoryNoncurrent" xlink:to="label_DeferredTaxAssetsInventoryNoncurrent" xlink:title="label: DeferredTaxAssetsInventoryNoncurrent to label_DeferredTaxAssetsInventoryNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsInventoryNoncurrent_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DeferredTaxAssetsInventoryNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsInventoryNoncurrent_2">Inventories</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsInventoryNoncurrent" xlink:to="label_DeferredTaxAssetsInventoryNoncurrent_2" xlink:title="label: DeferredTaxAssetsInventoryNoncurrent to label_DeferredTaxAssetsInventoryNoncurrent" />
    <link:label xlink:type="resource" xlink:label="label_DeferredTaxAssetsInventoryNoncurrent_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DeferredTaxAssetsInventoryNoncurrent" xml:lang="en-US" id="label_DeferredTaxAssetsInventoryNoncurrent_3">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DeferredTaxAssetsInventoryNoncurrent" xlink:to="label_DeferredTaxAssetsInventoryNoncurrent_3" xlink:title="label: DeferredTaxAssetsInventoryNoncurrent to label_DeferredTaxAssetsInventoryNoncurrent" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_MarketingExpense" xlink:label="MarketingExpense" xlink:title="MarketingExpense" />
    <link:label xlink:type="resource" xlink:label="label_MarketingExpense_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_MarketingExpense" xml:lang="en-US" id="label_MarketingExpense_2">Marketing Expense</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MarketingExpense" xlink:to="label_MarketingExpense_2" xlink:title="label: MarketingExpense to label_MarketingExpense" />
    <link:label xlink:type="resource" xlink:label="label_MarketingExpense" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_MarketingExpense" xml:lang="en-US" id="label_MarketingExpense">One-time marketing expense</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="MarketingExpense" xlink:to="label_MarketingExpense" xlink:title="label: MarketingExpense to label_MarketingExpense" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum_2">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Volatility Rate, Minimum</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum">Weighted-average expected volatility, minimum (as a percent)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xlink:label="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xlink:title="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum_2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum_2">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Volatility Rate, Maximum</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum_2" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" />
    <link:label xlink:type="resource" xlink:label="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xml:lang="en-US" id="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum">Weighted-average expected volatility, maximum (as a percent)</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xlink:to="label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" xlink:title="label: ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum to label_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="BalanceSheetLocationAxis" xlink:title="BalanceSheetLocationAxis" />
    <link:label xlink:type="resource" xlink:label="label_BalanceSheetLocationAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_BalanceSheetLocationAxis" xml:lang="en-US" id="label_BalanceSheetLocationAxis">Balance Sheet Location [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="BalanceSheetLocationAxis" xlink:to="label_BalanceSheetLocationAxis" xlink:title="label: BalanceSheetLocationAxis to label_BalanceSheetLocationAxis" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="BalanceSheetLocationDomain" xlink:title="BalanceSheetLocationDomain" />
    <link:label xlink:type="resource" xlink:label="label_BalanceSheetLocationDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_BalanceSheetLocationDomain" xml:lang="en-US" id="label_BalanceSheetLocationDomain">Balance Sheet Location [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="BalanceSheetLocationDomain" xlink:to="label_BalanceSheetLocationDomain" xlink:title="label: BalanceSheetLocationDomain to label_BalanceSheetLocationDomain" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:title="FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" />
    <link:label xlink:type="resource" xlink:label="label_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xml:lang="en-US" id="label_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable">Fair Value Measurements, Recurring and Nonrecurring [Table]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="label_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:title="label: FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable to label_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="FairValueByMeasurementFrequencyAxis" xlink:title="FairValueByMeasurementFrequencyAxis" />
    <link:label xlink:type="resource" xlink:label="label_FairValueByMeasurementFrequencyAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueByMeasurementFrequencyAxis" xml:lang="en-US" id="label_FairValueByMeasurementFrequencyAxis">Measurement Frequency [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueByMeasurementFrequencyAxis" xlink:to="label_FairValueByMeasurementFrequencyAxis" xlink:title="label: FairValueByMeasurementFrequencyAxis to label_FairValueByMeasurementFrequencyAxis" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="FairValueMeasurementFrequencyDomain" xlink:title="FairValueMeasurementFrequencyDomain" />
    <link:label xlink:type="resource" xlink:label="label_FairValueMeasurementFrequencyDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueMeasurementFrequencyDomain" xml:lang="en-US" id="label_FairValueMeasurementFrequencyDomain">Fair Value, Measurement Frequency [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueMeasurementFrequencyDomain" xlink:to="label_FairValueMeasurementFrequencyDomain" xlink:title="label: FairValueMeasurementFrequencyDomain to label_FairValueMeasurementFrequencyDomain" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="FairValueByFairValueHierarchyLevelAxis" xlink:title="FairValueByFairValueHierarchyLevelAxis" />
    <link:label xlink:type="resource" xlink:label="label_FairValueByFairValueHierarchyLevelAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueByFairValueHierarchyLevelAxis" xml:lang="en-US" id="label_FairValueByFairValueHierarchyLevelAxis">Fair Value, Hierarchy [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueByFairValueHierarchyLevelAxis" xlink:to="label_FairValueByFairValueHierarchyLevelAxis" xlink:title="label: FairValueByFairValueHierarchyLevelAxis to label_FairValueByFairValueHierarchyLevelAxis" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="FairValueMeasurementsFairValueHierarchyDomain" xlink:title="FairValueMeasurementsFairValueHierarchyDomain" />
    <link:label xlink:type="resource" xlink:label="label_FairValueMeasurementsFairValueHierarchyDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueMeasurementsFairValueHierarchyDomain" xml:lang="en-US" id="label_FairValueMeasurementsFairValueHierarchyDomain">Fair Value, Measurements, Fair Value Hierarchy [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueMeasurementsFairValueHierarchyDomain" xlink:to="label_FairValueMeasurementsFairValueHierarchyDomain" xlink:title="label: FairValueMeasurementsFairValueHierarchyDomain to label_FairValueMeasurementsFairValueHierarchyDomain" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="FairValueByAssetClassAxis" xlink:title="FairValueByAssetClassAxis" />
    <link:label xlink:type="resource" xlink:label="label_FairValueByAssetClassAxis" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueByAssetClassAxis" xml:lang="en-US" id="label_FairValueByAssetClassAxis">Asset Class [Axis]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueByAssetClassAxis" xlink:to="label_FairValueByAssetClassAxis" xlink:title="label: FairValueByAssetClassAxis to label_FairValueByAssetClassAxis" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:title="FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" />
    <link:label xlink:type="resource" xlink:label="label_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xml:lang="en-US" id="label_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain">Fair Value by Asset Class [Domain]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="label_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:title="label: FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain to label_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" />
    <link:loc xlink:type="locator" xlink:href="acls-20121231.xsd#acls_DryStripProductLineMember" xlink:label="DryStripProductLineMember" xlink:title="DryStripProductLineMember" />
    <link:label xlink:type="resource" xlink:label="label_DryStripProductLineMember" xlink:role="http://www.xbrl.org/2003/role/label" xlink:title="label_DryStripProductLineMember" xml:lang="en-US" id="label_DryStripProductLineMember">Dry Strip Product Line [Member]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DryStripProductLineMember" xlink:to="label_DryStripProductLineMember" xlink:title="label: DryStripProductLineMember to label_DryStripProductLineMember" />
    <link:label xlink:type="resource" xlink:label="label_DryStripProductLineMember_2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:title="label_DryStripProductLineMember" xml:lang="en-US" id="label_DryStripProductLineMember_2">Dry strip product line, intellectual property rights and certain assets</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DryStripProductLineMember" xlink:to="label_DryStripProductLineMember_2" xlink:title="label: DryStripProductLineMember to label_DryStripProductLineMember" />
    <link:label xlink:type="resource" xlink:label="label_DryStripProductLineMember_3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:title="label_DryStripProductLineMember" xml:lang="en-US" id="label_DryStripProductLineMember_3">Intellectual property rights and certain assets relating to the entity's dry strip product line.</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="DryStripProductLineMember" xlink:to="label_DryStripProductLineMember_3" xlink:title="label: DryStripProductLineMember to label_DryStripProductLineMember" />
    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:label="IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" xlink:title="IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems" />
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    <link:loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2012/elts/us-gaap-2012-01-31.xsd#us-gaap_AssetUnderConstructionMember" xlink:label="AssetUnderConstructionMember" xlink:title="AssetUnderConstructionMember" />
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<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>15
<FILENAME>acls-20121231_pre.xml
<DESCRIPTION>EX-101.PRE
<TEXT>
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<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>16
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<DESCRIPTION>EX-101.DEF
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  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Employee Benefit Plans (Tables)<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
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      <tr>
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          <div>Dec. 31, 2012</div>
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<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 95.75%; PADDING-TOP: 0pt; POSITION: relative; HEIGHT: 118px">
<p style="FONT-FAMILY: times">&#160;</p>
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<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>Year Ended<br />
December&#160;31,</b></font></th>
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<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Current:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Accrued compensation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,475</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,290</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other current liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">199</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total current liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,475</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,489</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-TOP: 12pt; MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Long-term:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other long-term liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3,042</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,243</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 40pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,517</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3,732</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
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                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CompensationAndRetirementDisclosureAbstract</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the amounts that are recognized in the balance sheet (or statement of financial position) for pension plans and/or other employee benefit plans, showing separately the assets and current and noncurrent liabilities (if applicable) recognized.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e1928-114920<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock</nobr></td>
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<TEXT>
<html>
  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EA1AE">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Property, Plant and Equipment, net (Details) (USD $)<br></strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment, net</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross</a></td>
        <td class="nump">$ 86,527,000<span></span></td>
        <td class="nump">$ 86,546,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Accumulated depreciation</a></td>
        <td class="num">(52,114,000)<span></span></td>
        <td class="num">(49,342,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Net</a></td>
        <td class="nump">34,413,000<span></span></td>
        <td class="nump">37,204,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Depreciation', window );">Depreciation expense</a></td>
        <td class="nump">3,300,000<span></span></td>
        <td class="nump">3,500,000<span></span></td>
        <td class="nump">3,600,000<span></span></td>
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      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Land and buildings</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment, net</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross</a></td>
        <td class="nump">78,954,000<span></span></td>
        <td class="nump">78,985,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Machinery and equipment</div>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment, net</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross</a></td>
        <td class="nump">7,118,000<span></span></td>
        <td class="nump">7,020,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Construction in process</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment, net</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
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        <td class="nump">$ 455,000<span></span></td>
        <td class="nump">$ 541,000<span></span></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The cumulative amount of depreciation, depletion and amortization (related to property, plant and equipment, but not including land) that has been recognized in the income statement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 14<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.14)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Gross amount of long-lived physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.13)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount, net of accumulated depreciation, depletion and amortization, of long-lived physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 8<br><br> -Article 7<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -Subparagraph b, c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.13)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 13<br><br> -Subparagraph a<br><br> -Article 5<br><br><br><br></p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EGZAG">
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          <div>Dec. 31, 2012

</div>
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</div>
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        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ConcentrationRiskNumberOfCustomers</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:integerItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ConcentrationRiskLineItems</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 275<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 18<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6927468&amp;loc=d3e6351-108592<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 825<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 21<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7491637&amp;loc=d3e13537-108611<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 275<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6927468&amp;loc=d3e6404-108592<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 825<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7491637&amp;loc=d3e13531-108611<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ConcentrationRiskPercentage1</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td>num:percentItemType</td>
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                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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            </div>
          </td>
        </tr>
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<DESCRIPTION>IDEA: XBRL DOCUMENT
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<html>
  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0E6SBI">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Quarterly Results of Operations (unaudited) (Details) (USD $)<br></strong></div>
        </th>
        <th class="th" colspan="8">3 Months Ended</th>
        <th class="th" colspan="3">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Sep. 30, 2012</div>
        </th>
        <th class="th">
          <div>Jun. 30, 2012</div>
        </th>
        <th class="th">
          <div>Mar. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Sep. 30, 2011</div>
        </th>
        <th class="th">
          <div>Jun. 30, 2011</div>
        </th>
        <th class="th">
          <div>Mar. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_QuarterlyFinancialInformationDisclosureAbstract', window );"><strong>Quarterly Results of Operations (unaudited)</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Revenue</a></td>
        <td class="nump">$ 44,624,000<span></span></td>
        <td class="nump">$ 44,640,000<span></span></td>
        <td class="nump">$ 59,114,000<span></span></td>
        <td class="nump">$ 55,007,000<span></span></td>
        <td class="nump">$ 60,411,000<span></span></td>
        <td class="nump">$ 72,455,000<span></span></td>
        <td class="nump">$ 93,380,000<span></span></td>
        <td class="nump">$ 93,170,000<span></span></td>
        <td class="nump">$ 203,385,000<span></span></td>
        <td class="nump">$ 319,416,000<span></span></td>
        <td class="nump">$ 275,212,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
        <td class="nump">480,000<span></span></td>
        <td class="nump">14,367,000<span></span></td>
        <td class="nump">22,788,000<span></span></td>
        <td class="nump">20,536,000<span></span></td>
        <td class="nump">22,623,000<span></span></td>
        <td class="nump">26,895,000<span></span></td>
        <td class="nump">34,138,000<span></span></td>
        <td class="nump">31,081,000<span></span></td>
        <td class="nump">58,171,000<span></span></td>
        <td class="nump">114,737,000<span></span></td>
        <td class="nump">85,838,000<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income (loss)</a></td>
        <td class="num">(14,818,000)<span></span></td>
        <td class="num">(8,718,000)<span></span></td>
        <td class="num">(471,000)<span></span></td>
        <td class="num">(10,027,000)<span></span></td>
        <td class="num">(2,113,000)<span></span></td>
        <td class="nump">1,151,000<span></span></td>
        <td class="nump">4,227,000<span></span></td>
        <td class="nump">1,812,000<span></span></td>
        <td class="num">(34,034,000)<span></span></td>
        <td class="nump">5,077,000<span></span></td>
        <td class="num">(17,573,000)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasicAndDiluted', window );">Net income (loss) per share basic and diluted (in dollars per share)</a></td>
        <td class="num">$ (0.14)<span></span></td>
        <td class="num">$ (0.08)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">$ (0.09)<span></span></td>
        <td class="num">$ (0.02)<span></span></td>
        <td class="nump">$ 0.01<span></span></td>
        <td class="nump">$ 0.04<span></span></td>
        <td class="nump">$ 0.02<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 0.05<span></span></td>
        <td class="num">$ (0.17)<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_IncomeTaxExpenseBenefitUncertainTaxPositionForeign', window );">Tax expense related to an uncertain tax position in a certain foreign jurisdiction</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">800,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">900,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterimPeriodCostsNotAllocableLineItems', window );"><strong>Quarterly charges and expenses</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal', window );">Gain on sale of dry strip assets and intellectual property</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">7,904,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestructuringCharges', window );">Restructuring charges</a></td>
        <td class="nump">600,000<span></span></td>
        <td class="nump">600,000<span></span></td>
        <td class="nump">100,000<span></span></td>
        <td class="nump">2,900,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">4,169,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">One-time expense</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterimPeriodCostsNotAllocableLineItems', window );"><strong>Quarterly charges and expenses</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MarketingExpense', window );">One-time marketing expense</a></td>
        <td class="nump">2,100,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Dry strip product line, intellectual property rights and certain assets</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterimPeriodCostsNotAllocableLineItems', window );"><strong>Quarterly charges and expenses</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal', window );">Gain on sale of dry strip assets and intellectual property</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">7,900,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Inventory reserves</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterimPeriodCostsNotAllocableLineItems', window );"><strong>Quarterly charges and expenses</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Provision for excess inventory</a></td>
        <td class="nump">13,400,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">14,492,000<span></span></td>
        <td class="nump">1,015,000<span></span></td>
        <td class="nump">2,015,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal', window );">Gain on sale of dry strip assets and intellectual property</a></td>
        <td class="nump">$ 7,904,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 7,904,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncomeTaxExpenseBenefitUncertainTaxPositionForeign">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the amount of income tax expense (benefit) related to an uncertain tax position in a foreign jurisdiction.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_IncomeTaxExpenseBenefitUncertainTaxPositionForeign</nobr></td>
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                  <tr>
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                    <td>acls_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gain (loss) resulting from the sale of a disposal group that is not a discontinued operation. It is included in income from continuing operations before income taxes in the income statement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 37, 45<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 205<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6360339&amp;loc=d3e1361-107760<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 47<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=8077374&amp;loc=d3e2443-110228<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasicAndDiluted">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of net income or loss for the period per each share in instances when basic and diluted earnings per share are the same amount and reported as a single line item on the face of the financial statements.  Basic earnings per share is the amount of net income or loss for the period per each share of common stock or unit outstanding during the reporting period.  Diluted earnings per share includes the amount of net income or loss for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EarningsPerShareBasicAndDiluted</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 225<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.5-03.1,2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_GrossProfit</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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              </div>
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          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterimPeriodCostsNotAllocableLineItems">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InterimPeriodCostsNotAllocableLineItems</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MarketingExpense">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Expenditures for planning and executing the conception, pricing, promotion, and distribution of ideas, goods, and services. Costs of public relations and corporate promotions are typically considered to be marketing costs.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 225<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.5-03.4)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_MarketingExpense</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net income after adjustments for dividends on preferred stock (declared in the period) and/or cumulative preferred stock (accumulated for the period).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 11<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1377-109256<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_QuarterlyFinancialInformationDisclosureAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_QuarterlyFinancialInformationDisclosureAbstract</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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              </div>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestructuringCharges">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount charged against earnings in the period for incurred and estimated costs associated with exit from or disposal of business activities or restructurings pursuant to a duly authorized plan, excluding asset retirement obligations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 5.P.3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140864-122747<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section P<br><br> -Subsection 3, 4<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394359&amp;loc=d3e17939-110869<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.P.4(b))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_RestructuringCharges</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueNet">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 225<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.5-03.1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 1<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SalesRevenueNet</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          </td>
        </tr>
      </table>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of allowances and reserves, the valuation and qualifying accounts that are either netted against the cost of an asset (in order to value it at its carrying value) or that reflect a liability established to represent expected future costs, charged to costs and expenses.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
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            </div>
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        </tr>
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  <head>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EHFAG">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Assets Manufactured for Internal Use (Details) (USD $)<br></strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Assets manufactured for internal use</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Cost</a></td>
        <td class="nump">$ 86,527,000<span></span></td>
        <td class="nump">$ 86,546,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Accumulated depreciation</a></td>
        <td class="num">(52,114,000)<span></span></td>
        <td class="num">(49,342,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Net</a></td>
        <td class="nump">34,413,000<span></span></td>
        <td class="nump">37,204,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Depreciation', window );">Depreciation expense</a></td>
        <td class="nump">3,300,000<span></span></td>
        <td class="nump">3,500,000<span></span></td>
        <td class="nump">3,600,000<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Assets Manufactured for Internal Use</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Assets manufactured for internal use</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Cost</a></td>
        <td class="nump">23,727,000<span></span></td>
        <td class="nump">27,503,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Accumulated depreciation</a></td>
        <td class="num">(13,948,000)<span></span></td>
        <td class="num">(10,526,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Net</a></td>
        <td class="nump">9,779,000<span></span></td>
        <td class="nump">16,977,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Depreciable period</a></td>
        <td class="text">5 years<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Depreciation', window );">Depreciation expense</a></td>
        <td class="nump">3,400,000<span></span></td>
        <td class="nump">4,900,000<span></span></td>
        <td class="nump">3,300,000<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Assets Manufactured for Internal Use | Internal use assets</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Assets manufactured for internal use</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Cost</a></td>
        <td class="nump">21,904,000<span></span></td>
        <td class="nump">27,503,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Assets Manufactured for Internal Use | Construction in process</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Assets manufactured for internal use</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Cost</a></td>
        <td class="nump">$ 1,823,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The cumulative amount of depreciation, depletion and amortization (related to property, plant and equipment, but not including land) that has been recognized in the income statement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 14<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.14)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Depreciation">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_Depreciation</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentGross">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Gross amount of long-lived physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.13)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PropertyPlantAndEquipmentGross</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PropertyPlantAndEquipmentLineItems</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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            </div>
          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount, net of accumulated depreciation, depletion and amortization, of long-lived physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 8<br><br> -Article 7<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -Subparagraph b, c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.13)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 13<br><br> -Subparagraph a<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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                <p>Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EEHAC">
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          <div style="width: 200px;"><strong>Nature of Business (Details) (USD $)<br>In Thousands, unless otherwise specified</strong></div>
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          <div class="a">Dry strip product line, intellectual property rights and certain assets</div>
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                <p>Represents the size of dry strip wafer processing equipment that the entity will stop selling.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
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                <p>The cash inflow from the sale of property, plant and equipment (capital expenditures), software, and other intangible assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 16<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Investing Activities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 15<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 12<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3179-108585<br><br><br><br></p>
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<td style="FONT-FAMILY: times" width="45"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(305</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(411</font></td>
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<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">24,843</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">35,071</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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                <p>Tabular disclosure of the various types of trade accounts and notes receivable and for each the gross carrying value, allowance, and net carrying value as of the balance sheet date. Presentation is categorized by current, noncurrent and unclassified receivables.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><nobr>us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock</nobr></td>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0E5KAE">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Product Warranty (Details) (USD $)<br>In Thousands, unless otherwise specified</strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
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      <tr>
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          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
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        <th class="th">
          <div>Dec. 31, 2010</div>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">$ 3,697<span></span></td>
        <td class="nump">$ 2,713<span></span></td>
        <td class="nump">$ 726<span></span></td>
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        <td class="nump">4,772<span></span></td>
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        <td class="num">(1,928)<span></span></td>
        <td class="nump">1,487<span></span></td>
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        <td class="nump">101<span></span></td>
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        <td class="nump">157<span></span></td>
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        <td class="nump">$ 1,801<span></span></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the period for which the warranty is offered for the products sold.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 460<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -Subparagraph ((c)(5))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6398077&amp;loc=d3e12565-110249<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 942<br><br> -SubTopic 210<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.9-03.15(5))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 15<br><br> -Subparagraph 5<br><br> -Article 9<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 5<br><br> -Paragraph 9, 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProductWarrantyAccrual</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 5<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 460<br><br> -SubTopic 10<br><br> -Section 25<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6397716&amp;loc=d3e11281-110244<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 20<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 460<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 7<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6398077&amp;loc=d3e12524-110249<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.20)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 5<br><br> -Paragraph 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProductWarrantyAccrualClassifiedCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying value as of the balance sheet date of obligations incurred through that date and due after one year (or beyond the operating cycle if longer) for estimated claims under standard and extended warranty protection rights granted to customers.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 450<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6952336&amp;loc=d3e14394-108349<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 5<br><br> -Paragraph 9, 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.24)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 24<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 450<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6952336&amp;loc=d3e14326-108349<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProductWarrantyAccrualNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPayments">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the aggregate decrease in the liability related to payments to satisfy claims for standard and extended product warranties.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 460<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -Subparagraph ((c)(2))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6398077&amp;loc=d3e12565-110249<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProductWarrantyAccrualPayments</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the aggregate Increase or Decrease in the liability during the reporting period for accruals related to preexisting standard and extended product warranties (including adjustments for changes in estimates).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 460<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -Subparagraph ((c)(4))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6398077&amp;loc=d3e12565-110249<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
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            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the aggregate increase in the liability for accruals related to standard and extended product warranties issued during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 460<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -Subparagraph ((c)(3))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6398077&amp;loc=d3e12565-110249<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProductWarrantyAccrualWarrantiesIssued</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EOBAC">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Subsequent Events (Details) (Subsequent event, USD $)<br>In Thousands, unless otherwise specified</strong></div>
        </th>
        <th class="th" colspan="1">3 Months Ended</th>
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      <tr>
        <th class="th">
          <div>Mar. 31, 2013</div>
        </th>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Subsequent event</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent events</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SeveranceCosts', window );">Employee termination benefits and other related costs</a></td>
        <td class="nump">$ 1,100<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SeveranceCosts">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The charge against earnings in the period for known and estimated costs of termination benefits provided to current employees that are involuntarily terminated under a benefit arrangement associated with exit from or disposal of business activities or restructurings pursuant to a duly authorized plan, excluding costs or losses pertaining to an entity newly acquired in a business combination or a discontinued operation as defined by generally accepted accounting principles and costs associated with one-time termination benefits.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (a)(10)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e1928-114920<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394359&amp;loc=d3e17939-110869<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 146<br><br> -Paragraph 8-13, 20<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.P.4(b))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 5-8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 112<br><br> -Paragraph 7<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section P<br><br> -Subsection 3, 4<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 5.P.3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140864-122747<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Staff Position (FSP)<br><br> -Number FAS146-1<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SeveranceCosts</nobr></td>
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                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SubsequentEventLineItems</nobr></td>
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                  <tr>
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                    <td>na</td>
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<DOCUMENT>
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<SEQUENCE>27
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  <head>
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    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Business Segment and Geographic Region Information<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Business Segment and Geographic Region Information</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingDisclosureTextBlock', window );">Business Segment and Geographic Region Information</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;17. Business Segment and Geographic Region Information</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company operates in one business segment, which is the manufacture of capital equipment for the semiconductor manufacturing industry. The principal market for semiconductor manufacturing equipment is semiconductor manufacturers. Substantially all sales are made directly by the Company to its customers located in the United States, Europe and Asia Pacific.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's ion implantation systems product line includes high current, medium current and high energy implanters. Other products include dry strip equipment, curing systems, and thermal processing systems. In addition to equipment, the Company provides post-sales equipment service and support, including spare parts, equipment upgrades, maintenance services and customer training.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue by product lines is as follows:</font></p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times"><font size="2"><!-- COMMAND=ADD_TABLEWIDTH,"100%" --></font></p>
<!-- User-specified TAGGED TABLE -->
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Ion implantation systems, services, and royalties</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">156,090</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">237,857</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">232,335</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other systems and services</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">47,295</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">81,559</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">42,877</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">203,385</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">319,416</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">275,212</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue and long-lived assets by geographic region, based on the physical location of the operation recording the sale or the asset, are as follows:</font></p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times"><font size="2"><!-- COMMAND=ADD_TABLEWIDTH,"100%" --></font></p>
<!-- User-specified TAGGED TABLE -->
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="54"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Revenue</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Long-Lived<br />
Assets</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2012</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">United States</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">132,159</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">43,440</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Europe</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">27,636</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Asia Pacific</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">43,590</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">752</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">203,385</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">44,192</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2011</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">United States</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">234,132</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">54,472</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Europe</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">31,505</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Asia Pacific</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">53,779</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">996</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">319,416</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">55,468</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2010</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">United States</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">190,819</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">50,532</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Europe</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">33,822</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Asia Pacific</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">50,571</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">442</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">275,212</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">50,974</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Long-lived assets consist of property, plant and equipment, net and assets manufactured for internal use. Operations in Europe and Asia Pacific consist of sales and service organizations.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;International revenue, including export sales from U.S. manufacturing facilities to foreign customers, sales by foreign subsidiaries and branches was $142.8&#160;million (70.2% of total revenue) in 2012, $231.0&#160;million (72.3% of total revenue) in 2011, and $208.5&#160;million (75.8% of total revenue) in 2010.</font></p></div>
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                <p>The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.</p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0ERVAE">
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          <div style="width: 200px;"><strong>Gain on Sale of Dry Strip Assets and Intellectual Property (Details) (USD $)<br></strong></div>
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          <div>Dec. 31, 2012</div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Sale of assets</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">$ 7,904,000<span></span></td>
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        <td class="nump">8,716,000<span></span></td>
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          <div class="a">Dry strip product line, intellectual property rights and certain assets</div>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Sale of assets</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DispositionOfAssetsSalePrice', window );">Purchase price</a></td>
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        <td class="nump">10,700,000<span></span></td>
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        <td class="nump">2,000,000<span></span></td>
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        <td class="nump">7,900,000<span></span></td>
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        <td class="nump">8,700,000<span></span></td>
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        <td class="nump">$ 800,000<span></span></td>
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          <div class="a">Dry strip product line, intellectual property rights and certain assets | Period through September 2013</div>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Sale of assets</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">300<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Dry strip product line, intellectual property rights and certain assets | Period through December 2015</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsLineItems', window );"><strong>Sale of assets</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_SizeOfDryStripWaferProcessingEquipmentLicenseReceived', window );">Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)</a></td>
        <td class="nump">200<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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                <p>Represents the contingent consideration relating to the sale of assets.</p>
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                <p>No definition available.</p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the sale price, including contingent consideration, of the assets sold.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Offset against proceeds when determining the gain on the sale of assets.</p>
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                <p>No definition available.</p>
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                    <td><strong> Name:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the size of dry strip wafer processing equipment for which the entity was granted a license to make and sell.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
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                <p>The gain (loss) resulting from the sale of a disposal group that is not a discontinued operation. It is included in income from continuing operations before income taxes in the income statement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 37, 45<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 205<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6360339&amp;loc=d3e1361-107760<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 47<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=8077374&amp;loc=d3e2443-110228<br><br><br><br></p>
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                <p>The cash inflow from the sale of property, plant and equipment (capital expenditures), software, and other intangible assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 16<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Investing Activities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 15<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 12<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3179-108585<br><br><br><br></p>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">224</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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                <p>Tabular disclosure of future minimum payments required in the aggregate and for each of the five succeeding fiscal years for operating leases having initial or remaining noncancelable lease terms in excess of one year and the total minimum rentals to be received in the future under noncancelable subleases as of the balance sheet date.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Cash payments</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at December&#160;31, 2010</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">171</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Cash payments</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">171</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,169</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Cash payments</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(3,551</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(130</font></td>
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<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">659</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div></div>
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                <p>Tabular disclosure of restructuring and related costs by type of restructuring including the description of the restructuring costs, such as the expected cost; the costs incurred during the period; the cumulative costs incurred as of the balance sheet date; the income statement caption within which the restructuring charges recognized for the period are included; and changes to an entity's restructuring reserve that occurred during the period associated with the exit from or disposal of business activities or restructurings for each major type of cost.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394359&amp;loc=d3e17939-110869<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 146<br><br> -Paragraph 20<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.P.4)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 5.P.3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140864-122747<br><br><br><br></p>
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                <p>Amounts due from customers or clients, within one year of the balance sheet date (or the normal operating cycle, whichever is longer) for goods or services (including trade receivables) that have been delivered or sold in the normal course of business.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 3<br><br> -Subparagraph a, b<br><br> -Article 5<br><br><br><br></p>
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                <p>Amount due from customers or clients, within one year of the balance sheet date (or the normal operating cycle, whichever is longer), for goods or services (including trade receivables) that have been delivered or sold in the normal course of business, reduced to the estimated net realizable fair value by an allowance established by the entity of the amount it deems uncertain of collection.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>A valuation allowance for trade and other receivables due to an Entity within one year (or the normal operating cycle, whichever is longer) that are expected to be uncollectible.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 310<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7512638&amp;loc=d3e5074-111524<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 4<br><br> -Article 5<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.4)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
    </div>
  </body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>32
<FILENAME>R67.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0E4CAC">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Income Taxes (Details 2) (United States)<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">United States</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowanceLineItems', window );"><strong>Valuation allowance</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_PeriodOfCumulativeLossPosition', window );">Period of cumulative loss position</a></td>
        <td class="text">3 years<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsValuationAllowancePercentage', window );">Percentage of valuation allowance</a></td>
        <td class="nump">100.00%<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsValuationAllowancePercentage">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the percentage of valuation allowance.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsValuationAllowancePercentage</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:percentItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PeriodOfCumulativeLossPosition">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the number of consecutive years during which the reporting entity has been in a loss position for income tax reporting purposes.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_PeriodOfCumulativeLossPosition</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceLineItems">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ValuationAllowanceLineItems</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
    </div>
  </body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>33
<FILENAME>R61.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0ECJAC">
      <tr>
        <th class="tl" colspan="1" rowspan="1">
          <div style="width: 200px;"><strong>Stockholders' Equity (Details)<br>In Thousands, unless otherwise specified</strong></div>
        </th>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfStockLineItems', window );"><strong>Stockholders' Equity</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesAuthorized', window );">Number of shares of preferred stock that the entity is authorized to issue</a></td>
        <td class="nump">30,000<span></span></td>
        <td class="nump">30,000<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Maximum</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfStockLineItems', window );"><strong>Stockholders' Equity</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesAuthorized', window );">Number of shares of preferred stock that the entity is authorized to issue</a></td>
        <td class="nump">30,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ClassOfStockLineItems">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ClassOfStockLineItems</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesAuthorized">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 2, 3, 4, 5, 6, 7, 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PreferredStockSharesAuthorized</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
    </div>
  </body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>34
<FILENAME>R47.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EGQAE">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Summary of Significant Accounting Policies (Details) (USD $)<br>In Millions, unless otherwise specified</strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionAbstract', window );"><strong>Foreign Currency</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionGainLossRealized', window );">Foreign exchange gains (losses) realized</a></td>
        <td class="num">$ (0.9)<span></span></td>
        <td class="nump">$ 1.2<span></span></td>
        <td class="num">$ (1.9)<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Buildings</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Useful life</a></td>
        <td class="text">40 years<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Machinery and equipment | Minimum</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Useful life</a></td>
        <td class="text">3 years<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Machinery and equipment | Maximum</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Useful life</a></td>
        <td class="text">10 years<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ForeignCurrencyTransactionAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ForeignCurrencyTransactionAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ForeignCurrencyTransactionGainLossRealized">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The net realized foreign currency transaction gain (loss) (pretax) included in determining net income from transactions that were settled as of the balance sheet date.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;1.&#160;&#160;Nature of Business</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Axcelis Technologies,&#160;Inc. ("Axcelis" or the "Company") was incorporated in Delaware in 1995, and is a worldwide producer of ion implantation, dry strip and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, the Company provides extensive aftermarket service and support, including spare parts, equipment upgrades, and maintenance services to the semiconductor industry.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;In December 2012, the Company sold its intellectual property rights and certain assets relating to the Company's dry strip product line for cash proceeds of $8.7&#160;million. As a result of this transaction, the Company will cease the sale of 300 mm dry strip wafer processing equipment in 2013. The Company will be able to continue to sell dry strip systems for smaller wafers until December 2015 and to support its installed base of all dry strip systems indefinitely. See Note&#160;3 for additional information relating to the accounting for the sale of the dry strip assets and intellectual property.</font></p></div>
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                <p>The entire disclosure for the nature of an entity's business, the major products or services it sells or provides and its principal markets, including the locations of those markets. If the entity operates in more than one business, the disclosure also indicates the relative importance of its operations in each business and the basis for the determination (for example, assets, revenues, or earnings).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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                <p>This element represents the portion of the balance sheet assertion valued at fair value by the entity whether such amount is presented as a separate caption or as a parenthetical disclosure. Additionally, this element may be used in connection with the fair value disclosures required in the footnote disclosures to the financial statements. The element may be used in both the balance sheet and disclosure in the same submission. This item includes currency on hand as well as demand deposits with banks or financial institutions. It also includes other kinds of accounts that have the general characteristics of demand deposits in that the Company may deposit additional funds at any time and also effectively may withdraw funds at any time without prior notice or penalty. Cash equivalents, excluding items classified as marketable securities, include short-term, highly liquid investments that are both readily convertible to known amounts of cash, and so near their maturity that they present minimal risk of changes in value because of changes in interest rates. Generally, only investments with original maturities of three months or less qualify under that definition. Original maturity means original maturity to the entity holding the investment. For example, both a three-month US Treasury bill and a three-year Treasury note purchased three months from maturity qualify as cash equivalents. However, a Treasury note purchased three years ago does not become a cash equivalent when its remaining maturity is three months.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 8<br><br> -Footnote 2<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 7, 8, 9, 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Cash<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Cash Equivalents<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 7<br><br> -Footnote 1<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Business Segment and Geographic Region Information (Tables)<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Business Segment and Geographic Region Information</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock', window );">Schedule of revenue by product lines</a></td>
        <td class="text"><div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman">
<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times">&#160;</p>
<div align="center">
<table style="WIDTH: 717px; HEIGHT: 67px" cellspacing="0" cellpadding="0" width="717" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Ion implantation systems, services, and royalties</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">156,090</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">237,857</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">232,335</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other systems and services</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">47,295</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">81,559</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">42,877</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">203,385</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">319,416</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">275,212</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;</font></p></div>
<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock', window );">Schedule of revenue and long-lived assets by geographic region</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times">&#160;</p>
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="54"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Revenue</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Long-Lived<br />
Assets</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2012</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">United States</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">132,159</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">43,440</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Europe</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">27,636</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Asia Pacific</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">43,590</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">752</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">203,385</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">44,192</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2011</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">United States</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">234,132</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">54,472</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Europe</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">31,505</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Asia Pacific</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">53,779</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">996</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">319,416</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">55,468</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2010</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">50,532</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">33,822</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">50,571</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">442</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">275,212</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">50,974</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div></div>
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        <td class="text"><div style="FONT-SIZE: 10pt; FONT-FAMILY: Times New Roman"><font style="FONT-FAMILY: times" size="2">Schedule II&#8212;Valuation and Qualifying Accounts Axcelis Technologies, Inc. (In thousands)</font><br />
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<td style="FONT-FAMILY: times" width="53"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="42"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">411</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">305</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">22,778</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">14,492</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(4,819</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,150</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">33,601</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Allowance for doubtful accounts and returns</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,357</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(535</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(449</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">38</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">411</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Reserve for excess and obsolete inventory</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">27,517</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,015</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(5,583</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(171</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">22,778</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-TOP: 12pt; MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2"><b>Year Ended December&#160;31, 2010</b></font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Allowance for doubtful accounts and returns</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,390</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,120</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(17</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">104</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,357</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Reserve for excess and obsolete inventory</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">36,980</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,015</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(11,224</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(254</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">27,517</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr></table></div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The entire disclosure for any allowance and reserve accounts (their beginning and ending balances, as well as a reconciliation by type of activity during the period). Alternatively, disclosure of the required information may be within the footnotes to the financial statements or a supplemental schedule to the financial statements.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br></p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;20. Subsequent Events</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;In order to align manufacturing and operating expense levels to changing business conditions, the Company implemented a headcount reduction in the first quarter of 2013. The Company anticipates recording employee termination benefits and other related costs of approximately $1.1&#160;million during the first quarter of 2013.</font></p></div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The entire disclosure for significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued. Examples include: the sale of a capital stock issue, purchase of a business, settlement of litigation, catastrophic loss, significant foreign exchange rate changes, loans to insiders or affiliates, and transactions not in the ordinary course of business.</p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EHDAE">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying amount (including both current and noncurrent portions of the accrual) as of the balance sheet date pertaining to a specified type of cost associated with exit from or disposal of business activities or restructuring pursuant to a duly authorized plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 95-3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.P.4(b))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section P<br><br> -Subsection 3, 4<br><br><br><br></p>
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                <p>Amount of cash paid in the period to fully or partially settle a specified, previously accrued type of restructuring cost.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.P.4(b)(2))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b) (2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394359&amp;loc=d3e17939-110869<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 95-3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section P<br><br> -Subsection 3, 4<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 146<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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                <p>Amount of consideration other than cash paid in the period to fully or partially settle a specified, previously accrued type of restructuring cost.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 146<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.P.4(b)(2))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 95-3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394359&amp;loc=d3e17939-110869<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section P<br><br> -Subsection 3, 4<br><br><br><br></p>
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                <p>The charge against earnings in the period for known and estimated costs of termination benefits provided to current employees that are involuntarily terminated under a benefit arrangement associated with exit from or disposal of business activities or restructurings pursuant to a duly authorized plan, excluding costs or losses pertaining to an entity newly acquired in a business combination or a discontinued operation as defined by generally accepted accounting principles and costs associated with one-time termination benefits.</p>
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                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (a)(10)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e1928-114920<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394359&amp;loc=d3e17939-110869<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 146<br><br> -Paragraph 8-13, 20<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.P.4(b))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 5-8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 112<br><br> -Paragraph 7<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section P<br><br> -Subsection 3, 4<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 420<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 5.P.3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140864-122747<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Staff Position (FSP)<br><br> -Number FAS146-1<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,265</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income (loss) before income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(32,388</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">7,471</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(17,261</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;</font></p></div>
<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock', window );">Schedule of components of income taxes (credits)</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times">&#160;</p>
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Current:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">United States</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Federal</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">82</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">163</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">309</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">738</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,646</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,528</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total current</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">820</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,809</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,837</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deferred:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">826</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">585</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,525</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total deferred</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">826</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">585</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,525</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,646</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,394</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">312</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;</font></p></div>
<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock', window );">Schedule of reconciliations of income taxes at the United States Federal statutory rate to the effective income tax rate</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times">&#160;</p>
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="50"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income (credit) at the United States statutory rate</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(11,336</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,615</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(6,041</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">53</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">31</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">309</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Unrecognized tax benefits</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(832</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">899</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">842</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Effect of change in valuation allowance</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">12,662</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(3,160</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6,550</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign income tax rate differentials</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(788</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(365</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,490</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Restoration of foreign deferred tax assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,329</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign dividend</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">383</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Stock options</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,298</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deemed distribution from foreign subsidiaries</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">149</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,533</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,152</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other, net</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">57</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">841</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(681</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,646</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,394</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">312</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;</font></p></div>
<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock', window );">Schedule of significant components of current and long-term deferred income taxes</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times">&#160;</p>
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="50"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="56"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="50"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="56"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"><font size="1"><b>As of December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Current</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Long Term</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Current</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Long Term</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="11"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Federal net operating loss carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">88,088</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">79,163</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State net operating loss carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,181</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,685</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign net operating loss carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,853</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,821</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Federal tax credit carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">17,814</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">15,505</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State tax credit carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">9,051</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">9,051</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Unremitted earnings of foreign subsidiaries</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(8,580</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(10,370</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Intangible assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">661</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">803</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Property, plant and equipment</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5,925</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5,589</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Accrued compensation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">352</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">368</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">541</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Inventories</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">22,582</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(215</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">22,447</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Stock compensation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,378</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3,970</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Warranty</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">612</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">36</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,293</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">51</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,820</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">917</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,243</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(3,814</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deferred taxes, gross</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">25,366</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">121,477</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">25,524</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">104,454</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Valuation allowance</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(25,062</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(119,605</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(24,160</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(102,814</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deferred taxes, net</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">304</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,872</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,364</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,640</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times">&#160;</p>
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<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at beginning of year</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">8,089</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6,965</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Increases in unrecognized tax benefits as a result of tax positions taken during a prior period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">646</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,124</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Decreases in unrecognized tax benefits related to settlements with tax authorities</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(880</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">663</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(799</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at end of year</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">7,719</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">8,089</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Recorded as other long-term liability</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,646</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,244</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Recorded as a decrease in deferred tax assets and offsetting valuation allowance</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5,073</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,845</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">7,719</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">8,089</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the components of income tax expense attributable to continuing operations for each year presented including, but not limited to: current tax expense (benefit), deferred tax expense (benefit), investment tax credits, government grants, the benefits of operating loss carryforwards, tax expense that results from allocating certain tax benefits either directly to contributed capital or to reduce goodwill or other noncurrent intangible assets of an acquired entity, adjustments of a deferred tax liability or asset for enacted changes in tax laws or rates or a change in the tax status of the entity, and adjustments of the beginning-of-the-year balances of a valuation allowance because of a change in circumstances that causes a change in judgment about the realizability of the related deferred tax asset in future years.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the components of net deferred tax asset or liability recognized in an entity's statement of financial position, including the following: the total of all deferred tax liabilities, the total of all deferred tax assets, the total valuation allowance recognized for deferred tax assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the reconciliation using percentage or dollar amounts of the reported amount of income tax expense attributable to continuing operations for the year to the amount of income tax expense that would result from applying domestic federal statutory tax rates to pretax income from continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of income before income tax between domestic and foreign jurisdictions.</p>
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                <p>No definition available.</p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the change in unrecognized tax benefits.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 217<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917533&amp;loc=d3e36027-109320<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 15A<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EQPAC">
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          <div style="width: 200px;"><strong>Summary of Significant Accounting Policies  (Policies)<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountingPoliciesAbstract', window );"><strong>Summary of Significant Accounting Policies</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy', window );">Basis of Presentation</a></td>
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<p style="FONT-FAMILY: times"><font size="2"><b>Basis of Presentation</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The accompanying consolidated financial statements include the accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Events occurring subsequent to December&#160;31, 2012 have been evaluated for potential recognition or disclosure in the consolidated financial statements. See Note&#160;20 for additional information relating to subsequent events.</font></p></div>
<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UseOfEstimates', window );">Use of Estimates</a></td>
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<p style="FONT-FAMILY: times"><font size="2"><b>Use of Estimates</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, the Company evaluates its estimates and judgments, including those related to revenue recognition, the realizable value of inventories, valuing share-based compensation instruments and valuation allowances for deferred tax assets. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.</font></p></div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock', window );">Foreign Currency</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Foreign Currency</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has determined the functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders' equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the consolidated statements of operations.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For the year ended December&#160;31, 2012 the Company realized $0.9&#160;million of foreign exchange losses. For the year ended December&#160;31, 2011 the Company realized $1.2&#160;million of foreign exchange gains. For the year ended December&#160;31, 2010 the Company incurred $1.9&#160;million of foreign exchange losses.</font></p></div>
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      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsPolicyTextBlock', window );">Cash and Cash Equivalents</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Cash and Cash Equivalents</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market securities and certificates of deposit. Cash equivalents are carried on the balance sheet at fair market value.</font></p></div>
<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryPolicyTextBlock', window );">Inventories</a></td>
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<p style="FONT-FAMILY: times"><font size="2"><b>Inventories</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Inventories are carried at lower of cost, determined using the first-in, first-out ("FIFO") method, or market. The Company periodically reviews its inventories and makes provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or market. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company records an allowance for estimated excess inventory. The allowance is determined using management's assumptions of materials usage, based on estimates of demand and market conditions. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.</font></p></div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock', window );">Property, Plant and Equipment</a></td>
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<p style="FONT-FAMILY: times"><font size="2"><b>Property, Plant and Equipment</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Property and equipment are stated at cost, less accumulated depreciation and amortization.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:</font></p>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Buildings</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">40&#160;years</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Machinery and equipment</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">3 to 10&#160;years</font></td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Repairs and maintenance costs are expensed as incurred. Expenditures for renewals and betterments are capitalized.</font></p></div>
<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock', window );">Impairment of Long-Lived Assets</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Impairment of Long-Lived Assets</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company records impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is measured by a comparison of the assets' carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company completed a test for recoverability due to indicators present at December&#160;31, 2012; specifically the carrying value of its net assets exceeded its current market capitalization. As of December&#160;31, 2012, the undiscounted cash flows used in the analysis significantly exceeded the carrying value of the Company's assets. As a result no impairment was recorded. The undiscounted cash flows used in the analysis were derived from the Company's long-term strategic plan.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company did not record an impairment charge for the years ended December&#160;31, 2011, or 2010.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Future actual performance could be materially different from our current forecasts, which could impact future estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in the Company's relationships with significant customers. The Company performs an impairment analysis when circumstances or events warrant.</font></p></div>
<span></span></td>
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      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskCreditRisk', window );">Concentration of Risk and Off-Balance Sheet Risk</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Concentration of Risk and Off-Balance Sheet Risk</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Financial instruments that potentially subject the Company to concentrations of credit risk are principally cash equivalents and accounts receivable. The Company's cash equivalents are principally maintained in an investment grade money-market fund.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has no significant off-balance-sheet risk such as foreign exchange contracts, option contracts or other foreign hedging arrangements.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company exposure to market risk for changes in interest rates relates primarily to cash equivalents. The primary objective of the Company's investment activities is to preserve principal while maximizing yields without significantly increasing risk. This is accomplished by investing in marketable high investment grade securities. The Company does not use derivative financial instruments to manage its investment portfolio and does not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company performs ongoing credit evaluations of its customers' financial condition and generally requires no collateral to secure accounts receivable. For selected overseas sales, the Company requires customers to obtain letters of credit before product is shipped. The Company maintains an allowance for doubtful accounts based on its assessment of the collectability of accounts receivable. The Company reviews the allowance for doubtful accounts monthly. The Company does not have any off-balance sheet credit exposure related to its customers.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's customers consist of semiconductor manufacturers located throughout the world and net sales to its ten largest customers accounted for 70.6%, 68.6% and 62.7% of revenue in 2012, 2011 and 2010, respectively.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For the years ended December&#160;31, 2012, 2011 and 2010, the Company had one customer represent 18.2%, 21.2% and 18.6% of total revenues, respectively, for each of the periods presented.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For the year ended December&#160;31, 2012, the Company had two customers account for 11.9% and 11.5% of consolidated accounts receivable, respectively. For the year ended December&#160;31, 2011, the Company had one customer represent 27.2% of consolidated accounts receivable.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Some of the components and sub-assemblies included in the Company's products are obtained either from a sole source or a limited group of suppliers. Disruption to the Company's supply source, resulting either from depressed economic conditions or other factors, could affect its ability to deliver products to its customers.</font></p></div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRecognitionPolicyTextBlock', window );">Revenue Recognition</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Revenue Recognition</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's revenue recognition policy involves significant judgment by management. As described below, the Company considers a broad array of facts and circumstances in determining when to recognize revenue, including contractual obligations to the customer, the complexity of the customer's post-delivery acceptance provisions, payment history, customer creditworthiness and the installation process. In the future, if the post-delivery acceptance provisions and installation process become more complex or result in a materially lower rate of acceptance, the Company may have to revise its revenue recognition policy, which could delay the timing of revenue recognition.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's system sales transactions are made up of multiple elements, including the system itself and elements that are not delivered simultaneously with the system. These undelivered elements might include a combination of installation services, extended warranty and support and spare parts, all of which are covered generally by a single sales price. On January&#160;1, 2011, the Company adopted the accounting standards update for multiple deliverable revenue arrangements, as required, using the prospective method. Accordingly, this guidance is being applied to all system revenue arrangements entered into or materially modified on or after January&#160;1, 2011. The adoption of the amended guidance did not change the accounting for arrangements entered into prior to January&#160;1, 2011. There was no material impact on our financial position, results of operations or cash flows upon adoption.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The impact of adopting this amended guidance on the Company's results of operations has been limited to transactions involving the sale of systems. The update amended the previous guidance for multiple-element arrangements. Pursuant to the amended guidance, the Company's system revenue arrangements with multiple elements are divided into separate units of accounting if specified criteria are met, including whether the delivered element has stand-alone value to the customer. If the criteria are met, then the consideration received is allocated among the separate units based on their relative selling price, and the revenue is recognized separately for each of the separate units.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company determines selling price for each unit of accounting (element) using vendor specific objective evidence (VSOE) or third-party evidence (TPE), if they exist, otherwise, the Company uses best estimated selling price (BESP). The Company generally expects that it will not be able to establish TPE due to the nature of its products, and, as such, the Company typically will determine selling price using VSOE or BESP.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Where required, the Company determines BESP for an individual element based on consideration of both market and Company-specific factors, including the selling price and profit margin for similar products, the cost to produce the deliverable and the anticipated margin on that deliverable and the characteristics of the varying markets in which the deliverable is sold.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The total consideration to be received in the transaction is allocated to each element in the arrangement based upon the relative selling price of each element when compared to the consideration received.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Systems are not sold separately and VSOE or TPE is not available for the systems element. Therefore the selling price associated with systems is based on BESP. The allocated value for installation in the arrangement includes (a)&#160;the greater of (i)&#160;the relative selling price of the installation or (ii)&#160;the portion or the sales price that will not be received until the installation is completed (the "retention"). The selling price of installation is based upon the fair value of the service performed, including labor, which is based upon the estimated time to complete the installation at hourly rates, and material components, both of which are sold separately. The selling price of all other elements (extended warranty for support, spare parts, and labor) is based upon the price charged when these elements are sold separately, or VSOE.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Product revenue for products which have demonstrated market acceptance, generally recognized upon shipment provided title and risk of loss has passed to the customer, evidence of an arrangement exists, prices are contractually fixed or determinable, collectability is reasonably assured through historical collection results and regular credit evaluations, and there are no uncertainties regarding customer acceptance. Revenue from installation services is recognized at the time formal acceptance is received from the customer or, for certain customers, when both the formal acceptance and retention payment have been received. Revenue for other elements is recognized at the time products are shipped or the related services are performed.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company generally recognizes revenue for products which have demonstrated market acceptance at the time of shipment because the customer's post-delivery acceptance provisions and installation process have been established to be routine, commercially inconsequential and perfunctory. The majority of its systems are designed and tailored to meet the customer's specifications, as outlined in the contract between the customer and the Company, which may be the Company's standard specification. To ensure that the customer's specifications are satisfied, many customers request that new systems be tested at the Company's facilities prior to shipment, normally with the customer present, under conditions that substantially replicate the customer's production environment and the customer's criteria are confirmed to have been met. The Company believes the risk of failure to complete a system installation is remote. Should an installation not be completed successfully, the contractual provisions do not provide for forfeiture, refund or other purchase price concession beyond those prescribed by the provisions of the Uniform Commercial Code applicable generally to such transactions.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For initial shipments of systems with new technologies or in the small number of instances where the Company is unsure of meeting the customer's specifications or obtaining customer acceptance upon shipment of the system, it will defer the recognition of systems revenue and related costs until written customer acceptance of the system is obtained. This deferral period is generally within twelve months of shipment.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Product revenue includes revenue from system sales, sales of spare parts, the spare parts component of maintenance and service contracts and product upgrades. Service revenue includes the labor component of maintenance and service contract amounts charged for on-site service personnel.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.</font></p></div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShippingAndHandlingCostPolicyTextBlock', window );">Shipping and Handling Costs</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Shipping and Handling Costs</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Shipping and handling costs are included in cost of revenue.</font></p></div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy', window );">Stock-Based Compensation</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Stock-Based Compensation</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company recognizes compensation expense for all share-based payments to employees and directors, including grants of employee stock options, based on the grant-date fair value of those share-based payments using the Black- Sholes option pricing model, adjusted for expected forfeitures. Stock-based compensation expense is recognized ratably over the requisite service period.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;See Note&#160;13 for additional information relating to stock-based compensation.</font></p></div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxPolicyTextBlock', window );">Income Taxes</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Income Taxes</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company records income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax bases, and operating loss and tax credit carryforwards.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax accounting. The Company establishes a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining the Company's provision for income taxes, the Company's deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. The Company evaluates the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. The Company recognizes accrued interest related to unrecognized tax benefits as interest expense and penalties as operating expense.</font></p></div>
<span></span></td>
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        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Computation of Net Income (Loss) per Share</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company incurred net losses for years ended December&#160;31, 2012 and December&#160;31, 2010, and has excluded 1,563,417 and 3,230,705 incremental shares attributable to outstanding stock options, restricted stock and restricted stock units from the calculation of net loss per share because the effect would have been anti-dilutive.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The components of net income (loss) per share are as follows:</font></p>
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<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years Ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands, except per share data)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income (loss) available to common stockholders</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(34,034</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5,077</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(17,573</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Weighted average common shares outstanding used in computing basic net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">107,619</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">106,234</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">104,522</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Incremental shares</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,864</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Weighted average common shares outstanding used in computing diluted net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">107,619</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">109,098</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">104,522</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Basic</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.32</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.05</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.17</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Diluted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.32</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.05</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.17</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr></table></div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock', window );">Recent Accounting Guidance</a></td>
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<p style="FONT-FAMILY: times"><font size="2"><b>Recent Accounting Guidance</b></font></p>
<p style="FONT-FAMILY: times"><font size="2"><u>Accounting Standards or Updates Recently Adopted</u></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Effective January&#160;1, 2012 the Company adopted Accounting Standards Update, or ASU, No.&#160;2011-05,</font> <font size="2"><i>Comprehensive Income (Topic 220)</i></font><font size="2">. This newly issued accounting standard requires the Company to report comprehensive income either in a single continuous statement or in two separate but consecutive financial statements. The adoption of this standard did impact the presentation of other comprehensive income, as we have elected to present two separate but consecutive statements, but did not have an impact on our financial position or results of operations.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><u>Accounting Standards or Updates Not Yet Effective</u></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;On February&#160;5, 2013, The Financial Accounting Standards Board ("FASB") issued Accounting Standards Update No.&#160;2013-02,</font> <font size="2"><i>Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income</i></font><font size="2">. The update requires that companies present either in a single note or parenthetically on the face of the financial statements, the effect of significant amounts reclassified from each component of accumulated other comprehensive income based on its source and the income statement line items affected by the reclassification. If a component is not required to be reclassified to net income in its entirety, companies would instead cross reference to the related footnote for additional information. This update is effective prospectively for annual and interim reporting periods beginning after December&#160;15, 2012. As this update only requires enhanced disclosure, the adoption of this update will not impact our financial position or results of operations.</font></p></div>
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                <p>Disclosure of accounting policy for cash and cash equivalents, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskCreditRisk">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for credit risk.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 942<br><br> -SubTopic 825<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6480020&amp;loc=d3e61044-112788<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Staff Position (FSP)<br><br> -Number SOP94-6-1<br><br> -Paragraph 7, 11<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 113<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 825<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6875567&amp;loc=d3e14537-108613<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 944<br><br> -SubTopic 825<br><br> -Section 55<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6487554&amp;loc=d3e32600-158583<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 825<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6875567&amp;loc=d3e14489-108613<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 107<br><br> -Paragraph 15A<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Statement of Position (SOP)<br><br> -Number 01-6<br><br> -Paragraph 14<br><br> -Subparagraph m<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 825<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 21<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7491637&amp;loc=d3e13537-108611<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 825<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7491637&amp;loc=d3e13531-108611<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 942<br><br> -SubTopic 825<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6480020&amp;loc=d3e61082-112788<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ConcentrationRiskCreditRisk</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for subsidiaries or other investments that are consolidated, including the accounting treatment for intercompany accounts or transactions and any noncontrolling interest.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.3A-02)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959686&amp;loc=d3e355033-122828<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph a<br><br> -Article 4<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02, 03, 04<br><br> -Article 3A<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2197480<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=d3e5614-111684<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph 2-6<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>nonnum:textBlockItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerSharePolicyTextBlock">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for computing basic and diluted earnings or loss per share for each class of common stock and participating security. Addresses all significant policy factors, including any antidilutive items that have been excluded from the computation and takes into account stock dividends, splits and reverse splits that occur after the balance sheet date of the latest reporting period but before the issuance of the financial statements.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 40<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3630-109257<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 6, 8-16, 60<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2144384<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EarningsPerSharePolicyTextBlock</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>nonnum:textBlockItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for (1) transactions denominated in a currency other than the reporting enterprise's functional currency, (2) translating foreign currency financial statements that are incorporated into the financial statements of the reporting enterprise by consolidation, combination, or the equity method of accounting, and (3) remeasurement of the financial statements of a foreign reporting enterprise in a hyperinflationary economy.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 830<br><br> -SubTopic 30<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2175892<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 52<br><br> -Paragraph 5, 7-20, 80<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 830<br><br> -SubTopic 20<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2175856<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 830<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2175826<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>nonnum:textBlockItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for recognizing and measuring the impairment of long-lived assets. An entity also may disclose its accounting policy for long-lived assets to be sold. This policy excludes goodwill and intangible assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 7-15, 26, 30-37<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section CC<br><br> -Subsection 3<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2155824<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>nonnum:textBlockItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxPolicyTextBlock">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for income taxes, which may include its accounting policies for recognizing and measuring deferred tax assets and liabilities and related valuation allowances, recognizing investment tax credits, operating loss carryforwards, tax credit carryforwards, and other carryforwards, methodologies for determining its effective income tax rate and the characterization of interest and penalties in the financial statements.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 17<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32809-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Interpretation (FIN)<br><br> -Number 48<br><br> -Paragraph 20<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 25<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e32247-109318<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 4<br><br> -Paragraph 11<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 19<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32840-109319<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 6-34, 43, 47, 49<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e32280-109318<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 954<br><br> -SubTopic 740<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6491622&amp;loc=d3e9504-115650<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 30<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2144749<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2144681<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                  <tr>
                    <td><strong> Name:</strong></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for major classes of inventories, bases of stating inventories (for example, lower of cost or market), methods by which amounts are added and removed from inventory classes (for example, FIFO, LIFO, or average cost), loss recognition on impairment of inventories, and situations in which inventories are stated above cost. If inventory is carried at cost, this disclosure includes the nature of the cost elements included in inventory.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2126999<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Financial Reporting Release (FRR)<br><br> -Number 206<br><br> -Paragraph b<br><br> -Subparagraph i, ii<br><br> -Chapter 2<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 6<br><br> -Subparagraph a<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Paragraph 3, 5-10, 15, 16, 17<br><br> -Chapter 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Statement of Position (SOP)<br><br> -Number 81-1<br><br> -Paragraph 69-75<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386783&amp;loc=d3e4556-108314<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.6(b))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Section A<br><br> -Paragraph 9<br><br> -Chapter 3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386783&amp;loc=d3e4492-108314<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of the adoption of new accounting pronouncements that may impact the entity's financial reporting.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for property, plant and equipment which may include the basis of such assets, depreciation methods used and estimated useful lives, the entity's capitalization policy, including its accounting treatment for costs incurred for repairs and maintenance activities, whether such asset balances include capitalized interest and the method by which such is calculated, how disposals of such assets are accounted for and how impairment of such assets is assessed and recognized.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.13(a))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2155824<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 22<br><br> -Paragraph 12, 13<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 34<br><br> -Paragraph 8, 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 13<br><br> -Subparagraph a<br><br> -Article 5<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -Subparagraph d<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Section C<br><br> -Paragraph 5<br><br> -Chapter 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 7<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PropertyPlantAndEquipmentPolicyTextBlock</nobr></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for revenue recognition. If the entity has different policies for different types of revenue transactions, the policy for each material type of transaction is generally disclosed. If a sales transaction has multiple element arrangements (for example, delivery of multiple products, services or the rights to use assets) the disclosure may indicate the accounting policy for each unit of accounting as well as how units of accounting are determined and valued. The disclosure may encompass important judgment as to appropriateness of principles related to recognition of revenue. The disclosure also may indicate the entity's treatment of any unearned or deferred revenue that arises from the transaction.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 605<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 13.B.Q1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6600647&amp;loc=d3e214044-122780<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 22<br><br> -Paragraph 8, 12, 13<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18823-107790<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18726-107790<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 13<br><br> -Section B<br><br> -Paragraph Question 1<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for stock option and stock incentive plans. This disclosure may include (1) the types of stock option or incentive plans sponsored by the entity (2) the groups that participate in (or are covered by) each plan (3) significant plan provisions and (4) how stock compensation is measured, and the methodologies and significant assumptions used to determine that measurement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -URI http://asc.fasb.org/subtopic&amp;trid=2228939<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 06-11<br><br> -Paragraph 7<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (b),(f)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>nonnum:textBlockItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for the classification of shipping and handling costs, including whether the costs are included in cost of sales or included in other income statement accounts. If shipping and handling fees are significant and are not included in cost of sales, disclosure includes both the amounts of such costs and the line item on the income statement which includes such costs.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 605<br><br> -SubTopic 45<br><br> -Section S99<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6408413&amp;loc=d3e221937-122793<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18726-107790<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 22<br><br> -Paragraph 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 00-10<br><br> -Paragraph 6<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367646&amp;loc=d3e18780-107790<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Shipping Costs<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6525344<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Handling Costs<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6514758<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 605<br><br> -SubTopic 45<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6408196&amp;loc=d3e61069-111654<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 605<br><br> -SubTopic 45<br><br> -Section 45<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915142&amp;loc=d3e60635-111653<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><strong> Name:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Statement of Position (SOP)<br><br> -Number 94-6<br><br> -Paragraph 11, 14<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 275<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6927468&amp;loc=d3e6143-108592<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 275<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6927468&amp;loc=d3e6132-108592<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 275<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6927468&amp;loc=d3e6061-108592<br><br><br><br></p>
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          <div style="width: 200px;"><strong>Summary of Significant Accounting Policies (Tables)<br></strong></div>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">107,619</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">106,234</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">104,522</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,864</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Weighted average common shares outstanding used in computing diluted net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">107,619</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">109,098</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">104,522</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Basic</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.32</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.05</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.17</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Diluted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.32</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.05</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.17</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr></table></div></div>
<span></span></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the useful life and salvage value of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale. Examples include land, buildings, machinery and equipment, and other types of furniture and equipment including, but not limited to, office equipment, furniture and fixtures, and computer equipment and software.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 13<br><br> -Subparagraph b<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.13)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
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                <table border="0" cellpadding="0" cellspacing="0">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of an entity's basic and diluted earnings per share calculations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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<html>
  <head>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EBFBG">
      <tr>
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          <div style="width: 200px;"><strong>Consolidated Statements of Cash Flow (USD $)<br>In Thousands, unless otherwise specified</strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
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      <tr>
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          <div>Dec. 31, 2012</div>
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        <th class="th">
          <div>Dec. 31, 2011</div>
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          <div>Dec. 31, 2010</div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract', window );"><strong>Cash flows from operating activities</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="num">$ (34,034)<span></span></td>
        <td class="nump">$ 5,077<span></span></td>
        <td class="num">$ (17,573)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Adjustments to reconcile net income (loss) to net cash provided by (used for) operating activities:</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepreciationDepletionAndAmortization', window );">Depreciation and amortization</a></td>
        <td class="nump">6,877<span></span></td>
        <td class="nump">8,497<span></span></td>
        <td class="nump">7,045<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal', window );">Gain on sale of dry strip assets and intellectual property</a></td>
        <td class="num">(7,904)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Deferred taxes</a></td>
        <td class="nump">826<span></span></td>
        <td class="nump">585<span></span></td>
        <td class="num">(1,525)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherNoncashIncomeExpense', window );">Other</a></td>
        <td class="nump">186<span></span></td>
        <td class="nump">28<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensation', window );">Stock-based compensation expense</a></td>
        <td class="nump">3,976<span></span></td>
        <td class="nump">4,687<span></span></td>
        <td class="nump">4,088<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWriteDown', window );">Provision for excess inventory</a></td>
        <td class="nump">14,492<span></span></td>
        <td class="nump">1,015<span></span></td>
        <td class="nump">2,015<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract', window );"><strong>Changes in operating assets &amp; liabilities</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsReceivable', window );">Accounts receivable</a></td>
        <td class="nump">10,478<span></span></td>
        <td class="nump">22,692<span></span></td>
        <td class="num">(38,652)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInInventories', window );">Inventories</a></td>
        <td class="nump">5,903<span></span></td>
        <td class="num">(11,870)<span></span></td>
        <td class="nump">3,549<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets', window );">Prepaid expenses and other current assets</a></td>
        <td class="nump">4,386<span></span></td>
        <td class="nump">3,049<span></span></td>
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        <td class="num">(13,490)<span></span></td>
        <td class="num">(17,940)<span></span></td>
        <td class="nump">32,276<span></span></td>
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        <td class="num">(5,396)<span></span></td>
        <td class="num">(4,006)<span></span></td>
        <td class="nump">10,601<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable', window );">Income taxes</a></td>
        <td class="num">(225)<span></span></td>
        <td class="nump">507<span></span></td>
        <td class="num">(1,406)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet', window );">Other assets and liabilities</a></td>
        <td class="nump">3,328<span></span></td>
        <td class="num">(8,788)<span></span></td>
        <td class="num">(2,841)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations', window );">Net cash (used for) provided by operating activities</a></td>
        <td class="num">(10,597)<span></span></td>
        <td class="nump">3,533<span></span></td>
        <td class="num">(5,892)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract', window );"><strong>Cash flows from investing activities</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleOfProductiveAssets', window );">Proceeds from sale of dry strip assets and intellectual property</a></td>
        <td class="nump">8,716<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Expenditures for property, plant, and equipment</a></td>
        <td class="num">(591)<span></span></td>
        <td class="num">(2,124)<span></span></td>
        <td class="num">(1,403)<span></span></td>
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        <td class="num">(2)<span></span></td>
        <td class="nump">3<span></span></td>
        <td class="nump">7,056<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations', window );">Net cash provided by (used for) investing activities</a></td>
        <td class="nump">8,123<span></span></td>
        <td class="num">(2,121)<span></span></td>
        <td class="nump">5,653<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract', window );"><strong>Cash flows from financing activities</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="num">(200)<span></span></td>
        <td class="num">(523)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromStockOptionsExercised', window );">Proceeds from exercise of stock options</a></td>
        <td class="nump">968<span></span></td>
        <td class="nump">288<span></span></td>
        <td class="nump">553<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromStockPlans', window );">Proceeds from Employee Stock Purchase Plan</a></td>
        <td class="nump">331<span></span></td>
        <td class="nump">503<span></span></td>
        <td class="nump">569<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperations', window );">Net cash provided by financing activities</a></td>
        <td class="nump">1,299<span></span></td>
        <td class="nump">591<span></span></td>
        <td class="nump">599<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations', window );">Effect of exchange rate changes on cash</a></td>
        <td class="num">(716)<span></span></td>
        <td class="num">(869)<span></span></td>
        <td class="nump">363<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInContinuingOperations', window );">Net (decrease) increase in cash and cash equivalents</a></td>
        <td class="num">(1,891)<span></span></td>
        <td class="nump">1,134<span></span></td>
        <td class="nump">723<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents at beginning of period</a></td>
        <td class="nump">46,877<span></span></td>
        <td class="nump">45,743<span></span></td>
        <td class="nump">45,020<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents at end of period</a></td>
        <td class="nump">44,986<span></span></td>
        <td class="nump">46,877<span></span></td>
        <td class="nump">45,743<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SupplementalCashFlowInformationAbstract', window );"><strong>Cash paid for:</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxesPaidNet', window );">Income taxes</a></td>
        <td class="nump">848<span></span></td>
        <td class="nump">515<span></span></td>
        <td class="nump">2,286<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssued1', window );">Issuance of restricted common stock in satisfaction of accrued compensation</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 570<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PaymentsOfFinancingFeesAndOtherExpenses">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The cash outflow paid to third parties in connection with debt financing and other related expenses.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_PaymentsOfFinancingFeesAndOtherExpenses</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 1<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6676-107765<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Cash Equivalents<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 8, 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 7, 26<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Cash<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3044-108585<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 7<br><br> -Footnote 1<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 1<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CashAndCashEquivalentsAtCarryingValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The component of income tax expense for the period representing the increase (decrease) in the entity's deferred tax assets and liabilities pertaining to continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 45<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 6.I.7)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6889476&amp;loc=d3e330036-122817<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Deferred Tax Expense (or Benefit)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6510177<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 6<br><br> -Section I<br><br> -Subsection 7<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredIncomeTaxExpenseBenefit</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepreciationDepletionAndAmortization">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DepreciationDepletionAndAmortization</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gain (loss) resulting from the sale of a disposal group that is not a discontinued operation. It is included in income from continuing operations before income taxes in the income statement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 37, 45<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 205<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6360339&amp;loc=d3e1361-107760<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 144<br><br> -Paragraph 47<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 360<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=8077374&amp;loc=d3e2443-110228<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The effect of exchange rate changes on cash balances in continuing operations held in foreign currencies.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 24<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3521-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 830<br><br> -SubTopic 230<br><br> -Section 45<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6450594&amp;loc=d3e33268-110906<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 25<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Balance Type:</strong></td>
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                    <td><strong> Period Type:</strong></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4297-108586<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 29<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 27<br><br> -Subparagraph f<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxesPaidNet</nobr></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInAccountsReceivable</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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          </td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) during the reporting period, excluding the portion taken into income, in the liability reflecting revenue yet to be earned for which cash or other forms of consideration was received or recorded as a receivable.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInDeferredRevenue</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInInventories</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInOperatingCapitalAbstract</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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          </td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) during the reporting period in other assets used in operating activities less other operating liabilities used in operating activities not separately disclosed in the statement of cash flows. May include changes in other current assets and liabilities, other noncurrent assets and liabilities, or a combination of other current and noncurrent assets and liabilities.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) during the reporting period in the value of prepaid expenses and other assets not separately disclosed in the statement of cash flows, for example, deferred expenses, intangible assets, or income taxes.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInRestrictedCash">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The net cash inflow or outflow for the increase (decrease) associated with funds that are not available for withdrawal or use (such as funds held in escrow) and are associated with underlying transactions that are classified as investing activities.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3213-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3179-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Investing Activities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 15, 16, 17<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncreaseDecreaseInRestrictedCash</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWriteDown">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Charge to cost of goods sold that represents the reduction of the carrying amount of inventory, generally attributable to obsolescence or market conditions.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Concepts (CON)<br><br> -Number 6<br><br> -Paragraph 86<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Section 7<br><br> -Paragraph 14<br><br> -Chapter 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 225<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.5-03.2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386783&amp;loc=d3e4542-108314<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InventoryWriteDown</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInContinuingOperations">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The increase (decrease) in cash associated with the entity's continuing operating, investing, and financing activities. While for technical reasons this element has no balance attribute, the default assumption is a debit balance consistent with its label.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetCashProvidedByUsedInContinuingOperations</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperations">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of net cash from (used in) the entity's financing activities, excluding cash flows derived by the entity from its discontinued operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 24<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3521-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 26<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3574-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperations</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperationsAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of net cash from (used in) the entity's investing activities, excluding cash flows derived by the entity from its discontinued operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 26<br><br> -Footnote 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 24<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3521-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 26<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3574-108585<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 26<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperationsAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of net cash from (used in) the entity's continuing operations, excluding cash flows derived by the entity from its discontinued operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 25<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3536-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 26<br><br> -Footnote 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 24<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3521-108585<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 26<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperationsAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net income after adjustments for dividends on preferred stock (declared in the period) and/or cumulative preferred stock (accumulated for the period).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 11<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1377-109256<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</nobr></td>
                  </tr>
                  <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Other income (expense) included in net income that results in no cash inflows or outflows in the period. Includes noncash adjustments to reconcile net income (loss) to cash provided by (used in) operating activities that are not separately disclosed.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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                <p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 15<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Investing Activities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 13<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3213-108585<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 17<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</nobr></td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleOfProductiveAssets">
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The cash inflow from the sale of property, plant and equipment (capital expenditures), software, and other intangible assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 16<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Investing Activities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 15<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 12<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3179-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProceedsFromSaleOfProductiveAssets</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockOptionsExercised">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The cash inflow associated with the amount received from holders exercising their stock options. This item inherently excludes any excess tax benefit, which the entity may have realized and reported separately.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph i<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 14<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3255-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Financing Activities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 19<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 18<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (j)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProceedsFromStockOptionsExercised</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockPlans">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The cash inflow associated with the amount received from the stock plan during the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 19<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Financing Activities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 18<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 14<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3255-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProceedsFromStockPlans</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensation">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The aggregate amount of noncash, equity-based employee remuneration. This may include the value of stock or unit options, amortization of restricted stock or units, and adjustment for officers' compensation. As noncash, this element is an add back when calculating net cash generated by operating activities using the indirect method.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensation</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td>duration</td>
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          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssued1">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The fair value of stock issued in noncash financing activities.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4332-108586<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4313-108586<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4304-108586<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 32<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_StockIssued1</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                    <td>duration</td>
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                    <td><nobr>us-gaap_SupplementalCashFlowInformationAbstract</nobr></td>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Restricted Cash (Tables)<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_RestrictedCashAbstract', window );"><strong>Restricted Cash</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfRestrictedCashAndCashEquivalentsTextBlock', window );">Schedule of components of restricted cash</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times">&#160;</p>
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="30"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="30"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Statutory liability deposit</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">106</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">104</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr></table></div></div>
<span></span></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
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        <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the cash and cash items which are restricted as to withdrawal or usage. The provisions of any restrictions are described in a note to the financial statements. Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or entity statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 1<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Cash Equivalents<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 8, 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EKH">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Stock Award Plans and Stock Based Compensation (Tables)<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Award Plans and Stock Based Compensation</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock', window );">Schedule of estimated weighted-average assumptions used in calculation of fair value of options granted</a></td>
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<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times">&#160;</p>
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<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" width="77"></td>
<td style="FONT-FAMILY: times" width="24"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="24"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>Years ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Weighted-average expected volatility</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">97.8%-113.55</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">97.8</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">97.8</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Weighted-average expected term</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3.8-6.1&#160;years</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6.1&#160;years</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6.2&#160;years</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Risk-free interest rate</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0.45%-1.37</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.1%-2.4</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.5%-2.0</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expected dividend yield</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td></tr></table></div>
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<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock', window );">Summary of stock option activity</a></td>
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<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative">
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<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="69"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="56"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="69"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Options</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Weighted<br />
Average<br />
Exercise<br />
Price</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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Average<br />
Remaining<br />
Contractual<br />
Term</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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Intrinsic<br />
Value</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="left" colspan="2"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(years)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2009</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">17,368</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6.43</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5,310</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.61</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercised</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(704</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Canceled</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(333</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.23</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expired</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(2,693</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">18.26</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2010</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">18,948</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3.70</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,662</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.70</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercised</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(372</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.77</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Canceled</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(654</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.43</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expired</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,491</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">12.38</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2011</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">21,093</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2.76</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,077</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">.93</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercised</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,148</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">.84</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Canceled</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,225</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.43</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expired</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,537</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">7.71</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">21,260</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2.24</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6.39</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,607</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercisable at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">11,680</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2.99</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5.59</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,591</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Options Vested or Expected to Vest at December&#160;31, 2012(1)</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">20,558</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2.27</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6.44</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,015</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --><!-- COMMAND=ADD_LINERULETXT,NOSHADE  COLOR="#000000" SIZE="1.0PT" WIDTH="26%" ALIGN="LEFT" -->
<hr style="COLOR: #000000" align="left" width="26%" noshade="noshade" size="1" /></div>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; PADDING-TOP: 0pt; POSITION: relative; TEXT-ALIGN: left">
<dl compact="compact">
<dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"><font size="2">(1)</font></dt>
<dd style="FONT-FAMILY: times"><font size="2">In addition to the vested options, the Company expects a portion of the unvested options to vest at some point in the future. Options expected to vest is calculated by applying an estimated forfeiture rate to the unvested options.</font></dd></dl></div></div>
<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock', window );">Schedule of changes in the Company's non-vested restricted stock units</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times">&#160;</p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 15%; WIDTH: 70%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times">&#160;</p>
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="69"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="82"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Shares/units</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Weighted-Average<br />
Grant Date Fair<br />
Value per Share</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="left" colspan="2"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2009</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">604</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5.90</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">695</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.72</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Vested</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,052</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3.30</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Forfeited</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(19</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2.94</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2010</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">228</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5.38</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">121</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2.50</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Vested</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(196</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5.81</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Forfeited</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(2</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6.01</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2011</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">151</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2.52</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">864</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.65</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Vested</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(47</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2.82</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Forfeited</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(7</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.62</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">961</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.73</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;</font></p></div>
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                  </tr>
                  <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the number and weighted-average exercise prices (or conversion ratios) for share options (or share units) that were outstanding at the beginning and end of the year, vested and expected to vest, exercisable or convertible at the end of the year, and the number of share options or share units that were granted, exercised or converted, forfeited, and expired during the year.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
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                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><nobr>us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the significant assumptions used during the year to estimate the fair value of stock options, including, but not limited to: (a) expected term of share options and similar instruments, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (f)(2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
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                    <td><nobr>us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock</nobr></td>
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  <head>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EMVAE">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Inventories, Net (Details) (USD $)<br></strong></div>
        </th>
        <th class="th" colspan="1">3 Months Ended</th>
        <th class="th" colspan="3">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories, net</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryRawMaterialsNetOfReserves', window );">Raw materials</a></td>
        <td class="nump">$ 72,013,000<span></span></td>
        <td class="nump">$ 72,013,000<span></span></td>
        <td class="nump">$ 85,829,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWorkInProcessNetOfReserves', window );">Work in process</a></td>
        <td class="nump">12,253,000<span></span></td>
        <td class="nump">12,253,000<span></span></td>
        <td class="nump">25,639,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryFinishedGoodsNetOfReserves', window );">Finished goods (completed systems)</a></td>
        <td class="nump">15,968,000<span></span></td>
        <td class="nump">15,968,000<span></span></td>
        <td class="nump">8,555,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories, net</a></td>
        <td class="nump">100,234,000<span></span></td>
        <td class="nump">100,234,000<span></span></td>
        <td class="nump">120,023,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryValuationReserves', window );">Inventory reserves</a></td>
        <td class="nump">33,600,000<span></span></td>
        <td class="nump">33,600,000<span></span></td>
        <td class="nump">22,800,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Reserves</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ChargesRelatedToBelowNormalProductionCapacity', window );">Cost of sales due to below normal production capacity</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">2,600,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">1,000,000<span></span></td>
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          <div class="a">Inventory reserves</div>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAndQualifyingAccountsDisclosureLineItems', window );"><strong>Reserves</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">$ 13,400,000<span></span></td>
        <td class="nump">$ 14,492,000<span></span></td>
        <td class="nump">$ 1,015,000<span></span></td>
        <td class="nump">$ 2,015,000<span></span></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the amount charged to cost of sales due to below normal production capacity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InventoryDisclosureAbstract</nobr></td>
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                    <td>xbrli:stringItemType</td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section BB<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.BB)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386940&amp;loc=d3e100047-122729<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 6<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.6(a)(1))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InventoryFinishedGoodsNetOfReserves</nobr></td>
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                    <td>us-gaap_</td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying amount (lower of cost or market) as of the balance sheet date of inventories less all valuation and other allowances. Excludes noncurrent inventory balances (expected to remain on hand past one year or one operating cycle, if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.6(a))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section 35<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386567&amp;loc=d3e3927-108312<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6676-107765<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InventoryNet</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.6(a)(4))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.BB)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386940&amp;loc=d3e100047-122729<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 6<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section BB<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InventoryRawMaterialsNetOfReserves</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of the valuation account as of the balance sheet date which reduces the carrying amount of inventory to net realizable value; takes into consideration such factors as market value, excessive quantities based on expected sales, technological obsolescence, and shrinkage. May also provide for estimated product returns or price concessions pertaining to product cost.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Paragraph 14<br><br> -Chapter 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 6<br><br> -Subparagraph a<br><br> -Article 5<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Section A<br><br> -Paragraph 9<br><br> -Chapter 3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.6(a))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Paragraph 8, 9, 14<br><br> -Chapter 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -Subparagraph (SX 210.12-09)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.BB)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386940&amp;loc=d3e100047-122729<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section 35<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386567&amp;loc=d3e3927-108312<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InventoryValuationReserves</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.6(a)(3))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 330<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 5.BB)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386940&amp;loc=d3e100047-122729<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 6<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 5<br><br> -Section BB<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><nobr>us-gaap_InventoryWorkInProcessNetOfReserves</nobr></td>
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                <p>Total of allowances and reserves, the valuation and qualifying accounts that are either netted against the cost of an asset (in order to value it at its carrying value) or that reflect a liability established to represent expected future costs, charged to costs and expenses.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><nobr>us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense</nobr></td>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EIBAG">
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          <div style="width: 200px;"><strong>Schedule II-Valuation and Qualifying Accounts (Details) (USD $)<br>In Thousands, unless otherwise specified</strong></div>
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        <th class="th" colspan="3">12 Months Ended</th>
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      <tr>
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          <div>Dec. 31, 2012</div>
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          <div>Dec. 31, 2012</div>
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        <th class="th">
          <div>Dec. 31, 2011</div>
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          <div class="a">Allowance for doubtful accounts and returns</div>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
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        <td class="nump">$ 411<span></span></td>
        <td class="nump">$ 1,357<span></span></td>
        <td class="nump">$ 2,390<span></span></td>
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        <td class="num">(535)<span></span></td>
        <td class="num">(1,120)<span></span></td>
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        <td class="num">(112)<span></span></td>
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        <td class="num">(17)<span></span></td>
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        <td class="nump">104<span></span></td>
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        <td class="nump">305<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">22,778<span></span></td>
        <td class="nump">27,517<span></span></td>
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        <td class="nump">14,492<span></span></td>
        <td class="nump">1,015<span></span></td>
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        <td class="num">(4,819)<span></span></td>
        <td class="num">(5,583)<span></span></td>
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        <td class="nump">1,150<span></span></td>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesAdjustments">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of the adjustments in a given period to allowances and reserves, the valuation and qualifying accounts that are either netted against the cost of an asset (in order to value it at its carrying value) or that reflect a liability.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ValuationAllowancesAndReservesAdjustments</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesBalance">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of allowances and reserves, the valuation and qualifying accounts that are either netted against the cost of an asset (in order to value it at its carrying value) or that reflect a liability established to represent expected future costs.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ValuationAllowancesAndReservesBalance</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of allowances and reserves, the valuation and qualifying accounts that are either netted against the cost of an asset (in order to value it at its carrying value) or that reflect a liability established to represent expected future costs, charged to costs and expenses.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesDeductions">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of the deductions in a given period to allowances and reserves, the valuation and qualifying accounts that are either netted against the cost of an asset (in order to value it at its carrying value) or that reflect a liability established to represent expected future costs, representing receivables written off as uncollectible and portions of the reserves utilized, respectively.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 09<br><br> -Article 12<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e24092-122690<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ValuationAllowancesAndReservesDeductions</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
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<DOCUMENT>
<TYPE>XML
<SEQUENCE>50
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EJBBG">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Consolidated Statements of Operations (USD $)<br>In Thousands, except Per Share data, unless otherwise specified</strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenuesAbstract', window );"><strong>Revenue</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueGoodsNet', window );">Product</a></td>
        <td class="nump">$ 174,309<span></span></td>
        <td class="nump">$ 287,324<span></span></td>
        <td class="nump">$ 242,771<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueServicesNet', window );">Services</a></td>
        <td class="nump">29,076<span></span></td>
        <td class="nump">32,092<span></span></td>
        <td class="nump">32,441<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Total revenue</a></td>
        <td class="nump">203,385<span></span></td>
        <td class="nump">319,416<span></span></td>
        <td class="nump">275,212<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfRevenueAbstract', window );"><strong>Cost of revenue</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsSold', window );">Product</a></td>
        <td class="nump">123,593<span></span></td>
        <td class="nump">181,241<span></span></td>
        <td class="nump">168,047<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfServices', window );">Services</a></td>
        <td class="nump">21,621<span></span></td>
        <td class="nump">23,438<span></span></td>
        <td class="nump">21,327<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Total cost of revenue</a></td>
        <td class="nump">145,214<span></span></td>
        <td class="nump">204,679<span></span></td>
        <td class="nump">189,374<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
        <td class="nump">58,171<span></span></td>
        <td class="nump">114,737<span></span></td>
        <td class="nump">85,838<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingExpensesAbstract', window );"><strong>Operating expenses</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpense', window );">Research and development</a></td>
        <td class="nump">40,401<span></span></td>
        <td class="nump">47,176<span></span></td>
        <td class="nump">39,524<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SellingAndMarketingExpense', window );">Sales and marketing</a></td>
        <td class="nump">25,889<span></span></td>
        <td class="nump">29,255<span></span></td>
        <td class="nump">27,549<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GeneralAndAdministrativeExpense', window );">General and administrative</a></td>
        <td class="nump">26,554<span></span></td>
        <td class="nump">31,174<span></span></td>
        <td class="nump">32,132<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal', window );">Gain on sale of dry strip assets and intellectual property</a></td>
        <td class="num">(7,904)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestructuringCharges', window );">Restructuring charges</a></td>
        <td class="nump">4,169<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingExpenses', window );">Total operating expenses</a></td>
        <td class="nump">89,109<span></span></td>
        <td class="nump">107,605<span></span></td>
        <td class="nump">99,205<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Income (loss) from operations</a></td>
        <td class="num">(30,938)<span></span></td>
        <td class="nump">7,132<span></span></td>
        <td class="num">(13,367)<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NonoperatingIncomeExpenseAbstract', window );"><strong>Other income (expense)</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentIncomeInterest', window );">Interest income</a></td>
        <td class="nump">45<span></span></td>
        <td class="nump">42<span></span></td>
        <td class="nump">96<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherNonoperatingIncomeExpense', window );">Other, net</a></td>
        <td class="num">(1,495)<span></span></td>
        <td class="nump">297<span></span></td>
        <td class="num">(3,990)<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NonoperatingIncomeExpense', window );">Total other income (expense)</a></td>
        <td class="num">(1,450)<span></span></td>
        <td class="nump">339<span></span></td>
        <td class="num">(3,894)<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments', window );">Income (loss) before income taxes</a></td>
        <td class="num">(32,388)<span></span></td>
        <td class="nump">7,471<span></span></td>
        <td class="num">(17,261)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income taxes</a></td>
        <td class="nump">1,646<span></span></td>
        <td class="nump">2,394<span></span></td>
        <td class="nump">312<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income (loss)</a></td>
        <td class="num">$ (34,034)<span></span></td>
        <td class="nump">$ 5,077<span></span></td>
        <td class="num">$ (17,573)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Net income (loss) per share</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic (in dollars per share)</a></td>
        <td class="num">$ (0.32)<span></span></td>
        <td class="nump">$ 0.05<span></span></td>
        <td class="num">$ (0.17)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted (in dollars per share)</a></td>
        <td class="num">$ (0.32)<span></span></td>
        <td class="nump">$ 0.05<span></span></td>
        <td class="num">$ (0.17)<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract', window );"><strong>Shares used in computing net income (loss) per share</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Basic (in shares)</a></td>
        <td class="nump">107,619<span></span></td>
        <td class="nump">106,234<span></span></td>
        <td class="nump">104,522<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted (in shares)</a></td>
        <td class="nump">107,619<span></span></td>
        <td class="nump">109,098<span></span></td>
        <td class="nump">104,522<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfGoodsAndServicesSold">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 2<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.2(a),(d))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CostOfGoodsAndServicesSold</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total costs related to goods produced and sold during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 2<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.2(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CostOfGoodsSold</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CostOfRevenueAbstract</nobr></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total costs related to services rendered by an entity during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 2<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.2(d))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CostOfServices</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gain (loss) resulting from the sale of a disposal group that is not a discontinued operation. It is included in income from continuing operations before income taxes in the income statement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 144<br><br><br><br> -Paragraph 37, 45<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 205<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6360339&amp;loc=d3e1361-107760<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 144<br><br><br><br> -Paragraph 47<br><br><br><br> -Subparagraph b<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=8077374&amp;loc=d3e2443-110228<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DisposalGroupNotDiscontinuedOperationGainLossOnDisposal</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EarningsPerShareAbstract</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 21<br><br><br><br> -Article 9<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 36, 37, 38<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-04.23)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879574&amp;loc=d3e536633-122882<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 225<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-04.19)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br><br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Emerging Issues Task Force (EITF)<br><br><br><br> -Number 07-4<br><br><br><br> -Paragraph 4<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 55<br><br><br><br> -Paragraph 52<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=16381557&amp;loc=d3e4984-109258<br><br><br><br><br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 18<br><br><br><br> -Article 7<br><br><br><br><br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br><br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EarningsPerShareBasic</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 18<br><br><br><br> -Article 7<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 11, 12, 36<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Emerging Issues Task Force (EITF)<br><br><br><br> -Number 07-4<br><br><br><br> -Paragraph 4<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br><br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Paragraph 21<br><br><br><br> -Article 9<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EarningsPerShareDiluted</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GeneralAndAdministrativeExpense">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The aggregate total of expenses of managing and administering the affairs of an entity, including affiliates of the reporting entity, which are not directly or indirectly associated with the manufacture, sale or creation of a product or product line.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.4)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_GeneralAndAdministrativeExpense</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1,2)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_GrossProfit</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Sum of operating profit and nonoperating income or expense before Income or Loss from equity method investments, income taxes, extraordinary items, and noncontrolling interest.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(h)(1)(i))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 08<br><br><br><br> -Paragraph h<br><br><br><br> -Subparagraph 1(i)<br><br><br><br> -Article 4<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The sum of the current income tax expense or benefit and the deferred income tax expense or benefit pertaining to continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 740<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 9<br><br><br><br> -Subparagraph (a),(b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 109<br><br><br><br> -Paragraph 45<br><br><br><br> -Subparagraph a, b<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 235<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.4-08.(h))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 08<br><br><br><br> -Paragraph h<br><br><br><br> -Article 4<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Income Tax Expense (or Benefit)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6515339<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxExpenseBenefit</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentIncomeInterest">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Income derived from investments in debt securities and on cash and cash equivalents the earnings of which reflect the time value of money or transactions in which the payments are for the use or forbearance of money.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 115<br><br><br><br> -Paragraph 14<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 7<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.7(b))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InvestmentIncomeInterest</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net income after adjustments for dividends on preferred stock (declared in the period) and/or cumulative preferred stock (accumulated for the period).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 11<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1377-109256<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 9<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NonoperatingIncomeExpense">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The aggregate amount of income or expense from ancillary business-related activities (that is to say, excluding major activities considered part of the normal operations of the business).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.7)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 7<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NonoperatingIncomeExpense</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NonoperatingIncomeExpenseAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_NonoperatingIncomeExpenseAbstract</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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        </tr>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OperatingExpenses</nobr></td>
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                  <tr>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
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                    <td><strong> Period Type:</strong></td>
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        </tr>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OperatingExpensesAbstract</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td>duration</td>
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              </div>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The net result for the period of deducting operating expenses from operating revenues.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OperatingIncomeLoss</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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            </div>
          </td>
        </tr>
      </table>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The net amount of other income and expense amounts, the components of which are not separately disclosed on the income statement, resulting from ancillary business-related activities (that is, excluding major activities considered part of the normal operations of the business) also known as other nonoperating income (expense) recognized for the period. Such amounts may include: (a) dividends, (b) interest on securities, (c) net gains or losses on securities, (d) unusual costs, (e) gains or losses on foreign exchange transactions, and (f) miscellaneous other income and expense items.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 9<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.9)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OtherNonoperatingIncomeExpense</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                    <td>duration</td>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpense">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 141<br><br><br><br> -Paragraph 51<br><br><br><br> -Subparagraph g<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 86<br><br><br><br> -Paragraph 11, 12<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 985<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6501960&amp;loc=d3e128462-111756<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 730<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 2<br><br><br><br> -Paragraph 12, 13<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ResearchAndDevelopmentExpense</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestructuringCharges">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount charged against earnings in the period for incurred and estimated costs associated with exit from or disposal of business activities or restructurings pursuant to a duly authorized plan, excluding asset retirement obligations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 420<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 5.P.3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140864-122747<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 5<br><br><br><br> -Section P<br><br><br><br> -Subsection 3, 4<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 28<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 420<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394359&amp;loc=d3e17939-110869<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 420<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SAB TOPIC 5.P.4(b))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6394695&amp;loc=d3e140904-122747<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_RestructuringCharges</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
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          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenuesAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_RevenuesAbstract</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                    <td><strong> Balance Type:</strong></td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueGoodsNet">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate revenue during the period from the sale of goods in the normal course of business, after deducting returns, allowances and discounts.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 1<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SalesRevenueGoodsNet</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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              </div>
            </div>
          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueNet">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 1<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SalesRevenueNet</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueServicesNet">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate revenue during the period from services rendered in the normal course of business, after deducting allowances and discounts.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 225<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SX 210.5-03.1(d))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 1<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                <p>The aggregate total amount of expenses directly related to the marketing or selling of products or services.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 40<br><br><br><br> -Subparagraph a<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 8<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Emerging Issues Task Force (EITF)<br><br><br><br> -Number 07-4<br><br><br><br> -Paragraph 4<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 16<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1505-109256<br><br><br><br><br><br><br><br></p>
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                    <td><strong> Name:</strong></td>
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                <p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 40<br><br><br><br> -Subparagraph a<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 10<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1448-109256<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 8<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Emerging Issues Task Force (EITF)<br><br><br><br> -Number 07-4<br><br><br><br> -Paragraph 4<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 171<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Weighted-Average Number of Common Shares Outstanding<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6528421<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">59,114</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">55,007</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">60,411</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">72,455</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">93,380</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">93,170</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">480</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">14,367</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">26,895</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">34,138</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(14,818</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(8,718</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(471</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(10,027</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(2,113</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,151</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,227</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,812</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Net income (loss) per share basic and diluted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.14</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.08</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.00</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.09</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.02</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.01</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.04</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.02</font></td>
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                <p>Tabular disclosure of the quarterly financial data in the annual financial statements. The disclosure includes financial information for each fiscal quarter for the current and previous year, including revenues, gross profit, income (loss) before extraordinary items and cumulative effect of a change in accounting principle and earnings per share data.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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          <div style="width: 200px;"><strong>Consolidated Balance Sheets (Parenthetical) (USD $)<br>In Thousands, except Per Share data, unless otherwise specified</strong></div>
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                <p>Face amount or stated value of common stock per share; generally not indicative of the fair market value per share.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.29)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 30<br><br> -Article 5<br><br><br><br></p>
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                <p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p>
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                <p>Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.29)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 30<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CommonStockSharesOutstanding</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockParOrStatedValuePerShare">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Face amount or stated value per share of nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer); generally not indicative of the fair market value per share.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 2, 3, 4, 5, 6, 7, 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PreferredStockParOrStatedValuePerShare</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesAuthorized">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 2, 3, 4, 5, 6, 7, 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PreferredStockSharesAuthorized</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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                </table>
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          </td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesIssued">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PreferredStockSharesIssued</nobr></td>
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                    <td>na</td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate share number for all nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer) held by stockholders. Does not include preferred shares that have been repurchased.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PreferredStockSharesOutstanding</nobr></td>
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                    <td>na</td>
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                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
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                    <td><nobr>us-gaap_StatementOfFinancialPositionAbstract</nobr></td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TreasuryStockShares">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of common and preferred shares that were previously issued and that were repurchased by the issuing entity and held in treasury on the financial statement date. This stock has no voting rights and receives no dividends.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28,29)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                  <tr>
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          <div style="width: 200px;"><strong>Employee Benefit Plans (Details) (USD $)<br></strong></div>
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        <th class="th" colspan="3">12 Months Ended</th>
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          <div>Dec. 31, 2012</div>
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        <th class="th">
          <div>Dec. 31, 2011</div>
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          <div>Dec. 31, 2010</div>
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        <td class="nump">$ 1,489,000<span></span></td>
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        <td class="nump">3,732,000<span></span></td>
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        <td class="nump">700,000<span></span></td>
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        <td class="nump">1,290,000<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DefinedBenefitPlanDisclosureLineItems', window );"><strong>Defined Contribution Plan</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansCurrentLiabilities', window );">Current liabilities</a></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">16.00%<span></span></td>
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                <p>Maximum percentage of employee gross pay, by the terms of the plan, that the employee may contribute to a defined contribution plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                <p>Amount of plan administration expenses deducted from total plan assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                <p>For a classified balance sheet, the amount recognized in balance sheet as a current liability associated with an underfunded defined benefit plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 45<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915240&amp;loc=d3e1703-114919<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Current Liabilities<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6509677<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 5<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e1928-114920<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                    <td>xbrli:monetaryItemType</td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>This represents the entire liability recognized in the balance sheet that is associated with the defined benefit plans.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 45<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915240&amp;loc=d3e1703-114919<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 942<br><br> -SubTopic 210<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.9-03.15)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e2417-114920<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 944<br><br> -SubTopic 210<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.7-03.15)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 6<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 5<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e2410-114920<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e1928-114920<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>This represents the noncurrent liability for underfunded plans recognized in the balance sheet that is associated with the defined benefit pension plans and other postretirement defined benefit plans.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 6<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e2417-114920<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e2410-114920<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.24)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915506&amp;loc=d3e1928-114920<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 5<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -SubTopic 20<br><br> -Section 45<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21915240&amp;loc=d3e1703-114919<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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          <div style="width: 200px;"><strong>Property, Plant and Equipment, net (Tables)<br></strong></div>
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<td style="FONT-FAMILY: times" width="50"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
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<td style="FONT-FAMILY: times" valign="bottom">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">78,985</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Machinery and equipment</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">7,118</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">7,020</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Construction in process</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">455</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">541</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total cost</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">86,527</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">86,546</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Accumulated depreciation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(52,114</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(49,342</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Property, plant and equipment, net</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">34,413</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">37,204</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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                <p>Tabular disclosure of the components of property, plant and equipment.</p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EFYAI">
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        <th class="th" colspan="3">12 Months Ended</th>
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          <div>Dec. 31, 2012</div>
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        <th class="th">
          <div>Sep. 30, 2012</div>
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        <th class="th">
          <div>Jun. 30, 2012</div>
        </th>
        <th class="th">
          <div>Mar. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Sep. 30, 2011</div>
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        <th class="th">
          <div>Jun. 30, 2011</div>
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        <th class="th">
          <div>Mar. 31, 2011</div>
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        <th class="th">
          <div>Dec. 31, 2012</div>
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        <th class="th">
          <div>Dec. 31, 2011</div>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems', window );"><strong>Revenue and long-lived assets by geographic region</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">$ 59,114,000<span></span></td>
        <td class="nump">$ 55,007,000<span></span></td>
        <td class="nump">$ 60,411,000<span></span></td>
        <td class="nump">$ 72,455,000<span></span></td>
        <td class="nump">$ 93,380,000<span></span></td>
        <td class="nump">$ 93,170,000<span></span></td>
        <td class="nump">$ 203,385,000<span></span></td>
        <td class="nump">$ 319,416,000<span></span></td>
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        <td class="nump">44,192,000<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">44,192,000<span></span></td>
        <td class="nump">55,468,000<span></span></td>
        <td class="nump">50,974,000<span></span></td>
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        <td class="nump">231,000,000<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">43,440,000<span></span></td>
        <td class="nump">54,472,000<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">53,779,000<span></span></td>
        <td class="nump">50,571,000<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 752,000<span></span></td>
        <td class="nump">$ 996,000<span></span></td>
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                <p>Percentage of revenues from external customers attributed to all foreign countries, in total, from which the entity derives its revenues.</p>
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                <p>Revenues from external customers attributed to all foreign countries in total from which the entity derives revenues.</p>
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                <p>Long-lived assets other than financial instruments, long-term customer relationships of a financial institution, mortgage and other servicing rights, deferred policy acquisition costs, and deferred tax assets.</p>
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                <p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p>
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<p style="FONT-FAMILY: times"><font size="2"><b>Preferred Stock</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company may issue up to 30&#160;million shares of preferred stock in one or more series. The Board of Directors is authorized to fix the rights and terms for any series of preferred stock without additional shareholder approval. As of December&#160;31, 2012, 2011, and 2010, there were no outstanding shares of preferred stock.</font></p></div>
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                <p>The entire disclosure for shareholders' equity, comprised of portions attributable to the parent entity and noncontrolling interest, if any, including other comprehensive income (as applicable).  Including, but not limited to: (1) balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings; (2) accumulated balance for each classification of other comprehensive income and total amount of comprehensive income; (3) amount and nature of changes in separate accounts, including the number of shares authorized and outstanding, number of shares issued upon exercise and conversion, and for other comprehensive income, the adjustments for reclassifications to net income; (4) rights and privileges of each class of stock authorized; (5) basis of treasury stock, if other than cost, and amounts paid and accounting treatment for treasury stock purchased significantly in excess of market; (6) dividends paid or payable per share and in the aggregate for each class of stock for each period presented; (7) dividend restrictions and accumulated preferred dividends in arrears (in aggregate and per share amount); (8) retained earnings appropriations or restrictions, such as dividend restrictions; (9) impact of change in accounting principle, initial adoption of new accounting principle and correction of an error in previously issued financial statements; (10) shares held in trust for Employee Stock Ownership Plan (ESOP); (11) deferred compensation related to issuance of capital stock; (12) note received for issuance of stock; (13) unamortized discount on shares; (14) description, terms, and number of warrants or rights outstanding; (15) shares under subscription and subscription receivables, effective date of new retained earnings after quasi-reorganization and deficit eliminated by quasi-reorganization and, for a period of at least ten years after the effective date, the point in time from which the new retained dates; and (16) retroactive effective of subsequent change in capital structure.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21488-112644<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30, 31<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 4<br><br> -Section E<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Preferred Stock<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6521494<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 11<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21564-112644<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 4<br><br> -Subparagraph (SAB TOPIC 4.C)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187143-122770<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21484-112644<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21475-112644<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21506-112644<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 30<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6405834&amp;loc=d3e23285-112656<br><br><br><br>Reference 12: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Section B<br><br> -Paragraph 7, 11A<br><br> -Chapter 1<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 13: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 4<br><br> -Section C<br><br><br><br>Reference 14: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br>Reference 15: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph d<br><br> -Article 4<br><br><br><br>Reference 16: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.29-31)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 17: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 310<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 4.E)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6228006&amp;loc=d3e74512-122707<br><br><br><br>Reference 18: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 5<br><br> -Paragraph 15<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 19: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br>Reference 20: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 2, 3, 4, 5, 6, 7, 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  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This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 22: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(d),(e))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 23: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Article 4<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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          <div style="width: 200px;"><strong>Assets Manufactured for Internal Use (Tables)<br></strong></div>
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        <td class="text">&#xA0;<span></span></td>
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<p style="FONT-FAMILY: times">&#160;</p>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>December&#160;31,</b></font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total cost</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">23,727</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">27,503</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Accumulated depreciation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(13,948</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(10,526</font></td>
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<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">9,779</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">16,977</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;16. Commitments and Contingencies</b></font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(a)&#160;&#160;&#160;&#160;Lease Commitments</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company leases manufacturing and office facilities and certain equipment under operating leases that expire through 2016. Rental expense was $4.3&#160;million, $4.6&#160;million, and $5.2&#160;million under operating leases for the years ended December&#160;31, 2012, 2011, and 2010 respectively.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Future minimum lease commitments on non-cancelable operating leases for the year ended December&#160;31, 2012 are as follows:</font></p>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,681</font></td>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2015</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,181</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">2016</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">224</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6,143</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<p style="FONT-FAMILY: times"><font size="2"><b>(b)&#160;&#160;&#160;&#160;Purchase Commitments</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has non-cancelable contracts and purchase orders for inventory of $14.9&#160;million at December&#160;31, 2012.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(c)&#160;&#160;&#160;&#160;Litigation</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company is not presently a party to any litigation that it believes might have a material adverse effect on its business operations. The Company is, from time to time, a party to litigation that arises in the normal course of its business operations.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(d)&#160;&#160;&#160;&#160;Indemnifications</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's system sales agreements typically include provisions under which the Company agrees to take certain actions, provide certain remedies and defend its customers against third-party claims of intellectual property infringement under specified conditions and to indemnify customers against any damage and costs awarded in connection with such claims. The Company has not incurred any material costs as a result of such indemnifications and has not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.</font></p></div>
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                <p>The entire disclosure for commitments and contingencies.</p>
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          <div style="width: 200px;"><strong>Consolidated Statements of Stockholders' Equity (USD $)<br>In Thousands, unless otherwise specified</strong></div>
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          <div>Total</div>
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        <td class="nump">$ 216,399<span></span></td>
        <td class="nump">$ 104<span></span></td>
        <td class="nump">$ 488,321<span></span></td>
        <td class="num">$ (1,218)<span></span></td>
        <td class="num">$ (275,947)<span></span></td>
        <td class="nump">$ 5,139<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="num">(17,573)<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="num">(17,573)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
        <td class="nump">1,384<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="num">(291)<span></span></td>
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        <td class="nump">553<span></span></td>
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        <td class="nump">552<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">638<span></span></td>
        <td class="nump">1<span></span></td>
        <td class="nump">637<span></span></td>
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        <td class="nump">280<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="num">(201)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="nump">262<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">570<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">570<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">4,088<span></span></td>
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        <td class="nump">205,567<span></span></td>
        <td class="nump">106<span></span></td>
        <td class="nump">493,967<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">5,077<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="num">(1,465)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">10<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">288<span></span></td>
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        <td class="nump">372<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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      <tr class="rc">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2011</a></td>
        <td class="nump">214,555<span></span></td>
        <td class="nump">107<span></span></td>
        <td class="nump">499,332<span></span></td>
        <td class="num">(1,218)<span></span></td>
        <td class="num">(288,443)<span></span></td>
        <td class="nump">4,777<span></span></td>
      </tr>
      <tr class="rc">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2011</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">106,809<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income (loss)</a></td>
        <td class="num">(34,034)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(34,034)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
        <td class="nump">642<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">642<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension</a></td>
        <td class="num">(399)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(399)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
        <td class="nump">968<span></span></td>
        <td class="nump">1<span></span></td>
        <td class="nump">967<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">1,148<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan', window );">Issuance of shares under Employee Stock Purchase Plan</a></td>
        <td class="nump">390<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">390<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Issuance of shares under Employee Stock Purchase Plan (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">306<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
        <td class="num">(22)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(22)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">30<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
        <td class="nump">3,976<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">3,976<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rc">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2012</a></td>
        <td class="nump">$ 186,076<span></span></td>
        <td class="nump">$ 108<span></span></td>
        <td class="nump">$ 504,643<span></span></td>
        <td class="num">$ (1,218)<span></span></td>
        <td class="num">$ (322,477)<span></span></td>
        <td class="nump">$ 5,020<span></span></td>
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      <tr class="rc">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2012</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">108,293<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of shares issued during the period related to restricted stock awards issued in satisfaction of accrued compensation, net of any shares forfeited.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Value of stock related to restricted stock awards issued in satisfaction of accrued compensation during the period, net of the stock value of such awards forfeited.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>This element represents the amount of recognized equity-based compensation during the period, that is, the amount recognized as expense in the income statement (or as asset if compensation is capitalized). Alternate captions include the words "stock-based compensation".</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 20<br><br> -Section 55<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6576910&amp;loc=d3e11178-113907<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph 64<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 35<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415241&amp;loc=d3e4534-113899<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A91<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5047-113901<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 20<br><br> -Section 55<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6576910&amp;loc=d3e11149-113907<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph 39<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                    <td><strong> Name:</strong></td>
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        <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net income after adjustments for dividends on preferred stock (declared in the period) and/or cumulative preferred stock (accumulated for the period).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 11<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1377-109256<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><strong> Name:</strong></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net of tax and reclassification adjustments amount of the increase (decrease) in accumulated other comprehensive income (loss) related to pension and other postretirement benefit plans, attributable to the parent entity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 19<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569616-111683<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph 29<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph 38<br><br> -Subparagraph c(3)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1A<br><br> -Subparagraph (c)(3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph 30<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569643-111683<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount after tax and reclassification adjustments, resulting from the process of expressing in the reporting currency of the reporting entity those amounts that are denominated or measured in a different currency, and from transactions whose terms are denominated in a currency other than the entity's functional currency, which is attributable to the parent entity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 19<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569616-111683<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph 29<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph 38<br><br> -Subparagraph c(3)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1A<br><br> -Subparagraph (c)(3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph 30<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 810<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569643-111683<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharesOutstanding">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of shares issued and outstanding as of the balance sheet date.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SharesOutstanding</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.29-31)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30, 31<br><br> -Article 5<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 51<br><br> -Paragraph A3<br><br> -Appendix A<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 310<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SAB TOPIC 4.E)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6228006&amp;loc=d3e74512-122707<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 4<br><br> -Section E<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_StockholdersEquity</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of shares issued during the period as a result of an employee stock purchase plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of shares issued during the period related to Restricted Stock Awards, net of any shares forfeited.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 4, 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of share options (or share units) exercised during the current period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28,29)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(iv)(2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate change in value for stock issued during the period as a result of employee stock purchase plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30, 31<br><br> -Article 5<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br></p>
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                    <td><strong> Name:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Value of stock related to Restricted Stock Awards issued during the period, net of the stock value of such awards forfeited.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Value of stock issued as a result of the exercise of stock options.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.29-31)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30, 31<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EFOAC">
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          <div style="width: 200px;"><strong>Consolidated Statements of Comprehensive Income (USD $)<br>In Thousands, unless otherwise specified</strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
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          <div>Dec. 31, 2012</div>
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        <th class="th">
          <div>Dec. 31, 2011</div>
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        <th class="th">
          <div>Dec. 31, 2010</div>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="num">$ (34,034)<span></span></td>
        <td class="nump">$ 5,077<span></span></td>
        <td class="num">$ (17,573)<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">642<span></span></td>
        <td class="num">(1,465)<span></span></td>
        <td class="nump">1,384<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Actuarial net (loss) gain from pension plan, net of benefit (taxes) of $178, ($4) and $151</a></td>
        <td class="num">(399)<span></span></td>
        <td class="nump">10<span></span></td>
        <td class="num">(291)<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTax', window );">Comprehensive income (loss)</a></td>
        <td class="num">$ (33,791)<span></span></td>
        <td class="nump">$ 3,622<span></span></td>
        <td class="num">$ (16,480)<span></span></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The change in equity [net assets] of a business enterprise during a period from transactions and other events and circumstances from non-owner sources which are attributable to the reporting entity. It includes all changes in equity during a period except those resulting from investments by owners and distributions to owners, but excludes any and all transactions which are directly or indirectly attributable to that ownership interest in subsidiary equity which is not attributable to the parent.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Net Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6518256<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 38<br><br><br><br> -Subparagraph c(3)<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Other Comprehensive Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6519514<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 30<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Comprehensive Income<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=16317811<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=20435746&amp;loc=d3e557-108580<br><br><br><br><br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph A5<br><br><br><br> -Appendix A<br><br><br><br><br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net income after adjustments for dividends on preferred stock (declared in the period) and/or cumulative preferred stock (accumulated for the period).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 260<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 11<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1377-109256<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 128<br><br><br><br> -Paragraph 9<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net of tax and reclassification adjustments amount of the increase (decrease) in accumulated other comprehensive income (loss) related to pension and other postretirement benefit plans, attributable to the parent entity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 19<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569616-111683<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 29<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 38<br><br><br><br> -Subparagraph c(3)<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1A<br><br><br><br> -Subparagraph (c)(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 30<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569643-111683<br><br><br><br><br><br><br><br></p>
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                <p>Amount after tax and reclassification adjustments, resulting from the process of expressing in the reporting currency of the reporting entity those amounts that are denominated or measured in a different currency, and from transactions whose terms are denominated in a currency other than the entity's functional currency, which is attributable to the parent entity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 19<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569616-111683<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 29<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 38<br><br><br><br> -Subparagraph c(3)<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1A<br><br><br><br> -Subparagraph (c)(3)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph 30<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 810<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 20<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=7656940&amp;loc=SL4569643-111683<br><br><br><br><br><br><br><br></p>
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          <div style="width: 200px;"><strong>Restructuring Charges<br></strong></div>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;9.&#160;&#160;Restructuring Charges</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company initiated reductions in force throughout 2012 to control costs and improve the focus of its operations in order to sustain future profitability and conserve cash. As a result, the Company recorded a total charge to restructuring expense of approximately $4.2&#160;million, for severance and related costs including a $0.1&#160;million non-cash charge for the modification of a share-based award. The Company did not incur restructuring charges for the years ended December&#160;31, 2011 or December&#160;31, 2010. The liability at December&#160;31, 2012 of $0.7&#160;million is expected to be paid in the first quarter of 2013.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's restructuring liability for the years ended December&#160;31, 2012, 2011 and 2010 are as follows:</font></p>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(130</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">659</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The entire disclosure for aggregate costs incurred during the period for restructuring, remediation, implementation, integration and asset impairment activities. Description of restructuring activities such as exit and disposal activities, could include facts and circumstances leading to the plan, the expected plan completion date, the major types of costs associated with the plan activities, total expected costs, the accrual balance at the end of the period, and the periods over which the remaining accrual will be settled. This would also include disclosure of the charge against earnings resulting from the aggregate write down of all assets from their carrying value to their fair value.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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                    <td><strong> Name:</strong></td>
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<DOCUMENT>
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<DESCRIPTION>IDEA: XBRL DOCUMENT
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  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
    <link rel="StyleSheet" type="text/css" href="report.css"><script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script></head>
  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EVRAE">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Document and Entity Information (USD $)<br></strong></div>
        </th>
        <th class="th" colspan="1">12 Months Ended</th>
        <th class="th" colspan="1"></th>
        <th class="th" colspan="1"></th>
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      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Feb. 25, 2013</div>
        </th>
        <th class="th">
          <div>Jun. 30, 2012</div>
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      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DocumentAndEntityInformationAbstract', window );"><strong>Document and Entity Information</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
        <td class="text">AXCELIS TECHNOLOGIES INC<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
        <td class="text">0001113232<span></span></td>
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        <td class="text">10-K<span></span></td>
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        <td class="text">Dec. 31,
         2012<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="text">--12-31<span></span></td>
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        <td class="text">No<span></span></td>
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        <td class="text">No<span></span></td>
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        <td class="text">Yes<span></span></td>
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        <td class="text">Accelerated Filer<span></span></td>
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        <td class="text">2012<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>If the value is true, then the document is an amendment to previously-filed/accepted document.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
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                <p>End date of current fiscal year in the format --MM-DD.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>This is focus fiscal period of the document report. For a first quarter 2006 quarterly report, which may also provide financial information from prior periods, the first fiscal quarter should be given as the fiscal period focus. Values: FY, Q1, Q2, Q3, Q4, H1, H2, M9, T1, T2, T3, M8, CY.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_DocumentFiscalPeriodFocus</nobr></td>
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                    <td>dei_</td>
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                    <td>dei:fiscalPeriodItemType</td>
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                    <td><strong> Balance Type:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>This is focus fiscal year of the document report in CCYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_DocumentFiscalYearFocus</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is CCYY-MM-DD.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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                <p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word "Other".</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_DocumentType</nobr></td>
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                    <td>dei_</td>
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                    <td>dei:submissionTypeItemType</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation 12B<br><br> -Number 240<br><br> -Section 12b<br><br> -Subsection 1<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityCentralIndexKey</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>dei_</td>
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                    <td>dei:centralIndexKeyItemType</td>
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                    <td>duration</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityCommonStockSharesOutstanding</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>dei_</td>
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                    <td>xbrli:sharesItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Indicate "Yes" or "No" whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityCurrentReportingStatus</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>dei_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>dei:yesNoItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td>duration</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Indicate whether the registrant is one of the following: (1) Large Accelerated Filer, (2) Accelerated Filer, (3) Non-accelerated Filer, (4) Smaller Reporting Company (Non-accelerated) or (5) Smaller Reporting Accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityFilerCategory</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>dei_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>dei:filerCategoryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>State aggregate market value of voting and non-voting common equity held by non-affiliates computed by reference to price at which the common equity was last sold, or average bid and asked price of such common equity, as of the last business day of registrant's most recently completed second fiscal quarter. The public float should be reported on the cover page of the registrants form 10K.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityPublicFloat</nobr></td>
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                    <td>dei_</td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation 12B<br><br> -Number 240<br><br> -Section 12b<br><br> -Subsection 1<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityRegistrantName</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>dei_</td>
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                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Indicate "Yes" or "No" if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityVoluntaryFilers</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>dei_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>dei:yesNoItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Indicate "Yes" or "No" if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>dei_EntityWellKnownSeasonedIssuer</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>dei_</td>
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  <head>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
      <tr>
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          <div style="width: 200px;"><strong>Product Warranty<br></strong></div>
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        <th class="th" colspan="1">12 Months Ended</th>
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      <tr>
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          <div>Dec. 31, 2012</div>
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        <td class="text">&#xA0;<span></span></td>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;10.&#160;&#160;Product Warranty</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company generally offers a one year warranty for all of its systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, the Company accrues a liability for the estimated cost of standard warranty at the time of system shipment and defers the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect the Company's warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. The Company periodically assesses the adequacy of its recorded liability and adjusts the amount as necessary.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The changes in the Company's product warranty liability are as follows:</font></p>
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<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years Ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at January&#160;1 (beginning of year)</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,697</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,713</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">726</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Warranties issued during the period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,042</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,772</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,722</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Settlements made during the period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(3,010</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(5,275</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,923</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Changes in estimate of liability for pre-existing warranties during the period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,928</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,487</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">188</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at December&#160;31 (end of year)</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,801</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,697</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,713</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" align="right"><font size="2">2,556</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">101</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">141</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">157</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">1,801</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">3,697</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,713</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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                <p>The entire disclosure for standard and extended product warranties and other product guarantee contracts, including a tabular reconciliation of the changes in the guarantor's aggregate product warranty liability for the reporting period.</p>
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                <p>Tax effect, net of reclassification adjustments, of the change in accumulated other comprehensive income (loss) related to pension and other postretirement benefit plans, attributable to the parent entity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;In addition to the statutory liability deposit, the Company has surety bonds related to value added tax claims and refunds in Europe of approximately $1.8&#160;million at December&#160;31, 2012 and standby letters of credit issued under the credit line of $3.6&#160;million.</font></p></div>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
      <tr>
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          <div style="width: 200px;"><strong>Gain on Sale of Dry Strip Assets and Intellectual Property<br></strong></div>
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      <tr>
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        <td class="text">&#xA0;<span></span></td>
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      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DisposalOfTangibleAndIntangibleAssetsDisclosureTextBlock', window );">Gain on Sale of Dry Strip Assets and Intellectual Property</a></td>
        <td class="text"><div style='font-size:10.0pt;FONT-FAMILY: Times New Roman;'>
<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;3.&#160;&#160;Gain on Sale of Dry Strip Assets and Intellectual Property</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;On December&#160;3, 2012, the Company entered into a purchase agreement with Lam Research Corporation ("Lam"). As part of the agreement, the Company sold its dry strip system assets and intellectual property to Lam. The purchase price was $10.7&#160;million, of which $2.0&#160;million is contingent upon reaching certain milestones. The $7.9&#160;million gain on sale of dry strip assets and intellectual property is comprised of the $8.7&#160;million proceeds received for the sale, offset by approximately $0.8&#160;million of product and material costs related to the lab system and other components purchased by Lam.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company determined that the sale would not be accounted for as a discontinued operation due to the continuing involvement it has as a result of the royalty free license granted to the Company and other factors as discussed below.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Lam granted the Company a worldwide, non-exclusive, non-transferable, royalty free license to use the intellectual property rights sold by the Company under the Asset Purchase Agreement. The perpetual license allows the Company to make and sell 300 mm dry strip wafer processing equipment for semiconductor applications through September 2013, make and sell 200 mm products through December 2015 and to support the Company's installed base of all dry strip equipment on a perpetual basis. As a result of this continuing involvement, the transaction has been recorded in continuing operations.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company will recognize the contingencies as the milestones are achieved, in accordance with the accounting guidance for gain contingencies. The Company expects to achieve the transition milestones over various periods through the first half of 2014. As the milestones are achieved, the proceeds will be recorded as part of the gain on sale of dry strip assets and intellectual property.</font></p></div>
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                <p>The entire disclosure for assets that are sold under contractual agreements. This would include both tangible and intangible assets.</p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Fair Value Measurements<br></strong></div>
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        <th class="th" colspan="1">12 Months Ended</th>
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          <div>Dec. 31, 2012</div>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;15. Fair Value Measurements</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Fair value is defined as the exchange price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(a)&#160;&#160;&#160;&#160;Fair Value Hierarchy</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument's categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:</font></p>
<ul>
<li style="list-style: none">
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font><font size="2"><i>Level&#160;1</i></font><font size="2">&#160;&#160;&#160;&#160;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font><font size="2"><i>Level&#160;2</i></font><font size="2">&#160;&#160;&#160;&#160;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</font><font size="2"><i>Level&#160;3</i></font><font size="2">&#160;&#160;&#160;&#160;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.</font></p></li></ul>
<p style="FONT-FAMILY: times"><font size="2"><b>(b)&#160;&#160;&#160;&#160;Assets Measured at Fair Value on a Recurring Basis</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's money market funds are included in cash and cash equivalents in the Consolidated Balance Sheets, and are considered a level&#160;1 investment as they are valued at quoted market prices in active markets.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The following table sets forth Company's assets which are measured at fair value on a recurring basis by level within the fair value hierarchy.</font></p>
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<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="45"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="36"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="36"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"><font size="1"><b>December&#160;31, 2012<br />
Fair Value Measurements</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Level&#160;1</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Level&#160;2</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Level&#160;3</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Total</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="11"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Cash equivalents:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Money market funds</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">29,179</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">29,179</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;<br /></font></p>
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<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="45"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="36"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="36"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="45"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"><font size="1"><b>December&#160;31, 2011<br />
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Level&#160;1</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Level&#160;2</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Total</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Cash equivalents:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">29,927</font></td>
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                <p>The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 825<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 21<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7491637&amp;loc=d3e13537-108611<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 107<br><br> -Paragraph 15B<br><br> -Subparagraph a, b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;11.&#160;&#160;Financing Arrangements</b></font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>Bank Credit Facility</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has a revolving credit facility with a bank pursuant to an Amended and Restated Loan and Security Agreement dated April&#160;25, 2011 (the "Revolving Credit Facility"). The facility provides for borrowings up to $30&#160;million, based primarily on accounts receivable, and is subject to certain financial covenants requiring the Company to maintain minimum levels of operating results and liquidity. The agreement will terminate on April&#160;10, 2015. The Company uses the facility to support letters of credit and for short term borrowing as needed.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;On March&#160;5, 2012, the Company entered into a Second Loan Modification Agreement relating to the Revolving Credit Facility to revise financial covenants. To facilitate future availability, on September&#160;10, 2012, the Company further modified the Revolving Credit Facility by entering into the Third Loan Modification Agreement (the "Third Modification Agreement"). The Third Modification Agreement revises the covenant setting the Company's minimum trailing six month Adjusted Net Income (as such capitalized term is defined in the agreement). All other material terms of the Revolving Credit Facility are unaffected by the Third Modification Agreement.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;At December&#160;31, 2012, the Company's available borrowing capacity under the Revolving Credit Facility was $17.3&#160;million and the Company was compliant with all covenants of the loan agreement. There were no borrowings against this facility during year the ended December&#160;31, 2012.</font></p></div>
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                <p>The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants.</p>
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                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.19,20,22)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21475-112644<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 19, 20, 22<br><br> -Article 5<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 2, 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">78,954</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">78,985</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Machinery and equipment</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">7,118</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">7,020</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Construction in process</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">455</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">541</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">86,527</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">86,546</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(52,114</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(49,342</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Property, plant and equipment, net</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">34,413</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">37,204</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Depreciation expense was $3.3&#160;million, $3.5&#160;million, and $3.6&#160;million, for the years ended December&#160;31, 2012, 2011, and 2010, respectively.</font></p></div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The entire disclosure for long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale. Examples include land, buildings, machinery and equipment, and other types of furniture and equipment including, but not limited to, office equipment, furniture and fixtures, and computer equipment and software. This disclosure may include property plant and equipment accounting policies and methodology, a schedule of property, plant and equipment gross, additions, deletions, transfers and other changes, depreciation, depletion and amortization expense, net, accumulated depreciation, depletion and amortization expense and useful lives, income statement disclosures, assets held for sale and public utility disclosures.</p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EDDNM">
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      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">4 years<span></span></td>
        <td class="text">6 months<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested', window );">Period after termination to exercise awards that were vested</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">90 days<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards', window );">Period after termination to retiring employees to exercise vested awards</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">1 year<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant', window );">Number of share of common stock available for future grant</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">2,000,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">1,500,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_EmployeeStockPurchasePlanAbstract', window );"><strong>Employee Stock Purchase Plan</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary', window );">Payroll deductions as a percentage of employee's salary</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">10.00%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent', window );">Purchase price as a percentage of the market value of a common stock on the day the stock is purchased</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">85.00%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized', window );">Offering period over which compensation expense is amortized</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">6 months<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Number of shares purchased under the plan</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">300,000<span></span></td>
        <td class="nump">400,000<span></span></td>
        <td class="nump">300,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Estimated weighted-average assumptions</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate', window );">Weighted-average expected volatility (as a percent)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">97.80%<span></span></td>
        <td class="nump">97.80%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum', window );">Weighted-average expected volatility, minimum (as a percent)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">97.80%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum', window );">Weighted-average expected volatility, maximum (as a percent)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">113.55%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Weighted-average expected term</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">6 years 1 month 6 days<span></span></td>
        <td class="text">6 years 2 months 12 days<span></span></td>
        <td class="text">3 years 9 months 18 days<span></span></td>
        <td class="text">6 years 1 month 6 days<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">7 years<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum', window );">Risk-free interest rate, minimum (as a percent)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">0.45%<span></span></td>
        <td class="nump">1.10%<span></span></td>
        <td class="nump">1.50%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum', window );">Risk-free interest rate, maximum (as a percent)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">1.37%<span></span></td>
        <td class="nump">2.40%<span></span></td>
        <td class="nump">2.00%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Stock-Based Compensation Expense</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate', window );">Forfeiture rate (as a percent)</a></td>
        <td class="nump">5.00%<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Stock-based compensation expense recognized (in dollars)</a></td>
        <td class="nump">$ 3,900,000<span></span></td>
        <td class="nump">$ 4,700,000<span></span></td>
        <td class="nump">$ 4,100,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 100,000<span></span></td>
        <td class="nump">$ 100,000<span></span></td>
        <td class="nump">$ 100,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant', window );">Stock-based compensation expense related to the modification of a stock option grant, included within restructuring line item</a></td>
        <td class="nump">100,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Options</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">21,093,000<span></span></td>
        <td class="nump">18,948,000<span></span></td>
        <td class="nump">17,368,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross', window );">Granted (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">4,077,000<span></span></td>
        <td class="nump">4,662,000<span></span></td>
        <td class="nump">5,310,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercised (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(1,148,000)<span></span></td>
        <td class="num">(372,000)<span></span></td>
        <td class="num">(704,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod', window );">Canceled (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(1,225,000)<span></span></td>
        <td class="num">(654,000)<span></span></td>
        <td class="num">(333,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod', window );">Expired (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(1,537,000)<span></span></td>
        <td class="num">(1,491,000)<span></span></td>
        <td class="num">(2,693,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the end of the period (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">21,260,000<span></span></td>
        <td class="nump">21,093,000<span></span></td>
        <td class="nump">18,948,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">21,300,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber', window );">Vested and exercisable (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">11,680,000<span></span></td>
        <td class="nump">10,200,000<span></span></td>
        <td class="nump">8,400,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber', window );">Options Vested or Expected to Vest at the end of the period (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">20,558,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward', window );"><strong>Weighted Average Exercise Price</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 2.76<span></span></td>
        <td class="nump">$ 3.70<span></span></td>
        <td class="nump">$ 6.43<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice', window );">Granted (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 0.93<span></span></td>
        <td class="nump">$ 1.70<span></span></td>
        <td class="nump">$ 1.61<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice', window );">Exercised (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 0.84<span></span></td>
        <td class="nump">$ 0.77<span></span></td>
        <td class="nump">$ 0.79<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice', window );">Canceled (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 1.43<span></span></td>
        <td class="nump">$ 1.43<span></span></td>
        <td class="nump">$ 1.23<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice', window );">Expired (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 7.71<span></span></td>
        <td class="nump">$ 12.38<span></span></td>
        <td class="nump">$ 18.26<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the end of the period (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 2.24<span></span></td>
        <td class="nump">$ 2.76<span></span></td>
        <td class="nump">$ 3.70<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice', window );">Exercisable at the end of the period (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 2.99<span></span></td>
        <td class="nump">$ 4.13<span></span></td>
        <td class="nump">$ 6.68<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice', window );">Options Vested or Expected to Vest at the end of the period (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 2.27<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract', window );"><strong>Weighted Average Remaining Contractual Term</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2', window );">Outstanding at the end of the period</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">6 years 4 months 20 days<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1', window );">Exercisable at the end of the period</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">5 years 7 months 2 days<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1', window );">Options Vested or Expected to Vest at the end of the period</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">6 years 5 months 8 days<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract', window );"><strong>Aggregate Intrinsic Value</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue', window );">Outstanding at the end of the period (in dollars)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">4,607,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1', window );">Exercisable at the end of the period (in dollars)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">2,591,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue', window );">Options Vested or Expected to Vest at the end of the period (in dollars)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">2,015,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract', window );"><strong>Additional disclosure</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue', window );">Total intrinsic value of options exercised (in dollars)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">900,000<span></span></td>
        <td class="nump">700,000<span></span></td>
        <td class="nump">1,200,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedInPeriodFairValue', window );">Total fair value of stock options vested (in dollars)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">4,100,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions', window );">Total forfeiture adjusted unrecognized compensation cost (in dollars)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">7,500,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted-average period over which unrecognized compensation cost is expected to be recognized</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">2 years 2 months 12 days<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">2 years 6 months<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Shares/units</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">151,000<span></span></td>
        <td class="nump">228,000<span></span></td>
        <td class="nump">604,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">1,000,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Granted (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">864,000<span></span></td>
        <td class="nump">121,000<span></span></td>
        <td class="nump">695,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod', window );">Vested (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(47,000)<span></span></td>
        <td class="num">(196,000)<span></span></td>
        <td class="num">(1,052,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod', window );">Forfeited (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(7,000)<span></span></td>
        <td class="num">(2,000)<span></span></td>
        <td class="num">(19,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the end of the period (in shares)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">961,000<span></span></td>
        <td class="nump">151,000<span></span></td>
        <td class="nump">228,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">1,000,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward', window );"><strong>Weighted-Average Grant Date Fair Value per Share</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 2.52<span></span></td>
        <td class="nump">$ 5.38<span></span></td>
        <td class="nump">$ 5.90<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Granted (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 1.65<span></span></td>
        <td class="nump">$ 2.50<span></span></td>
        <td class="nump">$ 1.72<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue', window );">Vested (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 2.82<span></span></td>
        <td class="nump">$ 5.81<span></span></td>
        <td class="nump">$ 3.30<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue', window );">Forfeited (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 1.62<span></span></td>
        <td class="nump">$ 6.01<span></span></td>
        <td class="nump">$ 2.94<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the end of the period (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 1.73<span></span></td>
        <td class="nump">$ 2.52<span></span></td>
        <td class="nump">$ 5.38<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract', window );"><strong>Additional disclosure</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions', window );">Total forfeiture adjusted unrecognized compensation cost (in dollars)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">$ 200,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_EmployeeStockPurchasePlanAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_EmployeeStockPurchasePlanAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the estimated annual forfeiture rate of the unvested portion of share-based compensation awards, based on historical analysis.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:percentItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the offering period over which compensation expense is amortized.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the amount of payroll deductions, expressed as a percentage of employees' salary, subject to certain caps set forth in the employee stock purchase plan, through which purchases are made.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:percentItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the period after termination to exercise share-based awards that were vested.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the period after termination to retiring employees to exercise vested share-based awards.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeestoExerciseVestedAwards</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the amount of stock-based compensation expense related to modification of stock option grant, which was included within restructuring expense.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ShareBasedCompensationExpensesRelatedToModificationOfStockOptionGrant</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpense">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (h)(1)(i)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph g(1)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5047-113901<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 14<br><br> -Section F<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph 64<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 14.F)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6793087&amp;loc=d3e301413-122809<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AllocatedShareBasedCompensationExpense</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Face amount or stated value of common stock per share; generally not indicative of the fair market value per share.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.29)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 30<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CommonStockParOrStatedValuePerShare</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average period over which unrecognized compensation is expected to be recognized for equity-based compensation plans, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (i)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions">
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate unrecognized cost of share-based awards, other than options, made to employees under an equity-based compensation plan, that have yet to vest.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedShareBasedAwardsOtherThanOptions</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate unrecognized cost of option awards made to employees under a stock option plan or plans, that have yet to vest.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Period which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (a)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsAdditionalDisclosuresAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td>duration</td>
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            </div>
          </td>
        </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(iv)(3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(e)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(2)(iii)(3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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                </table>
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            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(2)(iii)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(c)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(2)(iii)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph c(1)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(c)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</nobr></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(2)(i)-(ii)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(b)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(a)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward</nobr></td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue">
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The weighted average fair value of nonvested awards on equity-based plans excluding option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, revenue or profit achievement stock award plan) for which the employer is contingently obligated to issue equity instruments or transfer assets to an employee who has not yet satisfied service or performance criteria necessary to gain title to proceeds from the sale of the award or underlying shares or units.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(2)(i)-(ii)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(b)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(a)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue</nobr></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward</nobr></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(2)(iii)(2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(d)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(2)(iii)(2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(2)(d)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue</nobr></td>
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                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Balance Type:</strong></td>
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                    <td>duration</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Expected term of share-based compensation awards, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 14.D.2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6793087&amp;loc=d3e301413-122809<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (f)(2)(i)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 14<br><br> -Section D<br><br> -Subsection 2<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
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        <tr>
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        <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The estimated measure of the percentage by which a share price is expected to fluctuate during a period. Volatility also may be defined as a probability-weighted measure of the dispersion of returns about the mean. The volatility of a share price is the standard deviation of the continuously compounded rates of return on the share over a specified period. That is the same as the standard deviation of the differences in the natural logarithms of the stock prices plus dividends, if any, over the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (f)(2)(ii)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph e(2)(b)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate</nobr></td>
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        <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The estimated measure of the maximum percentage by which a share price is expected to fluctuate during a period. Volatility also may be defined as a probability-weighted measure of the dispersion of returns about the mean. The volatility of a share price is the standard deviation of the continuously compounded rates of return on the share over a specified period. That is the same as the standard deviation of the differences in the natural logarithms of the stock prices plus dividends, if any, over the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMaximum</nobr></td>
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        <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The estimated measure of the minimum percentage by which a share price is expected to fluctuate during a period. Volatility also may be defined as a probability-weighted measure of the dispersion of returns about the mean. The volatility of a share price is the standard deviation of the continuously compounded rates of return on the share over a specified period. That is the same as the standard deviation of the differences in the natural logarithms of the stock prices plus dividends, if any, over the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRateMinimum</nobr></td>
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                    <td>num:percentItemType</td>
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        <tr>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The maximum risk-free interest rate assumption that is used in valuing an option on its own shares.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMaximum</nobr></td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The minimum risk-free interest rate assumption that is used in valuing an option on its own shares.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRateMinimum</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The maximum number of shares (or other type of equity) originally approved (usually by shareholders and board of directors), net of any subsequent amendments and adjustments, for awards under the equity-based compensation plan. As stock or unit options and equity instruments other than options are awarded to participants, the shares or units remain authorized and become reserved for issuance under outstanding awards (not necessarily vested).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (a)(3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized</nobr></td>
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                    <td><strong> Data Type:</strong></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td>na</td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of difference between fair value of the underlying shares reserved for issuance and exercise price of vested portions of options outstanding and currently exercisable.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1</nobr></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(iii)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(1)(c), d(2)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice">
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The weighted-average price as of the balance sheet date at which grantees can acquire the shares reserved for issuance on vested portions of options outstanding and currently exercisable under the stock option plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(iii)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(1)(c)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average remaining contractual term for vested portions of options outstanding and currently exercisable or convertible, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The total accumulated difference between fair values of underlying shares on dates of exercise and exercise price on options which were exercised (or share units converted) into shares during the reporting period under the plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (d)(2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph c(2)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of options or other stock instruments for which the right to exercise has lapsed under the terms of the plan agreements.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(iv)(4)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(1)(g)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExpirationsInPeriod</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(iv)(3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(1)(f)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Gross number of share options (or share units) granted during the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of difference between fair value of the underlying shares reserved for issuance and exercise price of options outstanding.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph d(1)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The number of shares reserved for issuance under stock option agreements awarded under the plan that validly exist and are outstanding as of the balance sheet date, including vested options.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(1)(b)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(i)-(ii)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(1)(a)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(i)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph b(1)(a)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average remaining contractual term for option awards outstanding, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (e)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of difference between fair value of the underlying shares reserved for issuance and exercise prices of fully vested and expected to vest options outstanding.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (e)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph d(1)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>As of the balance sheet date, the number of shares into which fully vested and expected to vest stock options outstanding can be converted under the option plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (e)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph d(1)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>As of the balance sheet date, the weighted-average exercise price for outstanding stock options that are fully vested or expected to vest.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (e)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 123R<br><br> -Paragraph A240<br><br> -Subparagraph d(1)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average remaining contractual term for fully vested and expected to vest options outstanding, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (e)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedInPeriodFairValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Fair value of options vested. Excludes equity instruments other than options, for example, but not limited to, share units, stock appreciation rights, restricted stock.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedInPeriodFairValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Purchase price of common stock expressed as a percentage of its fair market value.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:percentItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average price at which option holders acquired shares when converting their stock options into shares.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average price at which grantees could have acquired the underlying shares with respect to stock options of the plan that expired.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExpirationsInPeriodWeightedAverageExercisePrice</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average price at which grantees could have acquired the underlying shares with respect to stock options that were terminated.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Weighted average price at which grantees can acquire the shares reserved for issuance on stock options awarded.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of shares issued during the period as a result of an employee stock purchase plan.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 129<br><br> -Paragraph 5<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 12<br><br> -Paragraph 10<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Number of share options (or share units) exercised during the current period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.28,29)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 718<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)(1)(iv)(2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Article 3<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 29, 30<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 505<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.3-04)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br></p>
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          <div style="width: 200px;"><strong>Accounts Receivable, net<br></strong></div>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;5.&#160;&#160;Accounts Receivable, net</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The components of accounts receivable are as follows:</font></p>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>December&#160;31,</b></font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Trade receivables</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">25,148</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">35,482</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Allowance for doubtful accounts</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(305</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(411</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">24,843</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">35,071</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The entire disclosure for claims held for amounts due a entity, excluding financing receivables. Examples include, but are not limited to, trade accounts receivables, notes receivables, loans receivables. Includes disclosure for allowance for credit losses.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(k))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 3, 4<br><br> -Article 5<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 310<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7512638&amp;loc=d3e5074-111524<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 310<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 11<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7512638&amp;loc=d3e5162-111524<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.3,4)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph k<br><br> -Article 4<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Statement of Position (SOP)<br><br> -Number 01-6<br><br> -Paragraph 13<br><br> -Subparagraph d<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 310<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7512638&amp;loc=d3e5066-111524<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 7<br><br> -Article 9<br><br><br><br></p>
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          <div style="width: 200px;"><strong>Inventories, net<br></strong></div>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;6.&#160;&#160;Inventories, net</b></font></p>
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<td style="FONT-FAMILY: times" width="51"></td>
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<td style="FONT-FAMILY: times" width="51"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>December&#160;31,</b></font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">72,013</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">85,829</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Work in process</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">12,253</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">25,639</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Finished goods (completed systems)</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">15,968</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">8,555</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">100,234</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">120,023</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;When recorded, inventory reserves are intended to reduce the carrying value of inventories to their net realizable value. The Company establishes inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company's products or market conditions. The Company regularly evaluates the ability to realize the value of inventories based on a combination of factors including the following: forecasted sales or usage, estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure. As of December&#160;31, 2012 and 2011, inventories are stated net of inventory reserves of $33.6&#160;million and $22.8&#160;million respectively.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;In 2012, the Company recorded a $14.5&#160;million increase to its excess inventory reserves. During the fourth quarter, as a result of industry consensus indicating that the semiconductor industry downturn will continue into 2013, along with the Company's internal projections, the Company performed a comprehensive review and analysis of its worldwide inventory levels based on historic and projected inventory requirements for all of its products, components and parts. As a result, the Company recorded a $13.4&#160;million increase to inventory reserves in the fourth quarter of 2012.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;During 2012, the Company recorded a charge to cost of sales of $2.6&#160;million due to production levels below normal capacity. There were no similar charges recorded for the year ended December&#160;31, 2011. During 2010, the Company recorded a charge to cost of sales of $1.0&#160;million due to below normal production capacity.</font></p></div>
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                <p>The entire disclosure for inventory. This may include, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the major classes of inventory, and the nature of the cost elements included in inventory. If inventory is stated above cost, accrued net losses on firm purchase commitments for inventory and losses resulting from valuing inventory at the lower-of-cost-or-market may also be included. For LIFO inventory, may disclose the amount and basis for determining the excess of replacement or current cost over stated LIFO value and the effects of a LIFO quantities liquidation that impacts net income.</p>
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                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 6<br><br> -Subparagraph a, b, c<br><br> -Article 5<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Research Bulletin (ARB)<br><br> -Number 43<br><br> -Section A<br><br> -Paragraph 9<br><br> -Chapter 3<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.6)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br></p>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;8.&#160;&#160;Assets Manufactured for Internal Use</b></font></p>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>December&#160;31,</b></font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Internal use assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">21,904</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">27,503</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Construction in progress</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,823</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total cost</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">23,727</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">27,503</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(13,948</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(10,526</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">9,779</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">16,977</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;These products are used in-house for research and development, training, and customer demonstration purposes. Costs are generally depreciated to expense over five years. Depreciation expense was $3.4&#160;million, $4.9&#160;million, and $3.3&#160;million, for the years ended December&#160;31, 2012, 2011, and 2010, respectively.</font></p></div>
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                <p>The entire disclosure of assets manufactured for internal use. This includes details regarding cost, accumulated depreciation and uses of the assets.</p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EZKBG">
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          <div>Dec. 31, 2011</div>
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          <div>Sep. 30, 2011</div>
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          <div>Jun. 30, 2011</div>
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        <td class="nump">$ 60,411<span></span></td>
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        <td class="nump">$ 93,380<span></span></td>
        <td class="nump">$ 93,170<span></span></td>
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        <td class="nump">156,090<span></span></td>
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        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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                <p>Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.</p>
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                <p>No definition available.</p>
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                <p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p>
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                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 225<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.5-03.1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 1<br><br> -Article 5<br><br><br><br></p>
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<DESCRIPTION>IDEA: XBRL DOCUMENT
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<html>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EQ3AI">
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        <td class="nump">5,294,000<span></span></td>
        <td class="nump">4,849,000<span></span></td>
        <td class="nump">4,265,000<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income (loss) before income taxes</a></td>
        <td class="num">(32,388,000)<span></span></td>
        <td class="nump">7,471,000<span></span></td>
        <td class="num">(17,261,000)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Current:</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit', window );">United States, State</a></td>
        <td class="nump">82,000<span></span></td>
        <td class="nump">163,000<span></span></td>
        <td class="nump">309,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentForeignTaxExpenseBenefit', window );">Foreign</a></td>
        <td class="nump">738,000<span></span></td>
        <td class="nump">1,646,000<span></span></td>
        <td class="nump">1,528,000<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefit', window );">Total current</a></td>
        <td class="nump">820,000<span></span></td>
        <td class="nump">1,809,000<span></span></td>
        <td class="nump">1,837,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Deferred:</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit', window );">Foreign</a></td>
        <td class="nump">826,000<span></span></td>
        <td class="nump">585,000<span></span></td>
        <td class="num">(1,525,000)<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Total deferred</a></td>
        <td class="nump">826,000<span></span></td>
        <td class="nump">585,000<span></span></td>
        <td class="num">(1,525,000)<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income taxes</a></td>
        <td class="nump">1,646,000<span></span></td>
        <td class="nump">2,394,000<span></span></td>
        <td class="nump">312,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract', window );"><strong>Reconciliations of income taxes at the United States Federal statutory rate to the effective income tax rate</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate', window );">Income (credit) at the United States statutory rate</a></td>
        <td class="num">(11,336,000)<span></span></td>
        <td class="nump">2,615,000<span></span></td>
        <td class="num">(6,041,000)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes', window );">State income taxes</a></td>
        <td class="nump">53,000<span></span></td>
        <td class="nump">31,000<span></span></td>
        <td class="nump">309,000<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_IncomeTaxReconciliationUnrecognizedTaxBenefits', window );">Unrecognized tax benefits</a></td>
        <td class="num">(832,000)<span></span></td>
        <td class="nump">899,000<span></span></td>
        <td class="nump">842,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance', window );">Effect of change in valuation allowance</a></td>
        <td class="nump">12,662,000<span></span></td>
        <td class="num">(3,160,000)<span></span></td>
        <td class="nump">6,550,000<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential', window );">Foreign income tax rate differentials</a></td>
        <td class="num">(788,000)<span></span></td>
        <td class="num">(365,000)<span></span></td>
        <td class="num">(1,490,000)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets', window );">Restoration of foreign deferred tax assets</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">(1,329,000)<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationRepatriationOfForeignEarnings', window );">Foreign dividend</a></td>
        <td class="nump">383,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost', window );">Stock options</a></td>
        <td class="nump">1,298,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries', window );">Deemed distribution from foreign subsidiaries</a></td>
        <td class="nump">149,000<span></span></td>
        <td class="nump">1,533,000<span></span></td>
        <td class="nump">2,152,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationOtherAdjustments', window );">Other, net</a></td>
        <td class="nump">57,000<span></span></td>
        <td class="nump">841,000<span></span></td>
        <td class="num">(681,000)<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income taxes</a></td>
        <td class="nump">1,646,000<span></span></td>
        <td class="nump">2,394,000<span></span></td>
        <td class="nump">312,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ComponentsOfDeferredTaxAssetsAndLiabilitiesCurrentAbstract', window );"><strong>Significant components of current deferred income taxes</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent', window );">Accrued compensation</a></td>
        <td class="nump">352,000<span></span></td>
        <td class="nump">541,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsInventoryCurrent', window );">Inventories</a></td>
        <td class="nump">22,582,000<span></span></td>
        <td class="nump">22,447,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent', window );">Warranty</a></td>
        <td class="nump">612,000<span></span></td>
        <td class="nump">1,293,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsOtherCurrent', window );">Other</a></td>
        <td class="nump">1,820,000<span></span></td>
        <td class="nump">1,243,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsLiabilitiesGrossCurrent', window );">Deferred taxes, gross</a></td>
        <td class="nump">25,366,000<span></span></td>
        <td class="nump">25,524,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsValuationAllowanceCurrent', window );">Valuation allowance</a></td>
        <td class="num">(25,062,000)<span></span></td>
        <td class="num">(24,160,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsLiabilitiesNetCurrent', window );">Deferred taxes, net</a></td>
        <td class="nump">304,000<span></span></td>
        <td class="nump">1,364,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract', window );"><strong>Significant components of long-term deferred income taxes</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsDomestic', window );">Federal net operating loss carryforwards</a></td>
        <td class="nump">88,088,000<span></span></td>
        <td class="nump">79,163,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal', window );">State net operating loss carryforwards</a></td>
        <td class="nump">1,181,000<span></span></td>
        <td class="nump">2,685,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign', window );">Foreign net operating loss carryforwards</a></td>
        <td class="nump">1,853,000<span></span></td>
        <td class="nump">1,821,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings', window );">Unremitted earnings of foreign subsidiaries</a></td>
        <td class="num">(8,580,000)<span></span></td>
        <td class="num">(10,370,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsIntangibleAssetsNoncurrent', window );">Intangible assets</a></td>
        <td class="nump">661,000<span></span></td>
        <td class="nump">803,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment', window );">Property, plant and equipment</a></td>
        <td class="nump">5,925,000<span></span></td>
        <td class="nump">5,589,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent', window );">Accrued compensation</a></td>
        <td class="nump">368,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsInventoryNoncurrent', window );">Inventories</a></td>
        <td class="num">(215,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost', window );">Stock compensation</a></td>
        <td class="nump">4,378,000<span></span></td>
        <td class="nump">3,970,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent', window );">Warranty</a></td>
        <td class="nump">36,000<span></span></td>
        <td class="nump">51,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsOtherNoncurrent', window );">Other</a></td>
        <td class="nump">917,000<span></span></td>
        <td class="num">(3,814,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent', window );">Deferred taxes, gross</a></td>
        <td class="nump">121,477,000<span></span></td>
        <td class="nump">104,454,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsValuationAllowanceNoncurrent', window );">Valuation allowance</a></td>
        <td class="num">(119,605,000)<span></span></td>
        <td class="num">(102,814,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsLiabilitiesNetNoncurrent', window );">Deferred taxes, net</a></td>
        <td class="nump">1,872,000<span></span></td>
        <td class="nump">1,640,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsLiabilitiesNet', window );">Deferred tax assets</a></td>
        <td class="nump">146,800,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Federal</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforwards</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness', window );">Tax credit carryforwards</a></td>
        <td class="nump">17,814,000<span></span></td>
        <td class="nump">15,505,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">State</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforwards</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness', window );">Tax credit carryforwards</a></td>
        <td class="nump">$ 9,051,000<span></span></td>
        <td class="nump">$ 9,051,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ComponentsOfDeferredTaxAssetsAndLiabilitiesCurrentAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ComponentsOfDeferredTaxAssetsAndLiabilitiesCurrentAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_ComponentsOfDeferredTaxAssetsAndLiabilitiesNoncurrentAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsIntangibleAssetsNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from intangible assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsIntangibleAssetsNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsInventoryCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsInventoryCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsInventoryNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsInventoryNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsLiabilitiesGrossCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsLiabilitiesGrossCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsOtherCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences not separately disclosed.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsOtherCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsOtherNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences not separately disclosed.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsOtherNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from employee compensation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from employee compensation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the current portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReservesNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the portion of the difference between total income tax expense or benefit as reported in the income statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to deemed distribution from foreign subsidiaries.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_IncomeTaxReconciliationDeemedDistributionFromForeignSubsidiaries</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the portion of the difference between total income tax expense or benefit as reported in the income statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to restoration of foreign deferred tax assets.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_IncomeTaxReconciliationRestorationOfForeignDeferredTaxAssets</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncomeTaxReconciliationUnrecognizedTaxBenefits">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the portion of the difference between total income tax expense or benefit as reported in the income statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to unrecognized tax benefits.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_IncomeTaxReconciliationUnrecognizedTaxBenefits</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentForeignTaxExpenseBenefit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The component of income tax expense for the period representing amounts paid or payable (or refundable) as determined by applying the provisions of foreign enacted tax law to the foreign taxable Income or Loss from continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 45<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CurrentForeignTaxExpenseBenefit</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The component of income tax expense for the period representing amounts of income taxes paid or payable (or refundable) for the period for all income tax obligations as determined by applying the provisions of relevant enacted tax laws to relevant amounts of taxable Income or Loss from continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Current Tax Expense (or Benefit)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6509736<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 6.I.7)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6889476&amp;loc=d3e330036-122817<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 45<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 6<br><br> -Section I<br><br> -Subsection 7<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CurrentIncomeTaxExpenseBenefit</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The component of income tax expense for the period representing amounts paid or payable (or refundable) as determined by applying the provisions of enacted state and local tax law to relevant amounts of taxable Income or Loss from continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 6<br><br> -Section I<br><br> -Subsection 7<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Current Tax Expense (or Benefit)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6509736<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 6.I.7)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6889476&amp;loc=d3e330036-122817<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 45<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CurrentStateAndLocalTaxExpenseBenefit</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The component of total income tax expense for the period comprised of the increase (decrease) in the entity's net foreign deferred tax assets and liabilities attributable to continuing operations as determined by applying the provisions of applicable enacted tax laws of countries other than the country of domicile.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 6.I.7)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6889476&amp;loc=d3e330036-122817<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 45<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 6<br><br> -Section I<br><br> -Subsection 7<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Deferred Tax Expense (or Benefit)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6510177<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredForeignIncomeTaxExpenseBenefit</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefit">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The component of income tax expense for the period representing the increase (decrease) in the entity's deferred tax assets and liabilities pertaining to continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 230<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 28<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3602-108585<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 45<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SAB TOPIC 6.I.7)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6889476&amp;loc=d3e330036-122817<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 95<br><br> -Paragraph 28<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Deferred Tax Expense (or Benefit)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6510177<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Staff Accounting Bulletin (SAB)<br><br> -Number Topic 6<br><br> -Section I<br><br> -Subsection 7<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredIncomeTaxExpenseBenefit</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
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                    <td><strong> Period Type:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract</nobr></td>
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                    <td><strong> Balance Type:</strong></td>
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                    <td><strong> Period Type:</strong></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsLiabilitiesNet</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences expected to be realized or consumed within one year or operating cycle, if longer.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 41, 42, 43<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31917-109318<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31931-109318<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsLiabilitiesNetCurrent</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Balance Type:</strong></td>
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                    <td>instant</td>
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          </td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences expected to be realized or consumed after one year (or the normal operating cycle, if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 41, 42, 43<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31917-109318<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31931-109318<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsLiabilitiesNetNoncurrent</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsDomestic">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible domestic operating loss carryforwards. Excludes state and local operating loss carryforwards.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 25<br><br> -Paragraph 20<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6969291&amp;loc=d3e28680-109314<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32621-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 43, 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32632-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsDomestic</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible foreign operating loss carryforwards.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 25<br><br> -Paragraph 20<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6969291&amp;loc=d3e28680-109314<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32621-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 43, 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32632-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible state and local operating loss carryforwards.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32632-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 25<br><br> -Paragraph 20<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6969291&amp;loc=d3e28680-109314<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Section Appendix E<br><br> -Paragraph 289<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32621-109319<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 43<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from property, plant, and equipment.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible general business tax credit carryforwards.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32621-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32632-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32559-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from share-based compensation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 11<br><br> -Subparagraph b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 25<br><br> -Paragraph 20<br><br> -Subparagraph (b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6969291&amp;loc=d3e28680-109314<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32621-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 43<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32632-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsValuationAllowanceCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards expected to be realized or consumed within one year or operating cycle, if longer.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31928-109318<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31917-109318<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 41, 42, 43<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsValuationAllowanceCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsValuationAllowanceNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized expected to be realized or consumed after one year (or the normal operating cycle, if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 5<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31928-109318<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 4<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e31917-109318<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 41, 42, 43<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxAssetsValuationAllowanceNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of deferred tax liability attributable to taxable temporary differences from undistributed earnings of subsidiaries and other recognized entities not within the country of domicile of the entity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32632-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 11<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 6<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32621-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 25<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6969291&amp;loc=d3e28680-109314<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 43<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h)(1)(i))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Subparagraph 1(i)<br><br> -Article 4<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>This element represents the income or loss from continuing operations attributable to the economic entity which may also be defined as revenue less expenses from ongoing operations, after income or loss from equity method investments, but before income taxes, extraordinary items, and noncontrolling interest.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 10<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract">
        <tr>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract</nobr></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h)(1)(i))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Subparagraph 1(i)<br><br> -Article 4<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The sum of the current income tax expense or benefit and the deferred income tax expense or benefit pertaining to continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -Subparagraph (a),(b)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 45<br><br> -Subparagraph a, b<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Income Tax Expense (or Benefit)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6515339<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxExpenseBenefit</nobr></td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                    <td>duration</td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The portion of the difference between total income tax expense or benefit as reported in the Income Statement and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations attributable to changes in the valuation allowance for deferred tax assets in the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 26<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32698-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 20<br><br> -URI http://asc.fasb.org/extlink&amp;oid=21917399&amp;loc=d3e32123-109318<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td>duration</td>
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The portion of the difference, between total income tax expense or benefit as reported in the Income Statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to total foreign income tax expense or benefit. The foreign income tax expense or benefit difference represents the income tax expense or benefit at applicable domestic statutory income tax rates applied to foreign earnings or loss for the period versus the foreign income tax expense or benefit calculated by applying the appropriate foreign tax rates.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32698-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Subparagraph 1<br><br> -Article 4<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
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                    <td><strong> Balance Type:</strong></td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of income tax expense or benefit for the period computed by applying the domestic federal statutory tax rates to pretax income from continuing operations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 47<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32698-109319<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Subparagraph 2<br><br> -Article 4<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The portion of the difference between total income tax expense or benefit as reported in the Income Statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations attributable to differences in the deductibility of incentive stock options and other equity-based compensation costs in accordance with generally accepted accounting principles and enacted tax laws.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32698-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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              </div>
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          </td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationOtherAdjustments">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The portion of the difference, between total income tax expense or benefit as reported in the Income Statement for the year/accounting period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to all other items not otherwise listed in the existing taxonomy.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_IncomeTaxReconciliationOtherAdjustments</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td>duration</td>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationRepatriationOfForeignEarnings">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The portion of the difference between total income tax expense or benefit as reported in the Income Statement and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations attributable to the repatriation of foreign earnings in the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32698-109319<br><br><br><br></p>
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                <p>The portion of the difference, between total income tax expense or benefit as reported in the Income Statement for the period and the expected income tax expense or benefit computed by applying the domestic federal statutory income tax rates to pretax income from continuing operations, that is attributable to state and local income tax expense or benefit.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 12<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32687-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 13<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32698-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Subparagraph 1<br><br> -Article 4<br><br><br><br></p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0E4FAE">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Commitments and Contingencies (Details) (USD $)<br></strong></div>
        </th>
        <th class="th" colspan="3">12 Months Ended</th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeasesOperatingAbstract', window );"><strong>Lease Commitments</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasesRentExpenseNet', window );">Rental expense under operating leases</a></td>
        <td class="nump">$ 4,300,000<span></span></td>
        <td class="nump">$ 4,600,000<span></span></td>
        <td class="nump">$ 5,200,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasesFutureMinimumPaymentsDueAbstract', window );"><strong>Future minimum lease commitments on non-cancelable operating leases</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasesFutureMinimumPaymentsDueCurrent', window );">2013</a></td>
        <td class="nump">3,057,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasesFutureMinimumPaymentsDueInTwoYears', window );">2014</a></td>
        <td class="nump">1,681,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasesFutureMinimumPaymentsDueInThreeYears', window );">2015</a></td>
        <td class="nump">1,181,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasesFutureMinimumPaymentsDueInFourYears', window );">2016</a></td>
        <td class="nump">224,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasesFutureMinimumPaymentsDue', window );">Total</a></td>
        <td class="nump">6,143,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract', window );"><strong>Purchase Commitments</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermPurchaseCommitmentAmount', window );">Non-cancelable contracts and purchase orders for inventory</a></td>
        <td class="nump">$ 14,900,000<span></span></td>
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                <p>The minimum amount the entity agreed to spend under the long-term purchase commitment.</p>
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                <p>No definition available.</p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of required minimum rental payments for leases having an initial or remaining non-cancelable letter-terms in excess of one year.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 16<br><br> -Subparagraph b(i)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 122<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 40<br><br> -Subparagraph (Note 3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6584154&amp;loc=d3e38371-112697<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6453985&amp;loc=d3e41502-112717<br><br><br><br></p>
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                <p>Amount of required minimum rental payments maturing in the next fiscal year following the latest fiscal year for operating leases having an initial or remaining non-cancelable letter-terms in excess of one year.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 16<br><br> -Subparagraph b(i)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 122<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 40<br><br> -Subparagraph (Note 3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6584154&amp;loc=d3e38371-112697<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6453985&amp;loc=d3e41502-112717<br><br><br><br></p>
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                <p>Amount of required minimum rental payments maturing in the forth fiscal year following the latest fiscal year for operating leases having an initial or remaining non-cancelable letter-terms in excess of one year.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 16<br><br> -Subparagraph b(i)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 122<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 40<br><br> -Subparagraph (Note 3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6584154&amp;loc=d3e38371-112697<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6453985&amp;loc=d3e41502-112717<br><br><br><br></p>
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                <p>Amount of required minimum rental payments maturing in the third fiscal year following the latest fiscal year for operating leases having an initial or remaining non-cancelable letter-terms in excess of one year.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 16<br><br> -Subparagraph b(i)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 122<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 40<br><br> -Subparagraph (Note 3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6584154&amp;loc=d3e38371-112697<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6453985&amp;loc=d3e41502-112717<br><br><br><br></p>
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                <p>Amount of required minimum rental payments maturing in the second fiscal year following the latest fiscal year for operating leases having an initial or remaining non-cancelable letter-terms in excess of one year.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 16<br><br> -Subparagraph b(i)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 13<br><br> -Paragraph 122<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 40<br><br> -Subparagraph (Note 3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6584154&amp;loc=d3e38371-112697<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 840<br><br> -SubTopic 20<br><br> -Section 50<br><br> -Paragraph 2<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6453985&amp;loc=d3e41502-112717<br><br><br><br></p>
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                <p>Rental expense for the reporting period incurred under operating leases, including minimum and any contingent rent expense, net of related sublease income.</p>
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                <p>Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.</p>
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                <p>Represents the amount of surety bonds that are available for the future payments.</p>
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                <p>Amount of cash subject to withdrawal restrictions, restricted deposits held as compensating balances, and cash and securities segregated in compliance with regulations (such as cash deposited in a special reserve account for the exclusive benefit of customers).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Audit and Accounting Guide (AAG)<br><br> -Number AAG-BRD<br><br> -Paragraph 80<br><br> -Subparagraph Exhibit 4-8, 3<br><br> -IssueDate 2006-05-01<br><br> -Chapter 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Audit and Accounting Guide (AAG)<br><br> -Number AAG-BRD<br><br> -Paragraph 21<br><br> -IssueDate 2006-05-01<br><br> -Chapter 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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                <p>The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.</p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EME">
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          <div style="width: 200px;"><strong>Stock Award Plans and Stock Based Compensation<br></strong></div>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;13.&#160;&#160;Stock Award Plans and Stock Based Compensation</b></font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(a)&#160;&#160;&#160;&#160;Equity Incentive Plans</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company maintains the Axcelis Technologies,&#160;Inc. 2012 Equity Incentive Plan (the "2012 Equity Plan"), which became effective on May&#160;2, 2012. Our 2000 Stock Plan (the "2000 Stock Plan"), expired on May&#160;1, 2012 and no new grants may be made under that plan after this date. However, awards granted under the 2000 Stock Plan prior to the expiration remain outstanding and subject to the terms of the 2000 Stock Plan.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The 2012 Equity Plan reserves 3.8&#160;million shares of common stock, $0.001 par value for grant and permits the issuance of options, stock appreciation rights, restricted stock, restricted stock units, stock equivalents, and awards of shares of common stock that are not subject to restrictions or forfeiture to selected employees, directors and consultants of the Company. Shares that are not issued under an award (because such award expires, is terminated unexercised or is forfeited) that were outstanding under the 2000 Stock Plan as of the May&#160;2, 2012 will increase the reserve of shares available for grant under the 2012 Equity Plan.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The term of stock options granted under these plans is specified in the award agreements. Unless a lesser term is otherwise specified by the Company's Compensation Committee of the Board of Directors, awards under the 2012 Equity Plan will expire seven years from the date of grant. In general, all awards issued under the 2000 Stock Plan expire ten years from the date of grant. Under the terms of these stock plans, the exercise price of a stock option may not be less than the fair market value of a share of the Company's common stock on the date of grant. Under the 2012 Equity Plan, fair market value is defined as the last reported sale price of a share of the common stock on a national securities exchange as of any applicable date, as long as the Company's shares are traded on such exchange.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Stock options granted to employees generally vest over a period of four years, while stock options granted to non-employee members of the Company's Board of Directors generally vest over a period of 6&#160;months and, once vested, are not affected by the director's termination of service to the Company. Termination of service by an employee will cause options to cease vesting as of the date of termination, and in most cases, employees will have 90&#160;days after termination to exercise options that were vested as of the termination of employment. In general, retiring employees will have one year after termination of employment to exercise vested options. The Company settles stock option exercises with newly issued common shares.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Restricted stock units granted to employees during 2012, 2011 and 2010 had both time-based vesting provisions and performance-based vesting provisions. Generally, unvested restricted stock unit awards expire upon termination of service to the Company. The Company settles restricted stock units upon vesting with newly issued common shares. No restricted stock was granted under either stock plan during the three year period.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;As of December&#160;31, 2012, there were 1.5&#160;million of shares available for grant under 2012 Equity Plan. No shares are available for grant under the 2000 Stock Plan.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;As of December&#160;31, 2012, there were 21.3&#160;million options outstanding under the 2012 Equity Plan and the 2000 Stock Plan, collectively, and 1.0&#160;million unvested restricted stock units outstanding under the 2000 Stock Plan.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(b)&#160;&#160;&#160;&#160;Employee Stock Purchase Plan</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Employee Stock Purchase Plan (the "Purchase Plan") provides effectively all of the Company's employees the opportunity to purchase common stock of the Company at less than market prices. Purchases are made through payroll deductions of up to 10% of the employee's salary as elected by the participant, subject to certain caps set forth in the Purchase Plan. Employees may purchase its common stock at 85% of the market value of the Company's common stock on the day the stock is purchased.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Purchase Plan is considered compensatory and as such, compensation expense has been recognized based on the benefit of the discounted stock price, amortized to compensation expense over each offering period of six months. Compensation expense was $0.1&#160;million for each of the years ended December&#160;31, 2012, 2011, and 2010.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;As of December&#160;31, 2012, there were a total of 2.0&#160;million shares reserved for issuance and available for purchase under the Purchase Plan. There were 0.3&#160;million, 0.4&#160;million and 0.3&#160;million shares purchased under the Purchase Plan for the years ended December&#160;31, 2012, 2011, and 2010, respectively.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(c)&#160;&#160;&#160;&#160;Valuation of Employee Stock Options</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For the purpose of valuing stock options, the Company uses the Black-Scholes option pricing model to calculate the grant-date fair value of an award. The fair values of options granted were calculated using the following estimated weighted-average assumptions:</font></p>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">97.8%-113.55</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">97.8</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">97.8</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3.8-6.1&#160;years</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6.1&#160;years</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6.2&#160;years</font></td>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Risk-free interest rate</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0.45%-1.37</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.1%-2.4</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.5%-2.0</font></td>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expected dividend yield</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">%</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">0</font></td>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Expected volatility&#8212;The Company is responsible for estimating volatility and has considered a number of factors when estimating volatility. The Company's method of estimating expected volatility for all stock options granted relies on a combination of historical and implied volatility. The Company believes that this blended volatility results in a more accurate estimate of the grant-date fair value of employee stock options because it more appropriately reflects the market's current expectations of future volatility.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Expected term&#8212;The Company calculated the weighted average expected term for stock options granted prior to July&#160;1, 2012, using a forward looking lattice model of the Company's stock price incorporating a suboptimal exercise factor and a projected post-vest forfeiture rate. For stock options granted after July&#160;1, 2012, the Company used the simplified method for estimating the expected life of "plain vanilla" options. The change in the expected term from 10&#160;years to 7&#160;years reflects the fact that options granted after May&#160;1, 2012 were granted under the 2012 Equity Incentive Plan, which limits option terms to seven years.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Risk-free interest rate&#8212;The yield on zero-coupon U.S. Treasury securities for a period that is commensurate with the expected term assumption is used as the risk-free interest rate.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Expected dividend yield&#8212;Expected dividend yield was not considered in the option pricing formula since the Company does not pay dividends and has no current plans to do so in the future.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(d)&#160;&#160;&#160;&#160;Summary of Share-Based Compensation Expense</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company estimates the fair value of stock options using the Black-Scholes valuation model. The fair value of the Company's restricted stock and restricted stock units is calculated based upon the fair market value of the Company's stock at the date of grant.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company uses the straight-line attribution method to recognize expense for stock-based awards such that the expense associated with awards is evenly recognized throughout the period.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The amount of stock-based compensation recognized is based on the value of the portion of the awards that are ultimately expected to vest. The Company estimates forfeitures at the time of grant and revises them, if necessary, in subsequent periods if actual forfeitures differ from those estimates. The term "forfeitures" is distinct from "cancellations" or "expirations" and represents only the unvested portion of the surrendered stock-based award. Based on a historical analysis, a forfeiture rate of 5% per year, including executive officer awards, was applied to stock-based awards for the years ended December&#160;31, 2012, 2011 and 2010.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company recognized stock-based compensation expense of $3.9&#160;million, $4.7&#160;million and $4.1&#160;million for the years ended December&#160;31, 2012, 2011 and 2010, respectively. For 2012, 2011 and 2010, the Company primarily used stock options in its annual equity compensation program. During 2012, the Company recognized stock-based compensation expense of $0.1&#160;million related to the modification of a stock option grant as a result of a restructuring action taken by the Company. As this related to a restructuring activity, the Company included this expense in the restructuring line item in the Consolidated Statements of Operations.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The benefits of tax deductions in excess of recognized compensation cost is reported as a financing cash flow, rather than as an operating cash flow. Because the Company does not recognize the benefit of tax deductions in excess of recognized compensation cost due to its cumulative net operating loss position, this had no impact on the Company's consolidated statement of cash flows as of and for the years ended December&#160;31, 2012, 2011 or 2010.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(e)&#160;&#160;&#160;&#160;Stock Option Awards</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The following table summarizes the stock option activity for the years ended December&#160;31, 2012, 2011 and 2010:</font></p>
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<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="69"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="56"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Options</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Weighted<br />
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Exercise<br />
Price</b></font></th>
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Remaining<br />
Contractual<br />
Term</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Aggregate<br />
Intrinsic<br />
Value</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="left" colspan="2"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(years)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2009</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">17,368</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6.43</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5,310</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.61</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercised</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(704</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.79</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Canceled</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(333</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.23</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expired</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(2,693</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">18.26</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2010</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">18,948</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3.70</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,662</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.70</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercised</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(372</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.77</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Canceled</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(654</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.43</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expired</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,491</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">12.38</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2011</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">21,093</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,077</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">.93</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercised</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,148</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">.84</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Canceled</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,225</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1.43</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Expired</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,537</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">7.71</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom" align="right">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">21,260</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2.24</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6.39</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,607</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Exercisable at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">11,680</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2.99</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5.59</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,591</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Options Vested or Expected to Vest at December&#160;31, 2012(1)</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">20,558</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2.27</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6.44</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,015</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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<dl compact="compact">
<dt style="MARGIN-BOTTOM: -11pt; FONT-FAMILY: times"><font size="2">(1)</font></dt>
<dd style="FONT-FAMILY: times"><font size="2">In addition to the vested options, the Company expects a portion of the unvested options to vest at some point in the future. Options expected to vest is calculated by applying an estimated forfeiture rate to the unvested options.</font></dd></dl></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Of the options outstanding at December&#160;31, 2012, 2011 and 2010, 11.7&#160;million, 10.2&#160;million and 8.4&#160;million, respectively, were vested and exercisable with a weighted average exercise price of $2.99, $4.13, and $6.68, respectively. The total intrinsic value, which is defined as the difference between the market price at exercise and the price paid by the employee to exercise the options, for options exercised during the years ended December&#160;31, 2012, 2011 and 2010 was $0.9&#160;million, $0.7&#160;million and $1.2&#160;million, respectively.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The total fair value of stock options vested during the year ended December&#160;31, 2012 was $4.1&#160;million. As of December&#160;31, 2012, there was $7.5&#160;million of total forfeiture- adjusted unrecognized compensation cost related to non-vested stock options granted under the 2012 Equity Incentive Plan and the 2000 Stock Plan. That cost is expected to be recognized over a weighted-average period of 2.5&#160;years.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(f)&#160;&#160;&#160;&#160;Restricted Stock and Restricted Stock Units</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Restricted stock units ("RSUs") represent the Company's unfunded and unsecured promise to issue shares of the common stock at a future date, subject to the terms of the RSU Award Agreement and either the 2012 Equity Incentive Plan or the 2000 Stock Plan. The purpose of these awards is to assist in attracting and retaining highly competent employees and directors and to act as an incentive in motivating selected employees and directors to achieve long-term corporate objectives. RSU awards granted in 2012, 2011 and 2010 included both time vested awards and performance vested awards for employees and executive officers. No restricted stock awards were granted, or vested, during the period. The fair value of a restricted stock unit and restricted stock awards is charged to expense ratably over the applicable service period.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Changes in the Company's non-vested restricted stock units for the years ended December&#160;31, 2012, 2011, and 2010 are as follows:</font></p>
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<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="69"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="82"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Shares/units</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Weighted-Average<br />
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="left" colspan="2"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2009</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">604</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5.90</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Granted</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">695</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.72</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Vested</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,052</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3.30</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Forfeited</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(19</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2.94</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<td style="FONT-FAMILY: times" valign="bottom">
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(2</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2011</font></p></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(47</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2.82</font></td>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Forfeited</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(7</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Outstanding at December&#160;31, 2012</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">961</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1.73</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income (loss) before income taxes are as follows:</font></p>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5,294</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,849</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,265</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income (loss) before income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(32,388</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">7,471</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(17,261</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income taxes (credits) are as follows:</font></p>
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<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Current:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">United States</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Federal</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">82</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">163</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">309</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">738</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,646</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,528</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total current</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">820</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,809</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,837</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deferred:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">826</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">585</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,525</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total deferred</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">826</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">585</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,525</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,646</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,394</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">312</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Reconciliations of income taxes at the United States Federal statutory rate to the effective income tax rate are as follows:</font></p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times"><font size="2"><!-- COMMAND=ADD_TABLEWIDTH,"100%" --></font></p>
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<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="50"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income (credit) at the United States statutory rate</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(11,336</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,615</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(6,041</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">53</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">31</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">309</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Unrecognized tax benefits</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(832</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">899</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">842</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Effect of change in valuation allowance</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">12,662</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(3,160</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">6,550</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign income tax rate differentials</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(788</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(365</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,490</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Restoration of foreign deferred tax assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(1,329</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign dividend</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">383</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Stock options</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,298</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deemed distribution from foreign subsidiaries</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">149</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,533</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,152</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other, net</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">57</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">841</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(681</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income taxes</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,646</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,394</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">312</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
<!-- end of user-specified TAGGED TABLE --></div>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Significant components of current and long-term deferred income taxes are as follows:</font></p>
<div style="PADDING-RIGHT: 0pt; PADDING-LEFT: 0pt; PADDING-BOTTOM: 0pt; MARGIN-LEFT: 10%; WIDTH: 80%; PADDING-TOP: 0pt; POSITION: relative">
<p style="FONT-FAMILY: times"><font size="2"><!-- COMMAND=ADD_TABLEWIDTH,"100%" --></font></p>
<!-- User-specified TAGGED TABLE -->
<div align="center">
<table cellspacing="0" cellpadding="0" width="100%" border="0">
<tr style="HEIGHT: 0px"><!-- TABLE COLUMN WIDTHS SET -->
<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="50"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="56"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="50"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="56"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="11"><font size="1"><b>As of December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Current</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Long Term</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Current</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>Long Term</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="11"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Federal net operating loss carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">88,088</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">79,163</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State net operating loss carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,181</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,685</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Foreign net operating loss carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,853</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,821</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Federal tax credit carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">17,814</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">15,505</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">State tax credit carryforwards</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">9,051</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">9,051</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Unremitted earnings of foreign subsidiaries</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(8,580</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(10,370</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Intangible assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">661</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">803</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Property, plant and equipment</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5,925</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">5,589</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Accrued compensation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">352</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">368</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">541</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Inventories</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">22,582</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(215</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">22,447</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Stock compensation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,378</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3,970</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Warranty</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">612</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">36</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,293</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">51</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,820</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">917</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,243</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(3,814</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deferred taxes, gross</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">25,366</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">121,477</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">25,524</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">104,454</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Valuation allowance</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(25,062</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(119,605</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(24,160</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">(102,814</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Deferred taxes, net</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">304</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,872</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,364</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,640</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;At December&#160;31, 2012, the Company had $146.8&#160;million of deferred tax assets relating to net operating loss carryforwards, tax credit carryforwards and other temporary differences, which are available to reduce income taxes in future years. A valuation allowance must be established when it is "more likely than not" that all or a portion of deferred tax assets will not be realized. A review of all available positive and negative evidence needs to be considered, including a company's performance, the market environment in which the company operates, length of carryback and carryforward periods, existing sales backlog, and projections of future operating results. Where there are cumulative losses in recent years there is a strong presumption that a valuation allowance is needed. This presumption can be overcome in very limited circumstances.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company is in a three year cumulative loss position in the United States. As a result, the Company maintains a 100% valuation allowance for entities in those tax jurisdictions to reduce the carrying value of deferred tax assets to zero. The Company will continue to maintain a full valuation allowance for those tax assets until sustainable future levels of profitability are evident. Changes in the valuation allowance in 2012 and 2011 were attributable to changes in the composition of temporary differences and changes in net operating loss carryforwards.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;At December&#160;31, 2012, the Company has federal and state net operating loss carryforwards of approximately $89.3&#160;million and foreign net operating loss carryforwards of approximately $1.9&#160;million expiring principally between 2013 and 2032.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has research and development and other tax credit carryforwards of approximately $21.8&#160;million at December&#160;31, 2012 that can be used to reduce future federal and state income tax liabilities. These tax credit carryforwards expire principally between 2022 and 2028. In addition, the Company has foreign tax credit carryforwards of approximately $5.0&#160;million at December&#160;31, 2012 that are available to reduce future U.S. income tax liabilities subject to certain limitations. These foreign tax credit carryforwards expire between 2013 and 2016.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;It is Company policy to provide taxes for the total anticipated tax impact of the undistributed earnings of our wholly-owned foreign subsidiaries', as such earnings are not expected to be reinvested indefinitely. The Company anticipates that US tax resulting from remitting such earnings will be off-set by net operating loss or credit carryforwards to the extent available. In addition, the Company does not anticipate incurring a foreign withholding tax on remitting such earnings since it does not intend to remit the earnings as dividends.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company and its subsidiaries file income tax returns in the U.S. federal jurisdiction and various states and foreign jurisdictions. The Company and most foreign subsidiaries are subject to income tax examinations by tax authorities for all years dating back to 2001. The Company's policy is to recognize interest related to unrecognized tax benefits as interest expense and penalties as operating expenses. The Company believes that it has appropriate support for the income tax positions taken and to be taken on its tax returns and that its accruals for tax liabilities are adequate for all open years based on an assessment of many factors including past experience and interpretations of tax law applied to the facts of each matter.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;At December&#160;31, 2012, the Company had unrecognized tax benefits of approximately $7.7&#160;million, of which approximately $5.1&#160;million reduced the Company's deferred tax assets and the offsetting valuation allowance and $2.6&#160;million was recorded in other long-term liabilities. The Company does not expect any significant changes in unrecognized tax benefits in 2013.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;A reconciliation of the beginning and ending balance of unrecognized tax benefits are as follows:</font></p>
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<td style="FONT-FAMILY: times" width="39"></td>
<td style="FONT-FAMILY: times" width="12"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>(in thousands)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at beginning of year</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" align="right"><font size="2">8,089</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">6,965</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Increases in unrecognized tax benefits as a result of tax positions taken during a prior period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">646</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,124</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Decreases in unrecognized tax benefits related to settlements with tax authorities</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(880</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">663</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(799</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at end of year</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">7,719</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">8,089</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Recorded as other long-term liability</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,646</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,244</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Recorded as a decrease in deferred tax assets and offsetting valuation allowance</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5,073</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,845</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times">&#160;</p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">7,719</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">8,089</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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                <p>The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.</p>
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                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 136, 172<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 235<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.4-08.(h))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6881521&amp;loc=d3e23780-122690<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 08<br><br> -Paragraph h<br><br> -Article 4<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 15<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32718-109319<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 43, 44, 45, 46, 47, 48, 49<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 9<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32559-109319<br><br><br><br></p>
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          <div style="width: 200px;"><strong>Summary of Significant Accounting Policies (Details 3) (USD $)<br>In Thousands, except Share data, unless otherwise specified</strong></div>
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          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2010</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRecognitionAbstract', window );"><strong>Revenue recognition</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts', window );">Maximum deferral period from shipment for recognition of systems revenue and related costs</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">12 months<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Anti-dilutive shares excluded from calculation of net loss per share</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">1,563,417<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">3,230,705<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Net income (loss) per share</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Income (loss) available to common stockholders (in dollars)</a></td>
        <td class="num">$ (14,818)<span></span></td>
        <td class="num">$ (8,718)<span></span></td>
        <td class="num">$ (471)<span></span></td>
        <td class="num">$ (10,027)<span></span></td>
        <td class="num">$ (2,113)<span></span></td>
        <td class="nump">$ 1,151<span></span></td>
        <td class="nump">$ 4,227<span></span></td>
        <td class="nump">$ 1,812<span></span></td>
        <td class="num">$ (34,034)<span></span></td>
        <td class="nump">$ 5,077<span></span></td>
        <td class="num">$ (17,573)<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Weighted average common shares outstanding used in computing basic net income (loss) per share</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">107,619,000<span></span></td>
        <td class="nump">106,234,000<span></span></td>
        <td class="nump">104,522,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberDilutedSharesOutstandingAdjustment', window );">Incremental shares</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">2,864,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Weighted average common shares outstanding used in computing diluted net income (loss) per share</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="nump">107,619,000<span></span></td>
        <td class="nump">109,098,000<span></span></td>
        <td class="nump">104,522,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasicAndDilutedAbstract', window );"><strong>Net income (loss) per share</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">$ (0.32)<span></span></td>
        <td class="nump">$ 0.05<span></span></td>
        <td class="num">$ (0.17)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted (in dollars per share)</a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="num">$ (0.32)<span></span></td>
        <td class="nump">$ 0.05<span></span></td>
        <td class="num">$ (0.17)<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the maximum deferral period from shipment for recognition of systems revenue and related costs.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_MaximumDeferralPeriodFromShipmentForRecognitionOfSystemsRevenueAndRelatedCosts</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:durationItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 07-4<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Diluted Earnings Per Share<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6510752<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Contingent Stock Agreement<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6508534<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Antidilution<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6505113<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 171<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 40<br><br> -Subparagraph c<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (c)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 13, 14<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:sharesItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EarningsPerShareAbstract</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Paragraph 21<br><br> -Article 9<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 36, 37, 38<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 942<br><br> -SubTopic 225<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.9-04.23)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879574&amp;loc=d3e536633-122882<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 225<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.5-03.21)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 944<br><br> -SubTopic 225<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.7-04.19)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 07-4<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 55<br><br> -Paragraph 52<br><br> -URI http://asc.fasb.org/extlink&amp;oid=16381557&amp;loc=d3e4984-109258<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Paragraph 18<br><br> -Article 7<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 20<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EarningsPerShareBasic</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>num:perShareItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasicAndDilutedAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
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                <p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Paragraph 18<br><br> -Article 7<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 11, 12, 36<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 07-4<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 03<br><br> -Paragraph 20<br><br> -Article 5<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 225<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 2<br><br> -Subparagraph (SX 210.5-03.21)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6880815&amp;loc=d3e20235-122688<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 2<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 04<br><br> -Paragraph 21<br><br> -Article 9<br><br><br><br></p>
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                    <td><strong> Name:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Net income after adjustments for dividends on preferred stock (declared in the period) and/or cumulative preferred stock (accumulated for the period).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 11<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1377-109256<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 9<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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                <p>The sum of dilutive potential common shares or units used in the calculation of the diluted per-share or per-unit computation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 07-4<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 40<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                  <tr>
                    <td><strong> Name:</strong></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 40<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 07-4<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 16<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1505-109256<br><br><br><br></p>
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                  <tr>
                    <td><strong> Name:</strong></td>
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                <p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 40<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 45<br><br> -Paragraph 10<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1448-109256<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 260<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 07-4<br><br> -Paragraph 4<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 128<br><br> -Paragraph 171<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Weighted-Average Number of Common Shares Outstanding<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6528421<br><br><br><br></p>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Cash equivalents:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">29,179</font></td>
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<td style="FONT-FAMILY: times" width="45"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="36"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="36"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Assets</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Cash equivalents:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Money market funds</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">29,927</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">29,927</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr></table></div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of assets and liabilities, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 820<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 1<br><br> -URI http://asc.fasb.org/extlink&amp;oid=7578670&amp;loc=d3e19190-110258<br><br><br><br></p>
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EQMAG">
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          <div style="width: 200px;"><strong>Consolidated Balance Sheets (USD $)<br>In Thousands, unless otherwise specified</strong></div>
        </th>
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      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current assets</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
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        <td class="nump">$ 44,986<span></span></td>
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      <tr class="re">
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        <td class="nump">24,843<span></span></td>
        <td class="nump">35,071<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories, net</a></td>
        <td class="nump">100,234<span></span></td>
        <td class="nump">120,023<span></span></td>
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        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
        <td class="nump">106<span></span></td>
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      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesCurrent', window );">Income taxes</a></td>
        <td class="nump">278<span></span></td>
        <td class="nump">495<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredRevenueCurrent', window );">Deferred revenue</a></td>
        <td class="nump">6,423<span></span></td>
        <td class="nump">10,786<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesCurrent', window );">Other current liabilities</a></td>
        <td class="nump">3,932<span></span></td>
        <td class="nump">4,647<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrent', window );">Total current liabilities</a></td>
        <td class="nump">29,782<span></span></td>
        <td class="nump">47,472<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredRevenueNoncurrent', window );">Long-term deferred revenue</a></td>
        <td class="nump">456<span></span></td>
        <td class="nump">1,488<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesNoncurrent', window );">Other long-term liabilities</a></td>
        <td class="nump">5,844<span></span></td>
        <td class="nump">5,730<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Liabilities', window );">Total liabilities</a></td>
        <td class="nump">36,082<span></span></td>
        <td class="nump">54,690<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingencies', window );">Commitments and contingencies (Note 16)</a></td>
        <td class="text">&nbsp;&nbsp;<span></span></td>
        <td class="text">&nbsp;&nbsp;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityAbstract', window );"><strong>Stockholders' equity</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockValue', window );">Preferred stock, $0.001 par value, 30,000 shares authorized; none issued or outstanding</a></td>
        <td class="text">&nbsp;&nbsp;<span></span></td>
        <td class="text">&nbsp;&nbsp;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockValueOutstanding', window );">Common stock, $0.001 par value, 300,000 shares authorized; 108,293 shares issued and 108,173 shares outstanding at December 31, 2012; 106,809 shares issued and 106,689 shares outstanding at December 31, 2011</a></td>
        <td class="nump">108<span></span></td>
        <td class="nump">107<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapital', window );">Additional paid-in capital</a></td>
        <td class="nump">504,643<span></span></td>
        <td class="nump">499,332<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TreasuryStockValue', window );">Treasury stock, at cost, 120 shares at December 31, 2012 and 2011</a></td>
        <td class="num">(1,218)<span></span></td>
        <td class="num">(1,218)<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Accumulated deficit</a></td>
        <td class="num">(322,477)<span></span></td>
        <td class="num">(288,443)<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Accumulated other comprehensive income</a></td>
        <td class="nump">5,020<span></span></td>
        <td class="nump">4,777<span></span></td>
      </tr>
      <tr class="reu">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Total stockholders' equity</a></td>
        <td class="nump">186,076<span></span></td>
        <td class="nump">214,555<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesAndStockholdersEquity', window );">Total liabilities and stockholders' equity</a></td>
        <td class="nump">$ 222,158<span></span></td>
        <td class="nump">$ 269,245<span></span></td>
      </tr>
    </table>
    <div style="display: none;">
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.19(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 19<br><br><br><br> -Subparagraph a<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AccountsPayableCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount due from customers or clients, within one year of the balance sheet date (or the normal operating cycle, whichever is longer), for goods or services (including trade receivables) that have been delivered or sold in the normal course of business, reduced to the estimated net realizable fair value by an allowance established by the entity of the amount it deems uncertain of collection.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.3-4)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 3<br><br><br><br> -Subparagraph a(1)<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 4<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AccountsReceivableNetCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 15<br><br><br><br> -Subparagraph b(1)<br><br><br><br> -Article 7<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 15<br><br><br><br> -Article 9<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 109<br><br><br><br> -Section Appendix E<br><br><br><br> -Paragraph 289<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name FASB Interpretation (FIN)<br><br><br><br> -Number 48<br><br><br><br> -Paragraph 15, 21<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AccruedIncomeTaxesCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 130<br><br><br><br> -Paragraph 14, 17, 26<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 11<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=20435746&amp;loc=d3e637-108580<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 14A<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=20435746&amp;loc=SL7669686-108580<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 220<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 14<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=20435746&amp;loc=d3e681-108580<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Article 3<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 31<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Principles Board Opinion (APB)<br><br><br><br> -Number 12<br><br><br><br> -Paragraph 10<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name FASB Staff Position (FSP)<br><br><br><br> -Number FAS115-1/124-1<br><br><br><br> -Paragraph 15D<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapital">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders. Includes adjustments to additional paid in capital. Some examples of such adjustments include recording the issuance of debt with a beneficial conversion feature and certain tax consequences of equity instruments awarded to employees. Use this element for the aggregate amount of additional paid-in capital associated with common and preferred stock. For additional paid-in capital associated with only common stock, use the element additional paid in capital, common stock. For additional paid-in capital associated with only preferred stock, use the element additional paid in capital, preferred stock.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 31<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.30(a)(1))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AdditionalPaidInCapital</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 12<br><br><br><br> -Article 7<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Concepts (CON)<br><br><br><br> -Number 6<br><br><br><br> -Paragraph 25<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 18<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.18)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_Assets</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 9<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.9)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 3<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6801-107765<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6676-107765<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AssetsCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_AssetsCurrentAbstract</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (a)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6676-107765<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Cash Equivalents<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 95<br><br><br><br> -Paragraph 8, 9<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 95<br><br><br><br> -Paragraph 7, 26<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Glossary Cash<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 230<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6943989&amp;loc=d3e3044-108585<br><br><br><br><br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 95<br><br><br><br> -Paragraph 7<br><br><br><br> -Footnote 1<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 1<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CashAndCashEquivalentsAtCarryingValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingencies">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Represents the caption on the face of the balance sheet to indicate that the entity has entered into (1) purchase or supply arrangements that will require expending a portion of its resources to meet the terms thereof, and (2) is exposed to potential losses or, less frequently, gains, arising from (a) possible claims against a company's resources due to future performance under contract terms, and (b) possible losses or likely gains from uncertainties that will ultimately be resolved when one or more future events that are deemed likely to occur do occur or fail to occur.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 944<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.7-03.(a),19)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.25)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 25<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 450<br><br><br><br> -SubTopic 20<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6952336&amp;loc=d3e14326-108349<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 5<br><br><br><br> -Paragraph 8, 9<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 17<br><br><br><br> -Article 9<br><br><br><br><br><br><br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 19<br><br><br><br> -Article 7<br><br><br><br><br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 942<br><br><br><br> -SubTopic 210<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.9-03.17)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CommitmentsAndContingencies</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockValueOutstanding">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Value of all classes of common stock held by shareholders. May be all or portion of the number of common shares authorized. These shares exclude common shares repurchased by the entity and held as treasury shares.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 30<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_CommonStockValueOutstanding</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredRevenueCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The carrying amount of consideration received or receivable as of the balance sheet date on potential earnings that were not recognized as revenue in conformity with GAAP, and which are expected to be recognized as such within one year or the normal operating cycle, if longer, including sales, license fees, and royalties, but excluding interest income.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 43<br><br><br><br> -Section A<br><br><br><br> -Paragraph 7, 8<br><br><br><br> -Chapter 3<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 13.A.4(a).Q1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6600647&amp;loc=d3e214044-122780<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 8<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6935-107765<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 13<br><br><br><br> -Section A<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredRevenueCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredRevenueNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The noncurrent portion of deferred revenue amount as of balance sheet date. Deferred revenue is a liability related to a revenue producing activity for which revenue has not yet been recognized, and is not expected to be recognized in the next twelve months. Generally, an entity records deferred revenue when it receives consideration from a customer before achieving certain criteria that must be met for revenue to be recognized in conformity with GAAP.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 43<br><br><br><br> -Section A<br><br><br><br> -Paragraph 7, 8<br><br><br><br> -Chapter 3<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 48<br><br><br><br> -Paragraph 6<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 605<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SAB TOPIC 13.A.4(a).Q1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6600647&amp;loc=d3e214044-122780<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 8<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6935-107765<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 13<br><br><br><br> -Section A<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_DeferredRevenueNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeRelatedLiabilitiesCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_EmployeeRelatedLiabilitiesCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying amount (lower of cost or market) as of the balance sheet date of inventories less all valuation and other allowances. Excludes noncurrent inventory balances (expected to remain on hand past one year or one operating cycle, if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.6(a))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 330<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 35<br><br><br><br> -Paragraph 2<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6386567&amp;loc=d3e3927-108312<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (b)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6676-107765<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_InventoryNet</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Liabilities">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.19-26)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_Liabilities</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesAndStockholdersEquity">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of all Liabilities and Stockholders' Equity items (or Partners' Capital, as applicable), including the portion of equity attributable to noncontrolling interests, if any.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.32)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 25<br><br><br><br> -Article 7<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 32<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_LiabilitiesAndStockholdersEquity</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.21)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 21<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_LiabilitiesCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrentAbstract">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_LiabilitiesCurrentAbstract</nobr></td>
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                    <td><strong> Data Type:</strong></td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate carrying amount, as of the balance sheet date, of noncurrent assets not separately disclosed in the balance sheet. Noncurrent assets are expected to be realized or consumed after one year (or the normal operating cycle, if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.17)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 17<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OtherAssetsNoncurrent</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate carrying amount of current liabilities (due within one year or within the normal operating cycle if longer) not separately disclosed in the balance sheet. Includes costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered and of liabilities not separately disclosed.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 43<br><br><br><br> -Section A<br><br><br><br> -Paragraph 8<br><br><br><br> -Chapter 3<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6904-107765<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 6<br><br><br><br> -Paragraph 15<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 6<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6911-107765<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OtherLiabilitiesCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesNoncurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate carrying amount, as of the balance sheet date, of noncurrent obligations not separately disclosed in the balance sheet. Noncurrent liabilities are expected to be paid after one year (or the normal operating cycle, if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.24)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 24<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_OtherLiabilitiesNoncurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockValue">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 29<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.28)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Principles Board Opinion (APB)<br><br><br><br> -Number 12<br><br><br><br> -Paragraph 10<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 129<br><br><br><br> -Paragraph 2, 3, 4, 5, 6, 7, 8<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Article 3<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.3-04)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6959260&amp;loc=d3e187085-122770<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PreferredStockValue</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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                </table>
              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The total of the amounts paid in advance for capitalized costs that will be expensed with the passage of time or the occurrence of a triggering event, and will be charged against earnings within one year or the normal operating cycle, if longer, and the aggregate carrying amount of current assets, as of the balance sheet date, not separately presented elsewhere in the balance sheet. Current assets are expected to be realized or consumed within one year (or the normal operating cycle, if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 8<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 45<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6361293&amp;loc=d3e6676-107765<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 43<br><br><br><br> -Section A<br><br><br><br> -Paragraph 4<br><br><br><br> -Chapter 3<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_PrepaidExpenseAndOtherAssetsCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 5<br><br><br><br> -Paragraph 10<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 25<br><br><br><br> -Paragraph 5<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6397716&amp;loc=d3e11281-110244<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 20<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 460<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 7<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6398077&amp;loc=d3e12524-110249<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.20)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 5<br><br><br><br> -Paragraph 9<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ProductWarrantyAccrualClassifiedCurrent</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Amount, net of accumulated depreciation, depletion and amortization, of long-lived physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 03<br><br><br><br> -Paragraph 8<br><br><br><br> -Article 7<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br><br><br> -Number 12<br><br><br><br> -Paragraph 5<br><br><br><br> -Subparagraph b, c<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 360<br><br><br><br> -SubTopic 10<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 1<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.13)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 13<br><br><br><br> -Subparagraph a<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The carrying amounts of cash and cash equivalent items which are restricted as to withdrawal or usage. Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or entity statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits. Excludes compensating balance arrangements that are not agreements which legally restrict the use of cash amounts shown on the balance sheet. For a classified balance sheet represents the current portion only (the noncurrent portion has a separate concept); there is a separate and distinct element for unclassified presentations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Audit and Accounting Guide (AAG)<br><br><br><br> -Number AAG-BRD<br><br><br><br> -Paragraph 80<br><br><br><br> -Subparagraph Exhibit 4-8, 3<br><br><br><br> -IssueDate 2006-05-01<br><br><br><br> -Chapter 4<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 1<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
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                <p>Cash and equivalents whose use in whole or in part is restricted for the long-term, generally by contractual agreements or regulatory requirements.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.1)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 1<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The cumulative amount of the reporting entity's undistributed earnings or deficit.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.31(a)(3))<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Principles Board Opinion (APB)<br><br><br><br> -Number 12<br><br><br><br> -Paragraph 10<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 31<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 04<br><br><br><br> -Article 3<br><br><br><br><br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 210<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 1<br><br><br><br> -Subparagraph (SX 210.5-02.29-31)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Regulation S-X (SX)<br><br><br><br> -Number 210<br><br><br><br> -Section 02<br><br><br><br> -Paragraph 29, 30, 31<br><br><br><br> -Article 5<br><br><br><br><br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher AICPA<br><br><br><br> -Name Accounting Research Bulletin (ARB)<br><br><br><br> -Number 51<br><br><br><br> -Paragraph A3<br><br><br><br> -Appendix A<br><br><br><br><br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 310<br><br><br><br> -SubTopic 10<br><br><br><br> -Section S99<br><br><br><br> -Paragraph 2<br><br><br><br> -Subparagraph (SAB TOPIC 4.E)<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6228006&amp;loc=d3e74512-122707<br><br><br><br><br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher SEC<br><br><br><br> -Name Staff Accounting Bulletin (SAB)<br><br><br><br> -Number Topic 4<br><br><br><br> -Section E<br><br><br><br><br><br><br><br></p>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount allocated to treasury stock. Treasury stock is common and preferred shares of an entity that were issued, repurchased by the entity, and are held in its treasury.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name Accounting Standards Codification<br><br><br><br> -Topic 505<br><br><br><br> -SubTopic 30<br><br><br><br> -Section 50<br><br><br><br> -Paragraph 4<br><br><br><br> -URI http://asc.fasb.org/extlink&amp;oid=6405834&amp;loc=d3e23315-112656<br><br><br><br><br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br><br><br> -Publisher FASB<br><br><br><br> -Name FASB Technical Bulletin (FTB)<br><br><br><br> -Number 85-6<br><br><br><br> -Paragraph 3<br><br><br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br><br><br><br><br></p>
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        <th class="th" colspan="1">12 Months Ended</th>
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          <div>Dec. 31, 2012</div>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;2.&#160;&#160;Summary of Significant Accounting Policies</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The accompanying consolidated financial statements reflect the application of certain significant accounting policies as described in this note and elsewhere in the footnotes.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(a)&#160;&#160;&#160;&#160;Basis of Presentation</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The accompanying consolidated financial statements include the accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Events occurring subsequent to December&#160;31, 2012 have been evaluated for potential recognition or disclosure in the consolidated financial statements. See Note&#160;20 for additional information relating to subsequent events.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(b)&#160;&#160;&#160;&#160;Use of Estimates</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, the Company evaluates its estimates and judgments, including those related to revenue recognition, the realizable value of inventories, valuing share-based compensation instruments and valuation allowances for deferred tax assets. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(c)&#160;&#160;&#160;&#160;Foreign Currency</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has determined the functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders' equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the consolidated statements of operations.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For the year ended December&#160;31, 2012 the Company realized $0.9&#160;million of foreign exchange losses. For the year ended December&#160;31, 2011 the Company realized $1.2&#160;million of foreign exchange gains. For the year ended December&#160;31, 2010 the Company incurred $1.9&#160;million of foreign exchange losses.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(d)&#160;&#160;&#160;&#160;Cash and Cash Equivalents</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market securities and certificates of deposit. Cash equivalents are carried on the balance sheet at fair market value.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(e)&#160;&#160;&#160;&#160;Inventories</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Inventories are carried at lower of cost, determined using the first-in, first-out ("FIFO") method, or market. The Company periodically reviews its inventories and makes provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or market. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company records an allowance for estimated excess inventory. The allowance is determined using management's assumptions of materials usage, based on estimates of demand and market conditions. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(f)&#160;&#160;&#160;&#160;Property, Plant and Equipment</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Property and equipment are stated at cost, less accumulated depreciation and amortization.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:</font></p>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Buildings</font></p></td>
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<td style="FONT-FAMILY: times" valign="bottom"><font size="2">40&#160;years</font></td></tr>
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<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Machinery and equipment</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">3 to 10&#160;years</font></td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Repairs and maintenance costs are expensed as incurred. Expenditures for renewals and betterments are capitalized.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(g)&#160;&#160;&#160;&#160;Impairment of Long-Lived Assets</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company records impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is measured by a comparison of the assets' carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company completed a test for recoverability due to indicators present at December&#160;31, 2012; specifically the carrying value of its net assets exceeded its current market capitalization. As of December&#160;31, 2012, the undiscounted cash flows used in the analysis significantly exceeded the carrying value of the Company's assets. As a result no impairment was recorded. The undiscounted cash flows used in the analysis were derived from the Company's long-term strategic plan.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company did not record an impairment charge for the years ended December&#160;31, 2011, or 2010.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Future actual performance could be materially different from our current forecasts, which could impact future estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in the Company's relationships with significant customers. The Company performs an impairment analysis when circumstances or events warrant.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(h)&#160;&#160;&#160;&#160;Concentration of Risk and Off-Balance Sheet Risk</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Financial instruments that potentially subject the Company to concentrations of credit risk are principally cash equivalents and accounts receivable. The Company's cash equivalents are principally maintained in an investment grade money-market fund.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has no significant off-balance-sheet risk such as foreign exchange contracts, option contracts or other foreign hedging arrangements.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company exposure to market risk for changes in interest rates relates primarily to cash equivalents. The primary objective of the Company's investment activities is to preserve principal while maximizing yields without significantly increasing risk. This is accomplished by investing in marketable high investment grade securities. The Company does not use derivative financial instruments to manage its investment portfolio and does not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company performs ongoing credit evaluations of its customers' financial condition and generally requires no collateral to secure accounts receivable. For selected overseas sales, the Company requires customers to obtain letters of credit before product is shipped. The Company maintains an allowance for doubtful accounts based on its assessment of the collectability of accounts receivable. The Company reviews the allowance for doubtful accounts monthly. The Company does not have any off-balance sheet credit exposure related to its customers.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's customers consist of semiconductor manufacturers located throughout the world and net sales to its ten largest customers accounted for 70.6%, 68.6% and 62.7% of revenue in 2012, 2011 and 2010, respectively.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For the years ended December&#160;31, 2012, 2011 and 2010, the Company had one customer represent 18.2%, 21.2% and 18.6% of total revenues, respectively, for each of the periods presented.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For the year ended December&#160;31, 2012, the Company had two customers account for 11.9% and 11.5% of consolidated accounts receivable, respectively. For the year ended December&#160;31, 2011, the Company had one customer represent 27.2% of consolidated accounts receivable.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Some of the components and sub-assemblies included in the Company's products are obtained either from a sole source or a limited group of suppliers. Disruption to the Company's supply source, resulting either from depressed economic conditions or other factors, could affect its ability to deliver products to its customers.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(i)&#160;&#160;&#160;&#160;Revenue Recognition</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's revenue recognition policy involves significant judgment by management. As described below, the Company considers a broad array of facts and circumstances in determining when to recognize revenue, including contractual obligations to the customer, the complexity of the customer's post-delivery acceptance provisions, payment history, customer creditworthiness and the installation process. In the future, if the post-delivery acceptance provisions and installation process become more complex or result in a materially lower rate of acceptance, the Company may have to revise its revenue recognition policy, which could delay the timing of revenue recognition.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's system sales transactions are made up of multiple elements, including the system itself and elements that are not delivered simultaneously with the system. These undelivered elements might include a combination of installation services, extended warranty and support and spare parts, all of which are covered generally by a single sales price. On January&#160;1, 2011, the Company adopted the accounting standards update for multiple deliverable revenue arrangements, as required, using the prospective method. Accordingly, this guidance is being applied to all system revenue arrangements entered into or materially modified on or after January&#160;1, 2011. The adoption of the amended guidance did not change the accounting for arrangements entered into prior to January&#160;1, 2011. There was no material impact on our financial position, results of operations or cash flows upon adoption.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The impact of adopting this amended guidance on the Company's results of operations has been limited to transactions involving the sale of systems. The update amended the previous guidance for multiple-element arrangements. Pursuant to the amended guidance, the Company's system revenue arrangements with multiple elements are divided into separate units of accounting if specified criteria are met, including whether the delivered element has stand-alone value to the customer. If the criteria are met, then the consideration received is allocated among the separate units based on their relative selling price, and the revenue is recognized separately for each of the separate units.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company determines selling price for each unit of accounting (element) using vendor specific objective evidence (VSOE) or third-party evidence (TPE), if they exist, otherwise, the Company uses best estimated selling price (BESP). The Company generally expects that it will not be able to establish TPE due to the nature of its products, and, as such, the Company typically will determine selling price using VSOE or BESP.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Where required, the Company determines BESP for an individual element based on consideration of both market and Company-specific factors, including the selling price and profit margin for similar products, the cost to produce the deliverable and the anticipated margin on that deliverable and the characteristics of the varying markets in which the deliverable is sold.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The total consideration to be received in the transaction is allocated to each element in the arrangement based upon the relative selling price of each element when compared to the consideration received.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Systems are not sold separately and VSOE or TPE is not available for the systems element. Therefore the selling price associated with systems is based on BESP. The allocated value for installation in the arrangement includes (a)&#160;the greater of (i)&#160;the relative selling price of the installation or (ii)&#160;the portion or the sales price that will not be received until the installation is completed (the "retention"). The selling price of installation is based upon the fair value of the service performed, including labor, which is based upon the estimated time to complete the installation at hourly rates, and material components, both of which are sold separately. The selling price of all other elements (extended warranty for support, spare parts, and labor) is based upon the price charged when these elements are sold separately, or VSOE.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Product revenue for products which have demonstrated market acceptance, generally recognized upon shipment provided title and risk of loss has passed to the customer, evidence of an arrangement exists, prices are contractually fixed or determinable, collectability is reasonably assured through historical collection results and regular credit evaluations, and there are no uncertainties regarding customer acceptance. Revenue from installation services is recognized at the time formal acceptance is received from the customer or, for certain customers, when both the formal acceptance and retention payment have been received. Revenue for other elements is recognized at the time products are shipped or the related services are performed.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company generally recognizes revenue for products which have demonstrated market acceptance at the time of shipment because the customer's post-delivery acceptance provisions and installation process have been established to be routine, commercially inconsequential and perfunctory. The majority of its systems are designed and tailored to meet the customer's specifications, as outlined in the contract between the customer and the Company, which may be the Company's standard specification. To ensure that the customer's specifications are satisfied, many customers request that new systems be tested at the Company's facilities prior to shipment, normally with the customer present, under conditions that substantially replicate the customer's production environment and the customer's criteria are confirmed to have been met. The Company believes the risk of failure to complete a system installation is remote. Should an installation not be completed successfully, the contractual provisions do not provide for forfeiture, refund or other purchase price concession beyond those prescribed by the provisions of the Uniform Commercial Code applicable generally to such transactions.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;For initial shipments of systems with new technologies or in the small number of instances where the Company is unsure of meeting the customer's specifications or obtaining customer acceptance upon shipment of the system, it will defer the recognition of systems revenue and related costs until written customer acceptance of the system is obtained. This deferral period is generally within twelve months of shipment.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Product revenue includes revenue from system sales, sales of spare parts, the spare parts component of maintenance and service contracts and product upgrades. Service revenue includes the labor component of maintenance and service contract amounts charged for on-site service personnel.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue related to maintenance and service contracts is recognized ratably over the duration of the contracts, or based on parts usage, where appropriate. Revenue related to service hours is recognized when the services are performed.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(j)&#160;&#160;&#160;&#160;Shipping and Handling Costs</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Shipping and handling costs are included in cost of revenue.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(k)&#160;&#160;&#160;&#160;Stock-Based Compensation</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company recognizes compensation expense for all share-based payments to employees and directors, including grants of employee stock options, based on the grant-date fair value of those share-based payments using the Black- Sholes option pricing model, adjusted for expected forfeitures. Stock-based compensation expense is recognized ratably over the requisite service period.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;See Note&#160;13 for additional information relating to stock-based compensation.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(l)&#160;&#160;&#160;&#160;Income Taxes</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company records income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax bases, and operating loss and tax credit carryforwards.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company's consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax accounting. The Company establishes a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining the Company's provision for income taxes, the Company's deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. The Company evaluates the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. The Company recognizes accrued interest related to unrecognized tax benefits as interest expense and penalties as operating expense.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(m)&#160;&#160;&#160;&#160;Computation of Net Income (Loss) per Share</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company incurred net losses for years ended December&#160;31, 2012 and December&#160;31, 2010, and has excluded 1,563,417 and 3,230,705 incremental shares attributable to outstanding stock options, restricted stock and restricted stock units from the calculation of net loss per share because the effect would have been anti-dilutive.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The components of net income (loss) per share are as follows:</font></p>
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<td style="FONT-FAMILY: times" align="left"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="51"></td>
<td style="FONT-FAMILY: times" width="12"></td><!-- TABLE COLUMN WIDTHS END --></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years Ended December&#160;31,</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2012</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2011</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="2"><font size="1"><b>2010</b></font></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>(in thousands, except per share data)</b></font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Income (loss) available to common stockholders</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(34,034</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">5,077</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(17,573</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Weighted average common shares outstanding used in computing basic net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">107,619</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">106,234</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">104,522</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Incremental shares</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,864</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Weighted average common shares outstanding used in computing diluted net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">107,619</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">109,098</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">104,522</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Net income (loss) per share</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Basic</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.32</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.05</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.17</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Diluted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.32</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">0.05</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.17</font></td>
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<p style="FONT-FAMILY: times"><font size="2"><b>(n)&#160;&#160;&#160;&#160;Recent Accounting Guidance</b></font></p>
<p style="FONT-FAMILY: times"><font size="2"><u>Accounting Standards or Updates Recently Adopted</u></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Effective January&#160;1, 2012 the Company adopted Accounting Standards Update, or ASU, No.&#160;2011-05,</font> <font size="2"><i>Comprehensive Income (Topic 220)</i></font><font size="2">. This newly issued accounting standard requires the Company to report comprehensive income either in a single continuous statement or in two separate but consecutive financial statements. The adoption of this standard did impact the presentation of other comprehensive income, as we have elected to present two separate but consecutive statements, but did not have an impact on our financial position or results of operations.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><u>Accounting Standards or Updates Not Yet Effective</u></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;On February&#160;5, 2013, The Financial Accounting Standards Board ("FASB") issued Accounting Standards Update No.&#160;2013-02,</font> <font size="2"><i>Reporting of Amounts Reclassified Out of Accumulated Other Comprehensive Income</i></font><font size="2">. The update requires that companies present either in a single note or parenthetically on the face of the financial statements, the effect of significant amounts reclassified from each component of accumulated other comprehensive income based on its source and the income statement line items affected by the reclassification. If a component is not required to be reclassified to net income in its entirety, companies would instead cross reference to the related footnote for additional information. This update is effective prospectively for annual and interim reporting periods beginning after December&#160;15, 2012. As this update only requires enhanced disclosure, the adoption of this update will not impact our financial position or results of operations.</font></p></div>
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                <p>The entire disclosure for all significant accounting policies of the reporting entity.</p>
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          <div style="width: 200px;"><strong>Financing Arrangements (Details) (Revolving credit facility, USD $)<br>In Millions, unless otherwise specified</strong></div>
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                <p>Represents the minimum trailing period for which a specified amount of adjusted net income is required as per the covenants of the debt instrument of the entity.</p>
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                <p>No definition available.</p>
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                <p>Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
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                <p>Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding).</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 210<br><br> -SubTopic 10<br><br> -Section S99<br><br> -Paragraph 1<br><br> -Subparagraph (SX 210.5-02.19(b),22(b))<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher SEC<br><br> -Name Regulation S-X (SX)<br><br> -Number 210<br><br> -Section 02<br><br> -Paragraph 19, 22<br><br> -Article 5<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
                </table>
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  <head>
    <META http-equiv="Content-Type" content="text/html; charset=us-ascii">
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  <body><span style="display: none;">v2.4.0.6</span><table class="report" border="0" cellspacing="2" id="ID0EO3AE">
      <tr>
        <th class="tl" colspan="1" rowspan="2">
          <div style="width: 200px;"><strong>Income Taxes (Details 4) (USD $)<br></strong></div>
        </th>
        <th class="th" colspan="2">12 Months Ended</th>
        <th class="th" colspan="1"></th>
      </tr>
      <tr>
        <th class="th">
          <div>Dec. 31, 2012</div>
        </th>
        <th class="th">
          <div>Dec. 31, 2011</div>
        </th>
        <th class="th">
          <div>Jun. 29, 2012</div>
        </th>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward', window );"><strong>Reconciliation of the beginning and ending balance of unrecognized tax benefits</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at beginning of year</a></td>
        <td class="nump">$ 8,089,000<span></span></td>
        <td class="nump">$ 6,965,000<span></span></td>
        <td class="nump">$ 800,000<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions', window );">Increases in unrecognized tax benefits as a result of tax positions taken during a prior period</a></td>
        <td class="nump">646,000<span></span></td>
        <td class="nump">1,124,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities', window );">Decreases in unrecognized tax benefits related to settlements with tax authorities</a></td>
        <td class="num">(880,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions', window );">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</a></td>
        <td class="nump">663,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations', window );">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations</a></td>
        <td class="num">(799,000)<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at end of year</a></td>
        <td class="nump">7,719,000<span></span></td>
        <td class="nump">8,089,000<span></span></td>
        <td class="nump">800,000<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability', window );">Recorded as other long-term liability</a></td>
        <td class="nump">2,646,000<span></span></td>
        <td class="nump">3,244,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance', window );">Recorded as a decrease in deferred tax assets and offsetting valuation allowance</a></td>
        <td class="nump">5,073,000<span></span></td>
        <td class="nump">4,845,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rou">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Unrecognized tax benefits</a></td>
        <td class="nump">7,719,000<span></span></td>
        <td class="nump">8,089,000<span></span></td>
        <td class="nump">800,000<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Research and development and other tax credit carryforwards</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforwards</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carryforwards</a></td>
        <td class="nump">21,800,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="rh">
        <td class="pl" style="border-bottom: 0px;" valign="top">
          <div class="a">Foreign</div>
        </td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="re">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardLineItems', window );"><strong>Tax credit carryforwards</strong></a></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
      <tr class="ro">
        <td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAmount', window );">Tax credit carryforwards</a></td>
        <td class="nump">$ 5,000,000<span></span></td>
        <td class="text">&#xA0;<span></span></td>
        <td class="text">&#xA0;<span></span></td>
      </tr>
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    <div style="display: none;">
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        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as a decrease in deferred tax assets and offsetting valuation allowance, as of the balance sheet date.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
                  </tr>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as other long-term liability, as of the balance sheet date.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>No definition available.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>acls_</td>
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                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
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                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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              </div>
            </div>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward">
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          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:stringItemType</td>
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                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>na</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>duration</td>
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              </div>
            </div>
          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardAmount">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 17<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 3<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32559-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Carryforwards<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6506874<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 109<br><br> -Paragraph 48<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_TaxCreditCarryforwardAmount</nobr></td>
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                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
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                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>debit</td>
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                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardLineItems">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_TaxCreditCarryforwardLineItems</nobr></td>
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                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
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                    <td>duration</td>
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      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefits">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns as of the balance sheet date.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Glossary Unrecognized Tax Benefit<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6527854<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 15A<br><br> -Subparagraph (a)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Interpretation (FIN)<br><br> -Number 48<br><br> -Paragraph 21<br><br> -Subparagraph a<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;">
                <table border="0" cellpadding="0" cellspacing="0">
                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_UnrecognizedTaxBenefits</nobr></td>
                  </tr>
                  <tr>
                    <td style="padding-right: 4px;"><nobr><strong> Namespace Prefix:</strong></nobr></td>
                    <td>us-gaap_</td>
                  </tr>
                  <tr>
                    <td><strong> Data Type:</strong></td>
                    <td>xbrli:monetaryItemType</td>
                  </tr>
                  <tr>
                    <td><strong> Balance Type:</strong></td>
                    <td>credit</td>
                  </tr>
                  <tr>
                    <td><strong> Period Type:</strong></td>
                    <td>instant</td>
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              </div>
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          </td>
        </tr>
      </table>
      <table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities">
        <tr>
          <td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td>
        </tr>
        <tr>
          <td>
            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gross amount of decreases in unrecognized tax benefits resulting from settlements with taxing authorities.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 15A<br><br> -Subparagraph (a)(3)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Interpretation (FIN)<br><br> -Number 48<br><br> -Paragraph 21<br><br> -Subparagraph a(3)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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                  <tr>
                    <td><strong> Name:</strong></td>
                    <td><nobr>us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities</nobr></td>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The gross amount of increases in unrecognized tax benefits resulting from tax positions that have been or will be taken in the tax return for the current period, excluding amounts pertaining to examined tax returns.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 15A<br><br> -Subparagraph (a)(2)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Interpretation (FIN)<br><br> -Number 48<br><br> -Paragraph 21<br><br> -Subparagraph a(2)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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                <p>The gross amount of increases in unrecognized tax benefits resulting from tax positions taken in prior period tax returns, excluding amounts pertaining to examined tax returns.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 15A<br><br> -Subparagraph (a)(1)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Interpretation (FIN)<br><br> -Number 48<br><br> -Paragraph 21<br><br> -Subparagraph a(1)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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                <p>The gross amount of decreases in unrecognized tax benefits resulting from lapses of the applicable statutes of limitations.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 740<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 15A<br><br> -Subparagraph (a)(4)<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Interpretation (FIN)<br><br> -Number 48<br><br> -Paragraph 21<br><br> -Subparagraph a(4)<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br></p>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">26,895</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">34,138</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(8,718</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(471</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(10,027</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(2,113</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,151</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,227</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,812</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
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<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Net income (loss) per share basic and diluted</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(0.14</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
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<td style="FONT-FAMILY: times" width="12"></td>
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<td style="FONT-FAMILY: times" width="44"></td>
<td style="FONT-FAMILY: times" width="12"></td>
<td style="FONT-FAMILY: times" align="right" width="7"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="8"><font size="1"><b>Years Ended December&#160;31,</b></font></th>
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<tr style="HEIGHT: 0px" valign="bottom">
<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,697</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,713</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">726</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Warranties issued during the period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,042</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">4,772</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,722</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Settlements made during the period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(3,010</font></td>
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<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(5,275</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,923</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Changes in estimate of liability for pre-existing warranties during the period</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">(1,928</font></td>
<td style="FONT-FAMILY: times"><font size="2">)</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,487</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">188</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Balance at December&#160;31 (end of year)</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,801</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,697</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,713</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Amount classified as current</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,700</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,556</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,556</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Amount classified as long-term</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">101</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">141</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">157</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="bottom" bgcolor="white">
<td style="FONT-FAMILY: times">
<p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total Warranty Liability</font></p></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">1,801</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">3,697</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" align="right"><font size="2">2,713</font></td>
<td style="FONT-FAMILY: times"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 460<br><br> -SubTopic 10<br><br> -Section 50<br><br> -Paragraph 8<br><br> -URI http://asc.fasb.org/extlink&amp;oid=6398077&amp;loc=d3e12565-110249<br><br><br><br></p>
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<p style="FONT-FAMILY: times"><font size="2"><b>Note&#160;12.&#160;&#160;Employee Benefit Plans</b></font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(a)&#160;&#160;&#160;&#160;Defined Contribution Plan</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company maintains the Axcelis Long-Term Investment Plan, a defined contribution plan. All regular employees are eligible to participate and may contribute up to 35% of their compensation on a before-tax basis subject to Internal Revenue Service ("IRS") limitations. Highly compensated employees may contribute up to 16% of their compensation on a before-tax basis subject to IRS limitations. The Company does not match contributions; therefore, no expense was recorded for this plan in 2012, 2011 or 2010.</font></p>
<p style="FONT-FAMILY: times"><font size="2"><b>(b)&#160;&#160;&#160;&#160;Other Compensation Plans</b></font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company operates in foreign jurisdictions that require lump sum benefits, payable based on statutory regulations, for voluntary or involuntary termination. Where required, an annual actuarial valuation of the benefit plans is obtained.</font></p>
<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The Company has recorded an unfunded liability of $4.5&#160;million and $3.7&#160;million at December&#160;31, 2012 and 2011, respectively, for costs associated with these compensation plans in foreign jurisdictions. The following table presents the classification of these liabilities in the Consolidated Balance Sheets:</font></p>
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<td style="FONT-FAMILY: times" align="right" width="7"></td>
<td style="FONT-FAMILY: times" width="39"></td>
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<th style="FONT-FAMILY: times" align="left"><font size="2">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
<th style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" align="center" colspan="5"><font size="1"><b>Year Ended<br />
December&#160;31,</b></font></th>
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<th style="FONT-FAMILY: times" align="left"><font size="1">&#160;</font><br /></th>
<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th>
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<th style="FONT-FAMILY: times"><font size="1">&#160;</font></th></tr>
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<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Current:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Accrued compensation</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,475</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,290</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other current liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">&#8212;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">199</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 30pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total current liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,475</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">1,489</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
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<p style="MARGIN-TOP: 12pt; MARGIN-LEFT: 10pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Long-term:</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="white">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 20pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Other long-term liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3,042</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">2,243</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 1pt solid; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr>
<tr style="HEIGHT: 0px" valign="top" bgcolor="#CCEEFF">
<td style="FONT-FAMILY: times" valign="bottom">
<p style="MARGIN-LEFT: 40pt; TEXT-INDENT: -10pt; FONT-FAMILY: times"><font size="2">Total liabilities</font></p></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">4,517</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">$</font></td>
<td style="FONT-FAMILY: times" valign="bottom" align="right"><font size="2">3,732</font></td>
<td style="FONT-FAMILY: times" valign="bottom"><font size="2">&#160;</font></td></tr>
<tr style="FONT-SIZE: 1.5pt; HEIGHT: 0px" valign="top">
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td>
<td style="BORDER-BOTTOM: #000000 2.25pt double; FONT-FAMILY: times" valign="bottom" align="right" colspan="2">&#160;</td>
<td style="FONT-FAMILY: times" valign="bottom">&#160;</td></tr></table></div>
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<p style="FONT-FAMILY: times"><font size="2">&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The expense recorded in connection with these plans was $0.6&#160;million, $0.7&#160;million and $0.6&#160;million during the years ended December&#160;31, 2012, 2011 and 2010, respectively.</font></p></div>
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            <div class="body" style="padding: 2px;"><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div>
                <p>The entire disclosure for pension and other postretirement benefits.</p>
              </div><a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;">
                <p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 158<br><br> -Paragraph 7, 21, 22<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name FASB Staff Position (FSP)<br><br> -Number FAS106-2<br><br> -Paragraph 20, 21, 22<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Implementation Guide (Q and A)<br><br> -Number FAS88<br><br> -Paragraph 63<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 106<br><br> -Paragraph 518<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Accounting Standards Codification<br><br> -Topic 715<br><br> -URI http://asc.fasb.org/topic&amp;trid=2235017<br><br><br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 5, 6, 7, 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  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This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 8<br><br> -Subparagraph m<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 87<br><br> -Paragraph 264<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher AICPA<br><br> -Name Accounting Principles Board Opinion (APB)<br><br> -Number 30<br><br> -Paragraph 26<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Emerging Issues Task Force (EITF)<br><br> -Number 03-2<br><br> -Paragraph 8<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.<br><br><br><br>Reference 12: http://www.xbrl.org/2003/role/presentationRef<br><br> -Publisher FASB<br><br> -Name Statement of Financial Accounting Standard (FAS)<br><br> -Number 132R<br><br> -Paragraph 5<br><br> -Subparagraph h<br><br> -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009.  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