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Income Taxes (Details 2) (United States) | 12 Months Ended
--- | ---
Dec. 31, 2012
United States |
Valuation allowance |
Period of cumulative loss position | 3 years
Percentage of valuation allowance | 100.00%

X
- Definition Represents the percentage of valuation allowance. + References No definition available. + Details
Name: | acls_DeferredTaxAssetsValuationAllowancePercentage
Namespace Prefix: | acls_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Represents the number of consecutive years during which the reporting entity has been in a loss position for income tax reporting purposes. + References No definition available. + Details
Name: | acls_PeriodOfCumulativeLossPosition
Namespace Prefix: | acls_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | us-gaap_ValuationAllowanceLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration