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Business Segment and Geographic Region Information (Details) (USD $) In Thousands, unless otherwise specified | 3 Months Ended | 12 Months Ended
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Dec. 31, 2012 | Sep. 30, 2012 | Jun. 30, 2012 | Mar. 31, 2012 | Dec. 31, 2011 | Sep. 30, 2011 | Jun. 30, 2011 | Mar. 31, 2011 | Dec. 31, 2012 item | Dec. 31, 2011 | Dec. 31, 2010
Business Segment and Geographic Region Information |  |  |  |  |  |  |  |  |  |  |
Number of business segments |  |  |  |  |  |  |  |  | 1 |  |
Revenue by product lines |  |  |  |  |  |  |  |  |  |  |
Revenue | $ 44,624 | $ 44,640 | $ 59,114 | $ 55,007 | $ 60,411 | $ 72,455 | $ 93,380 | $ 93,170 | $ 203,385 | $ 319,416 | $ 275,212
Ion implantation systems, services, and royalties |  |  |  |  |  |  |  |  |  |  |
Revenue by product lines |  |  |  |  |  |  |  |  |  |  |
Revenue |  |  |  |  |  |  |  |  | 156,090 | 237,857 | 232,335
Other systems and services |  |  |  |  |  |  |  |  |  |  |
Revenue by product lines |  |  |  |  |  |  |  |  |  |  |
Revenue |  |  |  |  |  |  |  |  | $ 47,295 | $ 81,559 | $ 42,877

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- Definition Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 225 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SX 210.5-03.1) -URI http://asc.fasb.org/extlink&oid=6880815&loc=d3e20235-122688 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 03 -Paragraph 1 -Article 5 + Details
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