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Inventories, Net (Details) (USD $) | 3 Months Ended | 12 Months Ended
--- | --- | ---
Dec. 31, 2012 | Dec. 31, 2012 | Dec. 31, 2011 | Dec. 31, 2010
Inventories, net |  |  |  |
Raw materials | $ 72,013,000 | $ 72,013,000 | $ 85,829,000 |
Work in process | 12,253,000 | 12,253,000 | 25,639,000 |
Finished goods (completed systems) | 15,968,000 | 15,968,000 | 8,555,000 |
Inventories, net | 100,234,000 | 100,234,000 | 120,023,000 |
Inventory reserves | 33,600,000 | 33,600,000 | 22,800,000 |
Reserves |  |  |  |
Cost of sales due to below normal production capacity |  | 2,600,000 |  | 1,000,000
Inventory reserves |  |  |  |
Reserves |  |  |  |
Increase in inventory reserves | $ 13,400,000 | $ 14,492,000 | $ 1,015,000 | $ 2,015,000

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