<SEC-DOCUMENT>0001181431-14-027005-index.html : 20140717
<SEC-HEADER>0001181431-14-027005.hdr.sgml : 20140717
<ACCEPTANCE-DATETIME>20140717200417
ACCESSION NUMBER:		0001181431-14-027005
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20140715
FILED AS OF DATE:		20140717
DATE AS OF CHANGE:		20140717

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978 232 4001

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			George Arthur L Jr
		CENTRAL INDEX KEY:			0001360852

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		14981482

	MAIL ADDRESS:	
		STREET 1:		12500 TI BOULEVARD, MS 8476
		CITY:			DALLAS
		STATE:			TX
		ZIP:			75243
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>rrd411729.xml
<DESCRIPTION>GEORGE 2014 STOCK OPTION GRANT
<TEXT>
Document 1 - file: rrd411729.html

Document 1 - RAW XML: rrd411729.xml

</DOCUMENT>
</SEC-DOCUMENT>