Form ARS - Annual Report to Security Holders:
SEC Accession No. 9999999997-15-007498
Filing Date
2015-03-25
Accepted
2015-04-07 11:47:25
Documents
1
Period of Report
2014-12-31
Effectiveness Date
2015-03-25

Document Format Files

Seq Description Document Type Size
1 AUTO-GENERATED PAPER DOCUMENT 9999999997-15-007498.paper ARS 290
  Complete submission text file 9999999997-15-007498.txt   1415
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 15006016
SIC: 3559 Special Industry Machinery, NEC