<SEC-DOCUMENT>0000921895-15-000553-index.html : 20150306
<SEC-HEADER>0000921895-15-000553.hdr.sgml : 20150306
<ACCEPTANCE-DATETIME>20150306151213
ACCESSION NUMBER:		0000921895-15-000553
CONFORMED SUBMISSION TYPE:	SC 13D/A
PUBLIC DOCUMENT COUNT:		3
FILED AS OF DATE:		20150306
DATE AS OF CHANGE:		20150306

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13D/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-60443
		FILM NUMBER:		15681228

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978 232 4001

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Vertex Capital Advisors, LLC
		CENTRAL INDEX KEY:			0001619125
		IRS NUMBER:				000000000
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13D/A

	BUSINESS ADDRESS:	
		STREET 1:		825 THIRD AVENUE
		STREET 2:		33RD FLOOR
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10022
		BUSINESS PHONE:		212-752-5750

	MAIL ADDRESS:	
		STREET 1:		825 THIRD AVENUE
		STREET 2:		33RD FLOOR
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10022
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13D/A
<SEQUENCE>1
<FILENAME>sc13da210114004_03052015.htm
<DESCRIPTION>AMENDMENT NO. 2 TO THE SCHEDULE 13D
<TEXT>
Document 1 - file: sc13da210114004_03052015.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>2
<FILENAME>ex991to13da210114004_030515.htm
<DESCRIPTION>NOMINATION AND STANDSTILL AGREEMENT
<TEXT>
Document 2 - file: ex991to13da210114004_030515.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.2
<SEQUENCE>3
<FILENAME>ex992to13da210114004_030515.htm
<DESCRIPTION>JOINT FILING AGREEMENT
<TEXT>
Document 3 - file: ex992to13da210114004_030515.htm

</DOCUMENT>
</SEC-DOCUMENT>