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Income Taxes (Details) - USD ($) $ in Millions	6 Months Ended
	Jun. 30, 2016	Mar. 31, 2016	Dec. 31, 2015
Income Taxes
Deferred tax assets valuation allowance			$ 124.2
Percentage of valuation allowance	100.00%
Deferred tax assets, net of valuation allowance	$ 0.0
Related tax reserve		$ (0.6)
Accrued interest		$ (0.3)

X

- Definition

Represents the percentage of valuation allowance.

+ References

No definition available.

+ Details

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Namespace Prefix:	acls_
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Balance Type:	na
Period Type:	duration

X

- Definition

Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (b),(c)
-URI http://asc.fasb.org/extlink&oid=6907707&loc=d3e32537-109319

+ Details

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X

- Definition

Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized expected to be realized or consumed after one year (or the normal operating cycle, if longer).

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=6907707&loc=d3e32537-109319

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 4
-URI http://asc.fasb.org/extlink&oid=37586315&loc=d3e31917-109318

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 5
-URI http://asc.fasb.org/extlink&oid=37586315&loc=d3e31928-109318

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- References

No definition available.

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X

- Definition

The amount of estimated interest accrued as of the balance sheet date arising from income tax examinations.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=6907707&loc=d3e32718-109319

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X

- Definition

The amount of estimated penalties accrued as of the balance sheet date arising from income tax examinations.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 15
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=6907707&loc=d3e32718-109319

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