# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-16-011101
Filing Date
2016-03-14
Accepted
2016-03-14 14:35:34
Documents
14
Period of Report
2016-04-04
Effectiveness Date
2016-03-14

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | a2227781zdef14a.htm | DEF 14A | 701923
2 | G147595.JPG | g147595.jpg | GRAPHIC | 6261
3 | G225777.JPG | g225777.jpg | GRAPHIC | 27387
4 | G645524.JPG | g645524.jpg | GRAPHIC | 67111
5 | G660872.JPG | g660872.jpg | GRAPHIC | 40713
6 | G570541.JPG | g570541.jpg | GRAPHIC | 38502
7 | G965828.JPG | g965828.jpg | GRAPHIC | 52891
8 | G403730.JPG | g403730.jpg | GRAPHIC | 53273
9 | G567670.JPG | g567670.jpg | GRAPHIC | 79026
10 | G315919.JPG | g315919.jpg | GRAPHIC | 45813
11 | G18360.JPG | g18360.jpg | GRAPHIC | 42915
12 | G175216.JPG | g175216.jpg | GRAPHIC | 80175
13 | G23482BEI001.GIF | g23482bei001.gif | GRAPHIC | 119088
14 | G23482BEI002.GIF | g23482bei002.gif | GRAPHIC | 64734
| Complete submission text file | 0001047469-16-011101.txt |  | 1693508

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 161503401
SIC: 3559 Special Industry Machinery, NEC