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    ACCESSION NUMBER:		0001047469-16-011101
    CONFORMED SUBMISSION TYPE:	DEF 14A
    PUBLIC DOCUMENT COUNT:		14
    CONFORMED PERIOD OF REPORT:	20160404
    FILED AS OF DATE:		20160314
    DATE AS OF CHANGE:		20160314
    EFFECTIVENESS DATE:		20160314

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
    		CENTRAL INDEX KEY:			0001113232
    		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
    		IRS NUMBER:				341818596
    		STATE OF INCORPORATION:			DE
    		FISCAL YEAR END:			1231

    	FILING VALUES:
    		FORM TYPE:		DEF 14A
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-30941
    		FILM NUMBER:		161503401

    	BUSINESS ADDRESS:
    		STREET 1:		108 CHERRY HILL DRIVE
    		CITY:			BEVERLY
    		STATE:			MA
    		ZIP:			01915
    		BUSINESS PHONE:		978-787-4000

    	MAIL ADDRESS:
    		STREET 1:		108 CHERRY HILL DRIVE
    		CITY:			BEVERLY
    		STATE:			MA
    		ZIP:			01915

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
    		DATE OF NAME CHANGE:	20000501
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