<SEC-DOCUMENT>0001209191-17-008688-index.html : 20170208
<SEC-HEADER>0001209191-17-008688.hdr.sgml : 20170208
<ACCEPTANCE-DATETIME>20170208162916
ACCESSION NUMBER:		0001209191-17-008688
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20170206
FILED AS OF DATE:		20170208
DATE AS OF CHANGE:		20170208

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Lawson Douglas A.
		CENTRAL INDEX KEY:			0001420601

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		17582910

	MAIL ADDRESS:	
		STREET 1:		21 VILLAGE VIEW ROAD
		CITY:			WESTFORD
		STATE:			MA
		ZIP:			01886
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>doc4.xml
<DESCRIPTION>FORM 4 SUBMISSION
<TEXT>
Document 1 - file: doc4.html

Document 1 - RAW XML: doc4.xml

</DOCUMENT>
</SEC-DOCUMENT>