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Business Segment and Geographic Region Information - Revenue by Product Line (Details) - USD ($) $ in Thousands | 3 Months Ended | 12 Months Ended
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Dec. 31, 2018 | Sep. 30, 2018 | Jun. 30, 2018 | Mar. 31, 2018 | Dec. 31, 2017 | Sep. 30, 2017 | Jun. 30, 2017 | Mar. 31, 2017 | Dec. 31, 2018 | Dec. 31, 2017 | Dec. 31, 2016 | Dec. 31, 2015
Revenue by product lines |  |  |  |  |  |  |  |  |  |  |  |
Revenue | $ 105,683 | $ 95,374 | $ 119,333 | $ 122,185 | $ 116,396 | $ 104,482 | $ 102,790 | $ 86,893 | $ 442,575 | $ 410,561 | $ 266,980 | $ 266,980
Ion implantation systems and services |  |  |  |  |  |  |  |  |  |  |  |
Revenue by product lines |  |  |  |  |  |  |  |  |  |  |  |
Revenue |  |  |  |  |  |  |  |  | 421,747 | 391,051 |  | 248,885
Other systems and services |  |  |  |  |  |  |  |  |  |  |  |
Revenue by product lines |  |  |  |  |  |  |  |  |  |  |  |
Revenue |  |  |  |  |  |  |  |  | $ 20,828 | $ 19,510 |  | $ 18,095

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- Definition Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 225 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SX 210.5-03.1) -URI http://asc.fasb.org/extlink&oid=63488584&loc=d3e20235-122688 + Details
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