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v3.19.1

Summary of Significant Accounting Policies - Revenue Recognition (Details) | 12 Months Ended
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Dec. 31, 2018
Product warranty period | 1 year
Systems |
Payment upon delivery of parts, period | 90 days
Minimum | Aftermarket |
Product warranty period | 1 year
Minimum | Systems |
Payment upon delivery of parts, period | 30 days
Maximum | Aftermarket |
Product warranty period | 3 years
Maximum | Systems |
Payment upon delivery of parts, period | 60 days

X
- Definition Represents the extended period for which the warranty is offered for the products sold. + References No definition available. + Details
Name: | acls_ExtendedProductWarrantyPeriod
Namespace Prefix: | acls_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Represents the period for payment upon delivery of parts. + References No definition available. + Details
Name: | acls_PeriodOfPaymentUponDeliveryOfParts
Namespace Prefix: | acls_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | us-gaap_ProductOrServiceAxis=acls_NewSystemsRevenueMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_RangeAxis=us-gaap_MinimumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_ProductOrServiceAxis=acls_AfterMarketMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_RangeAxis=us-gaap_MaximumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |