# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-19-001654
Filing Date
2019-03-27
Accepted
2019-03-27 08:01:41
Documents
10
Period of Report
2019-05-14
Effectiveness Date
2019-03-27

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | a2237891zdef14a.htm | DEF 14A | 677811
2 | G147595.JPG | g147595.jpg | GRAPHIC | 6261
3 | G967534.JPG | g967534.jpg | GRAPHIC | 43094
4 | G349429.JPG | g349429.jpg | GRAPHIC | 73765
5 | G766019.JPG | g766019.jpg | GRAPHIC | 60758
6 | G270880.JPG | g270880.jpg | GRAPHIC | 69803
7 | G1003233.JPG | g1003233.jpg | GRAPHIC | 81831
8 | G660655.JPG | g660655.jpg | GRAPHIC | 60861
9 | G25522BII001.GIF | g25522bii001.gif | GRAPHIC | 218898
10 | G25522BII002.GIF | g25522bii002.gif | GRAPHIC | 117919
| Complete submission text file | 0001047469-19-001654.txt |  | 1689794

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 19706671
SIC: 3559 Special Industry Machinery, NEC